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CN-119855177-B - Power switch device and electronic equipment

CN119855177BCN 119855177 BCN119855177 BCN 119855177BCN-119855177-B

Abstract

The application discloses a power switch device and electronic equipment, the power switch device comprises an active area, a terminal area, a grid bonding pad, a plurality of trench grids extending along a first direction and arranged at intervals along a second direction, a grid bus surrounding the active area and electrically connected with the grid bonding pad, wherein the grid bus comprises a first grid bus, a second grid bus and at least one grid finger, the first grid bus is connected with a first side of the grid bonding pad, part of the first grid bus extends along the second direction, part of the second grid bus is connected with a second side of the grid bonding pad, the at least one grid finger extends along the second direction and is connected with the first grid bus or the second grid bus, and the grid bus and the grid bonding pad at least partially surround the active area. By arranging the grid bus and the grid bonding pad and the grid fingers, the trench grid far away from the grid bonding pad can obtain enough current, so that the current distribution in the active region is more uniform.

Inventors

  • YANG JINGJIE

Assignees

  • 海信家电集团股份有限公司

Dates

Publication Date
20260505
Application Date
20241230

Claims (14)

  1. 1. A power switching device, comprising: An active region; a termination region disposed at a periphery of the active region; a plurality of trench gates disposed in the active region, the plurality of trench gates extending along a first direction and being disposed at intervals along a second direction, the first direction intersecting the second direction; a gate bus line at least partially disposed between the active region and the termination region; A gate pad disposed between the termination region and the active region, the gate pad configured to have an exposed surface electrical connection region for electrical connection with the gate bus, wherein the gate bus comprises: A first gate bus line connected to a first side of the gate pad, and a portion of the first gate bus line extending in the second direction; the first gate bus line includes: a first leg, a first end of the first leg being connected to the first side of the gate pad, and the first leg extending in the first direction; A second leg, a first end of the second leg being connected to a second end of the first leg, the second leg extending in the second direction and crossing a plurality of the trench gates; A second gate bus line connected to a second side of the gate pad and a portion of which extends in the second direction, wherein the first side and the second side intersect; The second gate bus line includes: A third leg, a first end of the third leg connecting the second side of the gate pad, the third leg extending in the second direction and crossing a plurality of the trench gates; A fourth leg, a first end of the fourth leg being connected to a second end of the third leg, and the fourth leg extending in the first direction; A third gate bus line, a first end of the third gate bus line being connected to a second end of the second branch line, and the third gate bus line extending toward the fourth branch line side in the first direction; a fourth gate bus, a first end of the fourth gate bus being connected to a second end of the fourth branch, the fourth gate bus extending in the first direction toward the third gate bus, wherein the third gate bus and the fourth gate bus are disposed at intervals in the first direction; At least one gate finger, each gate finger extending along the second direction and having one end connected to the first gate bus or the second gate bus, the gate finger including a second gate finger having one end connected to the second end of the fourth leg and the second gate extending in the active region, The active area is at least partially surrounded by the enclosed shape formed by the gate bus and the gate pad, the gate pad is arranged in a corner area of the enclosed shape, the active area is provided with an oblique diagonal, one end of the oblique diagonal is close to the gate pad, the first gate bus and the second gate bus are respectively positioned on two sides of the oblique diagonal, and the enclosed shape formed by the first gate bus, the second gate bus and the gate pad at least partially surrounds the active area.
  2. 2. The power switching device of claim 1 wherein the gate pad is disposed to protrude toward a side where the active region is located.
  3. 3. The power switching device of claim 1 wherein the gate finger comprises a first gate finger wherein an end of the first gate finger is connected to the first leg and the first gate finger extends into the active region, and wherein the first gate finger and the second gate finger are spaced apart in the second direction.
  4. 4. The power switching device of claim 3 wherein said first gate finger and said second gate finger are opposite and spaced apart.
  5. 5. The power switching device of claim 3 wherein the length of the second leg in the second direction is set to D, the length of the first gate bus is set to L1, the length of the second gate finger in the second direction is set to L2, and the length of the second gate bus is set to L3, then 。
  6. 6. The power switch device of claim 3, wherein the length of the second leg in the second direction is set to D, the length of the third leg is set to L4, the length of the first gate finger in the second direction is set to L5, and the length of the first gate bus line between the first gate finger and the gate pad is set to L6, then 。
  7. 7. The power switching device of claim 3, wherein the length of the second leg in the second direction is set to D, the lengths of the first and second fingers in the second direction are each 1 ⁄ D, and/or In the first direction, the distance between the first grating finger and the second branch line is 1 ⁄ D, and/or In a first direction, a distance between the first finger and the second leg is equal to a distance between the first finger and the third leg, and a distance between the second finger and the second leg is equal to a distance between the second finger and the third leg.
  8. 8. The power switching device of claim 3 wherein a sum of a length of the first leg in the first direction and a length of the gate pad in the first direction is equal to a length of the second leg in the second direction.
  9. 9. The power switching device of claim 1 wherein the first leg is parallel to and opposite the fourth leg and the second leg is parallel to and opposite the third leg.
  10. 10. The power switching device of claim 1, wherein the first leg and the third leg are equal in length.
  11. 11. The power switching device of claim 1, wherein, The third gate bus line and the fourth gate bus line are disposed opposite to and spaced apart from each other, and/or, The third gate bus line and the fourth gate bus line are equal in length.
  12. 12. The power switching device according to any one of claims 1 to 11, wherein the first direction is perpendicular to the second direction.
  13. 13. The power switching device according to any one of claims 1 to 11, wherein the power switching device comprises an IGBT or an RC-IGBT.
  14. 14. An electronic device comprising a power switching device according to any of claims 1 to 13.

Description

Power switch device and electronic equipment Technical Field The application relates to the technical field of semiconductors, in particular to a power switch device and electronic equipment. Background With the development of technology, power switching devices, such as IGBTs (Insulated Gate Bipolar Transistor, insulated gate bipolar transistors), are increasingly used. The demand for high current IGBTs is increasing, and with the increase of current capability, the IGBT chip size is also increasing, so that current distribution non-uniformity and heat distribution non-uniformity may occur in the active region. Disclosure of Invention In the summary, a series of concepts in a simplified form are introduced, which will be further described in detail in the detailed description. The summary of the application is not intended to define the key features and essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter. In order to solve the above problems, an aspect of the present application provides a power switching device, including: An active region; a termination region disposed at a periphery of the active region; a plurality of trench gates disposed in the active region, the plurality of trench gates extending along a first direction and being disposed at intervals along a second direction, the first direction intersecting the second direction; a gate bus line at least partially disposed between the active region and the termination region; a gate pad disposed between the termination region and the active region, the gate pad configured to have an electrical connection region with an exposed surface for electrical connection with the gate bus line; wherein the gate bus comprises: A first gate bus line connected to a first side of the gate pad, and a portion of the first gate bus line extending in the second direction; A second gate bus line connected to a second side of the gate pad and a portion of which extends in the second direction, wherein the first side and the second side intersect; at least one gate finger, each gate finger extending along the second direction and having one end connected to the first gate bus line or the second gate bus line, The gate bus and the gate pad form an enclosed shape at least partially surrounding the active region. The technical scheme has the advantages that the driving signals flow into the grid electrode pad and are transmitted to each trench grid electrode through the grid electrode bus by arranging the connected grid electrode bus and the grid electrode pad between the active area and the terminal area, or the current output from the trench grid electrode flows out to the grid electrode pad through the grid electrode bus, so that the power switch device is turned on or turned off, and the grid fingers are partitioned to prevent the current from being too concentrated in the edge area of the active area, so that the current distribution in the active area is more uniform, and the uniformity of the heat distribution is improved. The active region may have a diagonal, one end of the diagonal being adjacent to the gate pad, the first gate bus line and the second gate bus line being located on two sides of the diagonal, respectively, the first gate bus line, the second gate bus line, and the gate pad forming an enclosed shape at least partially surrounding the active region. The technical scheme has the advantages that the first grid bus and the second grid bus are arranged on two sides of the diagonal line and form a surrounding shape, so that current flowing out of the grid bonding pad flows to the trench grid in the active region through the first grid bus and the second grid bus, corresponding current can be obtained by the trench grid far away from the grid bonding pad, and uniformity of current distribution is enhanced. The gate pad is disposed in a corner region of the enclosed shape and protrudes toward a side where the active region is located. The technical scheme has the advantages that the grid electrode pad is arranged in the corner area, so that the arrangement of the device is kept clean and orderly, the attractive appearance and maintainability are improved, electromagnetic interference with other devices can be reduced, and noise and errors are reduced. Illustratively, the first gate bus line includes: a first leg, a first end of the first leg being connected to the first side of the gate pad, the first leg extending in the first direction; and a second leg having a first end connected to a second end of the first leg, the second leg extending in the second direction and crossing a plurality of the trench gates. The technical scheme has the advantages that the first branch line and the second branch line are arranged on the first grid bus, the electric connection with the plurality of groove grids spanned by the first branch line is realized through the second branc