CN-119084647-B - Vacuum regulating valve pressure control system and control method thereof

CN119084647BCN 119084647 BCN119084647 BCN 119084647BCN-119084647-B

Abstract

The invention provides a vacuum regulating valve pressure control system and a control method thereof, and relates to the technical field of vacuum regulating valve pressure control. The control method comprises the steps of controlling a valve plate of a vacuum regulating valve to rotate to a specified angle position according to a specified rotating speed after obtaining the specified rotating speed through a valve rotating speed model, wherein the valve rotating speed model is established based on PWM pulse frequency and a Simoid function. The control method of the vacuum regulating valve pressure control system solves the problem that the existing vacuum regulating valve pressure control system cannot meet the response speed and stability required by a production line, and achieves the effect of improving the response speed and stability of the system.

Inventors

Tohutinur
XIAO YONGNENG
HU QIANG
Su Genying
LIU KAIXIANG

Assignees

季华实验室

Dates

Publication Date: 20260505
Application Date: 20241107

Claims (8)

1. The control method of the vacuum regulating valve pressure control system is characterized in that the vacuum regulating valve pressure control system comprises a stepping driver and a vacuum regulating valve, and the control method of the vacuum regulating valve pressure control system comprises the steps of controlling the stepping driver to obtain a designated rotating speed through a valve rotating speed model, and controlling a valve plate of the vacuum regulating valve to rotate to a designated angle position according to the designated rotating speed; The specific expression of the Simoid function is as follows: ; Wherein, the To be about Is a function of the Simoid of (c), Is smaller than Is used for the integer variable of (c), The acceleration times are preset; the specific expression of the valve rotating speed model is as follows: ; Wherein, the To be about Is used for the valve rotating speed model of the engine, Is the minimum value of the PWM pulse frequency, Is the maximum value of the PWM pulse frequency.
2. The control method of a vacuum regulator valve pressure control system according to claim 1, wherein obtaining a specified rotation speed through a valve rotation speed model includes calculating the specified rotation speed according to the following formula: ; Wherein, the For the specified rotational speed of the motor, Is a preset parameter.
3. The control method of a vacuum regulator valve pressure control system according to claim 1, wherein upon power-up of the vacuum regulator valve, the following steps are performed: A1. Controlling the valve plate to rotate at the specified rotating speed through a stepping driver; A2. detecting the locked rotation condition of the valve plate and controlling the valve plate to stop rotating when the valve plate is blocked; A3. controlling the stepping driver to drive the valve plate to rotate reversely at the appointed rotating speed according to a preset step number by utilizing the valve rotating speed model; A4. and after the valve plate stops rotating, the vacuum regulating valve pressure control system is restored to an initial state.
4. A control method of a vacuum regulator valve pressure control system according to claim 3, wherein the specific steps in step A2 include: A21. detecting the locked rotation condition of the valve plate according to the following steps: A211. acquiring a two-phase current difference of the step driver; A212. when the two-phase current difference increases, the valve plate is judged to be blocked and is controlled to stop rotating.
5. A control method of a vacuum regulator valve pressure control system according to claim 3, wherein the setting step of the initial state of the vacuum regulator valve pressure control system includes: B1. Controlling the valve plate to rotate at the designated rotating speed so as to enable the vacuum regulating valve to be closed; B2. The valve plate is controlled to rotate 90 degrees at the specified rotating speed by utilizing the valve rotating speed model, and the cavity pressure corresponding to the vacuum cavity of the valve plate at different angle positions is recorded, so that a data table about the angle position of the valve plate and the cavity pressure of the vacuum cavity is obtained; B3. and controlling the angle position of the valve plate according to the data sheet so as to enable the vacuum cavity to reach the specified cavity pressure.
6. The control method of a vacuum regulator valve pressure control system according to claim 1, further comprising a zeroing controller for performing the following steps when the vacuum regulator valve is powered on: A1. Controlling the valve plate to rotate at the specified rotating speed through a stepping driver; A2. detecting the locked rotation condition of the valve plate and controlling the valve plate to stop rotating when the valve plate is blocked; A3. controlling the stepping driver to drive the valve plate to rotate reversely at the appointed rotating speed according to a preset step number by utilizing the valve rotating speed model; A4. and after the valve plate stops rotating, the vacuum regulating valve pressure control system is restored to an initial state.
7. The control method of a vacuum regulator valve pressure control system according to claim 6, wherein the zeroing controller performs, when detecting a locked-rotation condition of the valve plate: A21. detecting the locked rotation condition of the valve plate according to the following steps: A211. acquiring a two-phase current difference of the step driver; A212. when the two-phase current difference increases, the valve plate is judged to be blocked and is controlled to stop rotating.
8. The control method of a vacuum regulator valve pressure control system according to claim 1, further comprising an initialization controller for performing the steps of: B1. controlling the valve plate to rotate at the designated rotating speed by utilizing the valve rotating speed model so as to close the vacuum regulating valve; B2. The valve plate is controlled to rotate 90 degrees at the specified rotating speed by utilizing the valve rotating speed model, and the cavity pressure corresponding to the vacuum cavity of the valve plate at different angle positions is recorded, so that a data table about the angle position of the valve plate and the cavity pressure of the vacuum cavity is obtained; B3. and controlling the angle position of the valve plate according to the data sheet so as to enable the vacuum cavity to reach the specified cavity pressure.

Description

Vacuum regulating valve pressure control system and control method thereof Technical Field The invention relates to the technical field of vacuum regulating valve pressure control, in particular to a vacuum regulating valve pressure control system and a control method thereof. Background The regulating valve can effectively control the pressure of the vacuum cavity in different vacuum environments, and is widely applied to the fields of semiconductor technology, novel display manufacturing, solar energy and the like. In the vacuum system, the regulating valve is arranged on the air inlet or the air outlet and is connected with vacuum cavity equipment, the valve plate is regulated through a control algorithm to realize pressure control, however, the current vacuum regulating valve pressure control system cannot simultaneously consider the speed and the precision when controlling the valve plate to rotate, when the valve plate rotates at a higher speed, the actual position of the valve plate often has a larger error which is difficult to control with a designated position, so that the cavity pressure of the vacuum cavity is unstable, and the current vacuum regulating valve pressure control system cannot meet the response speed and the stability required by a production line. In view of the above problems, no effective technical solution is currently available. Disclosure of Invention The invention aims to provide a vacuum regulating valve pressure control system and a control method thereof, which solve the problem that the existing vacuum regulating valve pressure control system cannot meet the response speed and stability required by a production line, and achieve the effect of improving the response speed and stability of the system. In a first aspect, the invention provides a control method of a vacuum regulating valve pressure control system, which comprises the steps of obtaining a designated rotating speed through a valve rotating speed model, and controlling a valve plate of a vacuum regulating valve to rotate to a designated angle position according to the designated rotating speed, wherein the valve rotating speed model is established based on PWM pulse frequency and a Simoid function. According to the control method of the vacuum regulating valve pressure control system, the valve plate rotating speed is controlled more optimally by utilizing the preset valve rotating speed model, so that the valve plate can reach a designated position more quickly and accurately, and the response speed and stability of the system are improved. Further, the specific expression of the Simoid function is: ; Wherein, the To be aboutIs a function of the Simoid of (c),Is smaller thanIs used for the integer variable of (c),The acceleration times are preset; the specific expression of the valve rotating speed model is as follows: ; Wherein, the To be aboutIs used for the valve rotating speed model of the engine,Is the minimum value of the PWM pulse frequency,Is the maximum value of the PWM pulse frequency. Further, obtaining the specified rotational speed through the valve rotational speed model includes calculating the specified rotational speed according to the following formula: ; Wherein, the For the specified rotational speed of the motor,Is a preset parameter. Further, when the vacuum regulating valve is powered on, the following steps are executed: A1. Controlling the valve plate to rotate at the specified rotating speed through a stepping driver; A2. detecting the locked rotation condition of the valve plate and controlling the valve plate to stop rotating when the valve plate is blocked; A3. controlling the stepping driver to drive the valve plate to rotate reversely at the appointed rotating speed according to a preset step number by utilizing the valve rotating speed model; A4. and after the valve plate stops rotating, the vacuum regulating valve pressure control system is restored to an initial state. This step ensures that the system returns to a known, controllable initial state after each power-up, thus laying a foundation for the subsequent accurate control. Further, the specific steps in the step A2 include: A21. detecting the locked rotation condition of the valve plate according to the following steps: A211. acquiring a two-phase current difference of the step driver; A212. when the two-phase current difference increases, the valve plate is judged to be blocked and is controlled to stop rotating. The method can react at the early stage of blocking the valve plate, effectively prevent the valve plate from being damaged due to continuous stress, and simultaneously reverse the valve plate by a certain step number by taking the locked rotation as a signal, so that the valve plate can return to zero more accurately. Further, the setting step of the initial state of the vacuum regulating valve pressure control system includes: B1. Controlling the valve plate to rotate at the designated rotating speed so as