CN-116755293-B - Exposure apparatus

CN116755293BCN 116755293 BCN116755293 BCN 116755293BCN-116755293-B

Abstract

The disclosure provides an exposure device, which comprises a light-transmitting substrate, an annular frame, a storage mechanism and a traction mechanism, wherein the annular frame is arranged on one side of the light-transmitting substrate, a space surrounded by the annular frame and the light-transmitting substrate form a storage cavity, when the storage cavity is in a negative pressure state, a mask plate can be adsorbed on one side of the annular frame, which is opposite to the light-transmitting substrate, the storage mechanism and the traction mechanism are arranged in the storage cavity, the traction mechanism can be far away from or close to the storage mechanism in a direction parallel to the light-transmitting substrate, one side of the flexible light-shielding film is connected with the storage mechanism, and the opposite side of the flexible light-shielding film is connected with the traction mechanism, wherein when the traction mechanism is close to the storage mechanism, the storage mechanism can fold or wind the flexible light-shielding film, and when the traction mechanism is far away from the storage mechanism, at least part of the flexible light-shielding film can be unfolded. The present disclosure is capable of shading during exposure.

Inventors

WANG DONG
QI PENGYU
WAN JIYU
DUAN HAO
XIAO YU
FENG HE

Assignees

北京京东方显示技术有限公司
京东方科技集团股份有限公司

Dates

Publication Date: 20260512
Application Date: 20230530

Claims (10)

1. An exposure apparatus, comprising: A light-transmitting substrate; The device comprises a transparent substrate, an annular frame, a mask plate, a transparent substrate and a transparent electrode, wherein the annular frame is arranged on one side of the transparent substrate, and a space surrounded by the annular frame and the transparent substrate form a containing cavity; The light-transmitting substrate is arranged in the accommodating cavity, and is provided with a light-transmitting substrate, a containing mechanism and a traction mechanism, wherein the traction mechanism can be far away from or close to the containing mechanism in the direction parallel to the light-transmitting substrate; the flexible shading film is connected with the containing mechanism at one side, and is connected with the traction mechanism at the opposite side; Wherein, when the traction mechanism is close to the storage mechanism, the storage mechanism can fold or wind the flexible shading film, and when the traction mechanism is far away from the storage mechanism, at least part of the flexible shading film can be unfolded.
2. The exposure apparatus according to claim 1, wherein the housing mechanism includes: And the winding shaft is rotatably arranged on the annular frame, the flexible shading film is wound on the winding shaft, and the extending direction of the winding shaft is parallel to the light-transmitting substrate.
3. The exposure apparatus according to claim 2, wherein the number of the storage means, the drawing means, and the flexible light shielding films is plural, one of the storage means includes one of the winding shafts, the plurality of winding shafts correspond to the plurality of drawing means, the plurality of winding shafts correspond to the plurality of flexible light shielding films, and the plurality of drawing means correspond to the plurality of flexible light shielding films; the plurality of winding shafts at least comprise a first winding shaft and a second winding shaft; the first winding shaft and the second winding shaft extend along a first direction, and the first direction is parallel to the light-transmitting substrate; in a second direction, the first winding shaft and the second winding shaft are positioned at two opposite sides of the accommodating cavity, and the second direction is perpendicular to the first direction and parallel to the light-transmitting substrate; In the second direction, the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are located between the first winding shaft and the second winding shaft.
4. An exposure apparatus according to claim 3, wherein the exposure apparatus comprises a rail assembly including a first rail assembly including a rail extending along the second direction; the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding fit with the rails of the first rail assembly.
5. The exposure apparatus according to claim 3, wherein the number of the housing mechanism, the traction mechanism, and the flexible light shielding film is four, the plurality of winding shafts further includes a third winding shaft and a fourth winding shaft, the third winding shaft and the fourth winding shaft extending in the second direction; in the first direction, two of the traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are located between the third winding shaft and the fourth winding shaft.
6. The exposure apparatus according to claim 5, wherein the exposure apparatus includes a rail assembly including a first rail assembly including a rail extending along the second direction and a second rail assembly including a rail extending along the first direction; the second track assembly is positioned at one side of the first track assembly away from the light-transmitting substrate; Two of the traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding fit with the rails of the first rail assembly; Two of the traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are in sliding fit with the rails of the second rail assembly.
7. The exposure apparatus according to claim 6, wherein the first rail assembly includes two rails that are distributed on opposite sides of the accommodating chamber in the first direction, and/or The second track assembly comprises two tracks, and the two tracks of the second track assembly are distributed on two opposite sides of the accommodating cavity in the second direction.
8. The exposure apparatus according to claim 2, wherein an avoidance space is provided inside the annular frame, the avoidance space constitutes a part of the space of the accommodation chamber, and the winding shaft is provided in the avoidance space.
9. The exposure apparatus according to claim 2, wherein the exposure apparatus includes a rail assembly including one or more rails having an extending direction perpendicular to an extending direction of the winding shaft and an extending direction parallel to the light-transmitting substrate, and the traction mechanism is slidably fitted with the rails.
10. The exposure apparatus according to claim 9, wherein an avoidance space is provided inside the annular frame, the avoidance space constitutes a part of the space of the accommodation chamber, and the rail is provided in the avoidance space.

Description

Exposure apparatus Technical Field The disclosure relates to the field of display technologies, and in particular, to an exposure device. Background With the rapid development of display technology, various types of display devices are gradually introduced into the market. However, some display devices currently have drawbacks in the manufacturing process. Disclosure of Invention An object of the present disclosure is to provide an exposure apparatus. The present disclosure provides an exposure apparatus including: A light-transmitting substrate; The device comprises a transparent substrate, an annular frame, a mask plate, a transparent substrate and a transparent electrode, wherein the annular frame is arranged on one side of the transparent substrate, and a space surrounded by the annular frame and the transparent substrate form a containing cavity; The light-transmitting substrate is arranged in the accommodating cavity, and is provided with a light-transmitting substrate, a containing mechanism and a traction mechanism, wherein the traction mechanism can be far away from or close to the containing mechanism in the direction parallel to the light-transmitting substrate; the flexible shading film is connected with the containing mechanism at one side, and is connected with the traction mechanism at the opposite side; Wherein, when the traction mechanism is close to the storage mechanism, the storage mechanism can fold or wind the flexible shading film, and when the traction mechanism is far away from the storage mechanism, at least part of the flexible shading film can be unfolded. In some embodiments, the receiving mechanism comprises: And the winding shaft is rotatably arranged on the annular frame, the flexible shading film is wound on the winding shaft, and the extending direction of the winding shaft is parallel to the light-transmitting substrate. In some embodiments, the number of the containing mechanism, the traction mechanism and the flexible shading film is a plurality, one containing mechanism comprises one winding shaft, the winding shafts correspond to the traction mechanisms, the winding shafts correspond to the flexible shading films, and the traction mechanisms correspond to the flexible shading films; the plurality of winding shafts at least comprise a first winding shaft and a second winding shaft; the first winding shaft and the second winding shaft extend along a first direction, and the first direction is parallel to the light-transmitting substrate; in a second direction, the first winding shaft and the second winding shaft are positioned at two opposite sides of the accommodating cavity, and the second direction is perpendicular to the first direction and parallel to the light-transmitting substrate; In the second direction, the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are located between the first winding shaft and the second winding shaft. In some embodiments, the exposure apparatus includes a track assembly including a first track assembly including a track extending along the second direction; the two traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding fit with the rails of the first rail assembly. In some embodiments, the number of the containing mechanism, the traction mechanism and the flexible shading film is four, and the plurality of winding shafts further comprises a third winding shaft and a fourth winding shaft, wherein the third winding shaft and the fourth winding shaft extend along the second direction; in the first direction, two of the traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are located between the third winding shaft and the fourth winding shaft. In some embodiments, the exposure apparatus includes a track assembly including a first track assembly including a track extending along the second direction and a second track assembly including a track extending along the first direction; the second track assembly is positioned at one side of the first track assembly away from the light-transmitting substrate; Two of the traction mechanisms corresponding to the first winding shaft and the second winding shaft are in sliding fit with the rails of the first rail assembly; Two of the traction mechanisms corresponding to the third winding shaft and the fourth winding shaft are in sliding fit with the rails of the second rail assembly. In some embodiments, the first rail assembly includes two rails that are distributed on opposite sides of the receiving cavity in the first direction, and/or The second track assembly comprises two tracks, and the two tracks of the second track assembly are distributed on two opposite sides of the accommodating cavity in the second direction. In some embodiments, an avoidance space is formed on the inner side of the annular frame, the avoidance space forms a part of space of the accommodat