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CN-117000665-B - Cleaning equipment and method for aluminum nitride substrate

CN117000665BCN 117000665 BCN117000665 BCN 117000665BCN-117000665-B

Abstract

The invention relates to the technical field of aluminum nitride substrate cleaning, in particular to an aluminum nitride substrate cleaning device and an aluminum nitride substrate cleaning method. Including contact frame, sliding seat, crane, coupling spring and mounting panel etc. both sides all are connected with two contact frames around the top in the mounting bracket, and mounting bracket upper portion interval sliding type is connected with a plurality of sliding seats, and all sliding type is connected with the crane that is used for driving aluminium nitride base board and reciprocates to wash on the sliding seat, all is connected with coupling spring between crane and its adjacent sliding seat, and the crane bottom all is connected with the mounting panel. According to the invention, a plurality of aluminum nitride substrates can be sequentially placed in the placing frame, then the aluminum nitride substrates are driven to rotate through the synchronous belt assembly, under the cooperation of the contact rod and the contact frame, the aluminum nitride substrates can intermittently move up and down to sequentially carry out pickling and cleaning, the pickling solvent and the pure water can shake, the contact area between the pickling solvent and the pure water is increased, and the cleaning effect is improved.

Inventors

  • HE MIN

Assignees

  • 江西创科新材料科技有限公司

Dates

Publication Date
20260512
Application Date
20230828

Claims (6)

  1. 1. The utility model provides a cleaning equipment of aluminium nitride base plate, including bottom plate (1), mounting bracket (2) and liquid reserve tank (3), bottom plate (1) top is connected with mounting bracket (2), both sides all are connected with two liquid reserve tanks (3) that are used for storing pickling solvent and pure water around bottom plate (1) top, a serial communication port, still including contact frame (4), sliding seat (5), lifting frame (6), connecting spring (7), mounting panel (8), contact bar (9), lug (10), actuating unit, placing mechanism (13) and lifting mechanism (14), both sides all are connected with two contact frames (4) around top in mounting bracket (2), mounting bracket (2) upper portion interval slip type are connected with a plurality of sliding seat (5), all be connected with on sliding seat (5) and be used for driving aluminium nitride base plate reciprocates abluent lifting frame (6), all be connected with connecting spring (7) between lifting frame (6) and its adjacent sliding seat (5), lifting frame (6) bottom all is connected with mounting panel (8), both sides all are connected with contact bar (9) around (8) and contact bar (9) and contact bar (4) are used for in the extrusion process of contacting contact bar (4) to contact bar (4), the front side and the rear side of the sliding seat (5) are connected with the convex blocks (10), the driving assembly is used for driving the sliding seat (5) to rotate, the placing mechanism (13) is used for placing the aluminum nitride substrate, and the lifting mechanism (14) is used for lifting the aluminum nitride substrate for cleaning; The driving assembly comprises a first motor (11) and a synchronous belt assembly (12), the left side of the top of the mounting frame (2) is connected with the first motor (11), the synchronous belt assembly (12) is mounted on the upper portion of the mounting frame (2), a synchronous wheel on the left side of the synchronous belt assembly (12) is connected with an output shaft of the first motor (11), and a synchronous belt of the synchronous belt assembly (12) rotates to be in contact with the lug (10) so as to drive the lug (10) to rotate; the placement mechanism (13) comprises a connecting frame (131); Lifting mechanism (14) is including spacing ring (141), carriage (142), reset spring (143) and stay cord (144), and symmetry is connected with spacing ring (141) around all in connecting frame (131) lower part left and right sides, all is connected with on connecting frame (131) and is used for upwards lifting up carriage (142) with aluminium nitride base board, all is connected with reset spring (143) between spacing ring (141) and its adjacent carriage (142), all bilateral symmetry is connected with stay cord (144) between carriage (142) top and sliding seat (5) bottom.
  2. 2. The cleaning device for the aluminum nitride substrate according to claim 1, wherein the placing mechanism (13) further comprises a placing frame (132), limiting blocks (133), magnets (134), protruding plates (135), guide blocks (136) and limiting rods (137), the bottom of each mounting plate (8) is connected with the connecting frame (131), the placing frame (132) for placing the aluminum nitride substrate is connected with the connecting frame (131) in a sliding mode, multiple groups of limiting blocks (133) for limiting the aluminum nitride substrate are symmetrically connected in the placing frame (132), the number of each group of limiting blocks (133) is two, the front side and the rear side of the top of each connecting frame (131) are respectively connected with a magnet (134), the protruding plates (135) for limiting the placing frame (132) are respectively connected with the magnets (134) in a rotating mode, the protruding plates (135) are made of iron, the protruding plates (135) are respectively arranged on the front side and the rear side of each connecting frame (132), the tops of the limiting blocks (133) are respectively connected with the guide blocks (136) for guiding the aluminum nitride substrate, and the limiting rods (137) are respectively connected between the two limiting blocks (133) of the same group.
  3. 3. The cleaning device for the aluminum nitride substrate according to claim 1, further comprising a blowing mechanism (15) for air-drying the aluminum nitride substrate, wherein the blowing mechanism (15) comprises a mounting seat (151), a sliding plate (152), a second motor (153), a screw rod (154), a hollow frame (155) and an air pump (156), the mounting seat (151) is connected to the left rear side and the right front side of the top of the bottom plate (1), the sliding plate (152) is connected to the mounting seat (151) in a sliding manner, the second motor (153) is connected to the upper portion of the mounting seat (151), the screw rod (154) is connected to the output shaft of the second motor (153) in a threaded manner, the screw rod (154) is connected to the adjacent sliding plate (152) in a threaded manner, the bottom of the sliding plate (152) is connected to the hollow frame (155), the air pump (156) is connected to the air outlet of the air pump (156) and the hollow frame (155).
  4. 4. The cleaning device for aluminum nitride substrates according to claim 3, further comprising a shovel plate (16) for cleaning the top of the mounting frame (2), wherein the shovel plate (16) is symmetrically connected to the lower parts of the left side and the right side of the sliding seat (5), and the shovel plate (16) is contacted with the top of the mounting frame (2).
  5. 5. The cleaning apparatus according to claim 4, further comprising a pushing mechanism (17), wherein the pushing mechanism (17) comprises a fixed plate (171), a sliding rod (172), a connecting block (173), a compression spring (174) and a sloping plate (175), the top of the sliding plate (152) is connected with the fixed plate (171), the sliding rod (172) is connected to the fixed plate (171) in a sliding manner, one end of the sliding rod (172) far away from the fixed plate (171) is connected with the connecting block (173), the compression spring (174) is connected between the connecting block (173) and the adjacent fixed plate (171), the compression spring (174) is wound on the outer side of the sliding rod (172), one side of the connecting block (173) far away from the fixed plate (171) is symmetrically connected with two sloping plates (175) for pushing the connecting frame (131) to move and align, when the sliding plate (152) moves inwards, the fixed plate (171), the sliding rod (172), the connecting block (173) and the sloping plate (175) move inwards, when the sloping plate (175) contacts with the connecting frame (131) to push, the connecting frame (131) can be slightly connected with the hollow frame (131) to prevent the hollow frame (131) from moving, after the connecting frame (131) is aligned, the sliding rod (172), the connecting block (173) and the inclined plate (175) stop moving, the sliding plate (152) can drive the fixed plate (171) to move inwards continuously, the compression spring (174) compresses, and therefore the hollow frame (155) can move to the outer side of the connecting frame (131) accurately.
  6. 6. A cleaning method using the cleaning apparatus for aluminum nitride substrates according to any one of claims 1 to 5, comprising the steps of firstly placing a plurality of aluminum nitride substrates in a placing frame (132) in sequence, then driving a synchronous belt assembly (12) to rotate through a first motor (11), and driving a contact rod (9), the placing frame (132) and the aluminum nitride substrates to rotate, wherein the contact rod (9) is sequentially contacted with a plurality of protruding parts of a contact frame (4), so that the placing frame (132) and the aluminum nitride substrates in the contact frame can be driven to intermittently move up and down, the aluminum nitride substrates can be sequentially subjected to pickling by a pickling solvent and cleaning by pure water, and each time when a mounting plate (8) moves down, the sliding frame (142) can be driven to move up relative to the connecting frame (131), so that the aluminum nitride substrates in the placing frame (132) can be slightly lifted up, and the contact parts of the aluminum nitride substrates and the placing frame (132) can be cleaned.

Description

Cleaning equipment and method for aluminum nitride substrate Technical Field The invention relates to the technical field of aluminum nitride substrate cleaning, in particular to an aluminum nitride substrate cleaning device and an aluminum nitride substrate cleaning method. Background An aluminum nitride substrate is an insulating ceramic substrate having high thermal and electrical conductivity, which has a low expansion coefficient and high oxidation resistance, and thus is a suitable choice for various semiconductors. At present, when people wash aluminum nitride substrates, a special cleaning machine is generally used, and the cleaning machine can convey the aluminum nitride substrates through the rotation of rollers, so that the aluminum nitride substrates enter the cleaning machine to be cleaned. However, in the process of slowly moving the aluminum nitride substrate, the contact area between the aluminum nitride substrate and the cleaning agent in the cleaning machine is limited, and the bottom of the aluminum nitride substrate is in contact with the roller all the time, so that the bottom of the aluminum nitride substrate is difficult to clean, and the cleaning effect is poor. Disclosure of Invention In view of the above, the present invention provides a cleaning apparatus and a method for an aluminum nitride substrate, which can overcome the disadvantages that the contact area between the aluminum nitride substrate and the cleaning agent is limited, the bottom of the aluminum nitride substrate is difficult to clean, and the cleaning effect is poor when the existing cleaning machine is used for cleaning the aluminum nitride substrate. Technical proposal The utility model provides a cleaning equipment of aluminium nitride base plate, including the bottom plate, mounting bracket and liquid reserve tank, the bottom plate top is connected with the mounting bracket, both sides all are connected with two liquid reserve tanks that are used for storing pickling solvent and pure water around the bottom plate top, still including the contact frame, the sliding seat, the crane, connecting spring, the mounting panel, the contact rod, the lug, actuating assembly, placing mechanism and lifting mechanism, both sides all are connected with two contact frames around the top in the mounting bracket, mounting bracket upper portion interval sliding type is connected with a plurality of sliding seats, all sliding type is connected with the crane that is used for driving aluminium nitride base plate and reciprocates to wash on the sliding seat, all be connected with connecting spring between crane and its adjacent sliding seat, the crane bottom all is connected with the mounting panel, both sides all are connected with the contact rod around the mounting panel, the contact rod rotates and can be contacted with the contact frame, the contact frame is used for extrudeing the contact rod down to move, both sides all are connected with the lug around the sliding seat, actuating assembly is used for driving the sliding seat to rotate, placing mechanism is used for placing aluminium nitride base plate, lifting mechanism is used for lifting aluminium nitride base plate and washs. Preferably, the driving assembly comprises a first motor and a synchronous belt assembly, the left side of the top of the installation frame is connected with the first motor, the synchronous belt assembly is installed on the upper portion of the installation frame, the synchronous wheel on the left side of the synchronous belt assembly is connected with the output shaft of the first motor, and the synchronous belt of the synchronous belt assembly rotates to be in contact with the lug so as to drive the lug to rotate. Preferably, the placing mechanism comprises a connecting frame, placing frames, limiting blocks, magnets, convex plates, guide blocks and limiting rods, the bottom of the mounting plate is connected with the connecting frame, placing frames used for placing aluminum nitride substrates are connected in the connecting frame in a sliding mode, multiple groups of limiting blocks used for limiting the aluminum nitride substrates are connected in the placing frames in a vertical symmetrical mode, the number of each group of limiting blocks is two, the magnets are connected to the front side and the rear side of the top of the connecting frame, the convex plates used for limiting the placing frames are connected to the magnets in a rotating mode, the convex plates are made of iron, the convex plates are used for blocking the front side and the rear side of the placing frames, the guide blocks used for guiding the aluminum nitride substrates are connected to the top of the limiting blocks, and limiting rods used for limiting the aluminum nitride substrates are connected between the two limiting blocks of the same group. Preferably, the lifting mechanism comprises a limiting ring, a sliding frame, a reset spring and pull ropes, wherein the limiti