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CN-116936426-B - Sheet conveying device and semiconductor detection equipment

CN116936426BCN 116936426 BCN116936426 BCN 116936426BCN-116936426-B

Abstract

The application belongs to the technical field of conveying devices, and particularly relates to a sheet conveying device and semiconductor detection equipment. The sheet conveying device comprises a valve plate pipeline, a transmission mechanism and a bearing seat, wherein the valve plate pipeline comprises a valve plate and a pipeline extending from the valve plate along a first direction, the bearing seat is connected with the valve plate and is positioned at one side of the valve plate far away from the transmission mechanism in the first direction, the transmission mechanism is connected with the pipeline, and the transmission mechanism is arranged to be capable of driving the valve plate pipeline to move along the first direction so as to adjust the positions of the valve plate and the bearing seat in the first direction. The valve plate pipeline is driven to move along the first direction through the transmission mechanism so as to change the position of the valve plate in the first direction, and therefore the two chambers are switched between the blocking state and the communicating state. In addition, a bearing seat for placing the silicon wafer is arranged on the valve plate, and the valve plate is integrated with the bearing seat to synchronously carry the silicon wafer in the process of moving along the first direction to switch the state between the two chambers.

Inventors

  • MI TAO

Assignees

  • 中科晶源微电子技术（北京）有限公司

Dates

Publication Date
20260505
Application Date
20230714

Claims (10)

  1. 1. The sheet conveying device is characterized by comprising a valve plate pipeline, a transmission mechanism and a bearing seat; The valve plate conduit includes a valve plate and a conduit extending from the valve plate in a first direction; The bearing seat is connected with the valve plate and is positioned at one side of the valve plate away from the transmission mechanism in the first direction; The transmission mechanism is connected to the pipeline and comprises a reversing limiting mechanism and a power component, and the power component is arranged to drive the reversing limiting mechanism to act in a second direction so as to adjust the position of the valve plate pipeline in the first direction to realize switching of different gears, and further adjust the positions of the valve plate and the bearing seat in the first direction.
  2. 2. A sheet conveying device according to claim 1, wherein, The transmission mechanism further comprises a base; The pipeline penetrates through the base, the reversing limiting mechanism is movably connected with the base and the pipeline respectively, and the power component is arranged on the base and connected with the reversing limiting mechanism; wherein the first direction is perpendicular to the second direction.
  3. 3. A sheet conveying device according to claim 2, wherein, The reversing limiting mechanism comprises a guide seat and a rolling piece; The guide seat is provided with a guide groove and is connected with the power component, and the rolling piece is connected with the pipeline and is arranged in the guide groove; the power component is arranged to drive the guide seat to move in the second direction so as to enable the rolling piece to move in the first direction under the action of the guide groove.
  4. 4. A sheet conveying device according to claim 3, wherein, The guide groove comprises a plurality of horizontal groove sections and a plurality of inclined groove sections, the horizontal groove sections extend along the second direction, each inclined groove section is communicated with two adjacent horizontal groove sections, and the two adjacent horizontal groove sections are arranged at intervals in the first direction; The power component is arranged to drive the guide seat to move in the second direction so that the rolling piece can be switched between a plurality of horizontal groove sections under the action of the corresponding inclined groove sections.
  5. 5. The sheet conveying device according to claim 4, wherein, The plurality of horizontal groove sections comprise a first horizontal groove section, a second horizontal groove section and a third horizontal groove section, and the first horizontal groove section, the second horizontal groove section and the third horizontal groove section are sequentially arranged at intervals from top to bottom in the first direction; when the rolling element is arranged to be positioned on the first horizontal groove section, the valve plate and the bearing seat are positioned at a first position in the first direction; When the rolling element is arranged to be positioned on the second horizontal groove section, the valve plate and the bearing seat are positioned at a second position in the first direction; When the rolling element is arranged to be positioned on the third horizontal groove section, the valve plate and the bearing seat are positioned at a third position in the first direction.
  6. 6. A sheet conveying device according to claim 1, wherein, The sheet conveying device further comprises a sealing assembly, wherein the sealing assembly comprises a first deformation sleeve and a sealing support piece; The sealing support piece and the valve plate are arranged at intervals in parallel in the first direction and positioned between the valve plate and the transmission mechanism, and two ends of the first deformation sleeve are respectively connected with the valve plate and the sealing support piece and form a third chamber together in a surrounding manner; the pipeline passes through the third chamber and the sealing support and extends out of the third chamber.
  7. 7. A semiconductor inspection apparatus comprising a first chamber, a second chamber, and a sheet transfer device according to any one of claims 1 to 6; The first chamber is connected with the second chamber in the first direction, and the transmission mechanism is positioned outside the second chamber and at one side far away from the first chamber in the first direction; The valve plate is positioned in the second cavity, the pipeline is communicated with the first cavity, and the valve plate is arranged to move under the action of the transmission mechanism so as to enable the first cavity and the second cavity to be communicated or separated; The bearing seat is positioned in the first cavity when the first cavity and the second cavity are in a separated state, and is positioned in the second cavity when the first cavity and the second cavity are in a communicated state.
  8. 8. The semiconductor inspection apparatus of claim 7, further comprising a vacuum module and a pressure relief module; The vacuumizing module is arranged on one side, away from the second chamber, of the transmission mechanism in the first direction and is communicated with the pipeline so as to be used for vacuumizing the first chamber through the pipeline; the pressure relief module is connected to the first chamber and located at one side far away from the second chamber in the first direction, so as to relieve pressure of the first chamber.
  9. 9. The semiconductor inspection apparatus according to claim 8, wherein, The pressure relief module comprises a cover plate and a pressure relief valve, wherein the cover plate covers the first chamber and is provided with an air passage penetrating through the cover plate; The air flue comprises a main air flue section and a plurality of branch air flue sections, the pressure release valve is communicated with the main air flue section, the main air flue section extends along a first direction, and each branch air flue section is connected with the main air flue section and the first chamber and is symmetrically arranged relative to the center of the main air flue section.
  10. 10. The semiconductor inspection apparatus of claim 8, wherein the evacuation module comprises a first pump, a second pump, a first valve, and a transfer tubing assembly; the transfer pipeline assembly is connected to the pipeline, and the first pump and the second pump are both connected to the transfer pipeline assembly and used for vacuumizing the first chamber; the first valve is connected to the transfer tubing assembly and is located upstream of the second pump for controlling operation of the second pump, the first pump being located upstream of the first valve.

Description

Sheet conveying device and semiconductor detection equipment Technical Field The application belongs to the technical field of conveying devices, and particularly relates to a sheet conveying device and semiconductor detection equipment. Background The existing semiconductor detection equipment comprises an interlocking vacuum cavity and a main vacuum cavity, wherein a bearing seat is arranged in the interlocking vacuum cavity and used for placing a silicon wafer, a process platform and a transfer robot are arranged in the main vacuum cavity, and a door valve is arranged between the interlocking vacuum cavity and the main vacuum cavity and used for communicating or isolating the interlocking vacuum cavity and the main vacuum cavity. In the existing wafer transfer process, firstly, the silicon wafer at the atmosphere side is placed in an interlocking vacuum cavity, then the interlocking vacuum cavity is vacuumized, the door valve is opened under the condition that the vacuum degree of the interlocking vacuum cavity meets the door valve opening condition, and a transfer robot in the main vacuum cavity acts to transfer the silicon wafer in the interlocking vacuum cavity to a process platform. At present, the chip transfer flow Cheng Dongzuo is tedious and has low efficiency. Disclosure of Invention The application provides a film conveying device and semiconductor detection equipment, which are used for solving the technical problems of complicated film conveying process and low efficiency in the prior art. According to one aspect of the application, there is provided a sheet conveying device comprising a valve plate pipeline, a transmission mechanism and a bearing seat, wherein the valve plate pipeline comprises a valve plate and a pipeline extending from the valve plate along a first direction, the bearing seat is connected to the valve plate and positioned on one side of the valve plate away from the transmission mechanism in the first direction, the transmission mechanism is connected to the pipeline, and the transmission mechanism is arranged to drive the valve plate pipeline to move along the first direction so as to adjust the positions of the valve plate and the bearing seat in the first direction. In an alternative scheme of the application, the transmission mechanism comprises a base, a reversing limiting mechanism and a power component, wherein the pipeline penetrates through the base, the reversing limiting mechanism is movably connected with the base and the pipeline respectively, the power component is arranged on the base and connected with the reversing limiting mechanism, the power component is arranged to drive the reversing limiting mechanism to act in a second direction so as to adjust the position of the valve plate pipeline in the first direction, and the first direction is perpendicular to the second direction. In an alternative scheme of the application, the reversing limiting mechanism comprises a guide seat and a rolling element, wherein the guide seat is provided with a guide groove and is connected with a power component, the rolling element is connected with a pipeline and is arranged in the guide groove, and the power component is arranged to drive the guide seat to move in a second direction so that the rolling element moves in a first direction under the action of the guide groove. In an alternative scheme of the application, the guide groove comprises a plurality of horizontal groove sections and a plurality of inclined groove sections, wherein the horizontal groove sections extend along the second direction, each inclined groove section is communicated with two adjacent horizontal groove sections, the two adjacent horizontal groove sections are arranged at intervals in the first direction, and the power component is arranged to drive the guide seat to move in the second direction so that the rolling piece can be switched among the plurality of horizontal groove sections under the action of the corresponding inclined groove sections. In an alternative scheme of the application, the plurality of horizontal groove sections comprise a first horizontal groove section, a second horizontal groove section and a third horizontal groove section, the first horizontal groove section, the second horizontal groove section and the third horizontal groove section are sequentially arranged at intervals from top to bottom in the first direction, the valve plate and the bearing seat are positioned at a first position in the first direction when the rolling element is arranged on the first horizontal groove section, the valve plate and the bearing seat are positioned at a second position in the first direction when the rolling element is arranged on the second horizontal groove section, and the valve plate and the bearing seat are positioned at a third position in the first direction when the rolling element is arranged on the third horizontal groove section. In an alternative scheme of the appli