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CN-119324146-B - Coil connecting piece, electrode coil connecting structure and semiconductor process equipment

CN119324146BCN 119324146 BCN119324146 BCN 119324146BCN-119324146-B

Abstract

The invention provides a coil connecting piece, an electrode coil connecting structure and semiconductor process equipment, wherein the coil connecting piece comprises a plurality of support arms, a current equalizing part, a peripheral wall and a current equalizing part, wherein the support arms are provided with a first end and a second end which are oppositely arranged, the second end of the support arm is connected to the second end of the current equalizing part, the peripheral wall of the current equalizing part extends from the first end to the second end of the current equalizing part, all the support arms are distributed at intervals along the circumferential direction of the peripheral wall of the current equalizing part, and the current equalizing part is used for dispersing current output by a radio frequency source so as to uniformly split the current to the support arms. According to the coil connecting piece, the current equalizing parts are arranged, so that the distances between the current equalizing parts and the support arms are basically the same, current can be uniformly distributed on the support arms, and the uniformity of the current part of the electrode coil is improved.

Inventors

  • WANG SONG
  • YAO WEIJIE
  • WEI GANG
  • LI YINLONG

Assignees

  • 北京北方华创微电子装备有限公司

Dates

Publication Date
20260512
Application Date
20230717

Claims (12)

  1. 1. An electrode coil connecting structure, characterized by comprising: The coil connecting piece is used for connecting a radio frequency source and an electrode coil (30) and comprises a plurality of support arms (11), a current equalizing part (12) and a current equalizing part (12), wherein the support arms (11) are provided with a first end and a second end which are opposite, the first end of the current equalizing part (12) is used for being electrically connected with the radio frequency source, the second end of the support arms (11) is connected with the second end of the current equalizing part (12), the current equalizing part (12) is further provided with a peripheral wall, all the support arms (11) are distributed at intervals along the peripheral wall of the current equalizing part (12) in the circumferential direction, the current equalizing part (12) is used for dispersing current output by the radio frequency source so as to uniformly split the current to the support arms (11), and A shielding shell (40), wherein the shielding shell (40) is provided with a containing cavity, the shielding shell (40) is electrically connected with the reflux end of the radio frequency source, the coil connecting piece is arranged in the containing cavity, The electrode coil (30) comprises a first electrode coil (31), The coil connector (10) comprises a first coil connector (10 a), the first coil connector (10 a) is arranged in the accommodating cavity, and the first coil connector (10 a) is used for connecting a first output end of the radio frequency source with a receiving end of the first electrode coil (31); The electrode coil connecting structure further includes: The first plug-in column (50) is arranged on the shielding shell (40) in a penetrating mode, the first coil connecting piece (10 a) is electrically connected with the first plug-in column (50), and the first coil connecting piece (10 a) is electrically connected with the receiving end of the first electrode coil (31) through the first plug-in column (50); The second plug-in column (60), second plug-in column (60) with shield shell (40) electricity is connected, second plug-in column (60) be used for with the output electricity of first electrode coil (31) is connected, the radio frequency source passes through first coil connecting piece (10 a) first plug-in column (50), second plug-in column (60) with form the electric current return circuit between shield shell (40) and first electrode coil (31).
  2. 2. The electrode coil connecting structure according to claim 1, wherein, The flow equalizing part (12) is cylindrical, and the axis of the flow equalizing part (12) is perpendicular to all the support arms (11).
  3. 3. The electrode coil connecting structure according to claim 2, wherein, The second ends of all the support arms (11) are converged at the second end of the flow equalizing part (12).
  4. 4. The electrode coil connecting structure according to claim 2, wherein, The flow equalizing part (12) is provided with a through avoidance channel (121) along the axial direction of the flow equalizing part, and extension lines of all the support arms (11) are intersected on the axial line of the flow equalizing part (12).
  5. 5. The electrode coil connection structure according to claim 1, wherein the coil connection member (10) further includes: The main flow arm (13), main flow arm (13) is connected in the first end of flow equalizing part (12), flow equalizing part (12) pass through main flow arm (13) with radio frequency source electricity is connected.
  6. 6. The electrode coil connecting structure according to claim 1, wherein, The included angles formed between all adjacent support arms (11) are equal.
  7. 7. The electrode coil connection structure according to claim 1, wherein the first coil connection member (10 a) includes: A first support arm (11 a), wherein a first end of the first support arm (11 a) is electrically connected with the first plug-in column (50); the first current equalizing part (12 a), the first current equalizing part (12 a) is cylindrical, a first end of the first current equalizing part (12 a) is used for being electrically connected with a first output end of the radio frequency source, and a second end of the first support arm (11 a) is connected with a second end of the first current equalizing part (12 a).
  8. 8. The electrode coil connecting structure according to claim 1, wherein the shield case (40) includes A barrel (41), a first end of the barrel (41) being electrically connected to a return end of the radio frequency source; the shielding plate (42), shielding plate (42) are connected the second end of barrel (41), barrel (41) with shielding plate (42) enclose hold the chamber, shielding plate (42) with barrel (41) electricity is connected, first spliced pole (50) wear to establish on shielding plate (42), second spliced pole (60) with shielding plate (42) electricity is connected.
  9. 9. The electrode coil connection structure according to claim 7, wherein the electrode coil (30) further includes a second electrode coil (32), the first electrode coil (31) is located inside the second electrode coil (32), the coil connection member (10) further includes: A second coil connection (10 b), the second coil connection (10 b) being for connecting a second output of the radio frequency source with a receiving end of the second electrode coil (32); The electrode coil connecting structure further includes: a third plug-in post (70), wherein the third plug-in post (70) is arranged on the shielding shell (40) in a penetrating way, the second coil connecting piece (10 b) is electrically connected with the third plug-in post (70), and the second coil connecting piece (10 b) is electrically connected with the receiving end of the second electrode coil (32) through the third plug-in post (70); The second plug-in post (60) is further used for connecting a reflux end of the radio frequency source and an output end of the second electrode coil (32), so that a current loop is formed between the radio frequency source and the second electrode coil (32) through the second coil connecting piece (10 b), the third plug-in post (70), the second plug-in post (60) and the shielding shell (40).
  10. 10. The electrode coil connection structure according to claim 9, wherein the second coil connection member (10 b) includes: A second arm (11 b), a first end of the second arm (11 b) being adapted to be electrically connected to the third plug post (70); The second current equalizing part (12 b), the second current equalizing part (12 b) is in a cylinder shape, the first end of the second current equalizing part (12 b) is used for being electrically connected with the second output end of the radio frequency source, and the second end of the second support arm (11 b) is connected with the second end of the second current equalizing part (12 b); the second flow equalizing part (12 b) is sleeved outside the first flow equalizing part (12 a), and a gap is formed between the second flow equalizing part (12 b) and the first flow equalizing part (12 a).
  11. 11. The electrode coil connecting structure according to claim 1, further comprising: The installation seat (80), install seat (80) wear to establish on shield shell (40) and with shield shell (40) are connected, first spliced pole (50) run through simultaneously mount pad (80) with shield shell (40), first spliced pole (50) with mount pad (80) are connected, first spliced pole (50) with pass through between shield shell (40) mount pad (80) insulation setting.
  12. 12. A semiconductor processing apparatus, comprising: The shell is provided with an installation cavity; The electrode coil connection structure of any one of claims 1 to 11, disposed within the mounting cavity.

Description

Coil connecting piece, electrode coil connecting structure and semiconductor process equipment Technical Field The invention relates to the field of semiconductor manufacturing, in particular to a coil connecting piece, an electrode coil connecting structure and semiconductor process equipment. Background Deep silicon etching is an important process in industrial production, and has important application in the fields of integrated circuits, micro-electromechanical systems, advanced packaging and the like. With the rapid development of semiconductor component manufacturing process, the requirements on component performance and integration level are higher and higher, and the inductively coupled plasma source is widely applied to the field of microelectronic processing by virtue of high selectivity, high anisotropy and high etching rate. In the prior art, an upper electrode coil of an etching machine adopts an inner double-layer coil and an outer double-layer coil to provide radio frequency current, and the double-layer coil structure is positioned above the surface of a ceramic window. An electrode coil connecting structure is arranged between the upper electrode coil and the matcher and is used for connecting the coil and the matcher of the upper electrode. The existing upper electrode coil connecting structure adopts coil connecting pieces 10' to form four links to realize connection between the matcher 1 and the electrode coils. As shown in fig. 1, the matcher 1 is connected to the inner layer coil 4 through the first link 2 and the second link 3 to form a loop, and the matcher 1 is connected to the outer layer coil 7 through the third link 5 and the fourth link 6 to form a loop. As shown in the structural schematic diagram of 4 coil connectors 10 'shown in fig. 2, the 4 coil connectors 10' respectively form four links, each coil connector includes 1 main current arm 11 'and 4 support arms 12', the main current arm 11 'is connected with an input end or an output end of the matcher 1, and the 4 support arms 12' are respectively connected to corresponding electrode coils to realize the split of radio frequency current. That is, after the rf current flows out from the output interface of the matcher 1, the rf current is split into 4 arms 12 'via the main current arm 11' and symmetrically flows into the coil assembly. However, due to the unreasonable arrangement of the coil connectors in the prior art, there is an asymmetry in the current flowing into the electrode coil, ultimately resulting in an asymmetry in the plasma etch. Therefore, how to distribute the current more evenly to the individual arms 12' is a problem to be solved in the art. Disclosure of Invention The invention aims to solve the problem that current flowing into an electrode coil is uneven because more current flows on a support arm close to a main current arm when current is shunted to the electrode coil in the prior art. In order to solve the problems, according to a first aspect of the invention, a coil connecting piece is disclosed for connecting a radio frequency source and an electrode coil, the coil connecting piece comprises a plurality of support arms, a current equalizing part and a peripheral wall, wherein the first end of each support arm is used for being electrically connected with the electrode coil, the current equalizing part is provided with a first end and a second end which are oppositely arranged, the first end of each current equalizing part is used for being electrically connected with the radio frequency source, the second end of each support arm is connected with the second end of each current equalizing part, the current equalizing part is further provided with the peripheral wall, all support arms are circumferentially distributed at intervals along the peripheral wall of each current equalizing part, and the current equalizing part is used for dispersing current output by the radio frequency source so as to uniformly split the current to the support arms. Further, the flow equalizing part is cylindrical, and the axis of the flow equalizing part is perpendicular to all the support arms. Further, the second ends of all the support arms meet at the second end of the flow equalizing part. Further, the flow equalizing part is provided with a through avoidance channel along the axial direction of the flow equalizing part, and extension lines of all the support arms are intersected on the axial line of the flow equalizing part. Further, the coil connecting piece further comprises a main flow arm, wherein the main flow arm is connected to the first end of the current equalizing part, and the current equalizing part is electrically connected with the radio frequency source through the main flow arm. Further, the included angles formed between all adjacent support arms are equal. According to the second aspect of the invention, an electrode coil connecting structure is also disclosed, which comprises the coil connecting p