CN-116878372-B - Quartz pendulum piece deformation measuring device and measuring method

CN116878372BCN 116878372 BCN116878372 BCN 116878372BCN-116878372-B

Abstract

The invention provides a quartz pendulum piece deformation measuring device and a quartz pendulum piece deformation measuring method, and relates to the technical field of quartz acceleration devices. The quartz pendulum piece deformation measuring device comprises a polar plate, a pendulum piece fixing clamp, a first translation platform, a second translation platform and a capacitance measuring assembly. The pendulum plate fixing clamp is suitable for fixing a quartz pendulum plate, the polar plate is arranged on the first translation platform, the pendulum plate fixing clamp is arranged on the second translation platform, the plate surface of the polar plate is parallel to the quartz pendulum plate, the second translation platform moves along a first direction to drive the pendulum plate fixing clamp to move towards or away from the polar plate, the first direction is perpendicular to the plate surface of the polar plate, and the capacitance measuring assembly is electrically connected with the polar plate and the quartz pendulum plate and is suitable for measuring capacitance between the polar plate and the quartz pendulum plate. The quartz pendulum piece deformation measuring device provided by the invention can be used for independently measuring the deformation of the quartz pendulum piece, and has the advantages of no damage to the quartz pendulum piece in the measuring process, high detection efficiency and good detection precision.

Inventors

ZHAO QIAN
LI HUI
SHAO TIANMIN
WANG ZHIANG
Weng Mingze

Assignees

清华大学

Dates

Publication Date: 20260512
Application Date: 20230619

Claims (6)

1. A quartz pendulum plate deformation measuring device, comprising: a polar plate; The swing piece fixing clamp is suitable for fixing a quartz swing piece; The polar plate is arranged on the first translation platform, the swing piece fixing clamp is arranged on the second translation platform, and the plate surface of the polar plate is parallel to the quartz swing piece; The second translation platform moves along a first direction to drive the swing piece fixing clamp to move towards or away from the polar plate, wherein the first direction is perpendicular to the plate surface of the polar plate; the capacitance measuring assembly is electrically connected with the polar plate and the quartz pendulous reed and is suitable for measuring the capacitance between the polar plate and the quartz pendulous reed, wherein the polar plate forms a first electrode, and the quartz pendulous reed forms a second electrode; The quartz swing piece deformation measuring device further comprises a first fixing support and a second fixing support, wherein the first fixing support is arranged on the first translation platform, and the second fixing support is arranged on the second translation platform; The swing piece fixing clamp comprises a clamp body and a rotating table, wherein the rotating table is arranged on the second fixing bracket, and the clamp body is arranged on the rotating table; The first translation platform moves along a first direction to drive the polar plate to move towards or away from the swing piece fixing clamp, the first translation platform comprises a first locking piece and is suitable for locking and positioning the first translation platform, the swing piece fixing clamp comprises a deflector rod, a second fine adjuster, a second locking piece and a third locking piece, the deflector rod is arranged on the rotating table and is suitable for driving the rotating table to rotate, the second fine adjuster is suitable for driving the rotating table to rotate, and the second locking piece and the third locking piece are suitable for locking and positioning the rotating table.
2. The quartz wobble plate deformation measurement apparatus of claim 1, wherein the second translation stage comprises a first fine adjuster adapted to adjust a distance of the second translation stage relative to the first translation stage.
3. The quartz wobble plate deformation measurement apparatus of any of claims 1-2, wherein the capacitance measurement assembly comprises a shielded wire, a capacitance measurement chip, and a signal processing terminal; The capacitance measuring chip is electrically connected with the polar plate and the quartz pendulous reed through the shielding wire, and the capacitance measuring chip is electrically connected with the signal processing terminal.
4. A quartz wobble plate deformation measurement method based on the quartz wobble plate deformation measurement apparatus as claimed in any one of claims 1 to 3, comprising: Determining a target distance d 0 between the quartz pendulous reed and the polar plate; Adjusting the second translation platform to drive the swing piece fixing clamp to move along a first direction so as to enable the distance between the quartz swing piece and the polar plate to be a target distance d 0 , and measuring N capacitance C between the quartz swing piece and the polar plate through the capacitance measuring assembly; Based on N capacitance C, multiple groups of capacitance variation are obtained C; Based on the multiple groups of capacitance variation C, determining a set of deformation values of the quartz pendulous reed; wherein, the step of determining the target distance d0 between the quartz pendulous reed and the polar plate comprises the following steps: determining a preset distance d between the quartz pendulous reed and the polar plate, and determining a capacitance C between the quartz pendulous reed and the polar plate based on the preset distance d; determining a preset offset distance of the quartz pendulous reed D, based on the preset offset distance D, determining the capacitance variation between the quartz pendulous reed and the polar plate C; Based on the preset offset distance D and the capacitance variation C, determining the capacitance measurement sensitivity s= C/ d; And determining a target distance d 0 between the quartz pendulous reed and the polar plate based on the capacitance measurement sensitivity S.
5. The quartz wobble plate deformation measurement method of claim 4, further comprising: and determining the measurement range, resolution and capacitance sampling rate of the capacitance measurement component based on the capacitance measurement sensitivity S.
6. The quartz wobble plate deformation measurement method according to claim 4, wherein the step of determining a preset distance d between the quartz wobble plate and the polar plate, and determining a capacitance C between the quartz wobble plate and the polar plate based on the preset distance d, comprises: Obtaining structural parameters and physical parameters of the quartz pendulous reed; based on the structural parameters and the physical parameters, determining the preset distance d and the capacitance C by adopting a finite element simulation analysis method.

Description

Quartz pendulum piece deformation measuring device and measuring method Technical Field The invention relates to the technical field of quartz acceleration devices, in particular to a quartz pendulum plate deformation measuring device and a quartz pendulum plate deformation measuring method. Background The quartz accelerometer has simple structure, small volume, low power consumption, good manufacturability and high sensitivity, and plays an important role in various strategic tactical weapon navigation, guidance and control systems as an important component of inertial navigation and inertial measurement equipment. The quartz accelerometer mainly comprises an upper torquer, a lower torquer, a pendulum assembly and a servo loop. The quartz pendulum assembly is a key sensitive element of the quartz accelerometer and comprises a quartz pendulum piece, the quartz pendulum piece is a brittle material, the defects of low plasticity, fragility, easiness in occurrence of microcracks and the like are overcome, a gold film is deposited on the quartz pendulum piece, the film stress generated by the gold film can lead the quartz pendulum piece to deform, in addition, the influence of factors such as temperature change caused by long-term storage conditions and electrifying work of the quartz pendulum piece, vibration generated by transportation and the like is caused, and the microstructure of the gold film, the residual stress in the film and the structure of the quartz pendulum piece can also be changed, so that the quartz pendulum piece deforms, thereby influencing the measurement precision and reliability of the quartz accelerometer. Therefore, deformation measurement is required to be carried out on the quartz pendulous reed so as to improve the production process, ensure the quality of the quartz pendulous reed and ensure the reliability of the quartz accelerometer. In the prior art, deformation measurement of the quartz pendulums is usually carried out by means of long-term test on overall parameters of the quartz accelerometer so as to reflect stability of each part including the quartz pendulums. Disclosure of Invention In order to solve at least one technical problem in the background art, the invention provides the quartz pendulum piece deformation measuring device which can be used for independently measuring the deformation of the quartz pendulum piece, and has the advantages of no damage to the quartz pendulum piece in the measuring process, high detection efficiency and good detection precision. The second aspect of the invention provides a quartz pendulum plate deformation measurement method. An embodiment of a first aspect of the present invention provides a quartz wobble plate deformation measurement apparatus, including: a polar plate; The swing piece fixing clamp is suitable for fixing a quartz swing piece; The polar plate is arranged on the first translation platform, the swing piece fixing clamp is arranged on the second translation platform, and the plate surface of the polar plate is parallel to the quartz swing piece; The second translation platform moves along a first direction to drive the swing piece fixing clamp to move towards or away from the polar plate, wherein the first direction is perpendicular to the plate surface of the polar plate; And the capacitance measuring assembly is electrically connected with the polar plate and the quartz pendulous reed and is suitable for measuring the capacitance between the polar plate and the quartz pendulous reed, wherein the polar plate forms a first electrode, and the quartz pendulous reed forms a second electrode. According to the quartz pendulous reed deformation measuring device provided by the embodiment of the first aspect of the invention, the polar plate is arranged to form a capacitance structure with the quartz pendulous reed, the quartz pendulous reed is subjected to deformation measurement by adopting a capacitance method, and the quartz pendulous reed is not contacted with the quartz pendulous reed, so that the damage to the quartz pendulous reed is avoided, the detection efficiency is high, and the detection precision is good. Specifically, the quartz pendulous reed deformation measuring device comprises a polar plate, a pendulous reed fixing clamp, a first translation platform, a second translation platform and a capacitance measuring component, wherein the quartz pendulous reed is fixed on the pendulous reed fixing clamp, the polar plate is arranged on the first translation platform, the pendulous reed fixing clamp is arranged on the second translation platform, and the plate surface of the polar plate is parallel to the quartz pendulous reed, so that the polar plate and the quartz pendulous reed can form a capacitance structure, when the quartz pendulous reed deforms, the distance between the quartz pendulous reed and the polar plate changes, and then the capacitance between the quartz pendulous reed and the polar plate also change