CN-116660718-B - DBC encapsulation test equipment

CN116660718BCN 116660718 BCN116660718 BCN 116660718BCN-116660718-B

Abstract

The invention discloses DBC packaging test equipment which comprises static test equipment and a plurality of dynamic test equipment which are connected in series, wherein the static test equipment and the dynamic test equipment comprise a first conveying line, a three-axis mechanical arm, a third conveying line and a rotary test platform, the static test equipment is further provided with a static test machine and a basket feeding mechanism, the first conveying line and the basket feeding mechanism convey DBC drawing boards to the third conveying line, the three-axis mechanical arm grabs DBC substrates on the third conveying line and conveys the DBC substrates to the rotary test platform, and the rotary test platform conveys the DBC substrates to the static test machine for normal-temperature static test. The DBC packaging test equipment has the beneficial effects that the normal temperature static test and the high temperature dynamic test are combined into a whole, the test line architecture is simplified, the cost of the test line is reduced, the occupied area of the test line is reduced, the test process is optimized, the full-automatic test operation is realized, manual assistance is not needed, and the test efficiency and the product yield are improved.

Inventors

HU CONGJUN
XIANG WEILIN
ZHANG GAOHUA
CHEN YUANMING

Assignees

上海轩田工业设备有限公司

Dates

Publication Date: 20260508
Application Date: 20230802

Claims (10)

1. The DBC packaging test equipment is characterized by comprising static test equipment and a plurality of dynamic test equipment which are connected in series; The static test equipment and the dynamic test equipment comprise a conveying line I, a triaxial manipulator, a conveying line III and a rotary test platform; The static test equipment is further provided with a static test machine and a basket feeding mechanism, the first conveying line and the basket feeding mechanism convey DBC pumping plates to the third conveying line, the three-axis manipulator grabs DBC substrates on the third conveying line and conveys the DBC substrates to the rotary test platform, the rotary test platform conveys the DBC substrates to the static test machine for normal-temperature static test, after the test is finished, the rotary test platform conveys the DBC substrates away from the static test machine, then the three-axis manipulator conveys the DBC substrates on the rotary test platform back to the third conveying line, and finally the third conveying line conveys the DBC pumping plates to the first conveying line of the dynamic test equipment adjacent to the downstream; The dynamic test equipment is further provided with a dynamic test machine, a first conveying line of the dynamic test equipment conveys a DBC drawing board to a third conveying line of the dynamic test equipment, a triaxial manipulator of the dynamic test equipment grabs a DBC substrate on the third conveying line of the dynamic test equipment and conveys the DBC substrate to a rotary test platform of the dynamic test equipment, the rotary test platform of the dynamic test equipment conveys the DBC substrate to the dynamic test machine for high-temperature dynamic test, after the test is finished, the rotary test platform of the dynamic test equipment conveys the DBC substrate away from the dynamic test machine, then the triaxial manipulator of the dynamic test equipment conveys the DBC substrate on the rotary test platform of the dynamic test equipment back to the third conveying line of the dynamic test equipment, and finally the third conveying line of the dynamic test equipment conveys the DBC drawing board to the first conveying line of the downstream adjacent dynamic test equipment.
2. The DBC packaging test device of claim 1, wherein the dynamic test device comprises a second dynamic test device and a plurality of first dynamic test devices connected in series, wherein an upstream of the plurality of first dynamic test devices connected in series with the static test device and a downstream of the plurality of first dynamic test devices connected in series with the second dynamic test device.
3. The DBC packaging test device according to claim 2, wherein the two conveyor lines of the first and second dynamic test devices are parallel to each other; the conveying line III of the static test equipment and the dynamic test equipment can slide along the width direction of the conveying line III.
4. A DBC package testing apparatus according to claim 3, wherein the second dynamic testing apparatus further comprises a fourth conveyor line and a basket receiving mechanism, wherein one third conveyor line of the second dynamic testing apparatus is capable of conveying the DBC drawer to the fourth conveyor line, and wherein the other third conveyor line of the second dynamic testing apparatus is capable of conveying the DBC drawer to the basket receiving mechanism.
5. The DBC packaging test device according to claim 4, further comprising a chassis, wherein the first conveyor line, the three-axis manipulator, the third conveyor line, the fourth conveyor line, the rotary test platform, the basket feeding mechanism and the basket receiving mechanism are mounted on the chassis; The chassis is provided with a chute for sliding the conveying line three and a push-pull device I for driving the conveying line three to slide along the chute.
6. The DBC packaging test device according to claim 5, wherein the basket feeding mechanism and the basket receiving mechanism are identical in structure and comprise a material moving device and a basket; the basket is provided with a second rack and a second conveying line arranged on the second rack, a plate frame is arranged on the second conveying line, and a plurality of layers of DBC drawing plates can be stacked on the plate frame; the material moving device is provided with a first frame and a first lifting device arranged on the first frame, the first lifting device is connected with a second pushing device, the second pushing device is connected with the second lifting device, clamping plates are arranged at the upper end and the lower end of the second lifting device, a pair of clamping plates are driven by the second lifting device to approach each other so as to clamp the plate frame, and the second pushing device is used for driving the pair of clamping plates to approach or separate from the basket.
7. The DBC package testing apparatus of claim 6, wherein the basket feeding mechanism further has a pushing device coupled to the first frame for pushing the DBC drawer on the pair of clamping plates to move onto the third conveyor.
8. The DBC packaging test apparatus according to claim 1, wherein the three-axis manipulator comprises an X-axis translation device and a Y-axis translation device arranged on the X-axis translation device, a Z-axis lifting device is arranged on the Y-axis translation device, a push-pull device three is arranged on the Z-axis lifting device, the push-pull device three is connected with a pair of clamping jaws, and the push-pull device three drives the clamping jaws to approach or separate from each other so as to clamp or release the DBC substrate.
9. The DBC package testing apparatus according to claim 1, further comprising a code scanning device for scanning the DBC substrate on the third conveyor line.
10. The DBC packaging test device according to claim 1, wherein the rotary test platform comprises a rotary device, a jacking device and a placing plate, wherein the middle part of the placing plate is connected with the rotary device, and the placing plate is driven to rotate around a vertical shaft through the rotary device; the DBC substrates are placed at both ends of the placing plate; the jacking device is located below one end of the placing plate and used for jacking the DBC substrate on the placing plate to perform packaging test.

Description

DBC encapsulation test equipment Technical Field The invention relates to the field of semiconductors, in particular to DBC packaging test equipment. Background In the prior art, the DBC packaging test flow is generally divided into 2 working procedures, namely normal temperature static test and then high temperature dynamic test, the two working procedures are respectively and independently operated and do not interfere with each other, and in the test process, the DBC substrate subjected to normal temperature static test is required to be manually transferred to the high temperature dynamic test, so that the conventional DBC packaging test line is mostly manually and semi-automatically operated. Along with industry development, how to simplify the process and improve the testing efficiency and without affecting the accuracy of the testing effect of the process and the testing efficiency has become the focus of various large enterprises due to the improvement of the market on productivity requirements. Disclosure of Invention The invention mainly aims to provide DBC packaging test equipment, and aims to solve the problem that the existing DBC packaging test line is manually and semi-automatically operated and has low test efficiency. In order to solve the problems, the invention provides DBC packaging test equipment, which comprises static test equipment and a plurality of dynamic test equipment which are connected in series; The static test equipment and the dynamic test equipment comprise a conveying line I, a triaxial manipulator, a conveying line III and a rotary test platform; The static test equipment is further provided with a static test machine and a basket feeding mechanism, the first conveying line and the basket feeding mechanism convey DBC pumping plates to the third conveying line, the three-axis manipulator grabs DBC substrates on the third conveying line and conveys the DBC substrates to the rotary test platform, the rotary test platform conveys the DBC substrates to the static test machine for normal-temperature static test, after the test is finished, the rotary test platform conveys the DBC substrates away from the static test machine, then the three-axis manipulator conveys the DBC substrates on the rotary test platform back to the third conveying line, and finally the third conveying line conveys the DBC pumping plates to the first conveying line of the dynamic test equipment adjacent to the downstream; The dynamic test equipment is further provided with a dynamic test machine, a first conveying line of the dynamic test equipment conveys a DBC drawing board to a third conveying line of the dynamic test equipment, a triaxial manipulator of the dynamic test equipment grabs a DBC substrate on the third conveying line of the dynamic test equipment and conveys the DBC substrate to a rotary test platform of the dynamic test equipment, the rotary test platform of the dynamic test equipment conveys the DBC substrate to the dynamic test machine for high-temperature dynamic test, after the test is finished, the rotary test platform of the dynamic test equipment conveys the DBC substrate away from the dynamic test machine, then the triaxial manipulator of the dynamic test equipment conveys the DBC substrate on the rotary test platform of the dynamic test equipment back to the third conveying line of the dynamic test equipment, and finally the third conveying line of the dynamic test equipment conveys the DBC drawing board to the first conveying line of the downstream adjacent dynamic test equipment. In an embodiment, the dynamic test device comprises a dynamic test device II and a plurality of dynamic test devices I which are connected in series, wherein the upstream of the dynamic test devices I which are connected in series is connected with the static test device, and the downstream of the dynamic test devices I are connected in series with the dynamic test device II. In an embodiment, the two conveying lines of the first dynamic testing device and the second dynamic testing device are parallel to each other; the conveying line III of the static test equipment and the dynamic test equipment can slide along the width direction of the conveying line III. In an embodiment, the second dynamic testing device is further provided with a conveying line four and a basket receiving mechanism, one conveying line three of the second dynamic testing device can convey the DBC drawing board to the conveying line four, and the other conveying line three of the second dynamic testing device can convey the DBC drawing board to the basket receiving mechanism. In an embodiment, the DBC package testing device further includes a chassis, and the first conveyor line, the three-axis manipulator, the third conveyor line, the fourth conveyor line, the rotary testing platform, the basket feeding mechanism, and the basket receiving mechanism are installed on the chassis; The chassis is provided with a chute for sliding t