CN-117419031-B - Novel structure of composite ion pump

CN117419031BCN 117419031 BCN117419031 BCN 117419031BCN-117419031-B

Abstract

The invention belongs to the field of extremely high vacuum, in particular to a novel structure of a composite ion pump, which comprises an ion pump, a flange connecting pipe welding piece, a switching cylinder, a connecting terminal, a lead wire, an insulating ceramic pipe, a connecting column and a NEG pump core, wherein the flange connecting pipe welding piece comprises a flange, a connecting pipe and two NEG electrode plugs, the ion pump adopts a SKY20L pump, a pump port is replaced by the flange connecting pipe welding piece, the NEG pump core adopts a SaesD pump core, the two plugs in the flange connecting pipe welding piece are in pressure connection with the lead wire through the connecting terminal, the insulating ceramic pipe penetrates through the two lead wires to play an insulating role, the connecting column is connected with the two plugs of the lead wire and the NEG pump core and is fixed through countersunk screws, and the NEG electrode plugs are composited on the ion pump port to integrate NEG activation and an ion pump air extraction function. The invention solves the problems that the small pumping speed ion pump has compact space and the pumping port is inconvenient to increase. The invention has simple structure and convenient installation, and provides a new structure for optimizing the structure of the composite ion pump.

Inventors

ZHANG YINGZHI
WANG LIANG
WANG QIJIA
YUAN FANG
YE LINLIN

Assignees

中国科学院沈阳科学仪器股份有限公司

Dates

Publication Date: 20260512
Application Date: 20230927

Claims (2)

1. A novel structure of a composite ion pump is characterized by comprising a NEG pump, a transfer cylinder (9), a flange pipe connecting welding piece and an ion pump (13), wherein one end of the flange pipe connecting welding piece is connected with a pump port of the ion pump (13), the other end of the flange pipe connecting welding piece is connected with a pump core (7) of the NEG pump through the transfer cylinder (9), the flange pipe connecting welding piece comprises a flange (10), a connecting pipe (11) and a NEG electrode plug (12), one end of the connecting pipe (11) is connected to the pump port of the ion pump (13), the flange (10) is connected with the other end of the connecting pipe (11), the connecting pipe (11) is connected with a NEG electrode plug (12), one end of the transfer cylinder (9) is connected with a pump core (7), the other end of the transfer cylinder (9) is arranged on the flange (10), an opening (15) for air inlet is formed in the transfer cylinder (9), the flange (10) and the connecting pipe connecting plug (11) are sequentially communicated, the NEG electrode (12) is connected with a lead wire (5) through a terminal (6A, a ceramic lead wire (5) and a lead wire (2) is connected with one end (2) of the lead wire (2) after passing through the connecting post (2) The insulating ceramic tube (4), the lead A (5) and the connecting terminal (6) are all positioned in the connecting tube (9), the flange (10) and the connecting tube (11) which are communicated; One end of the switching cylinder (9) is in a ring shape, and the pump core (7) is inserted into the ring and is fixed with the switching cylinder (9) through a side jackscrew (8); The bottom of the outer side surface of the circular ring is provided with a chamfer (14); openings (15) are symmetrically formed in the left side and the right side of the axial section of the adapter tube (9) along the length direction; The NEG electrode plug (12) is a two-core NEG electrode plug, the two-core NEG electrode plug is in press connection with the two leads A (5) through the connecting terminal (6), and the insulating ceramic tube (4) penetrates through the two leads A (5) to insulate the two leads A (5).
2. The new structure of the composite ion pump according to claim 1, wherein the NEG electrode plug (12) is welded to the side surface of the adapter tube (11), namely, the axial center line of the NEG electrode plug (12) perpendicularly intersects with the axial center line of the adapter tube (11).

Description

Novel structure of composite ion pump Technical Field The invention belongs to the field of extremely high vacuum, and particularly relates to a novel structure of a composite ion pump. Background In recent years, composite ion pumps have been widely developed as one of the important means for obtaining ultra-high vacuum. The NEG pump (non-evaporative getter pump) is used as a non-evaporative adsorption vacuum pump, and compared with a titanium sublimator, the NEG pump works without evaporating extra gas, but uses the chemical activity of the material itself to perform surface adsorption or continuously cause internal diffusion to realize exhaust. The NEG pump has small volume and compact structure, and can be operated without a power supply after being activated. The NEG pump is combined with the ion pump, so that a short plate with obviously reduced pumping speed of the ion pump under low pressure is made up, and the NEG pump has extremely high pumping speed to air, water vapor and hydrogen, thereby being beneficial to realizing higher extreme vacuum. The NEG pump and ion pump composite structure is easy to realize on the large pumping speed ion pump, and the small pumping speed ion pump is small in volume space and compact in structure, and meanwhile, the pumping port position and the NEG electrode position of the ion pump are considered, so that the NEG pump and ion pump composite pump structure is designed to comprehensively consider the factors. Disclosure of Invention In order to meet the analysis requirements of the composite structure of the NEG pump and the ion pump, the invention aims to provide a novel structure of the composite ion pump. The aim of the invention is realized by the following technical scheme: The invention comprises a NEG pump, a switching cylinder, a flange pipe connecting welding piece and an ion pump, wherein one end of the flange pipe connecting welding piece is connected with a pump port of the ion pump, the other end of the flange pipe connecting welding piece is connected with a pump core of the NEG pump through the switching cylinder, the flange pipe connecting welding piece comprises a flange, a pipe connecting and a NEG electrode plug, one end of the pipe connecting to the pump port of the ion pump, the flange is connected with the other end of the pipe connecting, the pipe connecting is connected with the NEG electrode plug, one end of the switching cylinder is connected with the pump core, the other end of the switching cylinder is arranged on the flange, an opening for air inlet is formed in the switching cylinder, the flange and the pipe connecting are sequentially communicated, the NEG electrode plug is connected with one end of a lead A through a connecting terminal, the other end of the lead A is connected to one end of a connecting column after being penetrated by an insulating ceramic pipe, the other end of the connecting column is connected with a lead B on the pump core, and the connecting column, the insulating ceramic pipe, the lead A and the connecting terminal are all located inside the switching cylinder, the flange and the connecting terminal are communicated. One end of the switching cylinder is in a ring shape, and the pump core is inserted into the ring and is fixed with the switching cylinder through a side jackscrew. The bottom of the outer side face of the circular ring is a chamfer. Openings are symmetrically formed in the left side and the right side of the axial section of the adapter cylinder along the length direction. The NEG electrode plug is welded on the side face of the connecting pipe, namely the axial center line of the NEG electrode plug is perpendicularly intersected with the axial center line of the connecting pipe. The NEG electrode plug is a two-core NEG electrode plug, the two-core NEG electrode plug is in press connection with two leads A through a connecting terminal, and the insulating ceramic tube penetrates through the two leads A to insulate the two leads A. The invention has the advantages and positive effects that: The invention solves the problems that the NEG pump is combined with the small pumping speed ion pump, and the pumping port of the ion pump and the NEG electrode position are simultaneously considered due to small volume space and compact structure of the small pumping speed ion pump, so that the pumping port is inconvenient to increase. Meanwhile, the invention provides a new structure for the composite pump structure of the NEG pump and the small pumping speed ion pump. Drawings FIG. 1 is a cross-sectional view of the internal structure of the present invention; wherein 1 is countersunk head screw, 2 is connecting column, 3 is screw, 4 is insulating ceramic tube, 5 is lead A,6 is connecting terminal, 7 is pump core, 8 is jackscrew, 9 is transfer cylinder, 10 is flange, 11 is connecting tube, 12 is NEG electrode plug, 13 is ion pump. Detailed Description The invention is described in further detail below with