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CN-117797574-B - Plasma water-washing type tail gas treatment device and method

CN117797574BCN 117797574 BCN117797574 BCN 117797574BCN-117797574-B

Abstract

The invention discloses a plasma water washing type tail gas treatment device and method, comprising a water curtain chamber and a water washing tower which are arranged on a circulating water tank, wherein the water curtain chamber is circumferentially arranged in a rotating way, an axial water curtain assembly and a circumferential water curtain assembly are arranged in the water curtain chamber, the axial water curtain assembly downwards conducts water to form an axial water curtain with the length along the axial direction of the water curtain chamber and the width along the radial direction of the water curtain chamber, the circumferential water curtain assembly sprays water to the circumferential center to form a circumferential water curtain along the radial direction of the water curtain chamber, a vertically lifting water-filtering dust plate is arranged in the water washing tower, openable water holes and micro-filtering holes are densely distributed on the water-filtering dust plate, when the water-filtering dust plate moves downwards, the water holes are closed, and dust is downwards limited in a dust discharging bottom cavity between the water-filtering dust plate and the bottom of the circulating water tank through water seepage dust filtering of the micro-filtering holes. Through carrying out water curtain cooling dust fall and the operation of straining water pressure dirt to tail gas, more high-efficient and more in time clear away the dust that tail gas contained, avoid the dust too much to exist and cause the influence to tail gas treatment.

Inventors

  • YANG HAOQI

Assignees

  • 无锡索奥半导体科技有限公司

Dates

Publication Date
20260505
Application Date
20231226

Claims (8)

  1. 1. The plasma water washing type tail gas treatment device comprises a water curtain chamber (4) and a water washing tower (9) which are respectively and air-guide-communicated and arranged on a circulating water tank (2), wherein an air pipe group (6) and a combustion chamber (3) are sequentially arranged on the water curtain chamber (4) along the direction of waste gas input diversion, and a plasma torch (5) is arranged in the direction of a central axis corresponding to the combustion chamber (3); The water curtain device is characterized in that the water curtain chamber (4) is circumferentially arranged in a rotating way, an axial water curtain assembly and a circumferential water curtain assembly are installed in the water curtain chamber, the axial water curtain assembly downwards conducts water to form an axial water curtain (100) with the length along the axial direction of the water curtain chamber (4) and the width along the radial direction of the water curtain chamber (4), the circumferential water curtain assembly sprays water to the circumferential center to form a circumferential water curtain (200) along the radial direction of the water curtain chamber (4), and when the water curtain chamber (4) circumferentially rotates, the axial water curtain (100) is synchronously driven to cover a cooling cavity of the water curtain chamber (4) in a circumferential rotating mode, and the circumferential water curtain (200) is synchronously driven to cover an air inlet of the cooling cavity in the circumferential rotating mode; The water washing tower (9) is internally provided with a vertically lifting water filtering pressure dust plate (21), the water filtering pressure dust plate (21) is provided with water holes (210) which can be opened and closed and micro-filtration holes (211) are densely distributed, when the water filtering pressure dust plate (21) moves upwards, the water holes (210) are opened, when the water filtering pressure dust plate (21) moves downwards, the water holes (210) are closed, and dust is downwards pressed and limited in a dust discharging bottom cavity (23) between the water filtering pressure dust plate (21) and the bottom of the circulating water tank (2) through water seepage dust filtration of the micro-filtration holes (211); the axial water curtain assembly comprises an upper water spraying pipe (18) and a lower water suction pipe (17), wherein the upper water spraying pipe (18) and the lower water suction pipe (17) are radially arranged through the center of a water curtain chamber (4), an upper water spraying hole (180) of the upper water spraying pipe (18) and a lower water suction hole (170) on the lower water suction pipe (17) are vertically and oppositely arranged, and the water spraying power of the upper water spraying hole (180) is matched with the water suction power of the lower water suction hole (170) to form the axial water curtain (100); the axial water curtain assembly further comprises an annular water spray pipe (19), the annular water spray pipe (19) is connected to the outside of the upper water spray pipe (18) in a conducting mode, radial water spray holes (190) are formed in the inner ring of the annular water spray pipe (19), the upper water spray pipe (18) is impacted through the radial water spray holes (190), the circumferential water curtain (200) is formed, and the circumferential water curtain (200) in a rotating state forms a cutting action on tail gas flow entering the cooling cavity.
  2. 2. The plasma water washing type tail gas treatment device according to claim 1, comprising a supporting arm (16) corresponding to the water curtain chamber (4) and a rotary driving mechanism (12), wherein the water curtain chamber (4) is mounted on the supporting arm (16) connected with the machine case (1) in a rotary fit manner, the rotary driving mechanism (12) drives the water curtain chamber to realize the alternate rotary motion of forward rotation and reverse rotation, and the rotary progress of each rotary direction cannot exceed one circle.
  3. 3. The plasma water washing type tail gas treatment device according to claim 2, wherein the circulating water tank (2) is provided with a circulating water supply pump (13) and a water return pump (31), the circulating water supply pump (13) supplies water to an upper spray pipe (18) and an annular spray pipe (19) in the water curtain chamber (4) and a spray assembly in the water washing tower (9), and the water return pump (31) supplies water suction power to a lower suction pipe (17) in the water curtain chamber (4).
  4. 4. The plasma water washing type tail gas treatment device according to claim 3, wherein the water hole (210) of the water filtering dust plate (21) is correspondingly provided with an elastic water driving valve (26) for executing opening and closing actions, the elastic water driving valve (26) comprises a support (261) positioned at the top end of the water hole (210), a valve cover (262) positioned at the bottom end of the water hole (210) and an elastic part (263) penetrating through the water hole (210) and elastically connecting the support (261) with the valve cover (262), and the opening and closing actions are executed through the resistance driving of water in the circulating water tank (2) when the water filtering dust plate (21) moves up and down.
  5. 5. The plasma water washing type tail gas treatment device according to claim 4, wherein a dust collecting plate (22) is arranged at the inner bottom of the circulating water tank (2), a spacing space between the water filtering dust collecting plate (21) and the dust collecting plate (22) is the dust discharging bottom cavity (23), a dust collecting cavity (220) is formed in the dust collecting plate (22), dust collecting holes (221) of the dust collecting cavity (220) are uniformly distributed on the top surface of the dust collecting plate (22), and a dust discharging pipeline (14) for abutting the dust discharging pump (15) is connected to the dust collecting cavity (220).
  6. 6. The plasma water washing type tail gas treatment device according to claim 5, comprising a lifting driving mechanism (24) corresponding to the water filtering dust plate (21), wherein a plug frame (25) which is in sliding contact with the inner wall of the circulating water tank (2) is arranged on the periphery of the water filtering dust plate (21), and the lifting driving mechanism (24) drives the water filtering dust plate (21) to lift to realize water inlet action.
  7. 7. A plasma water washing type tail gas treatment device according to claim 6, wherein the water washing tower (9) is composed of a primary water washing tower (10) supplied with water through a circulating water supply pump (13) and a secondary water washing tower (11) supplied with water from the market.
  8. 8. The tail gas treatment method based on the plasma water-washing type tail gas treatment device according to any one of claims 1 to 7 is characterized by comprising the following steps: The method comprises the steps that firstly, a plasma torch (5) is excited by a direct current power supply to generate plasma and high temperature by high-purity N 2 ; step two, combining the high-temperature plasma decomposition and water dissolution processes, and treating tail gas generated in the industrial production process at high temperature through a combustion chamber (3) to react into powder or water-soluble substances; step three, cooling the byproducts and dust through a water curtain of a water curtain chamber (4); And fourthly, spraying the byproducts and dust cooled by the water curtain through a water washing tower, flushing and removing or removing the byproducts and dust by water dissolution, and spraying and cooling the gas.

Description

Plasma water-washing type tail gas treatment device and method Technical Field The invention belongs to the technical field of tail gas treatment in industrial production, and particularly relates to a plasma water-washing type tail gas treatment device and method. Background The tail gas generated in industrial production is purified by adopting a plasma water-washing waste gas treatment technology, such as tail gas generated in semiconductor production, photovoltaic production and the like, particularly nitrogen is ionized into plasma under the action of strong current, the generated high temperature is used for decomposing the tail gas, and the tail gas can be emptied after reaching the standard after being cooled by a water curtain and sprayed and washed sequentially. Dust contained in the tail gas easily causes blockage to equipment, and seriously affects treatment efficiency. The existing water curtain cooling is a static water curtain, the water curtain is easy to be scattered by tail gas flow and affected by contact range, the water curtain cooling dust fall is not thorough enough, the tail gas containing more dust is led to be input into a water scrubber for water washing operation, dust in a water tank is not concentrated, the dust is difficult to discharge, the dust is dispersed in water and can be circularly supplied to the water curtain cooling and water washing operation steps by a circulating pump, and the dust is difficult to clean and is circularly introduced into a production procedure. Disclosure of Invention The invention aims to overcome the defects in the prior art, and provides a plasma water-washing type tail gas treatment device and a plasma water-washing type tail gas treatment method. In order to achieve the aim, the plasma water washing type tail gas treatment device comprises a water curtain chamber and a water washing tower which are respectively and air-guide-communicated and arranged on a circulating water tank, wherein an air tube group and a combustion chamber are sequentially arranged on the water curtain chamber along the flow guiding direction of waste gas input, and a plasma torch is arranged in the direction of a central axis of the corresponding combustion chamber; The water curtain chamber is circumferentially arranged in a rotating way, an axial water curtain assembly and a circumferential water curtain assembly are installed in the water curtain chamber, the axial water curtain assembly downwards guides water to form an axial water curtain with the length along the axial direction of the water curtain chamber and the width along the radial direction of the water curtain chamber, and the circumferential water curtain assembly sprays water to the circumferential center to form a circumferential water curtain along the radial direction of the water curtain chamber; The water washing tower is characterized in that a vertically lifting water filtering pressure dust plate is arranged in the water washing tower, water holes capable of being opened and closed are formed in the water filtering pressure dust plate, micro-filtration holes are densely distributed in the water filtering pressure dust plate, water is led to the water holes when the water filtering pressure dust plate moves upwards, the water holes are closed when the water filtering pressure dust plate moves downwards, and dust is pushed down and limited in a dust discharging bottom cavity between the water filtering pressure dust plate and the bottom of the circulating water tank through water seepage dust filtration of the micro-filtration holes. The axial water curtain assembly comprises an upper water spray pipe and a lower water suction pipe, wherein the upper water spray pipe and the lower water suction pipe are radially arranged through the center of a water curtain chamber, an upper water spray hole of the upper water spray pipe and a lower water suction hole of the lower water suction pipe are vertically and oppositely arranged, and the water spray power of the upper water spray hole is matched with the water suction power of the lower water suction hole to form the axial water curtain. The axial water curtain assembly further comprises an annular water spray pipe, the annular water spray pipe is connected to the outside of the upper water spray pipe in a conducting mode, a radial water spray hole is formed in the inner ring of the annular water spray pipe, the upper water spray pipe is impacted through the radial water spray hole, the circumferential water curtain is formed, and the circumferential water curtain in a rotating state forms a cutting action on tail gas flow entering the cooling cavity. The water curtain chamber is arranged on the support arm connected with the case in a rotating fit manner, the rotation driving mechanism drives the water curtain chamber to realize the alternate rotation action of forward rotation and reverse rotation, and the rotation progress of each rotation direction c