CN-117815971-B - Etching solution allocation detection data processing system

CN117815971BCN 117815971 BCN117815971 BCN 117815971BCN-117815971-B

Abstract

The invention relates to the technical field of etching liquid production and provides an etching liquid allocation detection data processing system which comprises an etching liquid raw material weighing device, a stirring device, a conveying device and an industrial computer, wherein the etching liquid raw material weighing device comprises a supporting frame, a raw material tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electric control valve and a second electric control valve, the etching liquid raw material weighing device is in multiple connection with the industrial computer, the stirring device comprises a lifting driving assembly, a lifting seat, a stirring driving assembly and a stirring shaft, and the conveying device comprises a base, a conveying belt and a container. The invention has the advantages that the etching solutions with different raw material ratios are automatically prepared, the etching solutions are prepared in batches by sequentially passing through the material receiving area by a plurality of containers, and then transported to the etching solution detection area, so that the efficiency of the etching solution is improved.

Inventors

LIN QIUYU
CUI WENTAO
SHAO ZHEN

Assignees

福建钰融科技有限公司

Dates

Publication Date: 20260505
Application Date: 20231215

Claims (4)

1. An etching solution preparation detection data processing system, characterized by comprising: Etching liquid raw material weighing device, stirring device, transportation device and industrial computer; The etching liquid raw material weighing device comprises a supporting frame, a raw material tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electric control valve and a second electric control valve, wherein the raw material tank is fixedly arranged at the top of the supporting frame, an outlet of the raw material tank is fixedly connected with the upper end of the first conveying pipe, the first electric control valve is installed on the first conveying pipe, the lower end of the first conveying pipe is aligned with an inlet of the weighing tank, the weighing tank is placed at a detection end of the weighing sensor, the weighing sensor is fixedly arranged in the middle of the supporting frame, an outlet of the weighing tank is connected with the upper end of the second conveying pipe, and the second conveying pipe is provided with the second electric control valve; The etching liquid raw material weighing devices are multiple, and the first electric control valve, the second electric control valve and the weighing sensor are all electrically connected with the industry; The stirring device comprises a lifting driving assembly, a lifting seat, a stirring driving assembly and a stirring shaft, wherein the lifting seat is connected with the supporting frame through the lifting driving assembly, and the stirring shaft is connected with the lifting seat through the stirring driving assembly; The transportation device comprises a base, a transportation belt and a container, wherein the base is fixedly connected with the transportation belt, a plurality of bases are arranged at intervals along the length direction of the transportation belt, the base is provided with a groove, the container is placed in the groove, The material receiving area is arranged below the second material conveying pipe and the stirring shaft, the container reaches the material receiving area firstly, the raw materials of the etching solution fall into the container, and the stirring shaft stirs the raw materials in the container; the industrial computer stores an etching solution formula table, the etching solution formula table comprises a plurality of groups of etching solution formula data, each group of etching solution formula data comprises a group number, a raw material type and the weight of each raw material, the group numbers of each group of etching solution formula data are different, the raw material type and the weighing sensor are correspondingly bound by the industrial computer, and the weight of each raw material is the weighing threshold value corresponding to the weighing sensor; When the industrial computer sends a weighing signal to a first electric control valve, the first electric control valve is opened, and when the weight increase of the weighing tank is greater than or equal to the weighing threshold of the weighing sensor, the first electric control valve is closed; When the industrial computer sends a blanking signal to a second electric control valve, the second electric control valve is opened, and when the weighing value of the weighing sensor is the weight of the weighing tank, the second electric control valve is closed; the surface of the container is stuck with bar codes, the bar codes of each container are different, the transport device transports the container to an etching liquid detection area, a first bar code scanning gun is arranged in the material receiving area, a second bar code scanning gun is arranged in the etching liquid detection area, and the first bar code scanning gun and the second bar code scanning gun are electrically connected with the industry; After the first bar code scanning gun scans bar codes of containers positioned in the material receiving area, the industrial computer binds the bar codes with the group numbers, and the bar codes are in one-to-one correspondence with the group numbers; the etching liquid detection area is provided with a data input device which is electrically connected with the industrial computer and is used for inputting etching liquid detection result data; The industrial computer stores the etching liquid formula data and the etching liquid detection result data of each group in a database.
2. The etching solution formulation inspection data processing system according to claim 1, wherein the data input device comprises a keyboard, a touch screen, an industrial camera, an electron microscope.
3. The etching solution preparation detection data processing system according to claim 1, wherein the lifting driving component is an electric push rod, and the stirring driving component is a servo motor.
4. The etching solution preparation detection data processing system according to claim 1, wherein a container in-place sensor is installed in the material receiving area, and the container in-place sensor is electrically and mechanically connected with the industry.

Description

Etching solution allocation detection data processing system Technical Field The invention relates to the technical field of etching liquid production, in particular to an etching liquid preparation detection data processing system. Background In the panel TFT industry, etching is an indispensable process, and wet etching is widely used for a long time due to its advantages of fast etching speed, high selectivity, simple process, etc. Wet etching is a process in which the target material is etched away by a chemical reaction between the target material and the etching liquid. The etching liquid type comprises acidic copper chloride, alkaline copper chloride, ferric chloride, ammonium persulfate, sulfuric acid/chromic acid, sulfuric acid/hydrogen peroxide etching liquid and the like. In order to achieve the desired etching effect, such as different etching targets and different etching speeds, it is necessary to prepare the etching solution. The traditional mode of preparing the etching solution is that researchers manually increase or decrease the weight of the raw materials in a test tube container according to the types of the raw materials of the existing etching solution to prepare the etching solution, or add new raw materials or replace old raw materials on the basis of the original etching solution, and when the types of the raw materials of the etching solution and the weight of each raw material are changed, the actual etching effect is correspondingly changed. In order to detect etching effect, it is necessary to prepare etching solutions having different ratios of raw materials to confirm actually required etching solutions, and manually mix the raw materials into a test tube container one by one, and the preparation efficiency is very low. Therefore, how to improve the efficiency of etching solution formulation is a technical problem to be solved in the present art. Disclosure of Invention The invention aims to solve the technical problem of providing an etching solution allocation detection data processing system which improves the efficiency of allocating etching solution. The invention is realized in that the etching solution preparation detection data processing system comprises: Etching liquid raw material weighing device, stirring device, transportation device and industrial computer; The etching liquid raw material weighing device comprises a supporting frame, a raw material tank, a weighing sensor, a first conveying pipe, a second conveying pipe, a first electric control valve and a second electric control valve, wherein the raw material tank is fixedly arranged at the top of the supporting frame, an outlet of the raw material tank is fixedly connected with the upper end of the first conveying pipe, the first electric control valve is installed on the first conveying pipe, the lower end of the first conveying pipe is aligned with an inlet of the weighing tank, the weighing tank is placed at a detection end of the weighing sensor, the weighing sensor is fixedly arranged in the middle of the supporting frame, an outlet of the weighing tank is connected with the upper end of the second conveying pipe, and the second conveying pipe is provided with the second electric control valve; The etching liquid raw material weighing devices are multiple, and the first electric control valve, the second electric control valve and the weighing sensor are all electrically connected with the industry; The stirring device comprises a lifting driving assembly, a lifting seat, a stirring driving assembly and a stirring shaft, wherein the lifting seat is connected with the supporting frame through the lifting driving assembly, and the stirring shaft is connected with the lifting seat through the stirring driving assembly; The transportation device comprises a base, a transportation belt and a container, wherein the base is fixedly connected with the transportation belt, a plurality of bases are arranged at intervals along the length direction of the transportation belt, the base is provided with a groove, the container is placed in the groove, The second conveying pipe and the lower part of the stirring shaft are material receiving areas, the container reaches the material receiving areas firstly, the raw materials of the etching solution fall into the container, the stirring shaft stirs the raw materials in the container, and then the container reaches the etching solution detection area. Further, the industrial computer stores an etching solution formula table, wherein the etching solution formula table comprises a plurality of groups of etching solution formula data, each group of etching solution formula data comprises a group number, a raw material type and the weight of each raw material, the group numbers of each group of etching solution formula data are different, the raw material type and the weighing sensor are correspondingly bound by the industrial computer, and the weight of each raw material is