CN-119416483-B - Design method of compliant flight operation mechanism driven by service performance map

CN119416483BCN 119416483 BCN119416483 BCN 119416483BCN-119416483-B

Abstract

The application discloses a design method of a compliant flight operation mechanism driven by a service performance map, which comprises the following steps of obtaining service performance indexes of compliant flight operation. And constructing a theoretical performance map and a calculation model according to the service performance index and the associated theoretical performance index. Optimizing the calculation model to obtain a design model, screening according to the service performance index and the theoretical performance index to obtain an associated experimental performance index, and constructing an experimental performance map. And testing service performance indexes and constructing a service performance map. Taking the service performance spectrum as full-closed loop feedback, taking the experimental performance spectrum and the theoretical performance spectrum as semi-closed loop feedback, and optimizing the design model. Repeating the steps until the design optimization of the compliant flight operation mechanism is completed. Compared with the prior art, the application takes the mechanism statics performance, the dynamics performance and the reliability performance as optimization targets, designs the mechanism configuration and the scale parameters, and meets the design requirement of multiple performance indexes.

Inventors

WANG RUIZHOU
TANG JIAWEI
LIU MIN
ZHAN JINQING
WANG HUA

Assignees

广东工业大学

Dates

Publication Date: 20260512
Application Date: 20241022

Claims (7)

1. The design method of the compliant flight operation mechanism driven by the service performance map is characterized by comprising the following steps of: s1, researching flexible flight operation of microelectronic equipment to obtain service performance indexes; s2, constructing a theoretical performance map and a calculation model of the compliant flight operation mechanism according to the service performance index and the associated theoretical performance index; s3, optimizing the calculation model to obtain a configuration and structural parameter design model, screening according to the service performance index and the theoretical performance index to obtain an associated experimental performance index, constructing an experimental performance map, processing a prototype and testing; s4, mounting the prototype to microelectronic equipment, testing service performance indexes and constructing a service performance map; S5, taking the service performance map as full-closed loop feedback, taking the experimental performance map and the theoretical performance map as semi-closed loop feedback in the process, and optimizing a configuration and structural parameter design model; S6, repeating the steps S2-S5 until the service performance map meets the expectations, and completing design optimization of the compliant flight operation mechanism, wherein the construction process of the theoretical performance map comprises the following steps: S21, establishing a statics model of the compliant flight operation mechanism, and calculating statics performance indexes, wherein the compliant flight operation mechanism is simplified into a unit model consisting of beam units and hinge units based on finite element theory, a unit stiffness matrix of each unit is established, the unit stiffness matrices are converted and combined to obtain an overall stiffness matrix, and displacement of each node is solved according to the overall stiffness matrix and stress conditions of each node; S22, establishing a dynamic model of the compliant flying operation mechanism, and calculating dynamic performance indexes, wherein a unit mass matrix of each unit is established according to the unit model, the unit mass matrices are converted and combined to obtain an integral mass matrix, and the natural frequency of the mechanism is obtained according to the integral mass matrix and the integral stiffness matrix; s23, establishing a reliability model of the compliant flying operation mechanism, and calculating a reliability performance index, namely obtaining the maximum working stroke of the mechanism through rigidity calculation, calculating the maximum stress of the mechanism at the maximum working stroke, and judging whether the maximum stress exceeds the allowable stress of the mechanism.
2. The method according to claim 1, wherein in steps S1 and S2, the service performance index includes productivity, yield, stability and reliability, the theoretical performance index associated with the service performance index includes a statics performance index, a dynamics performance index and a reliability performance index, and the calculation model constructed according to the theoretical performance index is a statics performance index function Dynamic performance index function And reliability performance index function 。
3. The method for designing a compliant flight mechanism driven by a service performance map according to claim 2, wherein in said step S3, said configuration and structural parameter design model is composed of said static performance index function Dynamic performance index function And reliability performance index function After determining an optimization target, constraint conditions, design variables and a value interval thereof, solving the pareto front end, and obtaining the pareto front end through a decision algorithm, wherein the step S3 specifically comprises the following steps: S31, determining specific indexes of a service performance map of the compliant mechanism according to the operation requirements of the microelectronic equipment; S32, determining a size parameter which plays a role in determining the specific index as the size parameter to be optimized according to the specific index; S33, establishing a statics performance index function according to the extracted size parameters to be optimized Dynamic performance index function Reliability performance index function ; S34, normalization processing is carried out, and a comprehensive performance index function is established And determining final structural parameters by adopting an optimization algorithm.
4. The service performance map-driven compliant flying work mechanism design method according to claim 3, wherein in the step S32, the size parameters to be optimized are: Wherein, the Representing the length parameter vector to be optimized extracted by the mechanism, Representing the length parameter to be optimized, Representing the thickness parameter vector to be optimized extracted by the mechanism, Representing the flexible hinge radius parameter vector to be optimized extracted by the mechanism, Representing the thickness parameter to be optimized, Representing the flexible hinge radius parameter to be optimized.
5. The method for designing a compliant flight operation mechanism driven by a service performance map as described in claim 4, wherein in said step S33, a static performance index function is established Dynamic performance index function Reliability performance index function Before, it is also necessary to convert the beam units and hinge units into a matrix of units, in which a hydrostatic performance index function is established The beam elements need to be converted into element stiffness matrices in local coordinates, specifically: Wherein, the Is the first Node and the first The local unit stiffness matrix among the nodes is converted into global coordinates to obtain a global unit stiffness matrix: The global unit stiffness matrix in the global coordinate system is expanded as follows Is obtained by: Wherein, the The matrix after expanding all units is sequentially overlapped to obtain an integral rigidity matrix K for the number of nodes, and the displacement of each node is as follows , wherein, Finally, taking the mechanism amplification ratio as the statics performance index function for the stress condition of each node : Wherein, the For the displacement of the output end of the mechanism, Is the displacement of the input end of the mechanism.
6. The design method of compliant flight operation mechanism driven by service performance map as described in claim 5, wherein step S34 comprises the steps of Dynamic performance index function Dividing regional weight factors to obtain comprehensive performance index function of compliant flight operation mechanism , wherein, The weight coefficients representing the hydrostatic index function, And the weight coefficient representing the dynamic performance index function.
7. The service performance map driven compliant flight operations mechanism design method of claim 6, wherein the optimization algorithm comprises the steps of: S35, for comprehensive performance index function Single-objective optimization is carried out by adopting a particle swarm algorithm to obtain optimal structural parameters ; S36, for static performance index function Dynamic performance index function Reliability performance index function Performing multi-objective optimization by adopting a multi-objective intelligent optimization algorithm to obtain optimal structural parameters ; S37, structural parameters And structural parameters And comparing the corresponding theoretical performance maps to determine the final structural parameters.

Description

Design method of compliant flight operation mechanism driven by service performance map Technical Field The invention relates to the technical field, in particular to a design method of a compliant flight operation mechanism driven by a service performance map. Background In microelectronic equipment, the working mechanism acts as an end effector that performs precision operations, and its design performance is directly related to the specifications of the entire (kit) of equipment. When the traditional pure rigid operation mechanism is used for coping with complex and changeable microelectronic manufacturing environments, the problems of vibration transmission, motion hysteresis and the like often exist, and the operation requirements of high precision, high speed and high flexibility are difficult to meet. Thus, compliant flight operations have been developed. The compliant flight operation mechanism utilizes the elastic deformation of the component to complete the motion and force transmission and conversion mechanism. And a rigid kinematic pair of a traditional rigid mechanism is abandoned, and a flexible unit is adopted as a core component. The structure is more compact and light, the number of parts and the installation cost are reduced, and the reliability and the stability of the system are improved. The characteristics of the compliant mechanism are utilized to reduce vibration and impact in an active or passive mode, improve the stability and precision of operation and serve as an end effector of microelectronic equipment. The method aims at the dimensional synthesis of seeking the optimal performance of the compliant flight operation mechanism, performs the optimization design of dimensional parameters, realizes the service performance meeting the expected requirement, and is the technical problem facing at present. The prior art discloses a compliant mechanism stress constraint topology optimization method based on isogeometric analysis, which comprises the steps of defining a design domain of a compliant mechanism, initializing design parameters of the compliant mechanism, expressing a geometric model of the compliant mechanism by using NURBS curves according to the design parameters of the compliant mechanism, dispersing the design domain into geometric analysis grids, solving a structure displacement function, introducing density variables into control points to obtain the density of the control points, carrying out smooth processing, solving a normal form equivalent stress at Gaussian integral points, solving a maximum normal form equivalent stress of the compliant mechanism by adopting a P normal form method, establishing a topology optimization model based on the smoothed control point density by taking the maximum output displacement of the compliant mechanism as an objective function, the maximum normal form equivalent stress and the volume fraction of the compliant mechanism as constraints, and solving the topology optimization model by a moving progressive algorithm. The disadvantage of this solution is that, because the performance indexes are often opposite, the above-mentioned technical solution cannot well find the optimal balance point between the performance indexes. Therefore, in combination with the above requirements and the defects of the prior art, the application provides a design method of a compliant flight operation mechanism driven by a service performance map. Disclosure of Invention The invention provides a design method of a compliant flight operation mechanism driven by a service performance map, which takes the static performance, the dynamic performance and the reliability performance of the mechanism as optimization targets, designs the configuration and the scale parameters of the mechanism and meets the design requirement of multiple performance indexes. The primary purpose of the invention is to solve the technical problems, and the technical scheme of the invention is as follows: The invention provides a design method of a compliant flight operation mechanism driven by a service performance map, which comprises the following steps: S1, investigation is conducted on compliant flight operation of the microelectronic device, and service performance indexes are obtained. S2, constructing a theoretical performance map and a calculation model of the compliant flight operation mechanism according to the service performance index and the associated theoretical performance index. And S3, optimizing the calculation model to obtain a configuration and structural parameter design model, screening according to the service performance index and the theoretical performance index to obtain an associated experimental performance index, constructing an experimental performance map, processing a prototype and testing. And S4, mounting the prototype to microelectronic equipment, testing service performance indexes and constructing a service performance map. S5, taking the servic