CN-116730284-B - High-rigidity three-dimensional full-decoupling micro-motion platform

Abstract

The application provides a high-rigidity three-dimensional full-decoupling micro-motion platform which comprises a support, wherein a micro-motion mechanism comprises a main body, a first execution structure, a second execution structure and a third execution structure, the main body is arranged on the support, the first execution structure can be movably arranged on the main body along a first direction, a first reinforcing part is arranged on the first execution structure, the second execution structure can be movably arranged on the first execution structure along a second direction, a second reinforcing part is arranged on the second execution structure, the third execution structure can be movably arranged on the second execution structure along a third direction, a second driver is in transmission connection with the second execution structure, and the third driver is in transmission connection with the third execution structure. According to the high-rigidity three-dimensional full-decoupling micro-motion platform, the first reinforcing part and the second reinforcing part are respectively arranged in the first execution structure and the second execution structure, so that the rigidity strength of the micro-motion mechanism is improved, the decoupling performance of the micro-motion platform is improved, and the decoupling efficiency is improved.

Inventors

• ZHANG GUOQING
• CAO SHUAIKANG
• MA YUTING
• Huo Zexuan
• ZHANG XU

Assignees

• 深圳大学

Dates

Publication Date

20260505

Application Date

20230531

Claims (7)

1. 1. A high-stiffness three-dimensional fully decoupled micro-motion platform comprising: A bracket; The micro-motion mechanism comprises a main body arranged on the bracket, a first execution structure movably arranged on the main body along a first direction, a second execution structure movably arranged on the first execution structure along a second direction and a third execution structure movably arranged on the second execution structure along a third direction, wherein a first reinforcing part is arranged on the first execution structure, and a second reinforcing part is arranged on the second execution structure; the first driver is arranged on the bracket and is in transmission connection with the first execution structure; the second driver is arranged on the first execution structure and is in transmission connection with the second execution structure; the third driver is arranged on the second execution structure and is in transmission connection with the third execution structure; A third reinforcing part is arranged on one side, close to the second driver, of the second executing structure; The first execution structure is provided with a first installation position, the second driver is arranged in the first installation position, and the first reinforcing part is positioned beside the first installation position along the opposite sides of the third direction; The second execution structure is provided with a second installation position, the third driver is arranged in the second installation position, and the second reinforcing part is positioned beside the second installation position along the opposite sides of the second direction.
2. 2. The three-dimensional full-decoupling micro-motion platform with high rigidity according to claim 1, wherein the micro-motion mechanism further comprises a first flexible hinge, two ends of the first flexible hinge are respectively connected with the main body and the first executing structure, and the first flexible hinge is arranged at two opposite sides of the first executing structure along the second direction and/or the third direction.
3. 3. The three-dimensional full decoupling micro motion platform of claim 1, wherein the micro motion mechanism further comprises a second flexible hinge, two ends of the second flexible hinge are respectively connected with the first executing structure and the second executing structure, and the second flexible hinge is arranged at two opposite sides of the second executing structure along a third direction.
4. 4. The three-dimensional full decoupling micro motion platform with high rigidity according to claim 1, wherein the micro motion mechanism further comprises a third flexible hinge, two ends of the third flexible hinge are respectively connected with the second executing structure and the third executing structure, and the third flexible hinge is arranged at two opposite sides of the third executing structure along the second direction.
5. 5. The three-dimensional decoupling micro-motion platform of any one of claims 1-4, further comprising a connecting member, wherein the connecting member is connected to the first actuator and the first actuating structure, respectively, and the first actuator drives the first actuating structure to move along a first direction through the connecting member.
6. 6. The three-dimensional full decoupling micro motion platform with high rigidity according to claim 5, wherein a driving end is arranged on one side, close to the first driver, of the connecting piece, the first driver is connected with the driving end, a plurality of transmission ends are arranged on one side, close to the first executing structure, of the connecting piece, and the transmission ends are connected with the first executing structure.
7. 7. The three-dimensional full decoupling micro-motion platform with high rigidity according to claim 1, wherein a first positioning part is convexly arranged on one side of the support, which is close to the main body, and a second positioning part is arranged on the main body, and the first positioning part and the second positioning part are mutually positioned and connected.

Description

High-rigidity three-dimensional full-decoupling micro-motion platform Technical Field The application belongs to the technical field of micro-nano processing, and particularly relates to a high-rigidity three-dimensional full-decoupling micro-motion platform. Background The three-dimensional full-decoupling micro-motion platform is widely applied to the processing of micro-nano structures due to the accuracy, the processing efficiency and the like, the three-dimensional full-decoupling micro-motion platform mainly drives the execution structure of each part through a driver, the deformation of the three-dimensional full-decoupling micro-motion platform mainly depends on a flexible hinge, the flexible hinge is a special kinematic pair for generating displacement by utilizing the elastic deformation of materials, the flexible hinge has the advantages of no friction, no clearance, easiness in maintenance, high resolution and the like, and the flexible hinge has various structural types, and is commonly provided with straight beams, straight circles, ellipses and the like. The three-dimensional full-decoupling micro-motion platform is mainly divided into a serial type and a parallel type, although the serial type three-dimensional full-decoupling micro-motion platform has a simple structure and good decoupling performance, the processing efficiency is low, error accumulation is easy to generate, the parallel type three-dimensional full-decoupling micro-motion platform adopts a symmetrical structure, the mechanical property is good, the error accumulation is difficult to generate, and the parallel type three-dimensional full-decoupling micro-motion platform needs to have higher rigidity strength. At present, most of micro-motion mechanisms of parallel three-dimensional full-decoupling micro-motion platforms cannot meet the requirements on self strength, when an internal driver runs at high frequency, the three-dimensional micro-motion mechanisms are easy to slightly deform locally, so that the driver cannot drive a corresponding execution structure to efficiently complete high-frequency motion, only a few low-frequency motions can be performed, and the decoupling performance of the three-dimensional full-decoupling micro-motion platform is poor and the decoupling efficiency is low. Disclosure of Invention The embodiment of the application aims to provide a high-rigidity three-dimensional full-decoupling micro-motion platform, which aims to solve the technical problems of poor decoupling performance and low decoupling efficiency caused by insufficient rigidity strength of a micro-motion mechanism inside the micro-motion platform in the prior art. The technical scheme includes that the three-dimensional full-decoupling micro-motion platform comprises a support, a micro-motion mechanism, a third driver and a first actuator, wherein the micro-motion mechanism comprises a main body arranged on the support, a first actuating structure which can be movably arranged on the main body along a first direction, a second actuating structure which can be movably arranged on the first actuating structure along a second direction and a third actuating structure which can be movably arranged on the second actuating structure along a third direction, a first reinforcing part is arranged on the first actuating structure, a second reinforcing part is arranged on the second actuating structure, the first driver is arranged on the support and in transmission connection with the first actuating structure, the second driver is arranged on the first actuating structure and in transmission connection with the second actuating structure, and the third driver is arranged on the second actuating structure and in transmission connection with the third actuating structure. Compared with the prior art, the high-rigidity three-dimensional full-decoupling micro-motion platform has the advantages that the main body in the micro-motion mechanism is arranged on the support, the first execution structure is arranged on the main body, the second execution structure is arranged on the first execution structure, the third execution structure is arranged on the second execution structure, the first execution structure, the second execution structure and the third execution structure can respectively perform micro motion along the first direction, the second direction and the third direction, so that the serially connected structure is realized inside the micro-motion mechanism, meanwhile, the first reinforcement part and the second reinforcement part are respectively arranged in the first execution structure and the second execution structure provided with the second driver and the third driver, so that the rigidity strength of the first execution structure and the second execution structure is effectively improved, the first execution structure and the second execution structure are prevented from being slightly deformed locally when the first driver a