CN-118732202-B - Movable lens group, optical element system and photoetching system

Abstract

The invention provides a movable lens group, an optical element system and a lithography system. The first lens seat and the second lens seat in the movable lens group comprise a supporting component, a driving component and a transmission component. And ventilation structures are arranged in the supporting assembly and the transmission assembly to form a driving air film, a supporting air film and a centering air film. Based on the aerostatic principle, each air film has stronger rigidity, so that the impact resistance of the movable lens group can be improved, the position adjustment of the lens structure can be realized, and the imaging quality is improved. Because the centering air film in the first lens seat is annular, and the centering air film in the second lens seat is spherical, the first lens seat can realize vertical position adjustment, the second lens seat can realize horizontal rotation adjustment, and three-degree-of-freedom adjustment can be realized under the combination of the first lens seat and the second lens seat. In addition, the invention enables the movable lens to be assembled with the zero-abrasion running mechanism by forming the air film in each contact surface, thereby effectively relieving the problem that the friction particles pollute the lens.

Inventors

• YANG RUOJI
• HONG GUO
• WANG YANFEI
• LI YUNFENG

Assignees

• 上海微电子装备（集团）股份有限公司

Dates

Publication Date

20260505

Application Date

20230331

Claims (19)

1. 1. The movable lens group is characterized by comprising a lens structure, a first lens seat and/or a second lens seat; The first lens seat and the second lens seat comprise a supporting component, a driving component and a transmission component, wherein the supporting component respectively bears the lens structure and the driving component, a plurality of ventilation structures are arranged in the supporting component so as to form a supporting air film on the contact surface of the supporting component and the driving component and form a centering air film on the contact surface of the supporting component and the lens structure, the transmission component is respectively connected with the driving component and the lens structure, and a plurality of ventilation structures are also arranged in the transmission component so as to form a driving air film on the contact surface of the driving component and the transmission component; the centering air film of the first lens seat is annular, the centering air film of the second lens seat is spherical, when the driving assembly moves, the driving air film pushes the transmission assembly to move, the transmission assembly of the first lens seat can drive the lens structure to move vertically, and the transmission assembly of the second lens seat can drive the lens structure to rotate horizontally; and when the movable lens group comprises the first lens seat and the second lens seat, the lens structure is borne on the supporting component of the second lens seat, and the supporting component of the second lens seat is connected with the transmission component of the first lens seat.
2. 2. The movable lens group according to claim 1, wherein the support assembly comprises a base cover plate and a base, the base cover plate and the base are annular, the bottom surface of the base is provided with a first base platform extending outwards from the ring and a second base platform extending inwards from the ring, the base cover plate is received on the bottom surface of the first base platform, and the lens structure is arranged on the top surface of the second base platform.
3. 3. The movable mirror assembly of claim 2, wherein the drive assembly is located on a top surface of the first base, and the base cover and the first base are internally provided with the vent structure to enable the formation of the supporting air film on the top surface of the first base.
4. 4. The movable lens group according to claim 2, wherein the ventilation structure is arranged in the second base to form the centering air film, wherein the centering air film is positioned between an inner ring surface of the base and an outer ring surface of the lens structure in the first lens base, and the centering air film is positioned between a top surface of the second base and a bottom surface of the lens structure in the second lens base.
5. 5. The movable lens group of claim 4, wherein the first lens base further comprises a sealing ring, the sealing ring is sleeved on the outer ring surface of the base and surrounds an inner cavity with the outer ring surface of the base, and the inner cavity is communicated with the ventilation structure in the second base of the first lens base.
6. 6. The movable lens group according to claim 2, wherein in the second lens holder, a top surface of the second base is in a spherical ring shape, and a shape of a bottom surface of the lens structure, which is in contact with the second base, is adapted to a top surface of the second base, so that the centering air film is in a spherical ring shape.
7. 7. The movable lens group according to claim 2, wherein the driving assembly comprises a driving ring and a first motor in the first lens base, the driving ring is positioned on the first base, and the first motor is connected with the outer side wall of the driving ring so as to drive the driving ring to move horizontally.
8. 8. The movable lens group of claim 7, wherein in the first lens base, the transmission assembly comprises a transmission ring, a transmission ring cover plate and a first connecting plate; the lens structure comprises a lens structure, a driving ring cover plate, a first connecting plate, a second connecting plate, a lens structure and a lens cover plate, wherein the driving ring is positioned on the driving ring; The driving ring and the driving ring cover plate are internally provided with the ventilation structure so as to form the driving air film on the contact surface of the driving ring and the driving ring.
9. 9. The movable mirror assembly of claim 8, wherein the drive ring and the drive ring are each wedge-shaped annular, and wherein the topography of the opposing surfaces of the drive ring and the drive ring are adapted.
10. 10. The movable mirror assembly of claim 2, wherein within the second mount, the drive assembly comprises a first drive block, a second motor, and a third motor; The first driving block and the second driving block are arranged on the first base at intervals, the second motor is connected with the outer side wall of the first driving block to drive the first driving block to move in the horizontal direction, the third motor is connected with the outer side wall of the second driving block to drive the second driving block to move in the horizontal direction, and the moving direction of the first driving block is perpendicular to the moving direction of the second driving block.
11. 11. The movable lens group according to claim 10, wherein in the second lens base, the transmission assembly comprises a first transmission block, a second transmission block, a first transmission block cover plate, a second connecting plate, a third connecting plate, a first spherical hinge and a second spherical hinge, wherein, The first transmission block is positioned on the first driving block, the second transmission block is positioned on the second driving block, the first transmission block cover plate is positioned on the first transmission block and connected with the first transmission block, the second transmission block cover plate is positioned on the second transmission block and connected with the second transmission block, one end of the second connecting plate is connected with the first transmission block cover plate, the other end of the second connecting plate is connected with the first spherical hinge, the first spherical hinge is also connected with the lens structure, one end of the third connecting plate is connected with the second transmission block cover plate, the other end of the third connecting plate is connected with the second spherical hinge, and the second spherical hinge is also connected with the lens structure; and the ventilation structures are arranged in the first transmission block and the second transmission block, so that the driving air film can be formed on the contact surface of the first driving block and the first transmission block and the contact surface of the second driving block and the second transmission block respectively.
12. 12. The movable lens group of claim 11, wherein the first drive block, the second drive block, the first transmission block and the second transmission block are wedge-shaped in cross section along the axial direction of the base, and the topography of the opposing surfaces of the first drive block and the first transmission block are adapted, and the topography of the opposing surfaces of the second drive block and the second transmission block are adapted.
13. 13. The movable lens group according to claim 11, wherein a fixed seat is further arranged between the driving assembly and the lens structure in the second lens seat, and the fixed seat is annular and is positioned on the base to support the second connecting plate and the third connecting plate.
14. 14. The movable lens group according to claim 1, wherein the first lens seat and the second lens seat are both provided with a fixed ring, the fixed ring is located on the top surface of the transmission assembly, and the ventilation structure is arranged in the fixed ring so as to form a fixed air film on the contact surface of the fixed ring and the transmission assembly.
15. 15. The movable mirror assembly of claim 1, wherein the vent structure comprises a vent hole and a throttle slit in communication, and gas forms a gas film through the vent hole and the throttle slit in sequence.
16. 16. The movable lens group according to claim 1, wherein the lens structure comprises a lens and a lens frame, the lens is disposed on the lens frame, and the lens frame is disposed on the support assembly of the first lens mount or the support assembly of the second lens mount.
17. 17. The movable lens group according to claim 1, wherein when the movable lens group comprises the first lens holder and the second lens holder, the movable lens group further comprises a connecting ring, and the connecting ring is arranged between the transmission assembly of the first lens holder and the support assembly of the second lens holder to connect the transmission assembly of the first lens holder and the support assembly of the second lens holder.
18. 18. An optical element system comprising a movable lens group according to any one of claims 1 to 17 and an air supply device connected to at least one of the ventilation structures to supply air to all of the ventilation structures in the movable lens group.
19. 19. A lithographic system comprising the optical element system of claim 18.

Description

Movable lens group, optical element system and photoetching system Technical Field The present invention relates to the field of photolithography manufacturing technology, and in particular, to a movable lens group, an optical element system, and a photolithography system. Background In the field of lithography, movable mirror sets are used to compensate for imaging errors due to lens manufacturing and assembly errors. The existing movable lens group is generally composed of a lens, a centering reed, a piezoelectric ceramic motor, a lever mechanism and a pre-tightening spring. The lens is supported by three uniformly distributed lever mechanisms to form a three-degree-of-freedom movable mechanism, the piezoelectric ceramic motor is in contact with the lever mechanisms to drive the lens to generate vertical displacement, the lens is connected with the lens barrel through a centering reed to keep the lens horizontally centered in the vertical displacement process, and three pre-tightening springs are arranged on the lens and correspond to the supporting ends of the lever mechanisms to ensure that the movable lens group has certain vibration impact resistance. However, due to the inherent characteristics of the centering spring, there is crosstalk between RX, RY, and DZ when adjusting the movable lens group, centering ability is limited, and debugging efficiency is affected. And, due to the limitation of the contact stress, the preset value of the pre-tightening spring force is limited, so that the vibration impact resistance of the movable lens group is limited. In the adjusting process of the lens position, the motor drives the lens group in a contact way through the lever mechanism, and particles are inevitably polluted to the lens due to mutual friction of parts. Therefore, a new movable lens assembly is needed to solve the above-mentioned problems. Disclosure of Invention The invention aims to provide a movable lens group, an optical element system and a photoetching system, which are used for solving at least one problem of how to avoid adjustment crosstalk, how to improve adjustment efficiency, how to relieve friction particles to pollute lenses, how to improve the impact resistance of the movable lens group, how to reduce preparation cost and how to improve imaging quality. In order to solve the technical problems, the invention provides a movable lens group, which comprises a lens structure, a first lens seat and/or a second lens seat; The first lens seat and the second lens seat comprise a supporting component, a driving component and a transmission component, wherein the supporting component respectively bears the lens structure and the driving component, a plurality of ventilation structures are arranged in the supporting component so as to form a supporting air film on the contact surface of the supporting component and the driving component and form a centering air film on the contact surface of the supporting component and the lens structure, the transmission component is respectively connected with the driving component and the lens structure, and a plurality of ventilation structures are also arranged in the transmission component so as to form a driving air film on the contact surface of the driving component and the transmission component; the centering air film of the first lens seat is annular, the centering air film of the second lens seat is spherical, when the driving assembly moves, the driving air film pushes the transmission assembly to move, the transmission assembly of the first lens seat can drive the lens structure to move vertically, and the transmission assembly of the second lens seat can drive the lens structure to rotate horizontally; And when the movable lens group comprises the first lens seat and the second lens seat, the lens structure is borne on the supporting component of the second lens seat, and the supporting component of the second lens seat is connected with the transmission component of the first lens seat. Optionally, in the movable lens group, the supporting component comprises a base cover plate and a base, wherein the base cover plate and the base are annular, a first base platform extending outwards from the ring and a second base platform extending inwards from the ring are arranged on the bottom surface of the base, the base cover plate is connected to the bottom surface of the first base platform, and the lens structure is arranged on the top surface of the second base platform. Optionally, in the movable lens group, the driving component is located on the top surface of the first base, and the base cover plate and the first base are internally provided with the ventilation structure, so that the supporting air film can be formed on the top surface of the first base. Optionally, in the movable lens group, the ventilation structure is arranged in the second base to form the centering air film, wherein in the first lens seat, the centering air film is loca