Search

CN-117298692-B - A filtration system for electronic sulfuric acid production

CN117298692BCN 117298692 BCN117298692 BCN 117298692BCN-117298692-B

Abstract

The invention relates to a filtering system for electronic sulfuric acid production, which is applied to the field of sulfuric acid production, wherein a main filtering module, a circulating filtering module and a filtering detection cylinder are arranged, the filtering condition of sulfuric acid raw material liquid or finished product liquid can be automatically detected after each filtering, the filtering detection cylinder can be adhered with particle impurities in liquid, and the presence of the particle impurities can be effectively perceived by matching with the arrangement of a perception component, so that whether the filtering is up to standard or not can be judged, and when the filtering is not up to standard, repeated filtering can be carried out for a plurality of times through the circulating filtering module, compared with the prior art, the effect of detecting while filtering is achieved, the occurrence of incomplete or excessive filtering condition is effectively avoided, and the filtering efficiency and the filtering effect are effectively ensured.

Inventors

  • LI JUNLIN
  • FANG CHUNLIN

Assignees

  • 联仕(江西)新材料有限公司

Dates

Publication Date
20260508
Application Date
20231117

Claims (7)

  1. 1. A filtration system for electronic sulfuric acid production, characterized by: comprises a main filter module (2) and a circulating filter module (3) which are sequentially arranged on a main sulfuric acid production pipe (1), the main filter module (2) comprises a filter (4) and a filtering-following detection cylinder (5) which are sequentially connected with the production main pipe (1), the circulating filter module (3) comprises a circulating pipe (101) connected in parallel on the production main pipe (1), and a filter (4) and a filtering detection tube (5) which are sequentially arranged on the circulating pipe (101), two ends of the circulating pipe (101) connected with the production main pipe (1) are respectively provided with an electromagnetic valve and a one-way valve, the circulating pipe (101) is also connected with a return pipe (102), the filter (4) and the filtering detection cylinder (5) are positioned between two ends of the return pipe (102), electromagnetic valves are arranged at the inlet end and the outlet end of the circulating pipe (101) and the inlet end and the outlet end of the return pipe (102), the filtering-along detection cylinder (5) comprises an outer cover cylinder (51), two liquid guide cylinders (52) fixedly connected to the left end and the right end of the outer cover cylinder (51) respectively, and two mounting rings (53) fixedly connected to the liquid guide cylinders (52) respectively and positioned at the inner end parts of the outer cover cylinder (51), wherein a particle sensing sleeve is arranged between the two mounting rings (53); the particle sensing sleeve comprises a plurality of groups of particle sensing units (6) distributed in an annular array, each particle sensing unit (6) comprises a pushing roller (61) and a sensing roller (62) which are in contact with each other, each particle sensing unit (6) is installed between two mounting rings (53) through an electric rotating shaft, two adjacent groups of particle sensing units (6) are in contact with each other, the rotating directions of the pushing roller (61) and the sensing roller (62) are opposite, and the pushing roller and the sensing roller are both rotated towards the contact position of the pushing roller and the sensing roller.
  2. 2. A filtration system for electronic sulfuric acid production according to claim 1, characterized in that the inner diameter of the outer casing (51) is not smaller than twice the inner diameter of the liquid guiding cylinder (52), and the end of the liquid guiding cylinder (52) extends into the inside of the outer casing (51).
  3. 3. A filtration system for electronic sulfuric acid production according to claim 1, wherein a plurality of scrapers (54) are fixedly connected to the inner wall of the outer cover cylinder (51), the plurality of scrapers (54) are respectively in friction contact with the plurality of pushing rollers (61) and the sensing roller (62), the scrapers (54) are obliquely arranged, and an included angle between the scrapers (54) and the vertical direction is 30-60 degrees.
  4. 4. A filtration system for electronic sulfuric acid production according to claim 3, wherein the sensing roller (62) is internally provided with a pressure sensor, contacts of the pressure sensor are arranged on the inner wall of the sensing roller (62), the cylindrical surface of the sensing roller (62) is of an elastic structure, compressed air is filled in the sensing roller (62), and the pushing roller (61) is of a hard structure.
  5. 5. A filtering system for electronic sulfuric acid production according to claim 3, wherein the sensing roller (62) is internally provided with a sensing assembly (7), the sensing assembly (7) comprises a sensing tube coaxially arranged with the sensing roller (62), a sensing strip (71) attached to the inner wall of the sensing roller (62) and a supporting rod (74) fixedly connected between the middle part of the sensing tube and the middle part of the sensing strip (71), the end part of the sensing tube movably penetrates through the sensing roller (62) and is fixedly connected with the mounting ring (53), and shading liquid is filled in the sensing strip (71) and the liquid guide tube (73) in a saturated mode.
  6. 6. A filtering system for electronic sulfuric acid production according to claim 5, wherein the sensing tube comprises two outer thick-tube protection tubes (721) and a pre-shading thin tube (722) fixedly connected between the two outer thick-tube protection tubes (721), laser emitters and laser receivers are respectively arranged at the end parts of the two outer thick-tube protection tubes (721) far away from each other, the liquid guide tube (73) comprises a tube body (731) and a follow-up piece (732) fixedly connected to the end part of the tube body (731), and the tube body (731) is fixedly penetrated through the middle part of the pre-shading thin tube (722) and is mutually flush with the inner wall of the pre-shading thin tube (722).
  7. 7. The filtering system for electronic sulfuric acid production according to claim 6, wherein the outer thick tube (721) and the pre-shading thin tube (722) are coaxially arranged, the end surface of the sensing strip (71) attached to the sensing roller (62) and the follow-up piece (732) are of elastic structures, and other parts of the sensing strip (71) and the tube body (731) are of hard structures.

Description

A filtration system for electronic sulfuric acid production Technical Field The invention relates to a filtering system, in particular to a filtering system for electronic sulfuric acid production, which is applied to the field of sulfuric acid production. Background Microelectronic grade sulfuric acid is one of the common feed solutions for the microelectronic industry, and existing microelectronic grade sulfuric acid production systems typically include a filtration system for reducing trace ash and trace metal ions in the microelectronic grade sulfuric acid product. For the existing production process of microelectronic grade sulfuric acid, if the product quality is better improved, other technical means such as raw material liquid filtration, finished product liquid filtration and the like are needed, otherwise, the quality of refined sulfuric acid is directly affected. For raw material liquid filtration, finished product liquid filtration and the like, in the prior art, filtration is carried out by adopting filtering equipment only, filtration condition inspection and detection on raw material liquid or finished product liquid are lack in the filtration process, so that the filtration condition is difficult to know in time, the filtration effect and effect are influenced, on one hand, in order to ensure the filtration effect, the filtration is often carried out for many times, the filtration is continued under the condition that the amplitude filtration standard exists, the filtration efficiency is influenced under the condition, on the other hand, the general filtration times are determined, the condition that the filtration standard is not reached yet is finished is existed, and the filtration effect is influenced. Disclosure of Invention Aiming at the prior art, the invention aims to solve the technical problem that the prior art has certain defects on the filtering efficiency and effect of raw material liquid in sulfuric acid production. In order to solve the problems, the invention provides a filtering system for electronic sulfuric acid production, which comprises a main filtering module and a circulating filtering module which are sequentially arranged on a sulfuric acid production main pipe, wherein the main filtering module comprises a filter and a filtering-along detection cylinder which are sequentially connected with the production main pipe, the circulating filtering module comprises a circulating pipe which is connected in parallel with the production main pipe, a filter and a filtering-along detection cylinder which are sequentially arranged on the circulating pipe, two ends of the circulating pipe, which are connected with the production main pipe, are respectively provided with an electromagnetic valve and a one-way valve, a return pipe is also connected to the circulating pipe, the filter and the filtering-along detection cylinder are positioned between the two ends of the return pipe, the inlet end and the outlet end of the circulating pipe, the inlet end and the outlet end of the return pipe are respectively provided with the electromagnetic valves, the filtering-along detection cylinder comprises an outer cover cylinder, two liquid guide cylinders which are respectively fixedly connected to the left end and the right end of the outer cover cylinder, two mounting rings which are respectively fixedly connected to the inner ends of the liquid guide cylinders, and a particle sensing sleeve is arranged between the two mounting rings. In the above-mentioned filtration system for electronic sulfuric acid production, through main filtration module, circulation filtration module and along with straining the setting of examining the section of thick bamboo, can realize all can carrying out the detection of filtering the condition at sulfuric acid feed liquor or finished product liquid at every turn after filtering, after filtering not up to standard, can carry out repeated filtration many times through circulation filtration module, compare in prior art, reach the effect that the detection was filtered simultaneously, effectively avoid appearing filtering incompletely or excessively filtering the condition emergence to filtration efficiency and filter effect are effectively guaranteed. As a further improvement of the application, the inner diameter of the outer cover cylinder is not smaller than twice the inner diameter of the liquid guide cylinder, and the end part of the liquid guide cylinder extends to the inner part of the outer cover cylinder. As a further improvement of the application, the particle sensing sleeve comprises a plurality of groups of particle sensing units distributed in an annular array, the particle sensing units comprise a pushing roller and a sensing roller which are contacted with each other, and the two groups of particle sensing units are arranged between two mounting rings through an electric rotating shaft. As a further improvement of the application, two adjace