CN-118451040-B - Active oxygen supply device, treatment device using active oxygen, and treatment method using active oxygen

CN118451040BCN 118451040 BCN118451040 BCN 118451040BCN-118451040-B

Abstract

Provided is an active oxygen supply device capable of treating the surface of an object to be treated with active oxygen more stably. The active oxygen supplying device is provided with a housing having an opening portion, and a plasma exciter and an ozone decomposing device included therein. In the plasma exciter, a first electrode, a dielectric, and a second electrode are stacked in order. When a voltage is applied to the plasma actuator, the plasma actuator blows out a induced flow containing ozone from the first electrode in a first direction that is a direction along the surface of the dielectric. The ozone decomposing device decomposes ozone to generate active oxygen in the induced flow. The plasma exciter and the ozone decomposing device are configured such that a induced flow containing active oxygen flows out to the outside of the casing through the opening portion. An edge portion of the second electrode on a second direction side opposite to the first direction has a convex portion extending in the second direction, and overlaps the first electrode only at the convex portion. The convex portion has a constant width in the second direction.

Inventors

GU CHUANJIANG
YAMAUCHI KAZUHIRO
OZAWA MASAMOTO
TAKATA KENJI
After the East
Kimko Shota

Assignees

佳能株式会社

Dates

Publication Date: 20260512
Application Date: 20221226
Priority Date: 20211228

Claims (9)

1. An active oxygen supplying apparatus, comprising: A housing having at least one opening; a plasma exciter disposed within the housing, and Ozone decomposing apparatus, wherein The plasma actuator comprises a first electrode, a dielectric and a second electrode which are stacked in sequence, The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric, By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and blows out a induced flow containing ozone from the first electrode in a first direction which is one direction along the dielectric surface, The ozone decomposing means decomposes ozone contained in the induced flow to generate active oxygen in the induced flow, and the induced flow becomes an induced flow containing active oxygen, The plasma exciter and the ozone decomposing device are configured to cause the induced flow containing active oxygen to flow out from the opening portion to the outside of the housing, When the plasma actuator is seen from the second electrode side, an edge portion of the second electrode on the second direction side opposite to the first direction is provided with a convex portion extending in the second direction and overlapping the first electrode only at the convex portion, and The convex portion has a constant width along the second direction.
2. The active oxygen supplying apparatus according to claim 1, wherein, When the cross section of the plasma actuator in the thickness direction thereof is observed, The first electrode and the second electrode are disposed diagonally to each other across the dielectric in the thickness direction of the plasma actuator, The first electrode is disposed to cover a portion of the first surface of the dielectric, and The first surface has an exposed portion not covered by the first electrode, When the plasma actuator is seen from the first electrode side, at least a portion of the exposed portion and the second electrode have an overlap therebetween, and In the cross section along the thickness direction, the induced flow containing ozone is blown out from an edge portion of the first electrode on the first direction side along the exposed portion of the dielectric overlapped with the second electrode.
3. The active oxygen supply device according to claim 1 or 2, wherein an edge portion of the first electrode on the first direction side has a linear shape extending in a direction perpendicular to the first direction and along the first surface of the dielectric.
4. The active oxygen supplying apparatus according to claim 1 or 2, wherein the convex portion includes a plurality of convex portions having substantially the same shape that are provided in series.
5. The active oxygen supplying apparatus according to claim 1 or 2, wherein the convex portion has a periodic and regular waveform shape.
6. The active oxygen supplying apparatus according to claim 1 or 2, wherein the convex portion has a rectangular wave shape.
7. The active oxygen supplying apparatus according to claim 1 or 2, wherein the ozonolysis apparatus is at least one apparatus selected from the group consisting of: An ultraviolet light source that irradiates the induced flow containing ozone with ultraviolet light to generate active oxygen in the induced flow; a heating device which heats the induced flow containing ozone to generate active oxygen in the induced flow, and A humidifying device that humidifies the induced flow containing ozone to generate active oxygen in the induced flow.
8. A treatment apparatus using active oxygen, the apparatus treating a surface of an object to be treated by using active oxygen and comprising: A housing having at least one opening; a plasma exciter disposed within the housing, and Ozone decomposing apparatus, wherein The plasma actuator comprises a first electrode, a dielectric and a second electrode which are stacked in sequence, The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric, By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and blows out a induced flow containing ozone from the first electrode in a first direction which is one direction along the dielectric surface, The ozone decomposing means decomposes ozone contained in the induced flow to generate active oxygen in the induced flow, and the induced flow becomes an induced flow containing active oxygen, The plasma exciter and the ozone decomposing device are configured to cause the induced flow containing active oxygen to flow out from the opening portion to the outside of the housing, When the plasma actuator is seen from the second electrode side, an edge portion of the second electrode on the second direction side opposite to the first direction is provided with a convex portion extending in the second direction and overlapping the first electrode only at the convex portion, and The convex portion has a constant width along the second direction.
9. A treatment method for treating a surface of an object to be treated by using active oxygen, the treatment method comprising: A step of preparing a treatment device using active oxygen, wherein The treatment apparatus using active oxygen includes: A housing having at least one opening; a plasma exciter disposed within the housing, and Ozone decomposing apparatus, wherein The plasma actuator comprises a first electrode, a dielectric and a second electrode which are stacked in sequence, The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric, By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and blows out a induced flow containing ozone from the first electrode in a first direction which is one direction along the dielectric surface, The ozone decomposing means decomposes ozone contained in the induced flow to generate active oxygen in the induced flow, and the induced flow becomes an induced flow containing active oxygen, The plasma exciter and the ozone decomposing device are configured to cause the induced flow containing active oxygen to flow out from the opening portion to the outside of the housing, When the plasma actuator is seen from the second electrode side, an edge portion of the second electrode on the second direction side opposite to the first direction is provided with a convex portion extending in the second direction and overlapping the first electrode only at the convex portion, and The convex portion has a constant width in the second direction, The processing method further comprises the following steps: A step of disposing the prepared treatment device using active oxygen and the treated object at a position opposed to the surface of the treated object exposed to the induced flow when the induced flow containing active oxygen is caused to flow out from the opening, and And a step of treating the surface of the object with active oxygen while allowing the induced flow containing active oxygen to flow out from the opening.

Description

Active oxygen supply device, treatment device using active oxygen, and treatment method using active oxygen Technical Field The present disclosure relates to an active oxygen supply device, a treatment device using active oxygen, and a treatment method using active oxygen. Background Ultraviolet rays and ozone are known as means for sterilizing articles and the like. As a solution to the problem that sterilization using ultraviolet rays is limited to a portion of a sterilization object irradiated with ultraviolet rays, patent document 1 discloses a method of stirring active oxygen generated by irradiating ozone with ultraviolet rays generated by an ultraviolet ray generation lamp and sterilizing even a hatched portion of a sample using a sterilizing device having an ozone supply device, an ultraviolet ray generation lamp, and a stirring device. CITATION LIST Patent literature Patent document 1 Japanese patent application laid-open No. H01-025865 Non-patent literature Non-patent document 1:Masanobu WAKASA et al ,"Magnetic Field Effect on the Photocatalytic Reaction with TiO2 Semiconductor Film",Journal of The Society of Photographic Science and Technology of Japan,69,4,271-275(2006) Disclosure of Invention Problems to be solved by the invention The present inventors studied the sterilization performance provided by the sterilization method according to patent document 1, and found that the provided sterilization performance is approximately equivalent to that provided by the conventional sterilization method using only ozone. The degerming ability of active oxygen is said to be far exceeding that of ozone in nature, and thus the results of such studies are unexpected. At least one aspect of the present disclosure relates to providing an active oxygen supply apparatus that can more stably treat the surface of an object to be treated with active oxygen. Another aspect of the present disclosure relates to providing a treatment apparatus using active oxygen that can more stably treat a surface of an object to be treated using active oxygen. Yet another aspect of the present disclosure relates to providing a treatment method using active oxygen that makes a treatment using active oxygen more stable on a surface of an object to be treated. Solution for solving the problem At least one aspect of the present disclosure provides an active oxygen supplying apparatus, including: A housing having at least one opening; A plasma exciter disposed within the housing, and Ozone decomposing apparatus, wherein The plasma actuator comprises a first electrode, a dielectric and a second electrode which are stacked in sequence, The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric, By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and blows out a induced flow containing ozone from the first electrode in a first direction which is one direction along the dielectric surface, The ozone decomposing device decomposes ozone contained in the induced flow to generate active oxygen in the induced flow, and the induced flow becomes an induced flow containing active oxygen, The plasma exciter and the ozone decomposing device are arranged such that a induced flow containing active oxygen flows out from the opening portion to the outside of the casing, When the plasma actuator is seen from the second electrode side, an edge portion of the second electrode on the second direction side opposite to the first direction is provided with a convex portion extending in the second direction and overlapping the first electrode only at the convex portion, and The convex portion has a constant width in the second direction. At least one aspect of the present disclosure provides a treatment apparatus using active oxygen, which treats a surface of an object to be treated by using active oxygen and includes: A housing having at least one opening; A plasma exciter disposed within the housing, and Ozone decomposing apparatus, wherein The plasma actuator comprises a first electrode, a dielectric and a second electrode which are stacked in sequence, The first electrode is an exposed electrode provided on a first surface which is one surface of the dielectric, By applying a voltage between the first electrode and the second electrode, the plasma actuator generates a dielectric barrier discharge from the first electrode toward the second electrode and blows out a induced flow containing ozone from the first electrode in a first direction which is one direction along the dielectric surface, The ozone decomposing device decomposes ozone contained in the induced flow to generate active oxygen in the induced flow, and the induced flow becomes an induced flow containing active oxygen, The plasma exciter and the ozone decomposing device are arranged such that a induced flow co