CN-116641024-B - Physical vapor deposition coating equipment and coating method

CN116641024BCN 116641024 BCN116641024 BCN 116641024BCN-116641024-B

Abstract

The application discloses physical vapor deposition coating equipment and a coating method, wherein the coating equipment comprises a bearing platform, a protective cover and a first grounding circuit, wherein the bearing platform is used for bearing a component to be coated, a first orthographic projection of the component to be coated on the bearing platform is positioned in the bearing platform, the protective cover is positioned on one side of the bearing platform bearing the component to be coated, a second orthographic projection of the protective cover on the bearing platform covers the bearing platform exposed from the first orthographic projection, the bearing platform and the protective cover have conductivity, the protective cover and the bearing platform are arranged in an insulating manner in the coating process of the component to be coated, and the first grounding circuit is used for being electrically connected with the protective cover after the coating of the component to be coated is finished and removed from the bearing platform. Through the mode, the probability of occurrence of discharge lines can be reduced.

Inventors

LAI SHANCHUN
ZHANG CHUNLIU
PU YUFEI
HU DAQIAN
CAO TAO
WANG YANFENG
LI LIANG
GAO MINGKAI

Assignees

成都辰显光电有限公司

Dates

Publication Date: 20260508
Application Date: 20220215

Claims (14)

1. A physical vapor deposition coating apparatus, comprising: The device comprises a bearing platform, a first front projection and a second front projection, wherein the bearing platform is used for bearing a to-be-coated element, and the first front projection of the to-be-coated element on the bearing platform is positioned in the bearing platform; The protective cover is positioned on one side of the bearing platform for bearing the element to be coated, and a second orthographic projection of the protective cover on the bearing platform covers the bearing platform exposed from the first orthographic projection, wherein the bearing platform and the protective cover have conductive performance, and the protective cover and the bearing platform are arranged in an insulating manner in the coating process of the element to be coated; the first grounding circuit is used for being electrically connected with the protective cover after the element to be coated is coated and removed from the bearing platform, wherein the first grounding circuit is electrically connected with the bearing platform; The first lifting assembly is fixedly connected with the protective cover and used for driving the protective cover to be close to or far away from the bearing platform, wherein the first lifting assembly drives the protective cover to be far away from the bearing platform in the film coating process of the element to be coated, and after the film coating of the element to be coated is finished and removed from the bearing platform, the first lifting assembly drives the protective cover to be close to and contacted with the bearing platform, and the protective cover is electrically connected with the first grounding circuit through the bearing platform.
2. The coating apparatus according to claim 1, wherein, The bearing platform comprises a base layer and a convex part extending from the surface of one side of the base layer, wherein one side of the convex part, which is away from the base layer, is used for bearing the element to be coated, an annular recess is formed between the side surface of the convex part and the base layer, and the coating equipment further comprises: The protective cover is arranged on the bearing platform, is positioned in the annular recess, is fixedly connected with the bearing platform, is positioned in a region formed by the first orthographic projection and the second orthographic projection, and is in contact with the insulating part in a first direction perpendicular to the base layer and the convex part.
3. The coating apparatus according to claim 2, wherein, The insulation piece is annular, the protection cover is annular, in the first direction, the insulation piece is sleeved on the periphery of at least part of the convex part and is in contact with the convex part, and the protection cover is sleeved on the periphery of at least part of the insulation piece and is in contact with the insulation piece.
4. The coating apparatus according to claim 2, wherein, The insulating piece and the protruding portion face away from the surface of one side of the base layer to be flush, and one side of the insulating piece away from the base layer and one side of the protruding portion away from the base layer are used for jointly bearing the element to be coated.
5. The plating apparatus according to claim 4, wherein, In the coating process of the element to be coated, the protective cover is away from one side of the base layer, the insulating piece is away from one side of the base layer, and the surface of the protruding part, which is away from one side of the base layer, is flush.
6. A coating apparatus according to claim 2 or 3, wherein, The third orthographic projection covers part of the annular recess, the third orthographic projection is not overlapped with the first orthographic projection, the first lifting assembly comprises a plurality of first insulating support rods, and the first insulating support rods penetrate through the bearing platform and are fixedly connected with the protective cover.
7. The plating apparatus according to claim 6, wherein, The insulation piece is provided with the track groove towards protection casing one side, the protection casing is provided with the arch towards insulation piece one side, the arch is located the track inslot.
8. A coating apparatus according to claim 2 or 3, wherein, The third orthographic projection covers at least part of the annular recess, an accommodating groove is formed in the edge of one side of the insulating piece, which faces away from the base layer, and the protective cover is fixedly arranged in the accommodating groove; the coating equipment further comprises a controller which is connected with the first grounding circuit and used for controlling the first grounding circuit to be electrically connected with the protective cover after coating of the element to be coated is finished and controlling the first grounding circuit to be disconnected with the protective cover in the coating process of the element to be coated.
9. The plating apparatus according to claim 8, wherein, The coating equipment further comprises a second grounding circuit which is electrically connected with the bearing platform.
10. The plating apparatus according to claim 8, further comprising: The first grounding circuit is electrically connected with the protective cover, the second lifting component is used for driving the element to be coated to be close to or far away from the bearing platform and is coupled with the controller, the controller controls the first grounding circuit to be electrically connected with the protective cover in response to the second lifting component, and the controller controls the first grounding circuit to be disconnected with the protective cover in response to the second lifting component driving the element to be coated to be close to and in contact with the bearing platform.
11. The plating apparatus according to claim 10, wherein, The second lifting assembly comprises a plurality of second insulating support rods, and the second insulating support rods penetrate through the bearing platform.
12. The plating apparatus according to claim 1, further comprising: the bearing platform and the protective cover are positioned in the coating cavity; and the ion wind blowing and sweeping mechanism is used for electrically neutralizing the surface of the element to be coated after the element to be coated finishes coating and is removed from the coating cavity.
13. A physical vapor deposition coating method, comprising: The protective cover and the element to be coated are arranged on the same side of the bearing platform, the bearing platform and the protective cover have conductive performance, a first orthographic projection of the element to be coated on the bearing platform is positioned in the bearing platform, and a second orthographic projection of the protective cover on the bearing platform covers the bearing platform exposed from the first orthographic projection; coating the element to be coated; Responding to the end of coating of the element to be coated, and after the element to be coated is far away from the bearing platform, electrically connecting a first grounding circuit with the protective cover; The bearing platform is electrically connected with the first grounding circuit, and the coating equipment comprises a first lifting assembly which is fixedly connected with the protective cover; the step of insulating the protective cover from the bearing platform comprises the steps that the first lifting assembly drives the protective cover to be far away from the bearing platform; The step of electrically connecting the first grounding circuit with the protective cover comprises the step of driving the protective cover to be close to the bearing platform and contact with the bearing platform by the first lifting assembly.
14. The method of claim 13, wherein a side surface of the protective cover adjacent to the component to be coated is flush with a side surface of the component to be coated adjacent to the load platform.

Description

Physical vapor deposition coating equipment and coating method Technical Field The application belongs to the technical field of physical vapor deposition coating, and particularly relates to physical vapor deposition coating equipment and a coating method. Background In the fabrication of Micro-LED panels using large-sized glass substrates, it is often necessary to use Physical Vapor Deposition (PVD) coating equipment to complete the fabrication of the conductive metal film layers. When the glass substrate is coated by a PVD station, for example, when the coated metal is MO, al, ag, cu or other layers, discharge lines are easily generated at the edge of the glass substrate, thereby affecting the appearance of the screen. Disclosure of Invention The application provides physical vapor deposition coating equipment and a physical vapor deposition coating method, which can reduce the occurrence probability of discharge lines. In order to solve the technical problems, the technical scheme includes that the physical vapor deposition coating equipment comprises a bearing platform, a protective cover and a first grounding circuit, wherein the bearing platform is used for bearing a component to be coated, a first orthographic projection of the component to be coated on the bearing platform is located in the bearing platform, the protective cover is located on one side of the bearing platform bearing the component to be coated, a second orthographic projection of the protective cover on the bearing platform covers the bearing platform exposed from the first orthographic projection, the bearing platform and the protective cover have conductivity, the protective cover is arranged in an insulating mode with the bearing platform in the coating process of the component to be coated, and the first grounding circuit is used for being electrically connected with the protective cover after the coating of the component to be coated is finished and removed from the bearing platform. In order to solve the technical problems, the other technical scheme includes that a physical vapor deposition coating method is provided, the coating method comprises the steps of enabling an element to be coated to be located on a bearing platform, enabling a protective cover to be arranged on the same side of the bearing platform in an insulating mode, enabling the protective cover and the element to be coated to be arranged on the same side of the bearing platform, enabling first orthographic projection of the element to be coated on the bearing platform to be located in the bearing platform, enabling second orthographic projection of the protective cover on the bearing platform to cover the bearing platform exposed out of the first orthographic projection, coating the element to be coated, enabling a first grounding circuit to be electrically connected with the protective cover after the element to be coated is far away from the bearing platform in response to the fact that coating of the element to be coated is finished. Compared with the prior art, the physical vapor deposition coating equipment has the beneficial effects that the bearing platform and the protective cover have conductive performance, and in the coating process of the element to be coated, the protective cover is arranged in an insulating way with the bearing platform, and the protective cover is not contacted with the bearing platform. The electrons accumulated on the surface of the element to be coated and the film layer deposited on the surface of the protective cover have no current release path in the coating process, so that the probability of discharge lines generated on the surface of the element to be coated in the coating process is reduced, and the probability of appearance abnormality is reduced. After the element to be coated is coated and removed from the bearing platform, the protective cover is electrically connected with the first grounding circuit to release electrons on the surface of the protective cover, at the moment, the protective cover is in non-contact with the element to be coated, and the discharge current on the surface of the protective cover does not flow through the element to be coated, so that the probability of discharge lines generated on the surface of the element to be coated after the coating is finished is reduced, and the probability of appearance abnormality is reduced. Drawings For a clearer description of the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the description below are only some embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art, wherein: FIG. 1 is a schematic diagram of an embodiment of a conventional PVD coating apparatus; FIG. 2 is a schematic view o