CN-119510292-B - Optical path system and optical measurement equipment

Abstract

The invention relates to protection of an optical path system, and provides an optical path system and optical measurement equipment. The light path system comprises a light source module and/or a light detection module, a light beam processing device used for processing light beams passing through, a mounting base body, a light source inlet and a light outlet, wherein the mounting base body is provided with a mounting cavity, at least one light beam processing device is arranged in the mounting cavity, the light source module and/or the light detection module are arranged outside the mounting base body, the mounting base body is provided with the light inlet and the light outlet, the light inlet is used for allowing light beams to be processed to enter the mounting cavity, the light outlet is used for allowing the light beams processed by the light beam processing device to be emitted from the mounting cavity, and the air supply device comprises an air supply connector connected to the mounting base body and used for supplying protective air into the mounting cavity. The invention mainly solves the technical problem that the light path of a broad spectrum light source is easy to generate ozone to cause oxidation damage.

Inventors

• CHEN LU
• GAO ZHIMIN
• MA YANZHONG
• WANG NANSHUO
• HE BOQU
• SU FAN
• ZHANG SONG

Assignees

• 深圳中科飞测科技股份有限公司

Dates

Publication Date

20260508

Application Date

20230809

Claims (15)

1. 1. An optical path system, comprising: A light source module and/or a light detection module; the beam processing device in the reflecting arm is used for carrying out polarization analysis; The light source module and/or the light detection module are/is arranged outside the mounting matrix, the mounting matrix is provided with a light incidence port and a light emergent port, the light incidence port is used for allowing a light beam to be processed to enter the mounting cavity, and the light emergent port is used for allowing the light beam processed by the light beam processing device to be emitted from the mounting cavity; the light source module and the light detection module are respectively communicated with the light entrance port and the light exit port of the mounting cavity through the sealing tube, and a light beam channel is arranged in the sealing tube; And a gas supply device comprising a gas supply joint; the gas supply connector is connected to the mounting substrate and is used for supplying protective gas into the mounting cavity, and the light beam processing device is isolated in the mounting cavity and is in the protective gas atmosphere.
2. 2. The optical path system of claim 1 wherein the mounting substrate comprises a base and a protective cover, the beam processing device being disposed on the base, the protective cover having an interior cavity, the protective cover being snap-fit to the base and enclosing the mounting cavity with the base.
3. 3. The optical path system according to claim 2, wherein the base is provided with a first buckling surface, the protective cover is provided with a second buckling surface, at least one of the first buckling surface and the second buckling surface is provided with a sealing groove, a sealing element is arranged in the sealing groove, and the sealing groove on the first buckling surface and/or the second buckling surface is provided with a notch for embedding a sealing ring, and the notch is of a necking structure.
4. 4. The light path system of claim 3, wherein the seal groove is dovetail in cross-section and the seal is an O-ring.
5. 5. The optical path system of claim 3, wherein a groove is formed in a side wall of the protective cover, one end of the groove facing away from the base penetrates through the protective cover, one end of the groove, close to the base, is a blind end, the blind end forms a step on the protective cover, a through hole is formed in the step, a rod portion of a screw passes through the through hole to press and fix the protective cover onto the base, and the groove is used for avoiding a head portion of the screw.
6. 6. The light path system of claim 5, wherein the screw comprises an inner screw on a side of the seal adjacent the mounting cavity and an outer screw on a side of the seal facing away from the mounting cavity.
7. 7. The light path system of claim 2, wherein the sealing tube has flexibility for adjusting the position of the light source module and/or light detection module relative to the protective cover.
8. 8. The optical path system according to claim 7, wherein an optical path reflector is provided on the protective cover, and an optical axis of the light source module and/or the light detection module forms an included angle with an optical axis of the light beam processing device, and the optical path reflector is used for reflecting light between the light beam processing device and the light source module and/or the light detection module.
9. 9. The light path system of claim 7, wherein an end of the sealing tube is detachably connected to the light source module or the light detection module by a magnetic attraction structure.
10. 10. The optical path system of claim 2, wherein the protective cover comprises at least two cover bodies, each cover body is in butt joint in turn, and a sealing structure is arranged at the butt joint position of two adjacent cover bodies.
11. 11. The light path system according to any one of claims 1 to 10, wherein the beam processing device comprises a focusing module, the light outlet and/or the light inlet being provided with the focusing module, the focusing module being in sealing connection with the mounting substrate.
12. 12. The optical path system of any one of claims 1 to 10, wherein the mounting base has a cable aperture therein, and wherein the cable aperture has a cable seal for the passage of a cable therethrough and sealing engagement with the cable.
13. 13. The optical path system of any one of claims 1 to 10, further comprising a flow equalizing element disposed on the mounting substrate and corresponding to the air outlet of the air supply joint, the flow equalizing element for dispersing air discharged from the air supply joint.
14. 14. The optical path system of claim 13, wherein the flow equalization element is a flow equalization plate, the flow equalization plate is buckled on the inner wall of the installation cavity and encloses an air chamber with the inner wall of the installation cavity, and the air outlet of the air supply connector is communicated with the air chamber.
15. 15. An optical metrology apparatus comprising: an optical path system, the optical path system being the optical path system of any one of claims 1 to 14; And a detection device for detecting the object to be detected.

Description

Optical path system and optical measurement equipment Technical Field The invention relates to protection of optical path systems. Background In optical metrology devices, the performance of the light source is critical to the measurement device. Currently, a broad spectrum light source has become the light source of choice for semiconductor optical measurement devices due to its advantages such as broad spectrum range, ultra-high brightness/luminance, ultra-long lifetime, ultra-high stability, etc. For example, ellipsometers of semiconductor film thickness measuring apparatuses are increasingly employing a broad spectrum light source as their light source device. The broad spectrum light source has the advantages that when the broad spectrum light source is used as the light source of the measuring device, ultraviolet light in the ultraviolet band range of the broad spectrum light source can cause oxygen in the measuring light path to generate photolysis reaction to generate ozone, and the ozone has strong oxidizing property and can cause oxidation damage to plating films and structural parts of some light beam processing devices (such as lenses) in the measuring light path. These oxidative damages can affect the performance of the measuring light path, such as reduced transmitted or reflected light intensity due to damaged lens coating, and light path pollution due to volatile matters generated by ozone oxidation of the original black anodized surface treatment layer of the structure. Disclosure of Invention The invention mainly solves the technical problem that the light path containing ultraviolet rays in the light source is easy to generate ozone to cause oxidation damage. In a first aspect, the present invention provides an optical path system. An optical path system, comprising: A light source module and/or a light detection module; the beam processing device in the reflecting arm is used for carrying out polarization analysis; The light source module and/or the light detection module are/is arranged outside the mounting matrix, the mounting matrix is provided with a light incidence port and a light emergent port, the light incidence port is used for allowing a light beam to be processed to enter the mounting cavity, and the light emergent port is used for allowing the light beam processed by the light beam processing device to be emitted from the mounting cavity; the light source module and the light detection module are respectively communicated with the light entrance port and the light exit port of the mounting cavity through the sealing tube, and a light beam channel is arranged in the sealing tube; And a gas supply device comprising a gas supply joint; the gas supply connector is connected to the mounting substrate and is used for supplying protective gas into the mounting cavity, and the light beam processing device is isolated in the mounting cavity and is in the protective gas atmosphere. In one technical scheme, the mounting matrix comprises a base and a protective cover, the beam processing device is arranged on the base, the protective cover is provided with an inner cavity, and the protective cover is buckled on the base and surrounds the mounting cavity with the base. In one technical scheme, a first buckling surface is arranged on the base, a second buckling surface is arranged on the protective cover, a sealing groove is formed in at least one of the first buckling surface and the second buckling surface, a sealing piece is arranged in the sealing groove, and a notch for embedding a sealing ring is formed in the sealing groove on the first buckling surface and/or the second buckling surface, and the notch is of a necking structure. In one technical scheme, the cross section of the sealing groove is in a dovetail shape, and the sealing piece is an O-shaped ring. In one technical scheme, be equipped with the recess on the lateral wall of safety cover, the recess deviates from the one end of base link up the safety cover, the recess is close to the one end of base is the blind end, the blind end is in form the step on the safety cover, be equipped with the via hole on the step, the shaft portion that the via hole supplies the screw passes in order to compress tightly the safety cover and fix to on the base, the recess is used for dodging the head of screw. In one aspect, the screw includes an inboard screw located on a side of the seal adjacent the mounting cavity and an outboard screw located on a side of the seal facing away from the mounting cavity. In one embodiment, the sealing tube has flexibility for adjusting the position of the light source module and/or the light detection module relative to the protective cover. In one technical scheme, the protecting cover is provided with an optical path reflector, the optical axis of the light source module and/or the optical detection module forms an included angle with the optical axis of the light beam processing device, and the optical