CN-116642581-B - Metamaterial-based integrated polarized power meter and testing method thereof

CN116642581BCN 116642581 BCN116642581 BCN 116642581BCN-116642581-B

Abstract

The invention relates to a metamaterial-based integrated polarized power meter and a testing method thereof, wherein the polarized power meter comprises a substrate and detection devices, at least one group of detection devices is arranged on the substrate, each group of detection devices comprises three detection elements, and the three detection elements meet triple rotational symmetry in a plane of the substrate, wherein each detection element comprises a metamaterial structure and a photoelectric conversion module, the metamaterial structure is used for responding to an incident light beam, and the photoelectric conversion module is positioned in a dynamic local electric field and a dynamic local magnetic field generated by the metamaterial structure and is used for realizing conversion from an optical signal to a direct-current voltage signal. The invention can measure the linear polarization angle and the power density information at the same time, does not need an additional polarization resolution device and a photoelectric measurement device, greatly reduces the size of a detection device, is convenient for integration, and has important significance for engineering application and scientific research.

Inventors

WEN YONGZHENG
ZHAO SHIQIANG
LUO WEIJIA
Zhao Runni
ZHOU JI

Assignees

清华大学

Dates

Publication Date: 20260505
Application Date: 20230404

Claims (10)

1. A metamaterial-based integrated polarized power meter, comprising: A substrate; The detection device, be provided with at least one set of on the substrate detection device, every group detection device all includes three detection primitive, and three the detection primitive satisfies triple rotational symmetry in the substrate plane, wherein: Each detection element comprises a metamaterial structure and a photoelectric conversion module, wherein the metamaterial structure is used for responding to an incident light beam, and the photoelectric conversion module is positioned in a dynamic local electric field and a dynamic local magnetic field generated by the metamaterial structure and is used for realizing conversion between an optical signal and a direct-current voltage signal.
2. The metamaterial-based integrated polarization power meter of claim 1, wherein the three detection cells are a first detection cell, a second detection cell, and a third detection cell, respectively, the placement position of the first detection cell is defined as a position where a maximum response to an incident light beam occurs in a direction parallel to an x-axis, the placement position of the second detection cell is defined as a counterclockwise rotation of 120 degrees of the first detection cell, and the placement position of the third detection cell is defined as a clockwise rotation of 120 degrees of the first detection cell, wherein an x-axis is defined as a horizontal direction and a y-axis is defined as a vertical direction.
3. The metamaterial-based integrated polarization power meter according to claim 1 or 2, wherein the operating mode of the polarization power meter comprises: When the detection device comprises a group of detection devices, the detection device is used for detecting the polarization power information of a single frequency point in an incident light beam; and when the detection devices comprise a plurality of groups of different frequency responses, the detection devices are used for simultaneously detecting polarized power information of a plurality of frequency points in an incident light beam, wherein the polarized power information comprises power density and/or linear polarization angle.
4. The metamaterial-based integrated polarization power meter according to claim 1 or 2, wherein the substrate is a low-loss substrate, and the low-loss substrate is made of Teflon, FR-4, high-purity GaAs, high-purity Si, high-purity Ge, glass or quartz.
5. The metamaterial-based integrated polarization power meter according to claim 1 or 2, wherein the metamaterial structure has a sub-wavelength size, a good conductor metal material, a dielectric material, a heavily doped or undoped semiconductor material or a high polymer material is adopted as the material of the metamaterial structure, and an n-type or p-type doped semiconductor material or a two-dimensional material is adopted as the material of the photoelectric conversion module.
6. A testing method using the metamaterial-based integrated polarization power meter according to any one of claims 1 to 5, comprising: The light beam to be detected with certain incidence frequency is incident to a first detection element, a second detection element and a third detection element of the metamaterial-based integrated polarized power meter, and the direct current voltage generated by the first detection element, the second detection element and the third detection element is , And ; Based on DC voltage , And Calculating to obtain polarized power information of single frequency point of light beam to be detected, wherein the polarized power information comprises power density And/or linear polarization angle 。
7. The method according to claim 6, wherein when measuring the power density of the light beam to be detected When the method is used, the method also comprises the step of pre-irradiating the metamaterial-based integrated polarization power meter through a calibration light beam with known polarization and power density information, and measuring the direct current voltage actually generated by the first detection element, the second detection element and the third detection element , And Obtaining a calibrated photoelectric conversion coefficient , And Is carried out by a method comprising the steps of.
8. The test method according to claim 7, wherein the voltages generated by the first probe cell, the second probe cell, and the third probe cell and the polarization power information of the light beam to be detected satisfy the following relationship: when the three detection primitive structural parameters are identical, the three photoelectric conversion coefficients are identical, and when the three detection primitive structural parameters are different, the three photoelectric conversion coefficients are not identical.
9. The test method according to any one of claims 7 to 8, wherein the test method is based on a direct current voltage , And The calculation formula for calculating the polarized power information of the single frequency point of the light beam to be detected is as follows: ; ; ; 。
10. the test method according to any one of claims 6 to 8, wherein when the polarization power information of multiple frequency points in the light beam to be detected needs to be measured, the process includes the steps of simultaneously inputting the light beams to be detected with different frequencies into a plurality of groups of detection devices working in different wave bands, repeating the test process of the polarization power information of single frequency points, and obtaining the power density of the multiple frequency points in the light beam to be detected And/or linear polarization angle 。

Description

Metamaterial-based integrated polarized power meter and testing method thereof Technical Field The invention relates to a metamaterial-based integrated polarized power meter and a testing method thereof, and relates to the technical field of optical measurement. Background Polarization state and power density are important properties of light. On the one hand, the polarization information of the light has wide application in imaging, optical communication and spectral analysis, and on the other hand, the polarization information of the light is a frequently required test quantity in scientific research. In the prior art, a polarization resolution device is usually combined with a photoelectric measurement device arranged behind the polarization resolution device, and the angle of the polarization resolution device is rotated for a plurality of times, so that optical linear polarization angle information is obtained. The method is complex in operation, meanwhile, the space required by the measuring equipment is large, and the polarization resolution device and the photoelectric measuring device are separated, so that the development of integrated photonics is greatly limited. In addition, different photoelectric measurement means are required to be used in different wave bands, for example, microwaves need to use a rectenna, and visible light needs to use a PN junction and the like. Therefore, there is a need to develop an integrated on-chip device capable of measuring polarization information and power information simultaneously, and having a wide range of applicable bands. Disclosure of Invention The present invention aims to solve at least one of the technical problems existing in the prior art. In view of the above problems, it is an object of the present invention to provide a metamaterial-based integrated polarization power meter and a testing method thereof, which can realize simultaneous detection of linear polarization angle and power density in a sub-wavelength dimension. In order to achieve the above object, the present invention provides the following technical solutions: in a first aspect, the present invention provides a metamaterial-based integrated polarimeter, comprising: A substrate; The detection device, be provided with at least one set of on the substrate detection device, every group detection device all includes three detection primitive, and three the detection primitive satisfies triple rotational symmetry in the substrate plane, wherein: Each detection element comprises a metamaterial structure and a photoelectric conversion module, wherein the metamaterial structure is used for responding to an incident light beam, and the photoelectric conversion module is positioned in a dynamic local electric field and a dynamic local magnetic field generated by the metamaterial structure and is used for realizing conversion between an optical signal and a direct-current voltage signal. The working principle of the metamaterial-based integrated polarized power meter is that when a to-be-detected light beam irradiates the metamaterial-based integrated polarized power meter, the metamaterial structure generates resonance response to the to-be-detected light beam, an enhanced local dynamic electric field and a local dynamic magnetic field are generated, the local dynamic electric field drives carriers in a photoelectric conversion module arranged in the metamaterial-based integrated polarized power meter to drift, and the movement is driven by the local dynamic magnetic field to generate directional deflection under the action of Lorentz force, so that separation of positive and negative carriers is realized, charge aggregation with different properties is formed at two ends of the photoelectric conversion module, a direct current potential difference is generated, and conversion from light to direct current voltage is realized. Further, the three detecting elements are a first detecting element, a second detecting element and a third detecting element, wherein the placement position of the first detecting element is defined as a position where the maximum response to the incident light beam occurs in a direction parallel to the x-axis, the placement position of the second detecting element is defined as a position where the first detecting element rotates 120 degrees counterclockwise, and the placement position of the third detecting element is defined as a position where the first detecting element rotates 120 degrees clockwise, wherein the x-axis is defined as a horizontal direction, and the y-axis is defined as a vertical direction. Further, the working modes of the polarization power meter include: When the detection device comprises a group of detection devices, the detection device is used for detecting the polarization power information of a single frequency point in an incident light beam; and when the detection devices comprise a plurality of groups of different frequency responses, the d