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CN-118990052-B - Reduce anchor clamps device of being convenient for of damage installation Lift Pin

CN118990052BCN 118990052 BCN118990052 BCN 118990052BCN-118990052-B

Abstract

The invention discloses a clamp device capable of reducing damage and facilitating mounting of Lift Pin, which comprises a clamp table, a thimble, a supporting ring assembly, a lifting cylinder, a rotating motor, an angle assembly, a mounting assembly and a purging assembly, wherein the clamp table is in fastening connection with the lifting cylinder, the rotating motor is in transmission connection with the lifting cylinder, the rotating motor is in fastening connection with the lifting cylinder, the rotating motor is in transmission connection with the supporting ring assembly, the angle assembly is in rotation connection with the supporting ring assembly, the mounting assembly is in fastening connection with the angle assembly, the purging assembly is in fastening connection with the mounting assembly, the thimble is clamped with the mounting assembly, the lifting cylinder is matched with the rotating motor to realize control of vertical and rotary motion, the rotating motor is also in transmission connection with the supporting ring assembly, the angle assembly adjusts the angle of a workpiece, the thimble is connected with the mounting assembly in a clamping manner, and dust is removed by the purging assembly.

Inventors

  • YANG PING

Assignees

  • 上海稷以科技有限公司

Dates

Publication Date
20260512
Application Date
20240905

Claims (7)

  1. 1. The fixture device for reducing damage and facilitating mounting of Lift Pin is characterized by comprising a fixture table (1), a thimble (2), a supporting ring assembly (3), a lifting cylinder (4), a rotating motor (5), an angle assembly (6), a mounting assembly (7) and a purging assembly (8), wherein the fixture table (1) is tightly connected with the lifting cylinder (4), the rotating motor (5) is tightly connected with the supporting ring assembly (3), the angle assembly (6) is tightly connected with the supporting ring assembly (3), the mounting assembly (7) is tightly connected with the angle assembly (6), the purging assembly (8) is tightly connected with the mounting assembly (7), and the thimble (2) is clamped with the mounting assembly (7); The support ring assembly (3) comprises a ring body (31), a first elastic piece (32), a first hydraulic cylinder (33), a clamping block (34) and a balance plate (35), wherein the ring body (31) is fixedly connected with the first elastic piece (32), the first elastic piece (32) is fixedly connected with the balance plate (35), a damping groove (311) is formed in the ring body (31), the balance plate (35) is slidably connected with the damping groove (311), the damping groove (311) is triangle-like, the balance plate (35) is triangle-like, the first elastic piece (32) is three, the three first elastic pieces (32) are positioned at three triangle-like angles of the balance plate (35), the first elastic piece (32) is fixedly connected with the damping groove (311), the rotating motor (5) is in transmission connection with the balance plate (35), the first hydraulic cylinder (33) is fixedly connected with the ring body (31), the first hydraulic cylinder (33) is in transmission connection with the clamping block (34), and the clamping block (6) is in transmission connection with the rotation block (34) and is connected with the ground; The angle assembly (6) comprises an angle block (61), an angle motor (62), a first transmission rod (63), a connecting module (64) and a rotating module (65), wherein the angle block (61), a first hydraulic cylinder (33) and a clamping block (34) are three, each angle block (61) is rotationally connected with the clamping block (34), the angle motor (62) is in fastening connection with one clamping block (34), the angle motor (62) is in transmission connection with a first transmission rod (63), the first transmission rod (63) is in transmission connection with the connecting module (64), the rotating module (65) is in fastening connection with the angle block (61), the mounting assembly (7) is in fastening connection with the rotating module (65), a first electromagnetic block (341) is arranged on the clamping block (34), the first electromagnetic block (341) is in fastening connection with the clamping block (34), the first transmission rod (63) is positioned in the angle block (61), and the first transmission rod (63) passes through the angle block (61) and the clamping block (34); When the angle block (61) rotates, the rotating module (65) is clamped and abutted with the first transmission rod (63), and the first transmission rod (63) is in transmission connection with the rotating module (65); When the angle block (61) does not rotate, the first electromagnetic block (341) and the rotating module (65) are magnetically attracted for transmission.
  2. 2. The fixture device for reducing damage and facilitating mounting of Lift Pin of claim 1, wherein the rotary module (65) comprises a rotary shell (651), a second electromagnetic block (652), a second elastic member (653), a first magnetic block (654) and a clamping abutment block (655), wherein the rotary shell (651) is tightly connected with the first magnetic block (654), the rotary shell (651) is tightly connected with the angle block (61), the second electromagnetic block (652) is tightly connected with the rotary shell (651), the second electromagnetic block (652) is tightly connected with the second elastic member (653), the second elastic member (653) is tightly connected with the clamping abutment block (655), and the clamping abutment block (655) is slidingly connected with the rotary shell (651); When the second elastic piece (653) stretches, the second electromagnetic block (652) and the clamping abutting block (655) are in magnetic pole transmission, the clamping abutting block (655) is in clamping abutting connection with the first transmission rod (63), the clamping abutting block (655) is in transmission connection with the first transmission rod (63), and the clamping abutting block (655) is in transmission connection with the rotary shell (651); and the second elastic piece (653) is in magnetic attraction transmission with the first electromagnetic block (341) and the first magnetic block (654) in a normal state.
  3. 3. A reduced damage clamp device for facilitating Lift Pin installation in accordance with claim 2 wherein said connection module (64) comprises a hinge rod (641), a first hinge block (642), a second hinge block (643), a third hinge block (644) and a second transmission rod (645), said hinge rod (641), first hinge block (642), second hinge block (643) and third hinge block (644) being in two sets, each set of four said hinge rods (641), each set of said first hinge block (642) and two hinge rods (643), two said hinge rods (641) and second hinge block (643) being hinged, two said hinge rods (643) and second hinge block (643) being hinged, two said hinge rods (641) and third hinge block (644) being hinged, each set of said third hinge block (644) and second transmission rod (645) being in transmission connection, each set of said first hinge rod (641) and second transmission rod (645) being in each set of said transmission rod (641) and transmission rod (645) being in said transmission rod (61), each group of the second transmission rods (645) passes through the angle block (61) and the clamping block (34).
  4. 4. The fixture device for reducing damage and facilitating mounting of Lift Pin according to claim 1, wherein the mounting assembly (7) comprises a ball plunger (71), a third elastic piece (72), a mounting column (73), a lifting column (74), a cooling clamping module (75), a horizontal hydraulic cylinder (76), an adjusting nut (77) and a linkage bolt (78), the ball plunger (71) is tightly connected with the third elastic piece (72), the third elastic piece (72) is tightly connected with the lifting column (74), the ball plunger (71) is clamped with a thimble (2), a clamping groove (21) is formed in the thimble (2), the ball plunger (71) is abutted with the clamping groove (21), the mounting column (73) is slidingly connected with the lifting column (74), the horizontal hydraulic cylinder (76) is tightly connected with the mounting column (73), the cooling clamping module (75) is tightly connected with the lifting column (74), the ball plunger (8) is tightly connected with the third elastic piece (72), and the mounting column (73) is tightly connected with the adjusting nut (77) and the linkage bolt (78).
  5. 5. The fixture device for reducing damage and facilitating mounting of Lift Pin, as set forth in claim 4, wherein the purging component (8) comprises a fan (81), an inner screw block (82), a filter screen (83), a recovery shell (84) and an air control module (85), the inner screw block (82) is in fastening connection with a mounting column (73), the inner screw block (82) is located at the upper end of the mounting column (73), a screw groove (821) is formed in the inner screw block (82), the screw groove (821) is communicated with the mounting column (73), the fan (81) is in fastening connection with the mounting column (73), the filter screen (83) is in fastening connection with the air control module (85), the recovery shell (84) is in fastening connection with the mounting column (73), and the air control module (85) is in fastening connection with the lifting column (74).
  6. 6. The fixture device for reducing damage and facilitating mounting of Lift Pin, as set forth in claim 5, wherein the wind control module (85) comprises a wind control plate (851), a wind control motor (852) and a wind frame (853), the wind control plate (851) and the wind frame (853) are in sliding connection, the wind control motor (852) and the wind frame (853) are in fastening connection, a wind control opening (8531) is arranged on the wind frame (853), a rotary groove (8532) is arranged on the wind frame (853), the wind control opening (8531) is communicated with the rotary groove (8532), the rotary groove (8532) is communicated with a mounting column (73), and the filter screen (83) is in fastening connection with the wind control plate (851).
  7. 7. The fixture device for reducing damage and facilitating Lift Pin installation according to claim 6, wherein the cooling clamping module (75) comprises a first telescopic hose (751), a second telescopic hose (752), a clamping film (753), a cooling box (754), a liquid pump (755) and an iris assembly (756), the first telescopic hose (751) is tightly connected with a mounting column (73), the second telescopic hose (752) is tightly connected with the mounting column (73), an air outlet groove (731) is formed in the mounting column (73), the air outlet groove (731) is communicated with a spiral groove (821), a mounting plate (732) is arranged on the mounting column (73), the horizontal hydraulic cylinder (76) is tightly connected with the mounting plate (732), a vent hole (7321) is arranged on the mounting plate (732), the air outlet groove (731) is communicated with the vent hole (7321), the vent hole (7321) is communicated with a wind control port (8531), the first telescopic hose (751) is communicated with a lifting column (74), the second telescopic column (752) is communicated with a lifting diaphragm (733), the lifting column (733) is slidingly connected with the lifting diaphragm (733), the second flexible hose (752) and the baffle (733) are in sliding connection, the clamping film (753) is in fastening connection with the lifting column (74), the first flexible hose (751) is communicated with the cooling box (754), the second flexible hose (752) is communicated with the liquid pump (755), the liquid pump (755) is communicated with the cooling box (754), and the iris assembly (756) is in fastening connection with the liquid pump (755).

Description

Reduce anchor clamps device of being convenient for of damage installation Lift Pin Technical Field The invention relates to the technical field of clamp devices, in particular to a clamp device capable of reducing damage and convenient for mounting Lift Pin. Background In modern manufacturing, the design and function of the fixture devices has become a key factor in improving production efficiency and product quality. Clamp devices are commonly used in machining to secure, support and position raw materials or workpieces, to ensure machining accuracy and operational safety, and with the rapid development of automation and precision engineering, the demand for clamp devices is increasing, especially on high-precision and high-efficiency production lines, the role of which is becoming particularly important, as they directly affect the continuity of production and the accuracy of machining. Currently, conventional clamping devices focus on basic fixing and positioning functions, generally including simple mechanical structures such as manually adjustable screws and fixing plates, and particularly in ejector pin clamping devices, ejector pins are the most important medium for wafer transfer interaction between the transfer medium in the process chamber and the robot. For the related art, firstly, the conventional thimble clamp often lacks the angle adjusting function of a single thimble or multiple thimbles and the thimble function adapting to different sizes, so that the thimble clamp cannot be rapidly adapted to the changeable processing requirements on the production line, furthermore, mechanical damage cannot be effectively prevented, the thimbles are easy to break, meanwhile, heat and dust generated in the process cannot be effectively managed, and the quality problem and equipment failure of a workpiece can be caused, therefore, a clamp device for reducing the damage and facilitating the installation of Lift Pin is provided by a person skilled in the art, and the problem set forth in the background is solved. Disclosure of Invention The invention aims to provide a clamp device which reduces damage and is convenient for mounting Lift Pin, so as to solve the problems in the background technology. In order to solve the technical problems, the invention provides the following technical scheme: The fixture device comprises a fixture table, a thimble, a supporting ring assembly, a lifting cylinder, a rotating motor, an angle assembly, a mounting assembly and a purging assembly, wherein the fixture table is in fastening connection with the lifting cylinder, the rotating motor is in transmission connection with the supporting ring assembly, the angle assembly is in rotation connection with the supporting ring assembly, the mounting assembly is in fastening connection with the angle assembly, the purging assembly is in fastening connection with the mounting assembly, and the thimble is in clamping connection with the mounting assembly. Through adopting above-mentioned technical scheme, the anchor clamps platform is as the basis, with lift cylinder fastening connection, provide stable supporting platform, lift cylinder cooperation rotating electrical machines, realize vertical and rotary motion's accurate control, this kind of transmission connection has guaranteed the continuity and the stationarity of operation, rotating electrical machines still are connected with the support ring subassembly transmission, the support ring subassembly rotates with angle subassembly to be connected, allow the angle of equipment adjustment work piece in the course of working, installation component fastening connection is to angle subassembly, accurate positioning in the course of working has been ensured and firm support, simultaneously, the thimble is connected with installation component through the joint mode, be used for the position of accurate control work piece, sweep subassembly and installation component fastening connection, provide clean function, get rid of dust, keep operational environment's cleanness, improve the processingquality of product and the life of equipment. Further, the support ring assembly comprises a ring body, first elastic pieces, first hydraulic cylinders, clamping blocks and balance plates, the ring body is in fastening connection with the first elastic pieces, the first elastic pieces are in fastening connection with the balance plates, damping grooves are formed in the ring body, the balance plates are in sliding connection with the damping grooves, the damping grooves are triangular, the balance plates are triangular, the first elastic pieces are three, the three first elastic pieces are located at three corners of the triangular, the first elastic pieces are in fastening connection with the damping grooves, a rotating motor is in transmission connection with the balance plates, the first hydraulic cylinders are in fastening connection with the ring body, the first hydraulic cylinders are in