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CN-119267145-B - Low-temperature pump capable of being regenerated rapidly

CN119267145BCN 119267145 BCN119267145 BCN 119267145BCN-119267145-B

Abstract

The invention relates to a rapid regeneration cryopump, which comprises a cryopump body, a heat pipe and a heater, wherein the heat pipe penetrates through a cylinder shell of the cryopump body, the heat pipe is contacted with a primary cold head and a secondary cold head inside the cryopump body, and the heater is positioned outside the cryopump body and is contacted with the heat pipe. The heat pipe is used for conducting heat, so that the heater is positioned at the outer side of the low-temperature pump body, the heater with larger area and power can be arranged, the heat quantity of a cold head in unit time is increased, the regeneration time is shortened, the production efficiency is improved, and the heater is positioned at the outer side of the low-temperature pump body, and enough space is reserved between the heater and the heat pipe for insulation treatment, so that the problem that the normal operation of the low-temperature pump is influenced by short circuit of a heating rod in the prior art is avoided.

Inventors

  • CUI HANBO
  • CUI HANKUAN

Assignees

  • 上海优尊真空设备有限公司

Dates

Publication Date
20260508
Application Date
20241203

Claims (9)

  1. 1. The rapid regeneration cryopump comprises a cryopump body (1) and is characterized by further comprising a heat pipe (2) and a heater (3), wherein the heat pipe (2) penetrates through a cylinder shell (10) of the cryopump body (1), the heat pipe (2) is in contact with a primary cold head (14) and a secondary cold head (15) inside the cryopump body (1), and the heater (3) is positioned outside the cryopump body (1) and is in contact with the heat pipe (2); a capillary structure is fixed in the shell of the heat pipe (2), and working fluid is filled in the heat pipe (2); the low-temperature pump also comprises a heat insulation sleeve (8), wherein the heat insulation sleeve (8) is sleeved on the part, extending out of the low-temperature pump body (1), of the heat pipe (2) and the outer side of the heater (3); during operation, the working fluid in the heat pipe (2) is solidified due to the excessively low temperature of the cryopump body (1).
  2. 2. A rapid regeneration cryopump according to claim 1, wherein the portion of the heat pipe (2) extending out of the cryopump body (1) is formed with a flat plate portion (21), the heater (3) is in contact with the flat plate portion (21), and the heater (3) is an electric heater.
  3. 3. A cryopump with fast regeneration according to claim 1, further comprising a first fixing means (4) and a second fixing means (5), the first fixing means (4) fixing the heat pipe (2) with the primary cold head (14), the second fixing means (5) fixing the heat pipe (2) with the secondary cold head (15); the heat pipe (2) is fixedly connected with the cylinder shell (10), and the heater (3) is fixedly connected with the heat pipe (2).
  4. 4. A rapid regeneration cryopump according to claim 1, wherein the housing of the heat pipe (2) is made of aluminium, copper, an aluminium alloy or a copper alloy.
  5. 5. A cryopump with fast regeneration according to claim 1, further comprising a thermal insulation layer (6), the thermal insulation layer (6) covering the portion of the heat pipe (2) extending out of the cryopump body (1) and the surface of the heater (3), the thermal insulation layer (6) being in contact with the cylinder housing (10), the thermal insulation sleeve (8) being located outside the thermal insulation layer (6).
  6. 6. A rapid regeneration cryopump according to claim 1, wherein the insulating sleeve (8) is a hard shell, the insulating sleeve (8) is fixedly connected with the cylinder housing (10), the insulating sleeve (8) is not in contact with the heat pipe (2) and the heater (3), and a vacuum environment is formed inside the insulating sleeve (8).
  7. 7. The rapid regeneration cryopump of claim 6, further comprising a radiator (9), an extraction valve (81) and a vent valve (82), wherein the heat insulating sleeve (8) is fixedly connected with the extraction valve (81) and the vent valve (82) respectively, the inside of the heat insulating sleeve (8) is communicated with the extraction valve (81) and the vent valve (82) respectively, the extraction valve (81) is communicated with the vacuum pump, and the radiator (9) is in contact with the heat pipe (2).
  8. 8. The cryopump of claim 7, wherein the heat sink (9) includes a base (91) and fins (82), the base (91) is attached to and fixedly connected to the plate portion (21), and the fins (82) are integrally formed with the base (91).
  9. 9. A rapid regeneration pump according to claim 7, further comprising a fan (83), wherein the sleeve (8) is fixedly connected to the two vent valves (82), respectively, and wherein the outside of at least one vent valve (82) is fixedly connected to and in communication with the fan (83).

Description

Low-temperature pump capable of being regenerated rapidly Technical Field The invention relates to the field of cryopumps, in particular to a rapid regeneration cryopump. Background The cryogenic pump is a storage type vacuum pump, an extremely low temperature surface is arranged in the pump, and gas can be captured through condensation and adsorption, so that the ultra-high vacuum state is realized. The cryopump can obtain clean vacuum with the maximum pumping rate and the lowest limiting pressure, and is widely applied to research and production of semiconductors and integrated circuits, molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like. When the low-temperature pump runs for a long time to reach the saturated capacity, the pumping speed is rapidly reduced, and then the pump is stopped to heat, so that the gas adsorbed on the low-temperature plate is released, and the original pumping performance is recovered. The temperature is raised and the condensed adsorbed gas is released by pumping with a pre-pump, which is called "regeneration". Regeneration is accomplished in several ways: ① The natural heating method is to turn off the power supply of the refrigerator and to heat the low temperature pump slowly with the heat of the pump wall. The temperature rise is slow at the beginning, and when the pressure in the pump rises to the effect of convection heat exchange, the temperature rise rate is accelerated, and finally, the stable temperature rise value is reached. ② The air release heating method is to open the air release valve to put clean and dry air into the air release valve after the refrigerator is stopped to make the low temperature plate of the low temperature pump heat up rapidly ③ The electric heating method is to install electric heater on the first and the second cold heads of the low temperature pump to raise the temperature of the low temperature board fast and shorten the regeneration time. The existing electric heating mode adopts a metal shell to penetrate into the low-temperature pump, a plurality of heating wires and silica gel are arranged in the empty metal shell, the silica gel is positioned between the heating wires and the metal shell, and the heating wires are prevented from contacting each other or the metal shell, so that short circuit is prevented. The smaller the thickness of the silica gel is, the better the heat conducting performance is, but the more short circuit is easy to occur to the electric heating rod, so that electromagnetic interference is caused, and the larger the thickness of the silica gel is, the less short circuit is easy to occur, but the worse the heat conducting performance is. Because the thermal conductivity of silica gel is relatively poor, and the thickness of silica gel in the existing electric heating rod is relatively large, the heating capacity of the electric heating rod to the cold head cannot be continuously improved, and the time for electric heating regeneration is relatively long. And the heating amount cannot be increased by increasing the number of heating rods due to the priority of the internal space of the cryopump and the need to reduce the number of sealing interfaces. Disclosure of Invention The invention provides a rapid regeneration cryopump, which solves the technical problems. The utility model provides a cryogenic pump of quick regeneration, includes the cryogenic pump body, still includes heat pipe and heater, the heat pipe passes the cylinder casing of cryogenic pump body, the heat pipe contacts with the inside first order cold head and the second grade cold head of cryogenic pump body, the heater is located the cryogenic pump body outside and contacts with the heat pipe. Further, a flat plate part is formed at the part of the heat pipe extending out of the cryopump body, the heater is in contact with the flat plate part, and the heater is an electric heater. Further, the heat pipe cooling device further comprises a first fixing device and a second fixing device, wherein the first fixing device is used for fixing the heat pipe and the primary cold head, and the second fixing device is used for fixing the heat pipe and the secondary cold head; The heat pipe is fixedly connected with the cylinder shell, and the heater is fixedly connected with the heat pipe. Further, the shell of the heat pipe is made of aluminum, copper, aluminum alloy or copper alloy, a capillary structure is fixed in the shell of the heat pipe, and working fluid is filled in the heat pipe. Further, the heat pipe is sleeved outside the heater and the part of the heat pipe extending out of the cryopump body. Further, the heat pipe cooling device further comprises a heat insulation layer, the heat insulation layer covers the part, extending out of the cryopump body, of the heat pipe and the surface of the heater, the heat insulation layer is in contact with the cylinder she