CN-117535630-B - Linear metal evaporation source for vacuum coating

CN117535630BCN 117535630 BCN117535630 BCN 117535630BCN-117535630-B

Abstract

The invention relates to the technical field of vacuum coating, and discloses a linear metal evaporation source for vacuum coating. The invention relates to a linear metal evaporation source, which comprises a container, a nozzle and a crucible, wherein the container comprises a metal outer cover and an inner container, a heat insulation material is filled between the metal outer cover and the inner container, the inner container is a heater, a containing cavity of the inner container comprises a primary evaporation area, a pressurizing area, a secondary evaporation area and a heating area, the nozzle of the nozzle is in a slit shape, the top of the inner container is provided with the crucible, and the crucible is arranged in the primary evaporation area. The linear metal evaporation source is arranged in a vacuum chamber of vacuum coating equipment, and the liner heats the coated metal in a primary evaporation area, so that the coated metal is vaporized and evaporated to reach saturated vapor pressure. The metal vapor to be coated is transported to the nozzle in a saturated vapor pressure state, the nozzle enables the metal vapor to be sprayed out in a linear jet flow mode, and the metal vapor to be deposited on a coated workpiece to form a uniform and compact metal coating film layer, so that the coating efficiency is high, and the film quality is good.

Inventors

LI JIANFEI
WANG CHAO
HAO WENTAO
MIAO WEIWEI
HUANG XIAOWEI

Assignees

蒙城繁枫真空科技有限公司

Dates

Publication Date: 20260505
Application Date: 20231208

Claims (3)

1. A linear metal evaporation source for vacuum coating is characterized by comprising a container, a nozzle and a crucible; the container comprises a metal outer cover and an inner container; the inner container is arranged in the metal outer cover, and a heat insulation material is filled between the inner container and the metal outer cover; The containing cavity of the liner comprises a primary evaporation area, a pressurizing area, a secondary evaporation area and a heating area from bottom to top in sequence; the section of the primary evaporation zone is arc-shaped, and the section of the pressurizing zone is rectangular; The top end opening of the primary evaporation zone is communicated with the pressurizing zone, and the width of the pressurizing zone is smaller than the diameter of the primary evaporation zone; The section of the secondary evaporation zone is conical; the conical large end of the secondary evaporation zone is communicated with the pressurizing zone; the section of the heating area is rectangular and is communicated with the conical small end of the secondary evaporation area; The nozzle is conical; The conical large end of the nozzle is communicated with the heating area; The liner is made of graphite, the side walls of the liner of the primary evaporation zone, the pressurizing zone, the secondary evaporation zone and the heating zone are respectively and electrically connected with an external power supply, and heaters are formed in the container to heat the corresponding zones respectively; The nozzle is made of graphite and is electrically connected with an external power supply; the nozzle is in a slit shape, is arranged at the top of the inner container and is communicated with the heating area; the crucible is arranged in the primary evaporation zone and is used for placing a coated metal raw material; The linear metal evaporation source is arranged in a vacuum chamber of the vacuum coating equipment, the primary evaporation zone is used for heating the coated metal to be vaporized, the pressurizing zone, the secondary evaporation zone and the heating zone are used for enabling the coated metal vapor to be transported to the nozzle in a saturated vapor pressure state, and the nozzle is used for enabling the coated metal vapor to be sprayed out in a linear jet flow mode so as to form a uniform and compact film layer on a coated workpiece.
2. The linear metal evaporation source for vacuum coating according to claim 1, wherein the primary evaporation region, the booster region, the secondary evaporation region, the temperature-rising region and the nozzle are each provided with a temperature-control thermocouple.
3. The linear metal evaporation source for vacuum coating according to claim 1, wherein the heat insulating material is ceramic fiber.

Description

Linear metal evaporation source for vacuum coating Technical Field The embodiment of the invention relates to the technical field of vacuum coating, in particular to a linear metal evaporation source for vacuum coating. Background The vacuum coating technology has been widely used, such as photovoltaic cell film preparation, lithium battery collector film preparation, capacitor conductive film preparation, OLED film preparation, etc. As one of the application technologies of the emerging high-technology industry, the technical means and application thereof have been developed at a high speed in recent years. But the current manufacturing method, processing quality and efficiency of micron-scale thickness metal conductive films are severely lagged behind high-end industry applications. For example, the composite copper foil and aluminum foil for the collector of the lithium battery are generally electroplated by adopting a calendaring method and an electrophoresis method, and the traditional vacuum coating method has the advantages of high energy consumption, serious pollution, extremely low processing quality and processing efficiency in the manufacturing process, and far lags behind the requirements of the rapidly-developed new energy power generation and other emerging industries. The reasons for this are mainly: Firstly, the traditional film coating method is not suitable for preparing large-area metal film products, and has serious defects in film uniformity and process repeatability; secondly, although vacuum coating belongs to the advanced manufacturing technology category of environmental protection, due to the high temperature property of copper and aluminum metal material evaporation and the expansibility requirement of the application industry on product specification and productivity, the existing coating device adopts a technical mode which has the problems of low processing precision, obvious inherent defects of a film, low production efficiency, no controllability and continuous working capacity and the like. Therefore, how to design a proper vacuum coating technology mode to improve coating quality and coating efficiency, reduce manufacturing cost and raw material consumption, simplify manufacturing flow is a technical problem faced by technicians in the industry. Disclosure of Invention The invention aims to provide a linear metal evaporation source for vacuum coating, which solves the problems in the background technology. The embodiment of the invention provides a linear metal evaporation source for vacuum coating, which comprises a container, a nozzle and a crucible; the container comprises a metal outer cover and an inner container; the inner container is arranged in the metal outer cover, and a heat insulation material is filled between the inner container and the metal outer cover; The containing cavity of the liner comprises a primary evaporation area, a pressurizing area, a secondary evaporation area and a heating area from bottom to top in sequence; The liner is made of graphite, the side walls of the liner of the primary evaporation zone, the pressurizing zone, the secondary evaporation zone and the heating zone are respectively and electrically connected with an external power supply, and heaters are formed in the container to heat the corresponding zones respectively; the nozzle is in a slit shape, is arranged at the top of the inner container and is communicated with the heating area; the crucible is arranged in the primary evaporation zone and is used for placing a coated metal raw material; The linear metal evaporation source is arranged in a vacuum chamber of the vacuum coating equipment, the primary evaporation zone is used for heating the coated metal to be vaporized, the pressurizing zone, the secondary evaporation zone and the heating zone are used for enabling the coated metal vapor to be transported to the nozzle in a saturated vapor pressure state, and the nozzle is used for enabling the coated metal vapor to be sprayed out in a linear jet flow mode so as to form a uniform and compact film layer on a coated workpiece. Based on the scheme, the linear metal evaporation source for vacuum coating is provided with the container, the nozzle and the crucible, wherein the container comprises the metal outer cover and the inner container, the inner container is arranged in the metal outer cover, and the heat insulation material is filled between the inner container and the metal outer cover. The material of inner bag is graphite, and the lateral wall in the primary evaporation district, booster zone, secondary evaporation district and the district of rising temperature of inner bag is connected with the power respectively, and the spout of nozzle is slit-shaped, sets up the top of inner bag, and the crucible setting is in the primary evaporation district. The linear metal evaporation source for vacuum coating is arranged in a vacuum chamber of vacuum coating equipment, and coat