Search

CN-117227148-B - Exhaust jig device and method for restraining warping of carrier plate by utilizing gas pressurization

CN117227148BCN 117227148 BCN117227148 BCN 117227148BCN-117227148-B

Abstract

The invention discloses an exhaust jig device and method for inhibiting warping of a carrier plate by utilizing gas pressurization, comprising the steps of placing an exhaust jig containing the carrier plate in a gas pressurization cavity, enabling the upper contact surface of a plurality of holes of the exhaust jig to be provided with a first surface for placing the carrier plate, and enabling the exhaust jig to be vacuumized to fix the carrier plate, wherein the exhaust jig can be formed by combining a detachable upper contact part and a detachable lower base part in a jogged structure, and the gas pressurization cavity is pressurized by the gas so as to form a pressure difference between the first surface and the second surface of the carrier plate, thereby pressing the carrier plate on the exhaust jig, pressurizing the gas pressurization cavity to a preset pressure which is larger than standard atmospheric pressure for thermal processing, simulating or actually measuring the first surface of the carrier plate to obtain a geometric curved surface, and processing the upper contact surface into an inverse geometric curved surface so as to offset thermal stress, and shaping the carrier plate into a carrier plate which tends to be flat.

Inventors

  • Hong Zhahong

Assignees

  • 印能科技股份有限公司

Dates

Publication Date
20260505
Application Date
20230315
Priority Date
20220615

Claims (10)

  1. 1. An exhaust jig device for suppressing warpage of a carrier plate by pressurizing gas, comprising: A carrier plate having an upper face and a lower face, the upper face and the lower face being opposite to each other; an exhaust jig having an upper contact surface including a plurality of holes, one of the upper and lower surfaces of the carrier plate facing the upper contact surface and being placed and fixed on the upper contact surface, wherein the upper or lower surface of the carrier plate facing the upper contact surface is defined as a first surface and the other surface thereof is defined as a second surface, a gas pressurizing chamber for pressurizing gas, and the exhaust jig located in the gas pressurizing chamber for exhausting gas to form a pressure difference between the first and second surfaces of the carrier plate, thereby pressing the carrier plate on the exhaust jig, wherein the gas pressurizing chamber is pressurized to a predetermined pressure greater than a standard atmospheric pressure, characterized in that: The exhaust jig comprises a component formed by combining an upper contact part and a lower base part, wherein the surface of the upper contact part is the upper contact surface, the upper contact part is of a detachable design, the first surface of the carrier plate after the previous hot processing is simulated or actually measured to obtain surface data, and relevant data corresponding to the flat, concave, convex, concave and the like are processed on the upper contact surface according to the surface data, so that the thermal stress of the carrier plate can be counteracted during the subsequent hot processing, and the carrier plate after the hot processing is a carrier plate which tends to be flat.
  2. 2. The exhaust jig device for suppressing warpage of a carrier plate by pressurizing gas according to claim 1, wherein a fitting portion of a fitting structure is provided downward at a periphery of the upper contact portion, a fitting groove of the fitting structure is provided at the lower base portion corresponding to the fitting portion, the fitting portion is capable of being fitted and sealed to the fitting groove, and an O-ring is provided between the fitting portion and the fitting groove.
  3. 3. The exhaust jig apparatus according to claim 1, wherein the first surface of the carrier is a concave surface and the upper contact surface of the upper contact portion is a convex surface.
  4. 4. The exhaust jig apparatus according to claim 1, wherein the first surface of the carrier is a convex surface and the upper contact surface of the upper contact portion is a concave surface.
  5. 5. The exhaust jig device for suppressing warpage of a carrier by pressurizing gas according to claim 1, wherein the first surface of the carrier is a wave curved surface, and the upper contact surface of the upper contact portion is an inverse wave curved surface.
  6. 6. The exhaust jig apparatus according to claim 1, wherein the first surface of the carrier is an irregular curved surface, and the upper contact surface of the upper contact portion is an anti-irregular curved surface.
  7. 7. The exhaust jig apparatus according to claim 1, wherein at least one heat-resistant sealing layer is disposed between the first surface of the carrier and the upper contact surface of the exhaust jig, wherein the heat-resistant sealing layer partially covers or does not cover the hole.
  8. 8. The exhaust jig apparatus for suppressing warpage of a carrier board by pressurizing gas as claimed in claim 7, wherein the heat-resistant sealing layer is capable of withstanding a processing temperature of 40 ℃ or more and 1200 ℃ or less.
  9. 9. The exhaust jig apparatus according to claim 1, wherein the carrier is at least one of a printed circuit board, a substrate, a conductive support, a wafer, a silicon interposer, a package, and a flat panel with circuit wiring.
  10. 10. A method for suppressing warpage of carrier plate by gas pressurization includes such steps as measuring the surface data of the deformed carrier plate after the deformation of the first surface of carrier plate by thermal processing, or calculating the surface data of the deformed carrier plate after the deformation of the first surface of carrier plate by simulated thermal processing; preparing an exhaust jig with a detachable upper contact part, processing relevant data corresponding to the flat, concave, convex, concave and the like on the upper contact surface according to the surface data by a processing machine, placing the exhaust jig containing the carrier plate in a gas pressurizing cavity, placing the first surface of the carrier plate on the upper contact surface with a plurality of holes, pressurizing the gas pressurizing cavity, exhausting the exhaust jig to form a pressure difference between the first surface of the carrier plate and the second surface of the carrier plate, pressing the carrier plate on the exhaust jig, pressurizing the gas pressurizing cavity to a preset pressure which is larger than the standard atmospheric pressure, and counteracting the thermal stress of the carrier plate after the thermal processing to ensure that the carrier plate is a carrier plate which tends to be flat.

Description

Exhaust jig device and method for restraining warping of carrier plate by utilizing gas pressurization Technical Field The invention relates to the technical field of exhaust tools, in particular to an exhaust tool device and a method for inhibiting the warpage of a carrier plate by utilizing gas pressurization, the contact surface on the exhaust jig is processed into a carrier plate, and the reverse curvature surface or reverse wave surface of the curvature surface or wave surface is simulated or actually measured so as to counteract the thermal stress of the carrier plate and tend to be flat. Background It is considered that warpage of the package is caused by differences in thermal expansion coefficients of materials in the package. To solve this warpage problem, the application No. TW100146868, a carrier fixing method using gas pressurization to suppress warpage of the carrier, provides a solution. Referring to fig. 1 and 2, the above-mentioned prior art patent comprises a carrier plate 1 having upper and lower surfaces 1b, 1c, the upper and lower surfaces 1b, 1c being opposite to each other. An exhaustable tool 3, the exhaustable tool 3 having a hole surface 3a comprising a plurality of holes 5. One of the upper and lower surfaces 1b, 1c of the carrier plate 1 is faced to the hole surface 3a and placed on the hole surface 3a. The exhaustion jig 3 is vacuum-exhausted to fix the carrier plate 1 on the exhaustion jig 3. The carrier 1 is fixed on the hole surface 3a by a pressing plate capable of avoiding the effective area on the carrier 1. The evacuable fixture 3 containing the carrier plate 1 is placed in a gas plenum chamber 20. The gas pressurizing chamber 20 is pressurized to form a pressure difference between the first surface and the second surface of the carrier plate 1, so as to generate a pressing force 22, thereby pressing the carrier plate 1 on the exhaustion jig 3, wherein the gas pressurizing chamber 20 is pressurized to a predetermined pressure greater than the standard atmospheric pressure. This predetermined pressure is in the range between 1atm (kg/cm 2) and about 30atm (kg/cm 2). After the pressure in the gas pressurizing chamber 20 reaches the predetermined pressure, the exhaust of the exhaustion jig 3 is closed, and the carrier plate 1 is pressed on the exhaustion jig 3 through the high air pressure difference. At least one heat-resistant sealing layer 11 may be disposed between the first surface of the carrier 1 and the hole surface 3a of the exhaustion jig 3, wherein the heat-resistant sealing layer 11 does not cover the holes 5 of the hole surface 3a. The heat-resistant sealing layer 11 can withstand a treatment temperature of 40 ℃ or more and 300 ℃ or less, for example. The carrier plate 1 having the warpage portion 1a is placed on the exhaustion jig 3. The upper surface 1b or the lower surface 1c of the carrier plate 1 may be a first surface or a second surface. The exhaustion tool 3 may have a hole surface 3a and the gas channel 7 generates a gas flow path 21. The aperture face 3a may comprise a plurality of apertures 5. The gas channel 7 is coupled to a venting device 9, which venting device 9 may be a general venting pump or a vacuum pump or a venting channel switch. The carrier plate 1 is tightly pressed on the exhaustion jig 3 by the pressure 22 generated by the pressure difference between the gas flow paths 21 from the gas pressurizing chamber 20 to the hole surface 3A and the hole 5, so as to resist the warpage of the carrier plate 1 caused by uneven thermal expansion at high temperature. The above-mentioned prior art keeps the carrier plate 1 flat under pressure, but the thermal stress still exists in the carrier plate 1 and is not completely eliminated, so the thermal stress still deforms the carrier plate 1 when the pressure disappears. Therefore, in order to solve the above-mentioned problems of the prior art, it is desirable to develop an innovative structure with more ideal practicability, and the related industries should try to develop the breakthrough targets and directions. Disclosure of Invention The invention mainly aims to provide an exhaust jig device and an exhaust jig method for suppressing the warpage of a carrier plate by utilizing gas pressurization, wherein the upper contact surface of the exhaust jig can be processed into an anti-curvature surface or an anti-wave surface corresponding to the simulated or actually measured curvature surface or wave surface of the carrier plate so as to offset the thermal stress of the carrier plate and enable the carrier plate to be flat. In order to achieve the above object, the present invention provides an exhaust jig device for suppressing warpage of a carrier by pressurizing gas, comprising a carrier having an upper surface and a lower surface, wherein the upper surface and the lower surface are opposite to each other; an exhaust jig having an upper contact surface including a plurality of holes; one of the upper a