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CN-119056835-B - Mask plate clamp and dead angle preventing type cleaning device

CN119056835BCN 119056835 BCN119056835 BCN 119056835BCN-119056835-B

Abstract

The invention relates to a mask plate clamp and a dead angle prevention type cleaning device, which belong to the technical field of mask plate cleaning equipment. Including the mounting bracket, there is electronic slider upside through electronic slide rail sliding connection, electronic slider sliding connection has the carriage, the downside rigid coupling of carriage has the dead lever that mirror image and equidistance distribute, the downside of dead lever is provided with the sliding block, the downside sliding connection of sliding block has the backup pad, the mirror image the opposite side of sliding block all is provided with the fixed shell, the downside sliding connection of fixed shell has the adsorption shell, the downside of adsorption shell is provided with the rubber circle. According to the mask plate clamping device, the mask plate is stably clamped through the adsorption lifting of the adsorption shell and the supporting function of the supporting plate, the condition that the clamping force is controlled inaccurately when the mask plate is clamped is avoided, and the safety of the mask plate in the clamped moving process is improved.

Inventors

  • LIU WEIWEI
  • YOU CHUN
  • ZHANG YUEYUAN
  • ZHU MINGWEI
  • ZHU XIJIN

Assignees

  • 江苏路芯半导体技术有限公司

Dates

Publication Date
20260512
Application Date
20240826

Claims (6)

  1. 1. The mask plate clamp comprises a mounting frame (1), wherein the upper side of the mounting frame (1) is in sliding connection with an electric sliding block (2) through an electric sliding rail, the electric sliding block (2) is in sliding connection with a sliding frame (3), a first electric push rod (4) is fixedly connected with the electric sliding block (2), the telescopic end of the first electric push rod (4) is fixedly connected with the sliding frame (3), the mask plate clamp is characterized by further comprising fixing rods (5) which are mirror images and equidistantly distributed, the fixing rods (5) which are mirror images and equidistantly distributed are fixedly connected with the lower side of the sliding frame (3), the lower side of the fixing rods (5) is provided with a sliding block (6), the lower side of the sliding block (6) is in sliding connection with a supporting plate (7), tension springs are fixedly connected between the supporting plate (7) and the corresponding sliding block (6), opposite sides of the sliding block (6) are respectively provided with a fixing shell (8), the lower side of the fixing shell (8) is in sliding connection with an adsorption shell (9), the lower side of the adsorption shell (9) is provided with a through hole, the lower side of the adsorption shell (9) is provided with an adsorption shell (9), the sliding frame (3) is provided with a reset mechanism for controlling the reset of the supporting plates (7) which are mirror images and are distributed at equal intervals; The adsorption mechanism comprises an air suction cylinder (201), the air suction cylinder (201) is fixedly connected to the side wall corresponding to the fixing shell (8), the air suction cylinder (201) is communicated with the upper part corresponding to the fixing shell (8), a piston connecting rod (202) is connected in a sliding manner in the air suction cylinder (201), a tension spring is fixedly connected between the air suction cylinder (201) and the piston connecting rod (202), a fixing plate (203) is connected in the air suction cylinder (8), a through hole is formed in the middle of the fixing plate (203), a spring is fixedly connected between the fixing plate (203) and the corresponding adsorption shell (9), a spring is fixedly connected between the fixing plate (203) and the corresponding fixing shell (8), a moving assembly for controlling adsorption movement of the corresponding adsorption shell (9) is arranged on the fixing plate (203), a control assembly for controlling movement of the corresponding support plate (7) is arranged on the air suction cylinder (201), and a clamping assembly for controlling the clamping assembly of the adsorption shell (9) is arranged on the lower side of the sliding block (6); The movable assembly comprises a sliding plate (301), the sliding plate (301) is connected to the corresponding fixing plate (203) in a sliding manner, a through hole which is in communication fit with the through hole of the corresponding fixing plate (203) is formed in the sliding plate (301), a spring is fixedly connected between the sliding plate (301) and the adjacent fixing plate (203), a through hole is formed in the upper side of the fixing shell (8), a sliding plate (302) which is in plugging fit with the through hole is slidingly connected to the upper side of the fixing shell (8), an extrusion rod (303) which is in extrusion fit with the adjacent sliding plate (301) is fixedly connected to one side of the piston connecting rod (202) close to the adjacent fixing shell (8), the extrusion rod (303) penetrates through the adjacent fixing shell (8) and the adjacent air suction cylinder (201), and the extrusion rod (303) is in limit fit with the adjacent fixing plate (203). The control assembly comprises a first elastic telescopic rod (401), the first elastic telescopic rod (401) is fixedly connected to the side wall of the adjacent air suction cylinder (201), the telescopic end of the first elastic telescopic rod (401) is in extrusion fit with the adjacent piston connecting rod (202), the first elastic telescopic rod (401) is communicated with a liquid guide pipe (402), a cavity communicated with the liquid guide pipe (402) is formed in the lower side of the sliding block (6), a groove is formed in the supporting plate (7), a limiting block (403) in limiting fit with the groove on the adjacent supporting plate (7) is connected in the cavity of the sliding block (6) in a sliding mode, a limiting plate (404) is connected to one side, away from the adjacent fixed shell (8), of the air suction cylinder (201), a blind hole in limiting fit with the corresponding limiting plate (404) is formed in one side of the piston connecting rod (202), and a spring is fixedly connected between the limiting plate (404) and the adjacent adsorption shell (9); The clamping assembly comprises a second elastic telescopic rod (501), the second elastic telescopic rod (501) is fixedly connected to one side, corresponding to the sliding block (6), of the fixing shell (8), the telescopic end of the second elastic telescopic rod (501) is in extrusion fit with the adjacent supporting plate (7), the second elastic telescopic rod (501) is communicated with a first guide pipe (502), the upper side of the fixing shell (8) is fixedly connected with a double-head hydraulic cylinder (503) communicated with the adjacent first guide pipe (502), one telescopic end of the double-head hydraulic cylinder (503) is fixedly connected with the adjacent sliding plate (302), the telescopic end of the other side of the double-head hydraulic cylinder (503) is fixedly connected with a sliding bent rod (504), the sliding bent rod (504) is inserted into the adjacent fixing shell (8), and the sliding bent rod (504) is in extrusion fit with the adjacent sliding plate (301).
  2. 2. The mask plate clamp according to claim 1, wherein the reset mechanism comprises a second electric push rod (601), the second electric push rod (601) is fixedly connected to the sliding frame (3), a telescopic end of the second electric push rod (601) penetrates through the sliding frame (3), a connecting plate (602) is fixedly connected to the telescopic end of the second electric push rod (601), a first mirror-image and equidistant-distributed extrusion bending plate (603) and a second mirror-image and equidistant-distributed extrusion bending plate (604) are fixedly connected to the connecting plate (602), the first extrusion bending plate (603) is in extrusion fit with an adjacent piston connecting rod (202), and the second extrusion bending plate (604) is in extrusion fit with an adjacent supporting plate (7).
  3. 3. The dead angle prevention type cleaning device is characterized by comprising a cleaning shell (701) and the mask plate clamp according to claim 2, wherein the cleaning shell (701) is fixedly connected to the mounting frame (1), a motor (702) is fixedly connected to one side of the mounting frame (1), a lead screw (703) penetrating through the mounting frame (1) is fixedly connected to an output shaft of the motor (702), the lead screw (703) is in rotary connection with the mounting frame (1) and the cleaning shell (701), a connecting frame (704) is in threaded connection with the lead screw (703), the connecting frame (704) is inserted into the cleaning shell (701), and a motor roller (705) is arranged in the cleaning shell (701).
  4. 4. The dead angle preventing type cleaning device according to claim 3, wherein arc-shaped plates which are circumferentially and equidistantly distributed are arranged on the electric roller (705), and the concave faces of the arc-shaped plates face in the same direction as the rotation direction of the electric roller (705) and are used for flushing the surface of the quartz mask plate.
  5. 5. The dead angle prevention cleaning device according to claim 4, further comprising a dislocation mechanism, wherein the dislocation mechanism is arranged on the connecting frame (704), the dislocation mechanism is used for controlling the adsorption shell (9) to move, the dislocation mechanism comprises mirror image limit sliding rods (801), the mirror image limit sliding rods (801) are fixedly connected on the connecting frame (704), the fixing shell (8) is in sliding connection with the corresponding fixing rod (5) through a connecting block, the fixing rod (5) is in sliding connection with the corresponding sliding block (6), three air extraction cylinders (201) distributed at equal intervals are in extrusion fit with the corresponding limit sliding rods (801), swing rollers (802) are arranged on the lower side of the connecting frame (704), spray heads distributed at equal intervals are arranged on the swing rollers (802), fixing hydraulic cylinders (803) are fixedly connected in the fixing rod (5) at equal intervals, telescopic ends of the fixing hydraulic cylinders (803) are in sliding connection with the guide pipes of adjacent fixing shells (8), the guide pipes (803) are fixedly connected with the second guide pipes (804) which are fixedly connected with the second guide pipes (804), the second guide pipes (804) are fixedly connected with the second guide pipes (804) which are fixedly connected with the second guide pipes (804), the telescopic end of the third elastic telescopic rod (805) is fixedly connected with the adjacent sliding block (6).
  6. 6. The dead angle prevention type cleaning device according to claim 5, wherein the part of the limiting slide bar (801) positioned in the cleaning shell (701) is in the shape of an isosceles trapezoid, the symmetry line of the upper side surface of the isosceles trapezoid part of the limiting slide bar (801) is positioned on the same vertical surface with the axis of the electric roller (705), and the width of the upper side surface of the isosceles trapezoid is the same as the diameter of the total movement area of the electric roller (705) and the upper arc plate thereof.

Description

Mask plate clamp and dead angle preventing type cleaning device Technical Field The invention relates to a mask plate clamp and a dead angle prevention type cleaning device, which belong to the technical field of mask plate cleaning equipment. Background The mask plate is a core part used in the fields of semiconductor manufacture and micro-nano processing, and the precise pattern on the mask plate directly influences the functions and quality of high-tech products such as integrated circuits, display screens and the like. After the process is finished, attachments such as photoresistance, organic pollutants, metal scraps, dust, residual glue and the like can exist on the surface of the mask product. The quartz mask is an important object for producing wafers in a photoetching process, so that attachments on the surface of the quartz mask can directly influence the yield of the produced wafers in the photoetching process, operators need to thoroughly clean the quartz mask after photoresist removal of the quartz mask is completed, however, when the quartz mask is clamped by the existing cleaning device to clean, the lower side of the quartz mask is usually supported by a bracket, the quartz mask is cleaned by combining an ultrasonic cleaning technology, the situation that the quartz mask is broken or dropped is reduced when the bracket supports the lower side of the quartz mask to move and is immersed in cleaning liquid to carry out ultrasonic cleaning is reduced, the situation that the back of the quartz mask is rubbed by the bracket is caused, the transmissivity of the quartz mask in the photoetching process is reduced, the quality of the wafers produced by the quartz mask is influenced, and meanwhile, if the two sides of the quartz mask is clamped by a clamp to move, the strength of the clamp to clamp is difficult to accurately control, so that the quartz mask is broken or dropped is reduced, and therefore, the safety of the clamp needs to be developed and has stable cleaning functions. Disclosure of Invention Aiming at the problems in the background, the invention provides a mask plate clamp and a dead angle prevention type cleaning device. The technical scheme includes that the mask plate clamp comprises a mounting frame, wherein an electric sliding block is connected to the upper side of the mounting frame in a sliding mode through an electric sliding rail, a sliding frame is connected to the electric sliding block in a sliding mode, a first electric push rod is fixedly connected to the electric sliding block, a mirror image fixed rod which is distributed at equal intervals is fixedly connected to the lower side of the sliding frame, a sliding block is arranged on the lower side of the fixed rod, a supporting plate is connected to the lower side of the sliding block in a sliding mode, a tension spring is fixedly connected between the supporting plate and the corresponding sliding block, fixing shells are arranged on opposite sides of the mirror image sliding block, an adsorption shell is connected to the lower side of the fixing shells in a sliding mode, a rubber ring is arranged on the lower side of the adsorption shell, a through hole is formed in the upper side of the adsorption shell, and a reset mechanism which is used for controlling the mirror image and is distributed at equal intervals is arranged on the side wall of the fixing shell. As the preferential of the invention, the adsorption mechanism comprises an air suction cylinder, the air suction cylinder is fixedly connected to the side wall corresponding to the fixed shell, the air suction cylinder is communicated with the upper part corresponding to the fixed shell, a piston connecting rod is connected in the air suction cylinder in a sliding way, a tension spring is fixedly connected between the air suction cylinder and the piston connecting rod, a fixed plate is connected in the fixed shell in a sliding way, a through hole is arranged in the middle of the fixed plate, a spring is fixedly connected between the fixed plate and the corresponding adsorption shell, a spring is fixedly connected between the fixed plate and the corresponding fixed shell, a moving assembly for controlling the adsorption movement corresponding to the adsorption shell is arranged on the fixed plate, a control assembly for controlling the movement support corresponding to the support plate is arranged on the air suction cylinder, and a clamping assembly for controlling the extrusion clamping mask plate corresponding to the adsorption shell is arranged on the lower side of the sliding block. As the preferable choice of the invention, the said moving assembly includes the sliding plate, the said sliding plate is connected to the said fixed plate in a sliding way, there are through holes that communicate and cooperate with said fixed plate through hole in a said sliding plate, there are springs fixedly connected between said sliding plate and adjacent said fixed plate,