CN-117202741-B - Roll-to-roll slit coated perovskite thin film deposition equipment

CN117202741BCN 117202741 BCN117202741 BCN 117202741BCN-117202741-B

Abstract

The invention belongs to the technical field of solar photovoltaic, and particularly relates to roll-to-roll slit coating perovskite thin film deposition equipment. The equipment comprises an unreeling device, an ultraviolet ozone machine, a slit coating device, a drying and annealing device and a reeling device. The device comprises an unwinding driven wheel, a slit coating device, a drying and annealing device, a winding device and a winding device, wherein the unwinding device is an unwinding driven wheel, the slit coating device comprises a tensioning wheel and a slit coating machine, the drying and annealing device comprises an antisolvent gas air knife and a nitrogen air knife, the infrared annealing machine, and the winding device comprises a winding driving wheel. And guide rollers are respectively arranged between the unreeling device and the ultraviolet ozone machine and between the drying annealing device and the reeling device and used for tensioning and guiding the flexible film to run. According to the roll-to-roll slit coating perovskite thin film deposition equipment, the steps of preparing the perovskite solar cell from roll to roll are disassembled, and the functions of ozone, thin film deposition and annealing are realized independently, so that the stability and the simplicity of the equipment are improved, and the process error is reduced.

Inventors

YANG YINGGUO
CHENG LIWEI
YANG LIFENG
WANG AIMIN
JIN XIAOLAN

Assignees

复旦大学
上海熵朝科技有限公司

Dates

Publication Date: 20260512
Application Date: 20230825

Claims (7)

1. The roll-to-roll slit coating perovskite thin film deposition equipment is characterized by comprising an unreeling device, an ultraviolet ozone machine, a slit coating device, a drying annealing device and a reeling device, wherein the unreeling device is arranged from left to right, and the drying annealing device comprises: The unreeling device is an unreeling driven wheel and is used for winding the perovskite solar cell flexible film; the ultraviolet ozone machine is positioned on the right side of the unreeling device and is used for carrying out ozone treatment on the sexual film surface; The slit coating device comprises a tensioning wheel and a slit coater; the tensioning wheel consists of two large rollers on the same horizontal line and a small pressing roller positioned between the two large rollers and is used for realizing the tensioning function of the flexible film; the lower surface of the flexible film passes through the upper parts of the two large rollers, and the upper surface of the flexible film passes through the lower parts of the small pressing rollers and is pressed downwards by the small pressing rollers; The slit coater is a detachable part and is positioned right above the first large roller on the left side or above the second large roller, coating liquid is pre-filled in the slit coater, a peristaltic pump provides liquid outlet air pressure to control the liquid outlet amount of the coating liquid, the coating liquid flows out from a liquid outlet to reach the surface of the flexible film at a certain speed, and meanwhile, the flexible film moves rightwards at a certain speed, so that the liquid is uniformly spread on the surface of the flexible film; The drying annealing device comprises an antisolvent gas air knife, a nitrogen air knife and an infrared annealing machine, which are sequentially arranged on the right side of the slit coating device from left to right and are positioned right above the film; the method comprises the steps of firstly conveying a flexible film with liquid to the position right below an anti-solvent air knife station, continuously blowing anti-solvent air to the flexible film by the anti-solvent air knife, simultaneously keeping the flexible film to move rightwards to the position right below a nitrogen air knife station, continuously blowing high-purity nitrogen to the flexible film by the nitrogen air knife at a certain air pressure to ensure that the liquid on the flexible film is primarily volatilized and dried; The winding device is a winding driving wheel which is positioned at the rightmost side of the equipment and is used for winding the flexible film, and the winding driving wheel is controlled by a motor to operate; and a plurality of guide rollers are respectively arranged between the unreeling device and the ultraviolet ozone machine and between the drying annealing device and the reeling device, and are used for tensioning the flexible film on one hand and changing the running direction of the flexible film on the other hand so as to guide the flexible film at the former station to the latter station.
2. The roll-to-roll slot coated perovskite thin film deposition apparatus as claimed in claim 1, wherein the operational flow of the apparatus is as follows: the flexible film is fixed on the unreeling driven wheel and the reeling driving wheel at the two ends, and the reeling driving wheel is driven by a motor to drive the unreeling driven wheel, each guide wheel and the tensioning wheel, so that the flexible film moves from left to right; the method comprises the steps of enabling a flexible film to reach an ultraviolet ozone device station, enabling ultraviolet ozone to treat the surface of the flexible film, enabling the flexible film to reach a slit coating device station, enabling a slit coating device to uniformly deposit coating liquid on the surface of the flexible film, enabling the flexible film to reach a drying annealing device station, enabling anti-solvent air knives to promote liquid deposition, enabling nitrogen air knives to assist blowing and drying, enabling the flexible film to be further heated by an infrared annealing machine, and finally enabling the flexible film to be collected by a winding driving wheel.
3. The roll-to-roll slit coated perovskite thin film deposition apparatus as claimed in claim 2, wherein the movement speed of the flexible thin film substrate is controlled to be 20-60 mm/s.
4. The roll-to-roll slot coating perovskite thin film deposition equipment as claimed in claim 2, wherein the working range of the ultraviolet ozone machine is designed to be 20 x 30 cm 2 ~20*60 cm 2 , and the ultraviolet ozone effect is changed by adjusting the number and power of ultraviolet lamp tubes.
5. The roll-to-roll slit coating perovskite thin film deposition equipment according to claim 2, wherein the liquid outlet speed of the slit coater is controlled to be 40-250 ul/s, the deflection angle of the slit coater is 0 DEG in the vertical direction and 45 DEG left-right, and the distance between the liquid outlet of the slit coater and the flexible thin film is 10-200 um.
6. The roll-to-roll slit coating perovskite thin film deposition equipment as claimed in claim 2, wherein the deflection angle of the anti-solvent air knife and the nitrogen air knife is 0 ° in the vertical direction, 45 ° to the left and 45 ° to the right, and the air pressure is 0.05 to 0.2 MPa.
7. The roll-to-roll slit coated perovskite thin film deposition apparatus as claimed in claim 2, wherein the heating temperature of the infrared annealer is 80-150 ℃.

Description

Roll-to-roll slit coated perovskite thin film deposition equipment Technical Field The invention belongs to the technical field of solar photovoltaic, and particularly relates to roll-to-roll slit coating perovskite thin film deposition equipment. Background The perovskite photoelectric material is used as a star material in the photoelectric field, has excellent performance, low price and simple processing and manufacturing process, and thin film solar cells, light emitting devices, detectors and the like based on the perovskite material have breakthrough progress and show important application prospects. The photoelectric conversion efficiency of the perovskite thin film solar cell breaks through from 3.8% to more than 25.7% in a short period of 10 years, the efficiency of the double-junction perovskite solar cell exceeds 31%, and huge commercial potential is displayed, so that the industrial layout of the perovskite thin film solar cell is accelerated in the industry. Perovskite thin films are the core components in perovskite thin film devices, and perovskite thin film quality directly determines perovskite device performance. Solution spin coating is a conventional method for preparing perovskite films and devices by a solution method in a laboratory, and has high film quality and good controllability, but is only suitable for preparing small-area and small-batch perovskite films and devices, and does not match with large-area and large-batch industrialized manufacturing processes. The high-efficiency and large-batch preparation of high-quality uniform large-area perovskite thin films based on printing technology is an important way for promoting the industrialization of perovskite photoelectric devices. In the rapid advancement of perovskite solar cells toward commercialization, roll-to-roll printing processes (R2R) have shown attractive promise due to their rapid mass production. The advantages of R2R printing, such as volume, stability and repeatability, are well documented in organic solar cells. The preparation process of the perovskite solar cell comprises etching, cleaning, drying, coating, drying and re-etching, and when the processes are integrated on a set of R2R equipment, the equipment becomes larger, the flexible film is longer, so that errors caused in the preparation process are obviously amplified, and more severe requirements are also provided for the research and development of the equipment. Disclosure of Invention The invention aims to provide roll-to-roll slit coating perovskite film deposition equipment with good stability and small process error. According to the roll-to-roll slit coating perovskite thin film deposition equipment provided by the invention, the existing perovskite solar cell preparation process is disassembled, and the functions of ozone, thin film deposition and annealing are realized independently, so that the stability and the simplicity of the equipment are improved, and smaller process errors are ensured. The structure of the device is shown in fig. 1, and specifically comprises an unreeling device, an ultraviolet ozone machine, a slit coating device, a drying annealing device and a reeling device which are arranged from left to right, wherein: The unreeling device is an unreeling driven wheel and is used for winding the perovskite solar cell flexible film; the ultraviolet ozone machine is positioned on the right side of the unreeling device and is used for carrying out ozone treatment on the sexual film surface; The slit coating device comprises a tensioning wheel and a slit coater; the tensioning wheel consists of two large rollers on the same horizontal line and a small pressing roller positioned between the two large rollers and is used for realizing the tensioning function of the flexible film, wherein the lower surface of the flexible film passes over the two large rollers, and the upper surface of the flexible film passes under the small pressing roller and is pressed downwards by the small pressing roller; The slit coater is a detachable flexible component, can be positioned right above a first large roller on the left side and can also be positioned above a second large roller, wherein coating liquid is pre-filled in the slit coater, liquid outlet air pressure is provided by a peristaltic pump to control the liquid outlet amount of the coating liquid, the coating liquid flows out from a liquid outlet to reach the surface of a flexible film at a certain speed, and meanwhile, the flexible film moves rightwards at a certain speed, so that the liquid is uniformly paved on the surface of the flexible film; The drying annealing device comprises an antisolvent gas air knife, a nitrogen air knife and an infrared annealing machine, which are sequentially arranged on the right side of the slit coating device from left to right and are positioned right above the film; the method comprises the steps of firstly conveying a flexible film with liquid to the positio