CN-116753373-B - Pipe end connector, pipe butt joint device and semiconductor equipment

CN116753373BCN 116753373 BCN116753373 BCN 116753373BCN-116753373-B

Abstract

The embodiment of the invention provides a pipe end connector, a pipeline butt joint device and semiconductor equipment, and relates to the technical field of semiconductors. The pipe end connector comprises a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core. The valve core is arranged at one end of the connecting pipe body and partially protrudes out of the connecting pipe body, and a flow channel is formed between the valve core and the connecting pipe body so as to allow gas to pass through. A valve seat is formed at one end of the butt joint pipe. The outer sleeve is sleeved on the butt joint pipe and the connecting pipe body, and the connecting pipe body can move relative to the butt joint pipe by rotating the outer sleeve so as to enable the valve core to be combined with or separated from the valve seat. It can block the end of the pipe, thereby avoiding leakage of gas or liquid.

Inventors

Tang Renpeng
DONG WENHUI
LU XILONG
HE JICHAO

Assignees

拓荆科技(上海)有限公司

Dates

Publication Date: 20260508
Application Date: 20230612

Claims (10)

1. The pipe end connector is characterized by comprising a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core; The valve core is arranged at one end of the connecting pipe body and partially protrudes out of the connecting pipe body, and a flow passage is formed between the valve core and the connecting pipe body so as to allow gas to pass through; A valve seat is formed at one end of the butt joint pipe; The outer sleeve is sleeved on the butt joint pipe and the connecting pipe body, and the outer sleeve can be rotated to enable the connecting pipe body to move relative to the butt joint pipe so as to enable the valve core to be combined with or separated from the valve seat; The pipe end connector further comprises a telescopic pipe, one end of the telescopic pipe is connected with the connecting pipe body, the other end of the telescopic pipe is connected with the butt joint pipe, and the telescopic pipe is telescopic after the outer sleeve pipe is rotated.
2. The pipe end connector of claim 1, wherein the outer periphery of the butt joint pipe is convexly provided with a limiting table, the inner periphery of the outer sleeve is provided with a clamping table, the outer sleeve is rotatably sleeved outside the butt joint pipe, and the limiting table is abutted with the clamping table.
3. The pipe end fitting according to claim 2, wherein the outer circumference of the connecting pipe body is provided with threads, the inner circumference of the outer sleeve is provided with threads, and the end of the connecting pipe body provided with the valve core is rotatably mounted to the outer sleeve by screw-fitting.
4. The pipe end connector of claim 1 wherein the telescoping tube is a bellows, one end of the bellows is fixedly connected to the end of the connecting pipe body, and the other end of the bellows is fixedly connected to the mating pipe.
5. A pipe end joint according to any one of claims 1 to 3, wherein the valve seat is provided at the inner periphery of the butt pipe, an abutment inclined surface is provided on a side of the valve seat adjacent to the connecting pipe body, and the valve core is provided with a sealing ring which is abuttable against the abutment inclined surface.
6. A pipe end fitting according to any one of claims 1 to 3, wherein the outer periphery of the side of the mating pipe remote from the connecting pipe body is provided with a connecting flange.
7. A pipe end fitting according to any one of claims 1 to 3, wherein the outer periphery of the connecting pipe body is provided with a switch indicator strip for indicating the relative position of the valve core and the valve seat.
8. A pipe butt joint device for butt joint between two pipes, comprising a clamp and two pipe end joints according to any one of claims 1 to 7; the two connecting pipe bodies of the two pipe end connectors are respectively used for being connected with two pipelines; the two butt pipes of the two pipe end joints are connected through the clamp.
9. The pipe docking apparatus of claim 8, further comprising a gasket, the gasket is disposed between the two tube end fittings to seal.
10. A semiconductor device comprising the pipe end fitting of any one of claims 1 to 7, or comprising the pipe docking apparatus of claim 8 or 9.

Description

Pipe end connector, pipe butt joint device and semiconductor equipment Technical Field The invention relates to the field of semiconductors, in particular to a pipe end connector, a pipeline butt joint device and semiconductor equipment. Background In the semiconductor industry, films have a very important role, and the formation of films is a result of the interaction of various gases and liquids, so that a large number of pipelines are arranged in the film equipment for connecting the substances, and the risk of leakage is increased along with the increase of the pipelines. Because the reaction can be carried out between the gas and the gas or between the liquid and the liquid, in order to ensure the safe work of maintenance personnel, the internal gas or the liquid must be completely removed during the leakage maintenance work generally, and the mode is more troublesome and can have the problem of uncleanness. Disclosure of Invention The object of the present invention includes, for example, providing a pipe end fitting, a pipe joint device and a semiconductor device, which are capable of blocking an end portion of a pipe so that leakage of gas or liquid can be avoided. Embodiments of the invention may be implemented as follows: in a first aspect, the present invention provides a pipe end connector comprising a connecting pipe body, an outer sleeve, a butt joint pipe and a valve core; The valve core is arranged at one end of the connecting pipe body and partially protrudes out of the connecting pipe body, and a flow passage is formed between the valve core and the connecting pipe body so as to allow gas to pass through; A valve seat is formed at one end of the butt joint pipe; the outer sleeve is sleeved on the butt joint pipe and the connecting pipe body, and the outer sleeve can be rotated to enable the connecting pipe body to move relative to the butt joint pipe so as to enable the valve core to be combined with or separated from the valve seat. In an alternative embodiment, the outer periphery of the butt joint pipe is convexly provided with a limiting table, the inner periphery of the outer sleeve is provided with a clamping table, the outer sleeve is rotatably sleeved outside the butt joint pipe, and the limiting table is in butt joint with the clamping table. In an alternative embodiment, the outer periphery of the connecting pipe body is provided with threads, the inner periphery of the outer sleeve is provided with threads, and one end of the connecting pipe body provided with the valve core is rotatably mounted on the outer sleeve through the threaded fit. In an alternative embodiment, the pipe end connector further comprises a telescopic pipe, one end of the telescopic pipe is connected with the connecting pipe body, the other end of the telescopic pipe is connected with the butt joint pipe, and the telescopic pipe can be stretched by rotating the outer sleeve. In an alternative embodiment, the telescopic tube is a bellows, one end of the bellows is fixedly connected with the end part of the connecting tube body, and the other end of the bellows is fixedly connected with the butt joint tube. In an alternative embodiment, the valve seat is disposed at the inner periphery of the butt joint pipe, an abutment inclined plane is disposed at one side of the valve seat, which is close to the connecting pipe body, and a sealing ring is disposed on the valve seat and can abut against the abutment inclined plane. In an alternative embodiment, the outer periphery of the side of the butt joint pipe far away from the connecting pipe body is provided with a connecting flange. In an alternative embodiment, a switch indication strip is arranged on the outer periphery of the connecting pipe body and used for indicating the relative position of the valve core and the valve seat. In a second aspect, the present invention provides a pipe-line interface for interfacing between two pipes, comprising a clamp and two pipe-end fittings as described in any of the previous embodiments; the two connecting pipe bodies of the two pipe end connectors are respectively used for being connected with two pipelines; the two butt pipes of the two pipe end joints are connected through the clamp. In an alternative embodiment, the pipe interfacing device further comprises a gasket disposed between the two pipe ends for sealing. In a third aspect, the present invention provides a semiconductor device comprising a pipe end fitting according to any one of the preceding embodiments, or comprising a pipe docking apparatus according to any one of the preceding embodiments. The pipe end connector, the pipe butt joint device and the semiconductor device provided by the embodiment of the invention have the beneficial effects that: According to the application, the pipe end connector is arranged, the connecting pipe body of the pipe end connector is connected with the end part of the pipeline, and before the pipeline is disassembled, the outer