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CN-117604493-B - Inner furnace tube assembly and reaction furnace

CN117604493BCN 117604493 BCN117604493 BCN 117604493BCN-117604493-B

Abstract

The application provides an inner furnace tube assembly and a reaction furnace, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of high molding difficulty of an inner furnace tube in a process. The inner furnace tube assembly is applied to a reaction furnace, the reaction furnace comprises an outer furnace tube and an inner furnace tube assembly, the inner furnace tube assembly comprises a first mounting frame, a second mounting frame and a plurality of connecting rods, the first mounting frame and the second mounting frame are arranged in parallel with the first mounting frame, two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame, the connecting rods are sequentially arranged around the hollow area to form a cavity, and the hollow area is configured to be an opening of the cavity. Through this kind of structure, when manufacturing interior boiler tube subassembly, only need simple first mounting bracket of manufacturing on the production technology, connecting rod and second mounting bracket just can assemble into interior boiler tube subassembly, reduced interior boiler tube subassembly's manufacturing degree of difficulty.

Inventors

  • ZHU TAIRONG
  • LIN JIAJI

Assignees

  • 拉普拉斯新能源科技股份有限公司

Dates

Publication Date
20260508
Application Date
20231229

Claims (10)

  1. 1. An inner furnace tube assembly, characterized in that it is applied to a reaction furnace comprising an outer furnace tube and the inner furnace tube assembly, wherein the inner furnace tube assembly comprises: the first mounting frame is provided with a hollowed-out area; the second installation frame is arranged in parallel with the first installation frame; the two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame; The connecting rods are sequentially arranged around the hollowed-out area to form a cavity, a process chamber is arranged in the cavity, and the hollowed-out area is configured as an opening of the cavity; the inner furnace tube assembly further comprises a mounting plate and a side plate, wherein the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, the side plate is connected with the second mounting frame and the mounting plate, and a uniform flow cavity is formed by surrounding the second mounting frame, the mounting plate and the side plate; the second mounting frame is provided with a plurality of air inlets and at least one first vent hole, the air inlets are configured to convey process gas to the uniform flow cavity, and the first vent hole is connected with the uniform flow cavity and the process cavity so as to convey the gas in the uniform flow cavity to the process cavity.
  2. 2. The inner furnace tube assembly of claim 1, wherein the first mount comprises a first recess and the second mount comprises a second recess; The first end of the connecting rod is inserted into the first groove, and the second end of the connecting rod is inserted into the second groove.
  3. 3. The inner furnace tube assembly of claim 2, wherein the first groove is a first annular groove and the second groove is a second annular groove, the first annular groove and the second annular groove being coaxially disposed; The first ends of the connecting rods are inserted into the first annular grooves, the second ends of the connecting rods are inserted into the second annular grooves, and the connecting rods are sequentially arranged into an annular shape along the first annular grooves, wherein the side faces of the adjacent connecting rods are in contact.
  4. 4. The inner furnace tube assembly of claim 1, wherein the connecting rod comprises a hollow rod and the hollow rod communicates with the inlet orifice to deliver process gas to the uniform flow chamber using the hollow rod.
  5. 5. The inner furnace tube assembly of claim 1, wherein the cavity has a process chamber therein; the inner furnace tube assembly further comprises a mounting plate and a side plate, wherein the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, and the side plate is connected with the second mounting frame and the mounting plate to form a uniform flow cavity; wherein the second mount further comprises a plurality of gas inlet holes configured to deliver process gas to the uniform flow chamber; The connecting rod comprises a hollow rod, the hollow rod penetrates through the second mounting frame to be communicated with the uniform flow cavity, the side wall of the hollow rod is provided with a second ventilation hole, and the second ventilation hole is connected with the cavity of the hollow rod and the process cavity so as to convey gas in the uniform flow cavity to the process cavity.
  6. 6. The inner furnace tube assembly according to any one of claims 2 to 5, further comprising at least one first leg disposed within the uniform flow chamber for connecting the second mounting bracket and the mounting plate.
  7. 7. The inner furnace tube assembly of claim 6, wherein the first leg is connected to a central region of the second mounting bracket and/or the first leg is connected to a central region of the mounting plate.
  8. 8. The inner furnace tube assembly of any one of claims 1 to 3, wherein the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein; the first mounting frame is provided with a third air vent, and the third air vent is communicated with the accommodating cavity and the process chamber.
  9. 9. The inner furnace tube assembly of any one of claims 1 to 3, wherein the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein; the connecting rod is provided with a fourth air hole, and the fourth air hole is communicated with the accommodating cavity and the process chamber.
  10. 10. A reaction furnace, characterized by comprising: the inner furnace tube assembly of any one of claims 1 to 9; an outer furnace tube having a receiving cavity configured to receive the inner furnace tube assembly.

Description

Inner furnace tube assembly and reaction furnace Technical Field The invention relates to the field of semiconductor or photovoltaic material processing, in particular to an inner furnace tube assembly and a reaction furnace. Background With the development of semiconductor or photovoltaic material processing technology, a part of chemical vapor deposition (Chemical Vapor Deposition, CVD) equipment adopts a double-layer furnace tube structure, i.e., an outer furnace tube is sleeved outside an inner furnace tube, and the inner furnace tube is used as a process chamber. However, the integrally formed inner furnace tube is difficult to form in the process, so that the integrally formed inner furnace tube cannot be widely used. Disclosure of Invention The present application has been made to solve the above-mentioned technical problems. The embodiment of the application provides an inner furnace tube assembly and a reaction furnace. In a first aspect, an embodiment of the application provides an inner furnace tube assembly, which is applied to a reaction furnace, wherein the reaction furnace comprises an outer furnace tube and an inner furnace tube assembly, the inner furnace tube assembly comprises a first mounting frame and a second mounting frame, the first mounting frame is provided with a hollowed-out area, the second mounting frame is arranged in parallel with the first mounting frame, two ends of each connecting rod are respectively connected with the first mounting frame and the second mounting frame, the connecting rods are sequentially arranged around the hollowed-out area to form a cavity, and the hollowed-out area is configured to be an opening of the cavity. In some embodiments, the first mounting frame comprises a first groove, the second mounting frame comprises a second groove, the first end of the connecting rod is inserted into the first groove, and the second end of the connecting rod is inserted into the second groove. In some embodiments, the first groove is a first annular groove, the second groove is a second annular groove, the first annular groove and the second annular groove are coaxially arranged, wherein the first ends of the plurality of connecting rods are inserted into the first annular groove, the second ends of the plurality of connecting rods are inserted into the second annular groove, and the plurality of connecting rods are sequentially arranged into an annular shape along the first annular groove, and the side surfaces of the adjacent connecting rods are in contact. In some embodiments, the chamber is internally provided with a process chamber, wherein the inner furnace tube assembly further comprises a mounting plate and a side plate, the mounting plate is positioned on one side, far away from the first mounting frame, of the second mounting frame, the side plate is connected with the second mounting frame and the mounting plate, the second mounting frame, the mounting plate and the side plate are surrounded to form a uniform flow chamber, the second mounting frame is provided with a plurality of air inlets and at least one first air vent, the air inlets are configured to convey process gas to the uniform flow chamber, and the first air vents are connected with the uniform flow chamber and the process chamber to convey the gas in the uniform flow chamber to the process chamber. In some embodiments, the connecting rod comprises a hollow rod, and the hollow rod communicates with the gas inlet holes to deliver the process gas to the uniform flow chamber using the hollow rod. In some embodiments, the chamber has a process chamber therein, wherein the inner furnace tube assembly further comprises a mounting plate and a side plate, wherein the mounting plate is located on a side of the second mounting frame remote from the first mounting frame, and the side plate connects the second mounting frame and the mounting plate to form a uniform flow chamber, wherein the second mounting frame further comprises a plurality of gas inlet holes configured to deliver process gas to the uniform flow chamber, wherein the connecting rod comprises a hollow rod that communicates with the uniform flow chamber through the second mounting frame, wherein a side wall of the hollow rod has second vent holes that connect the cavity of the hollow rod and the process chamber to deliver gas within the uniform flow chamber to the process chamber. In some embodiments, at least one first strut is disposed within the uniform flow chamber for connecting the second mount and the mounting plate. In some embodiments, the first leg is coupled to a central region of the second mount and/or the first leg is coupled to a central region of the mounting plate. In some embodiments, the outer furnace tube has a receiving cavity configured to receive the inner furnace tube assembly, the cavity having a process chamber therein, and the first mount has a third vent communicating the receiving cavity with the process chamber