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CN-116684470-B - Configuration file generation method and device, semiconductor process equipment and master control device

CN116684470BCN 116684470 BCN116684470 BCN 116684470BCN-116684470-B

Abstract

The application discloses a configuration file generation method, a device, semiconductor process equipment and a general control device, wherein in the method, in the generation process of the configuration file, upper and lower computer parameters of target equipment are automatically acquired through a data acquisition interface, the configuration file is generated based on the acquired parameters, and the parameters are not required to be manually and sequentially accessed to the storage addresses of the upper computer parameters and the lower computer parameters to be consulted in the generation process of the configuration file, so that the problem that the configuration parameters are possibly missed or the required time is long due to manual inquiry is solved, and the purposes of reducing the time and labor cost required by the configuration file generation method are realized. In addition, the factory end user can obtain the configuration parameters in the configuration file through the method so as to comprehensively know the configuration information of the upper computer and the lower computer of the target equipment, and perform configuration operations such as parameter subscription and the like on the configuration parameters according to the obtained configuration information, so that the flow of the factory end user in configuring the configuration parameters is simplified.

Inventors

  • LI YUNFEI
  • LIU DAN

Assignees

  • 北京北方华创微电子装备有限公司

Dates

Publication Date
20260508
Application Date
20230523

Claims (14)

  1. 1. The method for generating the configuration file is used for generating the configuration file of the target device, the target device comprises an upper computer and a lower computer, and the method for generating the configuration file comprises the following steps: Responding to a generation instruction, and acquiring configuration parameters through a data acquisition interface, wherein the configuration parameters comprise upper computer parameters and lower computer parameters, the upper computer parameters are used for describing configuration information of the upper computer, and the lower computer parameters are used for describing configuration information of the lower computer; generating a configuration file based on the configuration parameters; The acquiring the configuration parameters through the data acquisition interface comprises the following steps: establishing communication connection with a control system of the upper computer through the data acquisition interface; the control system of the upper computer is used for controlling the lower computer to run; acquiring the upper computer parameters from the upper computer based on the established communication connection and a preconfigured first parameter position, wherein the first parameter position is used for describing the storage position of the upper computer parameters in the upper computer; The method comprises the steps of sending a reading instruction and a preconfigured second parameter position to a control system of the upper computer, receiving a lower computer parameter returned by the control system of the upper computer, wherein the reading instruction is used for indicating the control system of the upper computer to acquire the lower computer parameter from the lower computer according to the second parameter position and returning the lower computer parameter to a requester of the reading instruction, and the second parameter position is used for describing a storage position of the lower computer parameter in the lower computer.
  2. 2. The method of claim 1, wherein the generation instruction comprises a first generation instruction carrying type information of the configuration parameter, and wherein the obtaining the configuration parameter through the data acquisition interface in response to the generation instruction comprises: And responding to the first generation instruction, and acquiring configuration parameters corresponding to the type information of the configuration parameters through the data acquisition interface.
  3. 3. The method of claim 1, wherein the generation instruction comprises a second generation instruction carrying a generation mode, the generation mode comprises a first generation mode of a configuration file, and the acquiring the configuration parameters through the data acquisition interface comprises acquiring the configuration parameters corresponding to the generation mode through the data acquisition interface; the generating a configuration file based on the configuration parameters comprises: And if the second generation instruction indicates that the generation mode is the first generation mode of the configuration file, generating the configuration file according to the acquired configuration parameters.
  4. 4. A method according to claim 3, wherein said generating said configuration file from said acquired configuration parameters comprises: responding to a parameter selection instruction, and generating a configuration file according to configuration parameters corresponding to the parameter selection instruction; the parameter selection instruction corresponds to at least one of the configuration parameters.
  5. 5. The method of claim 3, wherein the generating means further comprises an update generating means of a configuration file; If the second generation instruction indicates that the generation mode is the update generation mode of the configuration file; the obtaining the configuration parameters corresponding to the generation mode comprises the following steps: Acquiring current configuration parameters from the upper computer and the lower computer; the generating a configuration file based on the configuration parameters comprises: analyzing a configuration file to be updated carried by the second generation instruction to obtain configuration parameters to be updated; and generating an updated configuration file based on the current configuration parameters and the configuration parameters to be updated.
  6. 6. The method of claim 5, wherein generating an updated configuration file based on the current configuration parameters and the configuration parameters to be updated comprises: responding to a parameter selection instruction, and generating an updated configuration file according to the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection instruction; the distinguishing configuration parameters comprise configuration parameters which exist in the current configuration parameters and do not exist in the configuration parameters to be updated, and the parameter selection instruction corresponds to at least one distinguishing configuration parameter.
  7. 7. The method according to any one of claims 1 to 6, wherein before generating the configuration file based on the configuration parameters, the method further comprises: and displaying the upper computer parameters and the lower computer parameters on a display page in a grouping way.
  8. 8. The method of any one of claims 1-6, further comprising: and allocating an identity to the configuration parameter, wherein the identity comprises a position identifier and a parameter identifier, the position identifier is used for representing the storage position of the configuration parameter in the target equipment, and the parameter identifier is used for distinguishing a plurality of configuration parameters stored in the same storage position.
  9. 9. The configuration file generating device is used for generating a configuration file of a target device, the target device comprises an upper computer and a lower computer, and the configuration file generating device of the target device comprises: The system comprises a data acquisition interface, a communication module, a data processing module and a control module, wherein the data acquisition interface is used for responding to a generation instruction and acquiring configuration parameters, the configuration parameters comprise an upper computer parameter and a lower computer parameter, the upper computer parameter is used for describing configuration information of the upper computer, and the lower computer parameter is used for describing configuration information of the lower computer; the file generation module is used for generating a configuration file based on the configuration parameters; the process of the data acquisition interface for acquiring the configuration parameters through the data acquisition interface specifically comprises the following steps: establishing communication connection with a control system of the upper computer through the data acquisition interface; the control system of the upper computer is used for controlling the lower computer to run; acquiring the upper computer parameters from the upper computer based on the established communication connection and a preconfigured first parameter position, wherein the first parameter position is used for describing the storage position of the upper computer parameters in the upper computer; The method comprises the steps of sending a reading instruction and a preconfigured second parameter position to a control system of the upper computer, receiving a lower computer parameter returned by the control system of the upper computer, wherein the reading instruction is used for indicating the control system of the upper computer to acquire the lower computer parameter from the lower computer according to the second parameter position and returning the lower computer parameter to a requester of the reading instruction, and the second parameter position is used for describing a storage position of the lower computer parameter in the lower computer.
  10. 10. The semiconductor process equipment is characterized by comprising an upper computer and a lower computer connected with the upper computer; the upper computer comprises a control system and a configuration file generating device, and the control system is used for controlling the lower computer to run; the configuration file generating device is configured to execute the configuration file generating method according to any one of claims 1 to 8, so as to generate a configuration file of the semiconductor process equipment.
  11. 11. A master control apparatus, comprising: a sending module for sending a first service instruction to the semiconductor processing apparatus of claim 10; The receiving module is used for receiving the configuration parameters in the configuration file returned by the semiconductor process equipment in response to the first service instruction, and the first service instruction is used for indicating the configuration parameters in the configuration file returned by the semiconductor process equipment.
  12. 12. The master control apparatus of claim 11, wherein the sending module is further configured to send a second service instruction to the semiconductor process device, the receiving module is further configured to receive data corresponding to the subscribed configuration parameters returned by the semiconductor process device in response to the second service instruction, and the second service instruction is configured to instruct the semiconductor process device to feed back the data corresponding to the subscribed configuration parameters.
  13. 13. A computing device includes a processor and a memory; Wherein the memory is connected with the processor and is used for storing a computer program; The processor is configured to implement the method for generating a configuration file according to any one of claims 1 to 8 by running a computer program stored in the memory.
  14. 14. A storage medium having a computer program stored thereon, which, when executed by a processor, implements the method of generating a configuration file according to any one of claims 1 to 8.

Description

Configuration file generation method and device, semiconductor process equipment and master control device Technical Field The present disclosure relates to the field of device manufacturing technologies, and more particularly, to a method and apparatus for generating a configuration file, a semiconductor processing device, a master control device, a computing device, and a computer readable storage medium. Background Before the equipment leaves the factory for delivery and use, a corresponding configuration file can be set for the equipment, so that the deployment difficulty of a user when the equipment is used is reduced, and the deployment flow is simplified. In particular, for some medium-sized and large-sized devices, the configuration parameters of the devices are numerous, and the configuration file setting of the devices is of great significance. However, the method for generating the configuration file of the device consumes a long time. Disclosure of Invention In order to solve the technical problems, the present disclosure provides a method and an apparatus for generating a configuration file, a semiconductor process device and a master control device, so as to achieve the purpose of reducing the time consumed by the configuration file generating method. In order to achieve the technical purpose, the embodiment of the specification provides the following technical scheme: In a first aspect, an embodiment of the present disclosure provides a method for generating a configuration file, where the method for generating a configuration file of a target device includes an upper computer and a lower computer, and the method for generating a configuration file includes: Responding to a generation instruction, and acquiring configuration parameters through a data acquisition interface, wherein the configuration parameters comprise upper computer parameters and lower computer parameters, the upper computer parameters are used for describing configuration information of the upper computer, and the lower computer parameters are used for describing configuration information of the lower computer; and generating a configuration file based on the configuration parameters. In some embodiments, the generating instructions include first generating instructions carrying type information of the configuration parameters, and the acquiring the configuration parameters through the data acquisition interface in response to the generating instructions includes: And responding to the first generation instruction, and acquiring configuration parameters corresponding to the type information of the configuration parameters through the data acquisition interface. In some embodiments, the generating instructions comprise second generating instructions carrying generating modes, the generating modes comprise first generating modes of configuration files, the acquiring configuration parameters through the data acquisition interface comprises acquiring configuration parameters corresponding to the generating modes through the data acquisition interface, and the generating the configuration files comprises: And if the second generation instruction indicates that the generation mode is the first generation mode of the configuration file, generating the configuration file according to the acquired configuration parameters. In some embodiments, the generating the configuration file according to the acquired configuration parameters includes: responding to a parameter selection instruction, and generating a configuration file according to configuration parameters corresponding to the parameter selection instruction; the parameter selection instruction corresponds to at least one of the configuration parameters. In some embodiments, the generating means further includes an update generating means of the configuration file; If the second generation instruction indicates that the generation mode is the update generation mode of the configuration file; the obtaining the configuration parameters corresponding to the generation mode comprises the following steps: Acquiring current configuration parameters from the upper computer and the lower computer; the generating a configuration file based on the configuration parameters comprises: analyzing a configuration file to be updated carried by the second generation instruction to obtain configuration parameters to be updated; and generating an updated configuration file based on the current configuration parameters and the configuration parameters to be updated. In some embodiments, the generating the updated configuration file based on the current configuration parameter and the configuration parameter to be updated includes: responding to a parameter selection instruction, and generating an updated configuration file according to the configuration parameters to be updated and the distinguishing configuration parameters corresponding to the parameter selection instruction; the distinguishing