CN-117480414-B - Grating structure, preparation method thereof and display device

CN117480414BCN 117480414 BCN117480414 BCN 117480414BCN-117480414-B

Abstract

A grating structure, a preparation method thereof and a display device. The preparation method of the grating structure comprises the steps of forming a plurality of first bulge structures (2) which are arranged along a first direction (X) (S101), forming a first adhesive material (3) which at least covers the plurality of first bulge structures (2), and forming the grating structure (S102) which comprises a plurality of second bulge structures (7) by utilizing the bulge structures which comprise the first bulge structures (2) and the first adhesive material (3), wherein the surface of the first adhesive material (3) facing away from the first bulge structures (2) is a flat surface, the bulge structures which correspond to the first bulge structures (2) and the first adhesive material (3) and the second bulge structures (7) one by one, the cross section of the second bulge structures (7) along the first direction (X) is triangular, and the second bulge structures (7) are provided with at least one inclined flat surface.

Inventors

LI DUOHUI
CHEN HONG
SONG MENGYA
ZHANG DONGLIANG
ZHANG XIAO
DUAN ZHENG
GUO KANG
GU XIN

Assignees

京东方科技集团股份有限公司

Dates

Publication Date: 20260512
Application Date: 20220527

Claims (15)

1. A method of fabricating a grating structure, wherein the method comprises: forming a plurality of first bump structures arranged along a first direction; Forming a first adhesive material at least covering the first protruding structures, forming a grating structure comprising a plurality of second protruding structures by using the protruding structures comprising the first protruding structures and the first adhesive material, wherein the surface of the first adhesive material, which faces away from the first protruding structures, is a flat surface, the protruding structures comprising the first protruding structures and the first adhesive material are in one-to-one correspondence with the second protruding structures, the cross section of the second protruding structures along the first direction is triangular, and the second protruding structures are provided with at least one inclined flat surface.
2. The method of claim 1, wherein forming a plurality of first bump structures aligned along a first direction comprises: Providing a first substrate, and manufacturing a plurality of first protruding structures arranged along the first direction on the first substrate; Forming a first paste covering at least the plurality of first bump structures and forming a grating structure including a plurality of second bump structures using the bump structures including the first bump structures and the first paste, comprising: forming a first adhesive material covering the first protruding structures, and performing a curing process on the first adhesive material to form a plurality of protruding structures comprising the first protruding structures and the first adhesive material, so as to obtain a first template, wherein the protruding structures have triangular cross sections along the first direction, and the protruding structures have at least one inclined flat surface; Providing a second adhesive material, using the first template as an imprinting template, adopting an imprinting process to enable the second adhesive material to form second protruding structures corresponding to the protruding structures one by one, and transferring the second protruding structures onto a second substrate to obtain the grating structure.
3. The method of claim 2, wherein using the first template as an imprint template to form second bump structures with a second glue material in a one-to-one correspondence with the bump structures using an imprint process, comprising: Coating a template adhesive on one side of the first adhesive, which is away from the first protruding structure, and using the first template as an imprinting template to enable the template adhesive to form a second template by adopting an imprinting process, wherein the second template comprises a first groove which is complementary and corresponding to the protruding structure, the cross section of the first groove along the first direction is triangular, and the first groove is provided with at least one inclined flat surface; And coating the second adhesive on one side of the second template with the first groove, using the second template as an imprinting template, and adopting an imprinting process to enable the second adhesive to form the second protrusion structure which is complementary and corresponds to the first groove.
4. A method according to claim 2 or 3, wherein fabricating a plurality of the first bump structures arranged along the first direction on a first substrate comprises: The method comprises the steps of manufacturing a plurality of first protruding structures on a first substrate by adopting an electron beam direct writing process, wherein the cross section of the first protruding structures is formed by sequentially and tightly arranging a plurality of rectangles, the thickness of the rectangles is not completely equal in the direction perpendicular to the first substrate, the rectangles comprise a first rectangle with the thickest thickness and a second rectangle with the thinnest thickness, which is not adjacent to the first rectangle at one side of the first rectangle, and the thicknesses of the first rectangle, the rectangles between the first rectangle and the second rectangle and the thickness of the second rectangle are sequentially reduced.
5. The method of claim 2, wherein fabricating a plurality of the first bump structures arranged along the first direction on a first substrate comprises: The first bulge structures comprising a plurality of strip structures are manufactured on the first substrate by adopting an electron beam direct writing process, wherein the strip structures are arranged at intervals along the first direction, the section shape of the strip structures is rectangular, the thickness of the strip structures is not completely equal in the direction perpendicular to the first substrate, the strip structures comprise a first strip structure with the thickest thickness and a second strip structure with the thinnest thickness, which is not adjacent to the first strip structure at one side of the first strip structure, and the thicknesses of the strip structures are sequentially reduced.
6. The method of claim 1, wherein forming a plurality of first bump structures arranged along a first direction comprises: providing a first substrate, and manufacturing a plurality of third protruding structures arranged along the first direction on the first substrate to obtain a third template; using the third template to form first bulge structures which are in one-to-one correspondence with the third bulge structures by using a third adhesive material through an imprinting process, and transferring the first bulge structures onto a second substrate; forming a first paste covering at least the plurality of first bump structures and forming a grating structure including a plurality of second bump structures using the bump structures including the first bump structures and the first paste, comprising: and coating the first adhesive on one side of the first protruding structure, which is away from the second substrate, and curing the first adhesive to form a protruding structure comprising the first adhesive and the first protruding structure as a second protruding structure, thereby obtaining the grating structure.
7. The method of claim 6, wherein using the third template to form a third paste into first bump structures in one-to-one correspondence with the third bump structures using an imprinting process, and transferring the first bump structures onto a second substrate, comprises: Coating template glue on one side of the third protruding structure, using the third template as an imprinting template, and forming a fourth template by using the template glue through an imprinting process, wherein the fourth template comprises a second groove complementarily corresponding to the third protruding structure; and coating the third adhesive on one side of the fourth template with the second groove, using the fourth template as an imprinting template, adopting an imprinting process to enable the third adhesive to form the first protruding structure which is complementary and corresponds to the second groove, and transferring the first protruding structure onto the second substrate.
8. The method of claim 6 or 7, wherein fabricating a plurality of third bump structures on the first substrate aligned along the first direction comprises: and manufacturing a plurality of third raised structures on the first substrate by adopting an electron beam direct writing process, wherein the cross section of the third raised structures is formed by sequentially and tightly arranging a plurality of rectangles, the thickness of the rectangles is not completely equal in the direction vertical to the first substrate, the rectangles comprise a first rectangle with the thickest thickness and a second rectangle with the thinnest thickness, which is not adjacent to the first rectangle at one side of the first rectangle, and the thicknesses of the first rectangle, the rectangles between the first rectangle and the second rectangle and the thickness of the second rectangle are sequentially reduced.
9. The method of claim 6, wherein fabricating a plurality of third bump structures on the first substrate aligned along the first direction comprises: The third protruding structures comprising a plurality of strip-shaped structures are manufactured on the first substrate by adopting an electron beam direct writing process, wherein the strip-shaped structures are arranged at intervals along the first direction, the cross sections of the strip-shaped structures in the first direction are rectangular, the thicknesses of the strip-shaped structures are not completely equal in the direction perpendicular to the first substrate, the strip-shaped structures comprise a first strip-shaped structure with the thickest thickness and a second strip-shaped structure with the thinnest thickness, the second strip-shaped structure is not adjacent to the first strip-shaped structure at one side of the first strip-shaped structure, and the thicknesses of the strip-shaped structures between the first strip-shaped structure and the second strip-shaped structure and the thickness of the second strip-shaped structure are sequentially reduced.
10. The method according to claim 5 or 9, wherein a sum of a distance between two adjacent stripe-shaped structures in the first direction and a width of the stripe-shaped structures in the first direction is 30 nm or more and 200 nm or less.
11. The method of any of claims 1-3, 5-7, 9, wherein the period of the grating structure is 300 nm or more and 600 nm or less.
12. The method of any of claims 1-3, 5-7, 9, wherein the second raised structures have a maximum thickness of 300 nanometers or more and 600 nanometers or less.
13. A grating structure, wherein the grating structure is produced by the method according to any one of claims 1-12; the grating structure comprises a plurality of second protruding structures arranged along a first direction, wherein the cross section of each second protruding structure along the first direction is triangular, and each second protruding structure is provided with at least one inclined flat surface.
14. A display device, wherein the display device comprises: a display panel; a light transmission layer positioned at the light emitting side of the display panel The grating structure of claim 13, on a side of the light transmission layer facing the display panel.
15. The display device of claim 14, wherein the grating structure is a coupling-in grating of the display device, and/or, The grating structure is a coupling-out grating of the display device, and the display device further comprises a reflecting layer positioned on one side of the grating structure, which is away from the light transmission layer.

Description

Grating structure, preparation method thereof and display device Technical Field The disclosure relates to the technical field of display, in particular to a grating structure, a preparation method thereof and a display device. Background Augmented reality (Augmented Reality, AR) glasses are predicted to be the "third screen" of humans, with very broad prospects of development. The Surface relief grating (Surface RELIEF GRATING, SRG) diffractive optical waveguide solution is considered to be the most promising mainstream AR optical waveguide lens preparation solution in the future due to its ease of mass production and excellent performance. The SRG AR optical waveguide sheet two-dimensional grating mainly comprises a rectangular grating, an inclined grating and a blazed grating. Blazed gratings are of great interest due to their excellent diffraction efficiency. The main methods for preparing the blazed grating template at present are diamond processing, wet etching, electron beam direct writing and the like. The diamond processing is limited by the size of the cutter, the cutter is easy to wear in the processing process to influence the processing precision, the blazed grating is prepared by wet etching, the material is limited by the crystal orientation of the material, the angle of the grating cannot be flexibly selected, the electron beam direct writing needs to use a gradient exposure process, and the inclined plane of the grating is wavy to influence the waveguide efficiency. Disclosure of Invention The embodiment of the disclosure provides a preparation method of a grating structure, which comprises the following steps: forming a plurality of first bump structures arranged along a first direction; Forming a first adhesive material which at least covers a plurality of first protruding structures, and forming a grating structure comprising a plurality of second protruding structures by using the protruding structures comprising the first protruding structures and the first adhesive material, wherein the surface of the first adhesive material, which faces away from the first protruding structures, is a flat surface, the protruding structures comprising the first protruding structures and the first adhesive material are in one-to-one correspondence with the second protruding structures, the cross section of the second protruding structures along the first direction is triangular, and the second protruding structures are provided with at least one inclined flat surface. In some embodiments, forming a plurality of first bump structures aligned along a first direction includes: Providing a first substrate, and manufacturing a plurality of first protruding structures arranged along a first direction on the first substrate; forming a first paste covering at least the plurality of first bump structures and forming a grating structure including a plurality of second bump structures using the bump structures including the first bump structures and the first paste, comprising: Forming a first adhesive material covering the first protruding structure, and performing a curing process on the first adhesive material to form a plurality of protruding structures comprising the first protruding structure and the first adhesive material, so as to obtain a first template, wherein the protruding structure has a triangular cross section along a first direction and at least one inclined flat surface; Providing a second adhesive material, using the first template as an imprinting template, adopting an imprinting process to enable the second adhesive material to form second convex structures corresponding to the convex structures one by one, and transferring the second convex structures onto a second substrate to obtain the grating structure. In some embodiments, using the first template as an imprinting template and using an imprinting process to form second bump structures with second glue materials in one-to-one correspondence with the bump structures, the method includes: Coating a template adhesive on one side of the first adhesive, which is far away from the first bulge structure, and forming a second template by using the first template as an imprinting template and adopting an imprinting process, wherein the second template comprises a first groove which is complementary and corresponds to the bulge structure, the cross section of the first groove is triangular along a first direction, and the first groove is provided with at least one inclined flat surface; And coating a second adhesive material on one side of the second template with the first groove, and using the second template as an imprinting template to form a second bulge structure which is complementary and corresponds to the first groove by using the second adhesive material as an imprinting technology. In some embodiments, fabricating a plurality of first bump structures arranged along a first direction on a first substrate includes: The method comprises t