CN-118528080-B - Plane vibration type deterministic magneto-rheological micro-polishing equipment

CN118528080BCN 118528080 BCN118528080 BCN 118528080BCN-118528080-B

Abstract

The application discloses plane vibration type deterministic magnetorheological micro-polishing equipment, which belongs to the technical field of precision machining, wherein a vibration part of a high-frequency vibration mechanism is used for driving a magnetic field response piece to vibrate in a reciprocating mode in a first direction and a second direction, the vibration amplitude is smaller than 1 millimeter, one of a mounting seat of the high-frequency vibration mechanism and a workpiece fixing mechanism is connected with a feeding mechanism, the other is mounted on a base, a workpiece to be polished, which is fixed on the workpiece fixing mechanism, is arranged opposite to the magnetic field response piece in a third direction, the feeding mechanism is used for driving the high-frequency vibration mechanism and the workpiece fixing mechanism to move relatively in the third direction, the first direction, the second direction and the third direction are perpendicular to each other, a magnetorheological fluid nozzle is matched with the magnetic field response piece, and the magnetorheological fluid nozzle is used for conveying magnetorheological fluid to a focusing magnetic field generated by the magnetic field response piece. The apparatus described above has the capability of deterministic polishing of the microstructured surface of microscale features.

Inventors

ZHU ZHIWEI
ZHU ZIHUI
HUANG PENG
CHEN XINYU

Assignees

南京理工大学

Dates

Publication Date: 20260505
Application Date: 20240528

Claims (8)

1. A plane vibration type deterministic magnetorheological micro-polishing device is characterized by comprising a base, a high-frequency vibration mechanism, a workpiece fixing mechanism, a magnetic field response piece, a feeding mechanism and a magnetorheological fluid nozzle, wherein, The high-frequency vibration mechanism comprises a vibration part and a mounting seat which are connected with each other, the magnetic field response piece is mounted on the vibration part, the vibration part is used for driving the magnetic field response piece to vibrate in a reciprocating manner in a first direction and a second direction, the vibration amplitude of the vibration part is smaller than 1 millimeter, and the first direction and the second direction are perpendicular to each other; One of the mounting seat and the workpiece fixing mechanism is connected with the feeding mechanism, the other one of the mounting seat and the workpiece fixing mechanism is arranged on the base, the workpiece fixing mechanism is used for fixing a workpiece to be polished, the workpiece to be polished and the magnetic field response piece are oppositely arranged in a third direction, the feeding mechanism is used for driving the high-frequency vibration mechanism and the workpiece fixing mechanism to relatively move in the third direction, and the third direction is perpendicular to the first direction and the second direction; The magnetic field response piece comprises a fixed seat, a coil, a first magnetic yoke, a second magnetic yoke and a third magnetic yoke, wherein the coil is wound on the periphery of the third magnetic yoke, the third magnetic yoke is clamped between the first magnetic yoke and the second magnetic yoke in the second direction, the first magnetic yoke and the second magnetic yoke are arranged at intervals with the third magnetic yoke, the first magnetic yoke and the second magnetic yoke are arranged at intervals on two opposite sides of the coil, and the coil generates a magnetic field under the condition of electrifying; The fixed seat is arranged on the vibration part, one end of each of the first magnetic yoke and the second magnetic yoke is fixedly connected with the fixed seat, one end of the third magnetic yoke is fixed on the fixed seat, the other end of the third magnetic yoke is connected with the other end of each of the first magnetic yoke and the second magnetic yoke, and in the second direction, the other ends of each of the first magnetic yoke and the second magnetic yoke extend to the position where the coil is located; The magnetorheological fluid nozzle is matched with the magnetic field response piece, and is used for conveying magnetorheological fluid to a focusing magnetic field generated by the magnetic field response piece.
2. The planar vibration type deterministic magnetorheological micropolishing apparatus of claim 1, further comprising a driving mechanism including a first driving portion and a second driving portion, both of which are mounted to the base, the driving direction of the first driving portion being parallel to the first direction, the driving direction of the second driving portion being parallel to the second direction, at least one of the dither mechanism and the workpiece fixing mechanism being mounted to the driving mechanism, and the driving mechanism being configured to relatively move the dither mechanism and the workpiece fixing mechanism in the first direction and the second direction.
3. The planar vibration type deterministic magnetorheological micropolishing apparatus of claim 2, wherein the feed mechanism is mounted to the first drive section, and the workpiece fixing mechanism is mounted to the feed mechanism, and the dither mechanism is mounted to the second drive section.
4. The planar vibration type deterministic magnetorheological micro-polishing apparatus according to claim 1, wherein the gap between the first yoke and the third yoke and the gap between the second yoke and the third yoke are each provided with a filling portion formed of a non-magnetically conductive material.
5. The planar vibration type deterministic magnetorheological micropolishing device of claim 1, wherein the first yoke, the second yoke and the third yoke are connected to each other at one end facing away from the fixed base, the formed end face is in a cylindrical side face-like structure, and the end face is arranged around the second direction.
6. The planar vibrating deterministic magnetorheological micropolishing apparatus of claim 1, wherein the current of the coil is controlled in a pulse width modulated manner.
7. The planar vibrating deterministic magnetorheological micropolishing apparatus of claim 1, further comprising a recovery vessel disposed below the magnetic field response member.
8. The planar vibrating deterministic magnetorheological micropolishing apparatus of claim 7, further comprising a storage vessel and a recovery pump, the recovery vessel and the storage vessel being in communication through the recovery pump, and the magnetorheological fluid nozzle being in communication with the storage vessel.

Description

Plane vibration type deterministic magneto-rheological micro-polishing equipment Technical Field The application belongs to the technical field of precision machining, and particularly relates to plane vibration type deterministic magnetorheological micro-polishing equipment. Background In the precision machining field, magnetorheological polishing is a common finishing method, has the advantages of controllable material removal, high machining efficiency, good stability, high polishing precision and the like, and is widely applied to ultra-precision polishing machining of complex optical surfaces. However, the existing magnetorheological polishing equipment mostly adopts a wheel type structure, is only suitable for the processing process of the medium-caliber and large-caliber optical element, and cannot be used for processing the element with small caliber because of the interference problem. For polishing small-caliber optical elements, although few researches have been proposed to make the magnetorheological polishing device adopt a ball permanent magnet structure so as to adapt to the polishing work of the elements with the caliber below 10mm. However, the width of the removal function obtained by such a device is still substantially above the millimeter level, and the removal function has a significant edge effect due to the small gradient of the magnetic field, and presents irregular or distorted edges, such that such a device still does not have the capability of deterministic polishing of the microstructured surface of the microscale features. Disclosure of Invention The embodiment of the application aims to provide a plane vibration type deterministic magnetorheological micro-polishing device, which solves the problem that the conventional magnetorheological polishing device does not have the capability of deterministic polishing of the microstructure surface with microscale characteristics. The embodiment of the application discloses a plane vibration type deterministic magnetorheological micro-polishing device, which comprises a base, a high-frequency vibration mechanism, a workpiece fixing mechanism, a magnetic field response piece, a feeding mechanism and a magnetorheological fluid nozzle, wherein, The high-frequency vibration mechanism comprises a vibration part and a mounting seat which are connected with each other, the magnetic field response piece is mounted on the vibration part, the vibration part is used for driving the magnetic field response piece to vibrate in a reciprocating manner in a first direction and a second direction, the vibration amplitude of the vibration part is smaller than 1 millimeter, and the first direction and the second direction are perpendicular to each other; One of the mounting seat and the workpiece fixing mechanism is connected with the feeding mechanism, the other one of the mounting seat and the workpiece fixing mechanism is arranged on the base, the workpiece fixing mechanism is used for fixing a workpiece to be polished, the workpiece to be polished and the magnetic field response piece are oppositely arranged in a third direction, the feeding mechanism is used for driving the high-frequency vibration mechanism and the workpiece fixing mechanism to relatively move in the third direction, and the third direction is perpendicular to the first direction and the second direction; The magnetorheological fluid nozzle is matched with the magnetic field response piece, and is used for conveying magnetorheological fluid to a focusing magnetic field generated by the magnetic field response piece. The embodiment of the application discloses plane vibration type deterministic magnetorheological micro-polishing equipment, which is characterized in that a high-frequency vibration mechanism and a workpiece fixing mechanism are both arranged on a base, and a vibration part in the high-frequency vibration mechanism can drive a magnetic field response piece to vibrate in a high-frequency micro-amplitude manner in a first direction and a second direction. Meanwhile, under the condition that the magnetic field response piece generates a focusing magnetic field, magnetorheological fluid conveyed by the magnetorheological fluid nozzle can be solidified in the range of the focusing magnetic field at the end part of the magnetic field response piece, so that the magnetorheological fluid is hardened, and the magnetic field response piece drives the magnetorheological fluid to relatively move in a plane relative to a workpiece to be polished, which is fixed on the workpiece fixing mechanism, in the first direction and the second direction, so that the material removing work of the corresponding position on the workpiece to be polished, namely the polishing process, is realized under the action of shearing force. In addition, in the embodiment of the application, the solidified magnetorheological fluid and the workpiece to be polished are in plane relative motion, and the workpie