CN-117238549-B - Collimation device and packaging method

CN117238549BCN 117238549 BCN117238549 BCN 117238549BCN-117238549-B

Abstract

The invention provides a collimation device and a preparation method thereof, wherein the collimation device comprises a first substrate, a second substrate and a sealing material, the first substrate is provided with a first sealing surface, the second substrate is provided with a second sealing surface, the sealing material is arranged on the first sealing surface and/or the second sealing surface, the sealing material is solidified to form a borate glass sealing layer, so that the first sealing surface and the second sealing surface are sealed by the sealing material, the sealing material comprises silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate and water, and the sealing material is in a fluid state before solidification.

Inventors

WANG XUCHENG
WU CHONG
DONG GONGXUN
LIANG YUHANG
YU XINGXIN
QU QIUZHI

Assignees

凯瑟斯技术(杭州)有限公司

Dates

Publication Date: 20260512
Application Date: 20230914

Claims (10)

1. A collimation device for collimating an atomic beam, the collimation device comprising: a first substrate having a first sealing surface; A second substrate having a second sealing surface, and The sealing material is arranged on the first sealing surface and/or the second sealing surface, and the sealing material is solidified to form a borate glass sealing layer so that the first sealing surface and the second sealing surface are sealed through the sealing material; the sealing material comprises silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate and water, and is in a fluid state before solidification; The sealing material comprises 10-60 parts by weight of SiO 2 , 20-45 parts by weight of Al 2 O 3 , 0-8 parts by weight of MgO, 0-3 parts by weight of CaO, 1-10 parts by weight of Na 2 CO 3 , 0-10 parts by weight of K 2 O and 1-10 parts by weight of B 2 O 3 , wherein the mixed powder is used for forming a borate glass sealing layer, and the components in the mixed powder are all inorganic materials.
2. The collimating device of claim 1, wherein each of MgO, caO, and K 2 O in the mixed powder is greater than 0 by weight.
3. The collimating device of claim 1 or 2, further comprising: Adding absolute ethyl alcohol into the mixed powder, grinding the mixed powder once, wherein the mol ratio of the mixed powder to the absolute ethyl alcohol is 1:1, and And (3) drying the mixed powder after primary grinding treatment, mixing the dried mixed powder with deionized distilled water according to a weight ratio of 1:1, adding a dispersing agent, carrying out secondary grinding treatment, and discharging to obtain the sealing material.
4. A collimating device as claimed in claim 3, characterized in that the dispersing agent is sodium stearate and polyethylene glycol.
5. The collimating device of claim 4, wherein the curing temperature in the sealing material is 200-800 ℃.
6. The alignment device of claim 1, wherein at least one of the first substrate and the second substrate is etched to form a micro-groove pattern, the micro-groove pattern being an alignment channel of the alignment device after the first sealing surface and the second sealing surface are sealed.
7. A method of packaging a collimator for atomic beam collimation, the method comprising: providing a first substrate and a sealing material, and coating the sealing material on a first sealing surface of the first substrate; Providing a second substrate, and covering a second sealing surface of the second substrate on the first sealing surface coated with the sealing material to form a temporary combination; Placing the temporary combination body in a high-temperature furnace, controlling the furnace temperature to be 200-800 ℃, solidifying the sealing material to form a borate glass sealing layer, and sealing the first sealing surface and the second sealing surface through the sealing material to form the collimation device; the sealing material comprises silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate and water, and is in a fluid state before solidification; The sealing material is prepared by weighing 10-60 parts by weight of SiO 2 , 20-45 parts by weight of Al 2 O 3 , 0-8 parts by weight of MgO, 0-3 parts by weight of CaO, 1-10 parts by weight of Na 2 CO 3 , 0-10 parts by weight of K 2 O and 1-10 parts by weight of B 2 O 3 according to weight percentage, and mixing to form mixed powder, wherein each component in the mixed powder is made of inorganic materials.
8. The packaging method of claim 7, wherein preparing the sealing material further comprises, Adding absolute ethyl alcohol into the mixed powder according to the mol ratio of the mixed powder to the absolute ethyl alcohol of 1:1, grinding the mixed powder in a ball mill, and And filtering the mixed powder after being treated by the ball mill, drying, mixing the dried mixed powder with deionized distilled water according to the weight ratio of 1:1, adding a dispersing agent, grinding the mixture in the ball mill again, and discharging to obtain the sealing material.
9. The packaging method of claim 8, further comprising: polishing the first sealing surface, and coating the sealing material on the polished first sealing surface; And polishing the second sealing surface, and combining the polished second sealing surface with the first sealing surface coated with the sealing material.
10. The packaging method of claim 8, further comprising: Etching the first substrate to form a first micro-groove pattern, the first micro-groove pattern and the first sealing surface being positioned on the same side of the thickness direction of the first substrate, and/or Etching the second substrate to form a second micro-groove pattern, wherein the second micro-groove pattern and the second sealing surface are positioned on the same side of the thickness direction of the second substrate; After the first sealing surface and the second sealing surface are sealed by the sealing material, the first micro-groove pattern and/or the second micro-groove pattern are used as a collimation channel of the collimation device.

Description

Collimation device and packaging method Technical Field The invention relates to the field of atomic clocks in general, in particular to a collimation device and a packaging method. Background Along with the development of theory and technology, atomic vapor can be precisely controlled to perform various scientific researches and industrial productions, such as microchip, space atomic clock, precise measurement, quantum information and quantum simulation, etc. The atomic vapor in the natural state is subjected to Boltzmann distribution, and the movement of the atomic vapor is disordered and difficult to control and apply. The efficient and stable generation of various collimated atomic beams by the atomic beam collimator is the basis of the above application, so there is a great market demand for developing the atomic beam collimator. The traditional atomic beam collimator is manufactured by adopting bonding technology (such as anodic bonding, thermocompression bonding, eutectic bonding or high-temperature diffusion bonding, etc.), and the method has the following disadvantages: 1. The bonding scene is single, the materials to be sealed are more critical (for example, the materials to be sealed are required to be resistant to acid and alkali, have strong stability and do not react with active atoms, the transmittance in ultraviolet and infrared wave bands is required to be high, for example, materials such as quartz, sapphire and the like, the sealing surface is required to be stable enough, and no organic materials exist), the adaptability is limited, 2, the conventional bonding process has higher requirements on the earlier processing of the bonding surface, the final bonding yield is not easy to control the operability, 3, the process difficulty is relatively high, the operation environment is required to be higher, 4, the cost is higher, 5, the corresponding oxygen isolation treatment is required to prevent oxidation during bonding, the process complexity is further increased, 6, the soldering flux is required to be properly used during bonding, and the potential pollution risk is caused. In addition, the traditional bonding process has the following problems in an application scene of the atomic beam device preparation that the bonding yield of materials to be bonded in a large area is low, the cost is high, the bonding strength is low, the selection of materials is strict, and the materials with excellent ultraviolet and infrared transmittance such as quartz and sapphire cannot be effectively bonded. In view of the foregoing, there is a need to propose a new collimating device and packaging method to overcome the above-mentioned problems. Disclosure of Invention The invention provides a collimation device, which comprises a first substrate, a second substrate and a sealing material, wherein the first substrate is provided with a first sealing surface, the second substrate is provided with a second sealing surface, the sealing material is arranged on the first sealing surface and/or the second sealing surface, the sealing material is solidified to form a borate glass sealing layer, so that the first sealing surface and the second sealing surface are sealed by the sealing material, and the sealing material comprises silicon dioxide, alkali metal oxide, alkaline earth metal oxide, carbonate and water, and is in a fluid state before solidification. In one embodiment, the silicon dioxide, the alkali metal oxide, the alkaline earth metal oxide and the carbonate in the sealing material form mixed powder, the mixed powder is used for forming a borate glass sealing layer, and the weight percentages of the components in the mixed powder are 20-45 parts by weight of Al 2O3, 0-8 parts by weight of MgO, 0-3 parts by weight of CaO, 1-10 parts by weight of Na 2CO3, 0-10 parts by weight of K 2 O and 1-10 parts by weight of B 2O3. In one embodiment, the mixed powder contains MgO, caO and K 2 O in an amount of more than 0 parts by weight. In one embodiment, the sealing material is prepared by adding absolute ethyl alcohol into the mixed powder, carrying out primary grinding treatment on the mixed powder, wherein the molar ratio of the mixed powder to the absolute ethyl alcohol is 1:1, drying the mixed powder after the primary grinding treatment, mixing the dried mixed powder with deionized distilled water according to the weight ratio of 1:1, adding a dispersing agent, carrying out secondary grinding treatment, and discharging. In one embodiment, the dispersing agent is sodium stearate and polyethylene glycol. In one embodiment, the curing temperature in the sealing material is 200-800 ℃. In an embodiment, at least one of the first substrate and the second substrate is etched to form a micro-groove pattern, and after the first sealing surface and the second sealing surface are sealed, the micro-groove pattern is a collimating channel of the collimating device. The invention also provides a packaging method of the colli