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CN-117733257-B - Electrostatic drive micro-feed actuator based on magnetic suspension support and electrolytic machining device

CN117733257BCN 117733257 BCN117733257 BCN 117733257BCN-117733257-B

Abstract

The invention provides an electrostatic driving micro-feed actuator based on magnetic suspension support and an electrolytic machining device, wherein the electrostatic driving micro-feed actuator comprises a shell, an electrostatic driving stator electrode plate, an electrostatic driving rotor, a stator coil, an inner shaft and a tool electrode; the electrostatic driving stator electrode plate is fixedly arranged at the top of the shell, the stator coil is fixedly arranged in the shell, the electrostatic driving rotor is suspended and arranged between the electrostatic driving stator electrode plate and the stator coil, the top of the inner shaft penetrates through the stator coil and then is fixedly connected with the electrostatic driving rotor, and the bottom of the inner shaft penetrates out of the shell and then is connected with the tool electrode. The invention improves the electrolytic machining speed and stability, reduces the stray effect and improves the electrolytic machining precision.

Inventors

  • HUANG RUINING
  • GUO YUSHENG

Assignees

  • 哈尔滨工业大学(深圳)(哈尔滨工业大学深圳科技创新研究院)

Dates

Publication Date
20260512
Application Date
20231221

Claims (8)

  1. 1. The electrostatic driving micro-feed actuator based on magnetic suspension support is characterized by comprising a shell, an electrostatic driving stator electrode plate, an electrostatic driving rotor, a stator coil, an inner shaft and a tool electrode; The electrostatic driving stator electrode plate, the electrostatic driving rotor, the stator coil and the inner shaft are coaxially arranged in the shell; The static driving stator electrode plate is fixedly arranged at the top of the shell, the stator coil is fixedly arranged in the shell, the static driving rotor is suspended between the static driving stator electrode plate and the stator coil, the top of the inner shaft penetrates through the stator coil and then is fixedly connected with the static driving rotor, and the bottom of the inner shaft penetrates out of the shell and then is connected with the tool electrode; The electrostatic driving rotor comprises an electrostatic driving rotor electrode plate, an induction coil and a permanent magnet which are sequentially arranged from top to bottom, and the inner shaft penetrates through the permanent magnet and the induction coil and is fixedly connected with the electrostatic driving rotor electrode plate.
  2. 2. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the bottom of the housing is provided with a linear limit bearing, the inner shaft being threaded into the linear limit bearing.
  3. 3. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the stator coil is a built-in iron-nickel alloy stator coil.
  4. 4. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the induction coil is a copper induction coil.
  5. 5. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the inner shaft is a smooth hollow structure.
  6. 6. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the housing is further provided with a power connection aperture.
  7. 7. The magnetically levitated support based electrostatically driven micro-feed actuator of claim 1, wherein the top of the housing is provided with a mounting clip.
  8. 8. An electrochemical machining apparatus comprising an electrostatically driven micro-feed actuator based on magnetically levitated supports as claimed in any one of claims 1 to 7.

Description

Electrostatic drive micro-feed actuator based on magnetic suspension support and electrolytic machining device Technical Field The invention relates to the technical field of electrolytic machining, in particular to an electrostatic driving micro-feed actuator based on magnetic suspension support and an electrolytic machining device. Background The electrochemical machining technology is based on the principle that electrons are obtained from a metal anode in the electrolytic process so as to be oxidized into metal ions to be dissolved in electrolyte, and a workpiece is taken as an electrolytic anode, and a cutter is taken as an electrolytic cathode so as to achieve the machining mode of removing workpiece materials. Because the electrolytic machining is performed in a non-contact mode, cutting stress does not exist between a workpiece and a cutter, and the cutter electrode basically does not generate loss according to the principle of reduction reaction of a cathode in the electrolytic process, the electrolytic machining technology is a good choice for continuous precise machining, and has good application prospects for machining of micro parts, micro holes and micro three-dimensional structures. In the electrolytic machining process, as the extremely small spacing between the workpiece and the cutter is required to be kept in a micrometer scale, the success or failure of electrolytic machining is directly influenced, the precision requirement is directly influenced, the traditional electrolytic machining mode relies on a feeding machine tool with high precision and high price, and the practical application range of electrolytic machining is greatly limited. Under the current domestic manufacturing background, the precision of a common servo motor or a linear motor is about ten micrometers, the precision requirement of micro electrolysis cannot be met, although the precision of the linear motor with a high-precision grating ruler can reach 0.01 micrometers, the linear motor is expensive, control software is not powered on, and the linear motor is difficult to apply in small and medium-sized processing enterprises, so that a processing method with low processing cost and simple control is needed to realize the micrometer control of the electrode spacing. In the aerospace field, the processing of the diversion holes of turbine blades of an aeroengine is one of the problems which plague the autonomous research and development of domestic engines, and the electrolytic processing has no problems of contact stress of mechanical processing, melting effect of electric spark processing and the like, so that the purpose of processing is realized by a particle removal mode, and the processing surface is smooth and has no cracks, thereby being a suitable method for realizing the processing of precise micro diversion holes. In order to solve the problem that the gap between the electrolytic machining poles is not easy to control, a great deal of researches and attempts are made by students at home and abroad. Zhao Chenglu, li Xing et al at the university of Harbin industries (Shenzhen) use planar electrodes for electrolytic machining, and use planar electrode sheets as tool electrodes for electrolytic machining, and force the electrode sheets to deform by electrostatic force between the tool electrodes and a workpiece to realize micro-feeding, so that charge transfer in the machining process realizes rebound, and the tool electrodes are far away from the workpiece to realize a machining cycle. Although the mode of realizing electrostatic driving micro-feeding through deformation can realize small-gap self-adaptive machining, the large area of the micro-feeding device leads to low current density and slower machining speed, and the shape of a tool electrode is too single to be suitable for machining of complex structures. Similar to the mode of electrostatic driving micro-feeding, students at home and abroad perform related researches based on ultrasonic auxiliary micro-electrolytic machining, and good machining effect is obtained. Polish scholars A Rusza apply ultrasonic vibration with frequency of 22kHz and amplitude of less than 16 μm to tool electrode and compare with traditional electrolytic machining, and also Skoczypiec performs auxiliary electrolytic machining under the condition that the frequency is 20kHz and the tool amplitude is less than 10 μm, which effectively improves MRR, korean scholars Insoon Yang performs deep small hole machining on 304 stainless steel under the condition that the ultrasonic frequency is 40kHz and the amplitude is 4 μm. It can be concluded from the comparison that the ultrasonic-assisted electrolytic machining can effectively improve the electrolytic machining effect, including improvement in the aspects of workpiece surface quality, micropore depth, precision and the like, and the greater the ultrasonic frequency of the assistance, the smaller the amplitude, the better the