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CN-117262711-B - Mask plate supporting device and mask plate carrying device

CN117262711BCN 117262711 BCN117262711 BCN 117262711BCN-117262711-B

Abstract

The invention relates to the field of carrying and discloses a mask plate supporting device and a mask plate carrying device, wherein the mask plate supporting device comprises a bracket, a left sliding mechanism, a right sliding mechanism, a left supporting component and a right supporting component, the left supporting component is arranged on the left sliding mechanism, the right supporting component is arranged on the right sliding mechanism, the left sliding mechanism drives the left sliding component to reciprocate along the left-right direction, the right sliding mechanism drives the right sliding component to reciprocate along the left-right direction, the left supporting component is used for supporting the left bottom surface of a mask plate, and the right sliding component is used for supporting the right bottom surface of the mask plate. The invention can ensure that the mask plate is fully flattened after being carried.

Inventors

  • LIU HUI
  • DENG GUOJUN
  • ZHOU TIANLIN
  • CHEN RUI
  • LING LIMIN

Assignees

  • 季华实验室

Dates

Publication Date
20260512
Application Date
20230912

Claims (8)

  1. 1. The mask support device comprises a support (1) and is characterized by further comprising a left sliding mechanism (2), a right sliding mechanism (3), a left supporting component (4) and a right supporting component (5), wherein the left supporting component (4) is arranged on the left sliding mechanism (2), the right supporting component (5) is arranged on the right sliding mechanism (3), the left sliding mechanism (2) drives the left supporting component to reciprocate along the left and right directions, the right sliding mechanism (3) drives the right supporting component to reciprocate along the left and right directions, the left supporting component (4) is used for supporting the left bottom surface of a mask (9), the right sliding component is used for supporting the right bottom surface of the mask (9), the left sliding mechanism (2) comprises a left sliding block (22), the left supporting component (4) comprises a supporting block (41), a guide rail (42), a connecting shaft (43), a swing arm (44) and a sliding piece (45), the guide rail (42) is arranged on the support (1), the sliding piece (45) is matched with the guide rail (42) to be connected with the left sliding block (42) in a penetrating mode, and the left sliding piece (42) is connected with the shaft hole (43) in a rotating mode along the shaft hole, the support block (41) is fixed on the connecting shaft (43), the sliding piece (45) is fixedly connected with the connecting shaft (43) through a swing arm (44), the guide rail (42) extends obliquely upwards from left to right, the guide rail (42) comprises a horizontal section (421) and an arc-shaped section (422), the horizontal section (421) is arranged on the left side of the arc-shaped section (422), the horizontal section (421) and the arc-shaped section (422) are mutually communicated, and an arc opening of the arc-shaped section (422) faces to the upper left.
  2. 2. Mask support device according to claim 1, characterized in that the bracket (1) comprises a rectangular frame (11) and a support plate (12), wherein the rectangular frame (11) is fixed on the support plate (12), and a light hole is formed in the middle of the support plate (12).
  3. 3. The mask support device according to claim 1, wherein the left sliding mechanism (2) further comprises a left electric push rod (21), the left electric push rod (21) is fixed on the bracket (1), the left electric push rod (21) drives the left sliding block (22) to reciprocate along the left-right direction, and the left supporting component (4) is arranged on the left sliding block (22).
  4. 4. A reticle support according to claim 3, wherein the left slide mechanism (2) further comprises a left slide rail (23), the left slide rail (23) being fixed to the frame (1).
  5. 5. Mask plate (9) supporting device according to claim 1, characterized in that the top surface of the supporting block (41) is provided with a groove (410), and the inner wall of the groove (410) is provided with a suction hole (411).
  6. 6. Mask support device according to claim 1, characterized in that two left support assemblies (4) are provided, two left sliding mechanisms (2) are provided, and the two left sliding mechanisms (2) drive the left support assemblies (4) to slide left and right in a one-to-one correspondence manner.
  7. 7. The mask support device according to any one of claims 1 to 6, wherein the right sliding mechanism (3) and the right support assembly (5) are respectively arranged in mirror images with the left sliding mechanism (2) and the left support assembly (4).
  8. 8. The mask plate carrying device comprises a sucker (6) and a triaxial movement mechanism, and is characterized by further comprising the mask plate supporting device according to any one of claims 1-7, wherein the sucker (6) is arranged on the triaxial movement mechanism, the triaxial movement mechanism drives the sucker (6) to move along the up-down direction, the left-right direction and the front-back direction, the sucker (6) is used for adsorbing the middle part of the mask plate (9), and the length of the sucker (6) extends along the front-back direction.

Description

Mask plate supporting device and mask plate carrying device Technical Field The invention relates to the field of carrying, in particular to a mask plate supporting device and a mask plate carrying device. Background And carrying the mask plate, namely adsorbing and lifting the middle part of the top surface of the mask plate by adopting a sucker, and carrying the mask plate to a required position. However, the larger the size of the current mask is to meet the use requirements of people, such as the larger requirements of people on display screens. When carrying the great mask of size, adsorb the middle part of mask through the sucking disc, behind the assigned position is carried to the mask, adsorb the mask through adding the vacuum adsorption device that can vertical absorption on the position that the mask needs to be placed, appear the offset when avoiding the mask to put down. However, under the action of gravity, the sagging phenomenon easily occurs at two ends of the mask, and the sagging degree of the mask with different sizes is different, and after the mask is adsorbed, the mask may not be flattened, and the flattening degree of the mask with different sizes is different, so that the difference occurs between the pattern side of the mask M and the exposure side of the substrate P, and the pattern is defective, so that the overlay accuracy is reduced. Disclosure of Invention The technical problem to be solved by the invention is to solve at least one technical problem set forth above. The invention solves the technical problems as follows: The utility model provides a mask strutting arrangement, includes support, left sliding mechanism, right sliding mechanism, left supporting component and right supporting component, left supporting component sets up on the left sliding mechanism, right supporting component sets up on the right sliding mechanism, left sliding mechanism drives left sliding component is along controlling direction reciprocating motion, right sliding mechanism drives right sliding component is along controlling direction reciprocating motion, left supporting component is used for supporting the left side bottom surface of mask, right sliding component is used for supporting the right side bottom surface of mask. As a further improvement of the technical scheme, the support comprises a rectangular frame and a support plate, wherein the rectangular frame is fixed on the support plate, and the middle part of the support plate is provided with a light hole. As a further improvement of the technical scheme, the left sliding mechanism comprises a left electric push rod and a left sliding block, the left electric push rod is fixed on the support, the left electric push rod drives the left sliding block to reciprocate along the left-right direction, and the left supporting component is arranged on the left sliding block. As a further improvement of the technical scheme, the left sliding mechanism further comprises a left sliding rail, and the left sliding rail is fixed on the bracket. As a further improvement of the technical scheme, the left support assembly comprises a support block, a guide rail, a connecting shaft, a swing arm and a sliding piece, wherein the guide rail is arranged on the support, the sliding piece is connected with the guide rail in a sliding fit manner, a shaft hole along the front-back direction is formed in the left sliding block, the connecting shaft is inserted into the shaft hole, the connecting shaft and the shaft hole can rotate relatively, the support block is fixed on the connecting shaft, the sliding piece is fixedly connected with the connecting shaft through the swing arm, and the guide rail extends upwards obliquely from left to right. As a further improvement of the technical scheme, the guide rail comprises a horizontal section and an arc-shaped section, wherein the horizontal section is arranged on the left side of the arc-shaped section, the horizontal section is communicated with the arc-shaped section, and an arc opening of the arc-shaped section faces to the upper left. As a further improvement of the technical scheme, the top surface of the supporting block is provided with a groove, and the inner wall of the groove is provided with a suction hole. As a further improvement of the technical scheme, two left support assemblies are arranged, two left sliding mechanisms are arranged, and the left support assemblies are driven to slide left and right in a one-to-one correspondence mode. As a further improvement of the technical scheme, the right sliding mechanism and the right supporting component are respectively arranged in a mirror image mode with the left sliding mechanism and the left supporting component. The invention also provides a mask plate carrying device which comprises a sucker, a triaxial moving mechanism and the mask plate supporting device in any technical scheme, wherein the sucker is arranged on the triaxial moving mechanism, the tr