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CN-117286467-B - Multi-element composite carbide coating

CN117286467BCN 117286467 BCN117286467 BCN 117286467BCN-117286467-B

Abstract

The chemical components of the multi-element composite carbide coating comprise carbide forming elements, non-carbide forming elements and non-metal elements, wherein the carbide forming elements are Cr, W and Mo elements, the non-carbide forming elements are Cu elements, the non-metal elements are Si and C, the bearing steel matrix is firstly cleaned and then subjected to magnetron sputtering during preparation, so that the multi-element composite carbide coating is obtained on the surface of the bearing steel matrix, the magnetron sputtered target is an integrated co-sputtering target, the integrated co-sputtering target is favorable for the components and tissues in the uniform coating, the integrated co-sputtering target comprises a Cr target, a W target, a Cu target, a Si target and a Mo target, and the reaction gas of the magnetron sputtering is a mixture of shielding gas and gaseous hydrocarbon and is used for vapor deposition. The multi-element composite carbide coating prepared by the invention has the advantages of high hardness, high wear resistance, high toughness, low friction coefficient, low stress and high coating-matrix binding force.

Inventors

  • XU XUEYUAN
  • CHEN YU
  • GAO XIN
  • Xiong Caizi
  • LI XUYONG
  • LI QIONG
  • WU NING
  • HUANG YONG
  • ZHANG DONGSHENG
  • HU ZHONGQING
  • XIA YUAN
  • MAO PINGPING

Assignees

  • 江西洪都航空工业集团有限责任公司

Dates

Publication Date
20260512
Application Date
20230927

Claims (9)

  1. 1. A multi-element composite carbide coating is characterized by comprising carbide forming elements, non-carbide forming elements and nonmetallic elements, wherein the carbide forming elements are Cr, W and Mo elements, the non-carbide forming elements are Cu elements, the nonmetallic elements are Si and C, the mole ratio of the sum of Cr, W, mo, cu and Si elements to the C element is 1:1-2, and the mole ratio of Cr to Si is 0.8-1.2:0.8-1.2; the multi-element composite carbide coating is prepared by adopting a vacuum magnetron sputtering system, wherein the vacuum magnetron sputtering system comprises a vacuum chamber, a magnetron sputtering source provided with an integrated co-sputtering target, an ion source and a workpiece support for bearing a bearing steel matrix, and the workpiece support is arranged at the inner center of the vacuum chamber, and comprises the following specific steps: (1) Firstly polishing a bearing steel matrix, then cleaning and drying, then mounting the dried bearing steel matrix on a workpiece support, pumping the vacuum degree of a vacuum chamber to below 2.0 multiplied by 10 -3 Pa by using a molecular pump, and then introducing high-purity argon gas to maintain the air pressure of the vacuum chamber; (2) The integrated co-sputtering targets in the magnetron sputtering source comprise Cr targets, W targets, cu targets, si targets and Mo targets, the magnetron sputtering source is started, protective gas is introduced into the magnetron sputtering source, reactive gas with a certain partial pressure ratio is introduced into the ion source, and magnetron sputtering and vapor deposition are carried out on the bearing steel matrix with the bias voltage set completed; The purities of the Cr target, the W target, the Cu target, the Si target and the Mo target are all more than 99.99%, the sputtering power of the Cr target is 200-300W, the sputtering power of the W target is 180-280W, the sputtering power of the Cu target is 180-240W, the sputtering power of the Si target is 280-320W, the sputtering power of the Mo target is 200-250W, and the bias voltage of the bearing steel matrix is-80 to-600V; (3) And (3) after the step (2) is finished, turning off the power supply, and opening the vacuum chamber to take out the bearing steel substrate when the temperature of the vacuum chamber is reduced to the room temperature, wherein the coating formed on the surface of the bearing steel substrate is the multi-element composite carbide coating.
  2. 2. The multi-component composite carbide coating according to claim 1, wherein the molar ratio of Cr to W is 0.8-1.2:0.8-1.2.
  3. 3. The multi-component composite carbide coating according to claim 1, wherein the molar ratio of Cr to Mo is 0.8-1.2:0.8-1.2.
  4. 4. The multi-component composite carbide coating according to claim 1, wherein the molar ratio of Cr to Cu is 0.8-1.2:0.8-1.2.
  5. 5. The multi-component composite carbide coating according to claim 1, wherein the thickness of the multi-component composite carbide coating is 0.5-10 μm, and the structure is an amorphous structure.
  6. 6. The multi-component composite carbide coating as claimed in claim 1, wherein in step (1), the bearing steel substrate comprises carbon steel, stainless steel, high strength steel, bearing steel, titanium alloy, aluminum alloy, magnesium alloy or cemented carbide.
  7. 7. The multi-component composite carbide coating according to claim 1, wherein in the step (2), the shielding gas is argon, the purity of the argon is 99.99%, and the flow rate of the argon introduced into the vacuum chamber is 20-60 sccm.
  8. 8. The multi-component composite carbide coating according to claim 1, wherein in the step (2), the reaction gas is a mixed gas of a shielding gas and a gaseous hydrocarbon, the gas partial pressure ratio of the gaseous hydrocarbon to the shielding gas is 2-4:6-8, the shielding gas is argon, the gaseous hydrocarbon is methane, and the gas flow of the reaction gas is 5-60 sccm.
  9. 9. The multi-component composite carbide coating according to claim 1, wherein in the step (2), the magnetron sputtering temperature is 250-350 ℃, and the magnetron sputtering time is 100-200 min.

Description

Multi-element composite carbide coating Technical Field The invention relates to the technical field of material surface coating, in particular to a multi-element composite carbide coating. Background The metal carbide has the characteristics of metal materials and ceramic materials, has the characteristics of metallic luster, conductivity, high melting point, high hardness and wear resistance, and is further widely applied to various fields. For example, chromium carbide has high hardness at high temperature as the metal carbide with the strongest oxidation resistance, and the tungsten carbide film prepared by the magnetron sputtering method has high hardness of 38GPa, and has wide application prospect in the wear-resistant coating of bearings and hard alloy cutting tools with high temperature and high load. However, the metal carbide has high brittleness and insufficient toughness, the impurity gas in the cavity is easy to infiltrate into the inner part or boundary of the film crystal grains in the magnetron sputtering process, the working gas also enters the film layer due to factors such as collision to form a Schottky defect or interstitial atoms, so that the grain boundary volume is increased, in addition, the difference between the thermal expansion coefficients of the carbide film and the matrix causes the residual stress of GPa grade of the carbide film, the residual stress is gradually accumulated along with the increase of the deposition thickness of the film, the bonding performance of the carbide film and the substrate is further reduced, and the residual stress cannot be relieved through the formation or sliding of dislocation due to the high brittleness of the metal carbide, so that the fracture toughness of the carbide film is lower. The patent CN104294230A discloses a high-hardness low-stress multi-element composite diamond-like coating and a preparation method thereof, the patent dopes copper elements in amorphous carbon films, realizes effective regulation and control of residual stress by occupying a certain lattice position and improves tribological performance of the films, in addition, copper is used as a non-carbide forming element, can control microstructure of the films, inhibit growth of crystalline phases, lead to formation of nanocrystalline and/or amorphous structures, improve ductility and toughness of the carbide films, and the patent CN112993299A discloses a silicon-doped niobium carbide coating of a fuel cell metal bipolar plate and a preparation method thereof, which inhibit growth of columnar grains in the coating, enable the coating to be more compact and reduce residual stress, and the two patents prepare the coating in a single-component doping or alloying mode, which can bring about improvement of one and two performances of the coating, but also cause reduction of other performances, such as low strength of copper, the copper elements easily cause reduction of the overall strength of the carbide films. In summary, reducing the residual stress during the film deposition process and improving the toughness of the carbide to obtain a carbide film having high hardness, high wear resistance, low friction coefficient and high toughness at the same time remains a hot spot and a difficult problem for those skilled in the art to study. Disclosure of Invention The technical problem solved by the invention is to provide a multi-element composite carbide coating to solve the problems in the background technology. The technical problems solved by the invention are realized by adopting the following technical scheme: The chemical components of the multi-element composite carbide coating comprise carbide forming elements, non-carbide forming elements and nonmetallic elements, wherein the carbide forming elements are Cr, W and Mo elements, the non-carbide forming elements are Cu elements, and the nonmetallic elements are Si and C; further, the molar ratio of the sum of the mol numbers of Cr, W, mo, cu and Si element to the mol ratio of C element is 1:1-2; the molar ratio of Cr to W is 0.8-1.2:0.8-1.2; The molar ratio of Cr to Mo is 0.8-1.2:0.8-1.2; The molar ratio of Cr to Cu is 0.8-1.2:0.8-1.2; the molar ratio of Cr to Si is 0.8-1.2:0.8-1.2. In the invention, the thickness of the multi-element composite carbide coating is 0.5-10 mu m, and the structure is an amorphous structure. In the present invention, the multi-component composite carbide coating is applied to the surface of bearing steel. The preparation method of the multi-element composite carbide coating adopts a vacuum magnetron sputtering system to prepare the multi-element composite carbide coating, wherein the vacuum magnetron sputtering system comprises a vacuum chamber, a magnetron sputtering source provided with an integrated co-sputtering target, an ion source and a workpiece support for bearing a bearing steel matrix, and the workpiece support is arranged at the inner center of the vacuum chamber, and comprises the