CN-119973575-B - Preparation method of multilayer structure metal mold and multilayer structure metal mold

CN119973575BCN 119973575 BCN119973575 BCN 119973575BCN-119973575-B

Abstract

The invention provides a preparation method of a metal mold with a multilayer structure and the metal mold with the multilayer structure, comprising the steps of preparing at least two metal templates with the single-layer structure, wherein the heights of micro-channel mold cores arranged in the same metal template with the single-layer structure are the same, the heights of micro-channel mold cores arranged on the metal templates with the single-layer structure are different, and the demolding angles of the micro-channel mold cores on the metal templates with the single-layer structure are positive demolding angles; and hot stamping the prepared single-layer structure metal templates with the polymer plate one by one, so that the micro-channel mold cores respectively arranged on the single-layer structure metal templates are hot stamped on the first side surface of the polymer plate to form a multi-layer structure polymer plate, and preparing the multi-layer structure metal mold with the micro-channel mold cores with positive demoulding angles by taking the multi-layer structure polymer plate as a substrate. The preparation process is simple and feasible, and is beneficial to batch production of the microfluidic chip with the multilayer structure.

Inventors

CHEN HUI
LIU QIANG
Gao Yacha
WU DALIN
WU XIAO
SU CHENYU
Niu Fengxiao
LIU ZHIYU
WU JINGXUAN
TAN XIAOFENG

Assignees

北京保利微芯科技有限公司

Dates

Publication Date: 20260508
Application Date: 20250218

Claims (10)

1. The preparation method of the metal mold with the multilayer structure is characterized by comprising the following steps of: Preparing at least two single-layer structure metal templates, wherein the heights of micro-channel mold cores in the same single-layer structure metal template are the same, the heights of micro-channel mold cores in different single-layer structure metal templates are different, and the demolding angles of the micro-channel mold cores on the single-layer structure metal templates are positive demolding angles; Carrying out hot stamping on each prepared single-layer structure metal template and a polymer plate one by one, so that each micro-channel mold core respectively arranged on each single-layer structure metal template is hot stamped on a first side surface of the polymer plate to form a multi-layer structure polymer plate; And preparing the multi-layer structure metal mold with the micro-channel mold core with the positive demoulding angle by taking the multi-layer structure polymer plate as a substrate.
2. The method for producing a metal mold with a multilayer structure according to claim 1, wherein the polymer sheet is a thermoplastic polymer sheet.
3. The method for producing a metal mold for multilayer structures according to claim 2, wherein the thermoplastic polymer is any one of PMMA, PC, COC, COP, PS, PP.
4. The method of manufacturing a metal mold of a multilayer structure according to claim 1, wherein alignment marks are formed on each of the metal mold plates of a single layer structure and the polymer sheet, and positional alignment of each of the metal mold plates of a single layer structure is achieved by the alignment marks before the metal mold plates of a single layer structure are thermally embossed on the polymer sheet.
5. The method of manufacturing a metal mold of a multilayer structure according to claim 1, wherein the polymer sheet is cooled after the hot stamping is completed.
6. The method for producing a metal mold of multilayer structure according to claim 1, wherein each metal mold of single-layer structure is produced by: Spin coating photoresist on a glass substrate, placing a mask plate to expose, post-bake and develop the photoresist to obtain a film structure with a positive demoulding angle; forming a conductive layer on the adhesive film structure through magnetron sputtering; and then electroforming the adhesive film structure through a pulse electroforming process, and stripping the adhesive film structure from the glass substrate to obtain the metal mold with the single-layer structure.
7. The method of manufacturing a metal mold for a multilayer structure according to claim 6, wherein the photoresist is AZ positive photoresist.
8. The method for manufacturing a metal mold with a multilayer structure according to claim 1, wherein the metal mold with a multilayer structure having a micro flow channel with a positive draft angle is manufactured by using the polymer sheet with a multilayer structure as a substrate, specifically comprising: preparing a conductive layer, namely depositing a metal conductive layer on the polymer plate with the multilayer structure through magnetron sputtering; And electroforming the deposited metal conductive layer through a pulse electroforming process, and stripping the electroformed metal layer from the multi-layer structure polymer plate to obtain the multi-layer structure metal mold with the micro flow channel with the positive demoulding angle.
9. The method for producing a metal mold for multilayer structure according to claim 8, wherein the metal conductive layer is one of nickel and chromium.
10. A multilayer structure metal mold characterized by being produced by the production method of the multilayer structure metal mold according to any one of claims 1 to 9.

Description

Preparation method of multilayer structure metal mold and multilayer structure metal mold Technical Field The invention belongs to the technical field of manufacturing metal molds for manufacturing microfluidic chips, and particularly relates to a preparation method of a metal mold with a multilayer structure and the metal mold with the multilayer structure. Background The microfluidic chip is a carrier for treating micro-liquid by utilizing a micro-scale flow channel (i.e. a micro-flow channel), along with the continuous development and maturation of a microfluidic technology, market demands are gradually increased, the microfluidic chip is widely applied to the fields of biomedicine, environment detection, food safety and the like, application scenes are continuously expanded, demands for a double-layer or multi-layer structure microfluidic chip are continuously increased, and the multi-layer structure specifically refers to the micro-flow channels with different depths in the same microfluidic chip. For example, a step emulsion chip is generally in a multi-layer structure, a micro channel is combined with a step, discrete phase fluid needs to break through the micro channel under a certain pressure to form micro drops at the step, a single-cell drop chip is provided with a drop generation flow channel and a drop tiling amplification flow channel, the depth of the drop tiling flow channel is larger than that of the generation flow channel, and the generated drops are prevented from being extruded in a tiling area. The polymer microfluidic chip is manufactured by injecting plastic in a molten state into a metal mold, and then cooling and solidifying the plastic into a microfluidic chip with a certain shape. For injection molding of a dense complex microfluidic chip with a double-layer or multi-layer structure, the multi-layer or multi-layer metal mold is required to be at a positive demolding angle, otherwise, the molded chip and the metal mold are difficult to demold, or serious mold pulling is caused, so that the liquid flow is influenced or the bonding strength is influenced. The traditional metal mold manufacturing method comprises a MESE process, a mechanical processing process and the like, and the manufacturing of the metal mold with double-layer or multi-layer micro-channels at positive demolding angles is difficult to realize in the processes. Therefore, how to manufacture a metal mold with positive demolding angles for multi-layer micro-channels is beneficial to injection molding and demolding to prepare multi-layer polymer micro-fluidic chips with complex structures is a technical problem to be solved in the technology. Disclosure of Invention Therefore, the technical problem to be solved by the invention is to provide a preparation method of a metal mold with a multilayer structure and the metal mold with the multilayer structure, which can prepare the metal mold for forming micro-channels with positive draft angles with different depths so as to meet the preparation requirements of micro-fluidic chips with double-layer or multilayer structures and realize batch production of the micro-fluidic chips with double-layer or multilayer structures. In order to solve the above problems, the present invention provides a method for preparing a metal mold of a multilayer structure, comprising the steps of: Preparing at least two single-layer structure metal templates, wherein the heights of micro-channel mold cores in the same single-layer structure metal template are the same, the heights of micro-channel mold cores in different single-layer structure metal templates are different, and the demolding angles of the micro-channel mold cores on the single-layer structure metal templates are positive demolding angles; Carrying out hot stamping on each prepared single-layer structure metal template and a polymer plate one by one, so that each micro-channel mold core respectively arranged on each single-layer structure metal template is hot stamped on a first side surface of the polymer plate to form a multi-layer structure polymer plate; And preparing the multi-layer structure metal mold with the micro-channel mold core with the positive demoulding angle by taking the multi-layer structure polymer plate as a substrate. In some embodiments, the polymer sheet is a thermoplastic polymer sheet. In some embodiments, the thermoplastic polymer is any one of PMMA, PC, COC, COP, PS, PP. In some embodiments, alignment marks are formed on each of the single-layer structure metal templates and the polymer sheet, and the alignment marks are used for achieving the position alignment of each of the single-layer structure metal templates before each of the single-layer structure metal templates is hot stamped on the polymer sheet. In some embodiments, the polymeric sheet is cooled after the hot stamping is completed. In some embodiments, each single-layer structured metal template is prepared and formed as follows: Spin coat