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CN-117492489-B - Temperature control equipment and temperature control method

CN117492489BCN 117492489 BCN117492489 BCN 117492489BCN-117492489-B

Abstract

The embodiment of the invention provides temperature control equipment and a temperature control method, and relates to the technical field of semiconductors. The temperature control equipment comprises a pre-temperature control system, a circulating system and a processing device, wherein the pre-temperature control system comprises a vortex tube, a gas transmission device, a first heat exchange device and a second heat exchange device, a gas inlet of the vortex tube is connected with the gas transmission device, a first outlet of the vortex tube is communicated with a heat exchange agent inlet of the first heat exchange device, and a second outlet of the vortex tube is communicated with a heat exchange agent inlet of the second heat exchange device. The circulating system comprises a circulating pump and a circulating water tank, wherein a liquid outlet of the circulating pump is respectively communicated with a liquid inlet of the first heat exchange device and a liquid inlet of the second heat exchange device, a liquid outlet of the circulating water tank is communicated with the circulating pump, and a liquid inlet of the circulating water tank is used for being communicated with an output end of load equipment. The liquid outlet of the processing device is communicated with the input end of the load equipment. The temperature fluctuation range can be reduced, and the PID control precision is improved. And the use power of the refrigerating and heating device can be reduced, and the refrigerating efficiency is improved.

Inventors

  • ZHANG WEIMING
  • WEN ZHICHENG

Assignees

  • 上海盛剑半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20231220

Claims (10)

  1. 1. A temperature control apparatus, comprising: The device comprises a pre-temperature control system (100), wherein the pre-temperature control system (100) comprises a vortex tube (110), a gas transmission device (140), a first heat exchange device (120) and a second heat exchange device (130), a gas inlet of the vortex tube (110) is connected with the gas transmission device (140), a first outlet of the vortex tube (110) is communicated with a heat exchanger inlet of the first heat exchange device (120), and a second outlet of the vortex tube (110) is communicated with a heat exchanger inlet of the second heat exchange device (130); The circulating system (200), the circulating system (200) comprises a circulating pump (210) and a circulating water tank (220), wherein a liquid outlet of the circulating pump (210) is respectively communicated with a liquid inlet of the first heat exchange device (120) and a liquid inlet of the second heat exchange device (130), a liquid outlet of the circulating water tank (220) is communicated with the circulating pump (210), and a liquid inlet of the circulating water tank (220) is communicated with an output end of the load equipment (500); The liquid inlet of the treatment device (300) is respectively communicated with the liquid outlet of the first heat exchange device (120) and the liquid outlet of the second heat exchange device (130), and the liquid outlet of the treatment device (300) is communicated with the input end of the load equipment (500).
  2. 2. The temperature control apparatus according to claim 1, wherein the gas delivery device (140) includes an ejector (141), a gas-liquid separator (142), and a gas compressor (143), an outlet of the gas compressor (143) is in communication with an inlet of the vortex tube (110), an inlet of the gas compressor (143) is in communication with an outlet of the gas-liquid separator (142), an inlet of the gas-liquid separator (142) is in communication with an outlet of the ejector (141), and an inlet and an outlet of the ejector (141) are in communication with a heat exchanger outlet of the first heat exchanging device (120) and a heat exchanger outlet of the second heat exchanging device (130), respectively.
  3. 3. The temperature control apparatus of claim 1, wherein the circulation system (200) further comprises an adjustment assembly (400), the adjustment assembly (400) being disposed on a liquid inlet branch and a liquid outlet branch of the first heat exchange device (120) and the second heat exchange device (130), the adjustment assembly (400) being configured to distribute and control the amount of liquid entering and exiting the first heat exchange device (120) and the second heat exchange device (130).
  4. 4. A temperature control apparatus according to claim 3, wherein the regulating assembly (400) comprises a regulating valve (410), at least one first expansion valve (610) and at least one second expansion valve (620), the regulating valve (410) being arranged on a branch of the circulating pump (210) where the outlet communicates with the first heat exchanging means (120) and the second heat exchanging means (130); Temperature control equipment the liquid outlet of first heat transfer device (120) with be provided with at least one between the inlet of processing apparatus (300) refrigerating plant (310) first expansion valve (610), the liquid outlet of second heat transfer device (130) with be provided with at least one between the inlet of processing apparatus (300) refrigerating plant (310) second expansion valve (620).
  5. 5. The temperature control device of claim 4, wherein the temperature control device (1000) further comprises a plurality of temperature sensors (700), the plurality of temperature sensors (700) comprises a first temperature sensor (710), a second temperature sensor (720) and a third temperature sensor (730), at least one first temperature sensor (710) is provided at an output end of the load device (500), at least one second temperature sensor (720) is provided between a liquid outlet of the first heat exchange device (120) and the first expansion valve (610), and at least one third temperature sensor (730) is provided between a liquid outlet of the second heat exchange device (130) and the second expansion valve (620).
  6. 6. The temperature control apparatus of claim 4, wherein the liquid outlet of the first heat exchanging device (120) is respectively communicated with the liquid outlet of the circulation pump (210) and the first expansion valve (610), and the liquid outlet of the second heat exchanging device (130) is respectively communicated with the liquid outlet of the circulation pump (210) and the second expansion valve (620).
  7. 7. The temperature control apparatus according to claim 1, wherein the temperature control apparatus (1000) further comprises at least one third expansion valve (630) and at least one fourth expansion valve (640), wherein at least one third expansion valve (630) is provided between the load apparatus (500) and the circulation tank (220), and wherein at least one fourth expansion valve (640) is provided between the processing device (300) and the load apparatus (500).
  8. 8. The temperature control apparatus of claim 1, wherein the first heat exchange device (120) and/or the second heat exchange device (130) is a gas-water heat exchange tube (800).
  9. 9. A temperature control method applied to the temperature control apparatus (1000) according to any one of claims 1 to 8, characterized in that the temperature control method comprises: determining a first preset temperature and a first preset range; acquiring a first temperature of a liquid inlet of the load equipment (500); comparing the first temperature with the first preset temperature; if the difference between the first preset temperature and the first temperature is greater than the maximum value of the first preset range, controlling the output power of the heating device (320) of the processing device (300) to be reduced; If the difference between the first preset temperature and the first temperature is smaller than the minimum value of the first preset range, controlling the output power of the heating device (320) of the processing device (300) to be increased; And if the difference between the first preset temperature and the first temperature is in the first preset range, controlling the heating device (320) of the processing device (300) to keep the current state.
  10. 10. The temperature control method according to claim 9, wherein the temperature control device (1000) further comprises a plurality of expansion valves (600), the plurality of expansion valves (600) comprises at least one first expansion valve (610) and at least one second expansion valve (620), at least one first expansion valve (610) is arranged between a liquid outlet of the first heat exchange device (120) and a liquid inlet of the processing device (300) refrigeration device (310), and at least one second expansion valve (620) is arranged between a liquid outlet of the second heat exchange device (130) and a liquid inlet of the processing device (300) refrigeration device (310); Before the step of obtaining the temperature of the liquid inlet of the load device (500), the temperature control method further comprises: determining a second preset temperature and a second preset range; Acquiring a second temperature of a liquid inlet of the processing device (300); comparing the second temperature with the second preset temperature; if the difference between the second preset temperature and the second temperature is greater than the maximum value of the second preset range, increasing the opening of the first expansion valve (610) and reducing the opening of the second expansion valve (620); if the difference between the second preset temperature and the second temperature is smaller than the minimum value of the second preset range, reducing the opening of the first expansion valve (610) and increasing the opening of the second expansion valve (620); And if the difference between the second preset temperature and the second temperature is in the second preset range, controlling the first expansion valve (610) and the second expansion valve (620) to keep the current state.

Description

Temperature control equipment and temperature control method Technical Field The invention relates to the technical field of semiconductors, in particular to temperature control equipment and a temperature control method. Background The semiconductor temperature control device is used for providing rapid, accurate and stable temperature output for semiconductor integrated circuit etching process equipment so as to ensure accurate manufacture of integrated circuits, and is one of important devices in an upstream support link of the semiconductor industry. At present, however, a refrigeration system of a temperature control device for controlling a process cavity of an etching device mainly adopts a mode of combining an evaporator with an electric heater, and realizes temperature control by adjusting PID (proportional-integral-derivative) parameters, namely proportional-integral-derivative parameters, on one hand, the mode of combining the evaporator with the electric heater can cause certain temperature loss so as to increase power consumption, and on the other hand, the PID control has certain delay, so that the requirement on parameter adjustment is very high, real-time response is difficult for large temperature change, and the stability of the supply temperature is ensured. Disclosure of Invention The invention provides a temperature control device and a temperature control method, which can reduce the temperature fluctuation range, improve the PID control precision, reduce the use power of a refrigerating device and a heating device, reduce the volume of the device and improve the refrigerating efficiency. Embodiments of the invention may be implemented as follows: embodiments of the present invention provide a temperature control apparatus, comprising: The system comprises a vortex tube, a gas transmission device, a first heat exchange device and a second heat exchange device, wherein a gas inlet of the vortex tube is connected with the gas transmission device, a first outlet of the vortex tube is communicated with a heat exchange agent inlet of the first heat exchange device, and a second outlet of the vortex tube is communicated with a heat exchange agent inlet of the second heat exchange device; The circulating system comprises a circulating pump and a circulating water tank, wherein the liquid outlet of the circulating pump is respectively communicated with the liquid inlet of the first heat exchange device and the liquid inlet of the second heat exchange device; The liquid inlet of the treatment device is respectively communicated with the liquid outlet of the first heat exchange device and the liquid outlet of the second heat exchange device, and the liquid outlet of the treatment device is communicated with the input end of the load equipment. In the above embodiment, by setting the pre-temperature control system, the secondary refrigerant flowing out of the output end of the load device enters the first heat exchange device and the second heat exchange device respectively, the vortex tube is adopted to provide the heat exchange agent for the first heat exchange device and the second heat exchange device respectively, and due to the nature of the vortex tube, the vortex tube can generate vortex for high-speed air flow, separate cold air flow and hot air flow, and flow out respectively through the two outlets. The temperature of the gas flowing out of the two outlets of the vortex tube is different, and cold and hot two air flows respectively enter the first heat exchange device and the second heat exchange device as heat exchangers, so that the first heat exchange device and the second heat exchange device have different temperature treatment effects on the secondary refrigerant flowing out of the load equipment. The secondary refrigerant flowing out of the load equipment enters the first heat exchange device and the second heat exchange device for heat exchange respectively, then flows into the processing device in a mixed mode, and finally flows into the load equipment again, so that the primary temperature control can be carried out on the secondary refrigerant flowing out of the load equipment, and then the secondary refrigerant is converged into the processing device for heating and cooling treatment so as to reach the temperature required by the load equipment. Therefore, the temperature fluctuation range of the secondary refrigerant which needs to be processed by the processing device is reduced, the PID control precision is improved, the refrigeration efficiency is improved, the use power of the refrigerating device and the heating device is reduced, the size of the refrigerating device and the heating device can be further reduced, the size of the whole temperature control equipment is reduced, and the production cost is reduced. In an alternative embodiment, the temperature control device further comprises a gas transmission device, the gas transmission device comprises an ejector, a g