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CN-117926177-B - Metal mask and manufacturing method thereof

CN117926177BCN 117926177 BCN117926177 BCN 117926177BCN-117926177-B

Abstract

The disclosure provides a metal mask and a manufacturing method thereof, wherein the mask comprises a frame, a plurality of metal strips, a plurality of spliced metal sheets, a plurality of openings, and an insulating coating layer, wherein the metal strips comprise a plurality of first-direction metal strips and/or a plurality of second-direction metal strips connected with the frame, the metal strips cross over the hollowed-out parts of the frame, the spliced metal sheets are connected with the first-direction metal strips and/or the second-direction metal strips, two ends of each spliced metal sheet are connected with the frame and cover the hollowed-out parts of the frame, and the spliced metal sheets are provided with a plurality of openings in an array manner. The technical scheme in the disclosure adopts a spliced mode, avoids the bottleneck that a wide large-size screen is required in the prior art scheme, realizes the same use effect as a general metal mask or a packaging layer metal mask manufactured by a full-size screen, and enables the application of the large-size AMOLED metal mask to be possible.

Inventors

  • ZHANG CAIXING
  • QIAN CHAO

Assignees

  • 江苏高光半导体材料有限公司

Dates

Publication Date
20260512
Application Date
20240124

Claims (8)

  1. 1. The utility model provides a metal mask version which characterized in that is used for forming the encapsulation layer in AMOLED production process at least, includes: A frame (10); The metal strips comprise a plurality of first-direction metal strips (21) and a plurality of second-direction metal strips (22) which are connected with the frame (10), the metal strips cross over the hollowed-out part of the frame (10), and the first direction is perpendicular to the second direction; the splicing type metal sheets (30) are connected with the first-direction metal strips (21) and the second-direction metal strips (22), and the two ends of each splicing type metal sheet are connected with the frame (10) and cover the hollowed-out parts of the frame (10), and a plurality of openings (31) are formed in the splicing type metal sheets (30) in an array mode; The whole metal mask plate or one or more of the parts are provided with an insulating coating layer (23); the overlapping positions of the first direction metal strip (21) and the second direction metal strip (22) are respectively provided with a first groove (211) and a second groove (221), and the first groove (211) and the second groove (221) are embedded with each other to reduce the thickness of the overlapping position; Among the plurality of metal strips: The metal strip parallel to the long axis of the spliced metal sheet (30) is provided with a third groove (222), the third groove (222) is a step groove, and two long sides of the spliced metal sheet (30) are respectively embedded into the third grooves (222) of two adjacent metal strips; the metal strip perpendicular to the long axis of the spliced metal sheet (30) is provided with a fourth groove (212) which can be embedded into the overlapped part of the spliced metal sheet (30) and the metal strip; the third groove (222) or the fourth groove (212) is used for reducing the thickness of the overlapped part of the metal strip and the spliced metal sheet (30).
  2. 2. The metal reticle of claim 1, wherein a plurality of said spliced metal sheets (30) are embedded within one of said fourth recesses (212).
  3. 3. The metal mask according to claim 1, wherein the frame (10) or the metal strip is made of an alloy with the following marks, namely Invar36, SUS304 and SUS420, and has a thickness of 0.03mm to 0.20mm; The material of the spliced metal plate (30) is selected from the alloys with the following marks, invar36 and SUS420.
  4. 4. The metal mask according to claim 1, wherein a clearance area defined by the plurality of first-direction metal strips (21) and the second-direction metal strips (22) is larger than a corresponding opening (31) in the spliced metal sheet (30).
  5. 5. The metal mask according to claim 1, wherein the insulating coating layer (23) is made of a material selected from the group consisting of aluminum oxide, yttrium oxide, silicon nitride and silicon oxide.
  6. 6. The metal mask according to claim 1, wherein, Overlapping said metals strips are arranged between each other, The metal strips and the spliced metal sheets (30) are mutually connected, The metal strip and the frame (10) are mutually connected, And/or The spliced metal sheet (30) and the frame (10) are mutually separated Is fixed in a state in which the metal strip is tensioned.
  7. 7. A method of producing a metal mask as claimed in any one of claims 1 to 6, wherein the insulating coating layer (23) is formed on the surfaces of the frame (10), the metal strips and the spliced metal sheets (30) separately before assembly.
  8. 8. A method for manufacturing a metal mask according to any one of claims 1 to 6, wherein: tensioning the metal strip; and fixedly connecting one or more of the following components in the tensioning process: -the first (21) and second (22) overlapped direction metal strips, -the first (21) and splice (30) overlapped direction metal strips, -the second (22) and splice (30) overlapped direction metal strips; after the fixing, the parts are integrally coated to form the insulating coating layer (23).

Description

Metal mask and manufacturing method thereof Technical Field The disclosure relates to the field of AMOLED production, in particular to a metal mask plate and a manufacturing method thereof. Background The metal mask is an important tool for an AMOLED (active matrix organic light emitting diode) display panel in the preparation process, and is mainly used for limiting a film material deposition area in the process of evaporating organic materials or forming a packaging layer and the like. With the continuous development of technology and market demands, the production line generation of display panels (generally meaning larger glass substrates) is also iterated continuously, and with the rising of the production line of large-generation (G8.5 generation and above) AMOLED, the demand for larger-size metal masks is growing. However, the size limitation of the existing original rolling equipment is limited, the large-width original material on which the large-size metal mask depends cannot be effectively supplied, and the investment limit of the special large-width rolling equipment is extremely high, which definitely limits the pace of the AMOLED industry to the higher generation line. Disclosure of Invention In order to solve or improve the existing technical problems, a first aspect of the present invention provides a metal mask, which can be at least used to form a packaging layer in an AMOLED production process, and mainly includes: A frame; the metal strips comprise a plurality of first-direction metal strips and/or a plurality of second-direction metal strips which are connected with the frame, and the metal strips cross over the hollowed-out parts of the frame; The splicing type metal sheets are connected with the first-direction metal strips and/or the second-direction metal strips, and the two ends of each splicing type metal sheet are connected with the frame and cover the hollowed-out parts of the frame; the whole metal mask plate or one or more of the parts are provided with an insulating coating layer. The scheme adopts a splicing mode, avoids the bottleneck of the wide large-size screen in the prior art, realizes the same use effect as the general metal mask or the packaging layer metal mask for manufacturing the full-size screen, and enables the application of the large-size AMOLED metal mask to be possible. Optionally, the first direction metal strips and the second direction metal strips are included, and the first direction is perpendicular to the second direction; The overlapping positions of the first direction metal strip and the second direction metal strip are respectively provided with a first groove and a second groove, and the first grooves and the second grooves are embedded with each other to reduce the thickness of the overlapping positions. Optionally, among the plurality of metal strips: the metal strips parallel to the long shafts of the spliced metal sheets are provided with third grooves, the third grooves are step grooves, and two long sides of the spliced metal sheets are respectively embedded into the third grooves of two adjacent metal strips; The metal strip vertical to the long shaft of the spliced metal sheet is provided with a fourth groove, and the part of the spliced metal sheet, which is overlapped with the metal strip, can be embedded; the third groove or the fourth groove is used for reducing the thickness of the overlapped part of the metal strip and the spliced metal sheet. Further, a plurality of spliced metal sheets are embedded in one fourth groove. In the above alternative scheme, the metal strips staggered horizontally and vertically are arranged at the hollowed-out part of the frame, and the tensioned metal strips can support the spliced metal sheets. By means of the first groove and the second groove which are formed in the metal strip, the phenomenon that the overlapped parts of the metal strip in the first direction and the metal strip in the second direction are mutually staggered due to the influence of external force is avoided, and the insulation coating layer is damaged. In addition, the third groove and the fourth groove can also avoid the phenomenon that the overlapped parts of the metal strips of the spliced metal sheets are affected by external force to mutually shift, so that the insulating coating layer is damaged. Meanwhile, the grooves of the types effectively reduce the thickness of the overlapped part of the parts, reduce the film crossing difference of the overlapped part, and also play a role in protecting the film. And shielding of structures such as metal strips and the like on evaporation materials can be reduced, so that the evaporation film is more uniform. Alternatively, the frame or the metal strip is made of an alloy of Invar36, SUS304, SUS420, 0.03mm to 0.20mm in thickness; the material of the spliced metal plates is selected from the alloys of Invar36 and SUS420. Optionally, the clearance area surrounded by the plurality of me