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CN-116806104-B - Display device and method for manufacturing the same

CN116806104BCN 116806104 BCN116806104 BCN 116806104BCN-116806104-B

Abstract

The present invention relates to a display device and a method for manufacturing the display device. A display device according to one embodiment includes a 1 st display element including a 1 st lower electrode, a 1 st upper electrode, and a 1 st organic layer that emits light in response to a voltage between the 1 st lower electrode and the 1 st upper electrode, a 2 nd display element including a 2 nd lower electrode, a 2 nd upper electrode, and a 2 nd organic layer that emits light in response to a voltage between the 2 nd lower electrode and the 2 nd upper electrode, and a partition wall disposed between the 1 st display element and the 2 nd display element. The partition wall includes a lower portion having a 1 st side surface on the 1 st display element side and a 2 nd side surface on the 2 nd display element side, and an upper portion having a 1 st end portion protruding from the 1 st side surface and a 2 nd end portion protruding from the 2 nd side surface. The 1 st end has light shielding property, and the 2 nd end has light transmitting property.

Inventors

  • FUKUDA KAICHI

Assignees

  • 株式会社日本显示器

Dates

Publication Date
20260512
Application Date
20230322
Priority Date
20220323

Claims (16)

  1. 1. A display device is provided with: A1 st display element including a1 st lower electrode, a1 st upper electrode, and a1 st organic layer that emits light in response to a voltage between the 1 st lower electrode and the 1 st upper electrode; A 2 nd display element including a 2 nd lower electrode, a 2 nd upper electrode, and a 2 nd organic layer emitting light corresponding to a voltage between the 2 nd lower electrode and the 2 nd upper electrode, and A barrier rib disposed between the 1 st display element and the 2 nd display element, The partition wall is provided with: A lower part having a1 st side surface on the 1 st display element side and a2 nd side surface on the 2 nd display element side, and An upper part having a1 st end protruding from the 1 st side surface and a2 nd end protruding from the 2 nd side surface, The 1 st end has light shielding property, and the 2 nd end has light transmitting property.
  2. 2. The display device according to claim 1, wherein the upper portion includes: A transparent layer extending over a range from the 1 st end to the 2 nd end, and And a light shielding layer disposed at the 1 st end.
  3. 3. The display device according to claim 2, wherein the light shielding layer is arranged over the transparent layer.
  4. 4. The display device according to claim 2, wherein the light shielding layer is formed of titanium.
  5. 5. The display device according to claim 2, wherein the light shielding layer has a transmittance of 10% or less for light having a wavelength of 436nm or light having a wavelength of 405 nm.
  6. 6. The display device according to claim 2, wherein the barrier rib surrounds the 1 st display element and the 2 nd display element, The light shielding layer surrounds the 1 st display element.
  7. 7. The display device according to claim 2, wherein the transparent layer comprises: A 1 st transparent layer formed of silicon oxide, and And a 2 nd transparent layer formed of a conductive oxide.
  8. 8. The display device according to claim 2, wherein the transparent layer has a single-layer structure of silicon oxide.
  9. 9. The display device of claim 1, wherein the lower portion has electrical conductivity, The 1 st upper electrode is in contact with the 1 st side, The 2 nd upper electrode is in contact with the 2 nd side surface.
  10. 10. The display device according to claim 1, further comprising a1 st sealing layer made of an inorganic material covering the 1 st display element, the 1 st side surface, and the 1 st end portion, and A2 nd sealing layer formed of an inorganic material covering the 2 nd display element, the 2 nd side surface, and the 2 nd end portion, The ends of the 1 st sealing layer and the 2 nd sealing layer are positioned above the upper part and are separated from each other.
  11. 11. A method of manufacturing a display device, comprising: Forming a1 st lower electrode and a2 nd lower electrode; Forming a partition wall having a lower portion and an upper portion, wherein the lower portion has a1 st side surface on the 1 st lower electrode side and a2 nd side surface on the 2 nd lower electrode side, and the upper portion has a light-shielding 1 st end portion protruding from the 1 st side surface and a light-transmitting 2 nd end portion protruding from the 2 nd side surface; Sequentially forming a1 st organic layer including a light emitting layer, a1 st upper electrode covering the 1 st organic layer, a1 st sealing layer formed of an inorganic material, and a1 st resist covering the 1 st sealing layer on the 1 st lower electrode, the 2 nd lower electrode, and the partition wall; Exposing the part of the 1 st resist overlapping with the 2 nd bottom electrode and the 2 nd end part, Exposing the 1 st resist to a developing solution to remove the exposed portions of the 1 st resist, The 1 st display element including the 1 st lower electrode, the 1 st organic layer, and the 1 st upper electrode is formed by removing a portion of the 1 st organic layer, the 1 st upper electrode, and the 1 st sealing layer exposed from the 1 st resist by 1 st etching.
  12. 12. The method for manufacturing a display device according to claim 11, further comprising: After the 1 st display element is formed, a 2 nd organic layer including a light emitting layer, a 2 nd upper electrode covering the 2 nd organic layer, a 2 nd sealing layer formed of an inorganic material, and a 2 nd resist covering the 2 nd sealing layer are sequentially formed over the 1 st display element, the 2 nd lower electrode, and the partition wall, Exposing the portion of the 2 nd resist overlapping the 1 st display element and the 1 st end portion, Exposing the 2 nd resist to a developing solution to remove the exposed portions of the 2 nd resist, The portion of the 2 nd organic layer, the 2 nd upper electrode, and the 2 nd sealing layer exposed from the 2 nd resist is removed by 2 nd etching, thereby forming a2 nd display element including the 2 nd lower electrode, the 2 nd organic layer, and the 2 nd upper electrode.
  13. 13. The method for manufacturing a display device according to claim 12, wherein a part of the 2 nd resist is located below the 1 st end portion, Light exposing the 2 nd resist is blocked by the 1 st end portion, After exposing the 2 nd resist to the developing solution, a portion of the 2 nd resist located below the 1 st end remains when the 2 nd etching is performed.
  14. 14. The method for manufacturing a display device according to claim 12, wherein the upper portion includes: A transparent layer extending over a range from the 1 st end to the 2 nd end, and And a light shielding layer disposed at the 1 st end.
  15. 15. The method for manufacturing a display device according to claim 14, wherein a transmittance of light used for exposing the 2 nd resist to the light shielding layer is 10% or less.
  16. 16. The method for manufacturing a display device according to claim 15, wherein light having a wavelength of 436nm or light having a wavelength of 405nm is used in the exposure of the 2 nd resist.

Description

Display device and method for manufacturing the same Cross reference to related applications The present application claims priority based on japanese patent application No. 2022-047128, filed on 3/23 of 2022, and the entire contents of the descriptions of the japanese patent application are incorporated herein by reference. Technical Field Embodiments of the present invention relate to a display device and a method of manufacturing the same. Background In recent years, display devices using Organic Light Emitting Diodes (OLEDs) as display elements have been put into practical use. The display element includes a lower electrode, an organic layer covering the lower electrode, and an upper electrode covering the organic layer. In manufacturing the display device, a technique for suppressing a decrease in reliability is required. Disclosure of Invention In general, according to an embodiment, a display device includes a 1 st display element including a 1 st lower electrode, a 1 st upper electrode, and a 1 st organic layer that emits light in response to a voltage between the 1 st lower electrode and the 1 st upper electrode, a 2 nd display element including a 2 nd lower electrode, a 2 nd upper electrode, and a 2 nd organic layer that emits light in response to a voltage between the 2 nd lower electrode and the 2 nd upper electrode, and a barrier rib disposed between the 1 st display element and the 2 nd display element. The partition wall includes a lower portion having a 1 st side surface on the 1 st display element side and a 2 nd side surface on the 2 nd display element side, and an upper portion having a 1 st end portion protruding from the 1 st side surface and a 2 nd end portion protruding from the 2 nd side surface. The 1 st end has light shielding property, and the 2 nd end has light transmitting property. Further, according to an embodiment, a method for manufacturing a display device includes forming a1 st lower electrode and a 2 nd lower electrode, forming a partition wall including a lower portion having a1 st side surface on the 1 st lower electrode side and a 2 nd side surface on the 2 nd lower electrode side, and an upper portion having a light-shielding 1 st end portion protruding from the 1 st side surface and a light-transmitting 2 nd end portion protruding from the 2 nd side surface, sequentially forming a1 st organic layer including a light-emitting layer, a1 st upper electrode formed of an inorganic material, a1 st sealing layer, and a1 st resist covering the 1 st sealing layer on the 1 st lower electrode, the 2 nd lower electrode, and the partition wall, exposing a portion of the 1 st resist overlapping the 2 nd lower electrode and the 2 nd end portion to a developer, removing the exposed portion of the 1 st resist, and removing the 1 st electrode from the 1 st electrode, and the 1 st electrode by exposing the 1 st electrode, and the 1 st electrode by etching. According to the configuration of the embodiment, the reliability of the display device can be improved. Drawings Fig. 1 is a diagram showing a configuration example of a display device according to an embodiment. Fig. 2 is a diagram showing an example of a layout of subpixels. Fig. 3 is a schematic cross-sectional view of the display device taken along line III-III in fig. 2. Fig. 4 is a schematic cross-sectional view of a partition wall disposed between the 1 st subpixel and the 2 nd subpixel and its vicinity enlarged. Fig. 5 is a schematic cross-sectional view showing another example of a structure applicable to a partition wall. Fig. 6 is a schematic plan view of the partition wall. Fig. 7 is a flowchart showing an example of a method for manufacturing a display device. Fig. 8 is a schematic cross-sectional view showing a part of a manufacturing process of the display device. Fig. 9 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 8. Fig. 10 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 9. Fig. 11 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 10. Fig. 12 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 11. Fig. 13 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 12. Fig. 14 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 13. Fig. 15 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 14. Fig. 16 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 15. Fig. 17 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 16. Fig. 18 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 17. Fig. 19 is a schematic cross-sectional view showing a manufacturing process subsequent to fig. 18. Fig. 20 is a schematic cross-sectional view showing a manufacturing process subsequent to