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CN-120405882-B - Axial synchronous adjusting device for optical element

CN120405882BCN 120405882 BCN120405882 BCN 120405882BCN-120405882-B

Abstract

The invention discloses an optical element axial synchronous adjusting device which comprises a bottom plate, a driving block, a ball screw, a moving block, a connecting rod, a rotating shaft, a mirror frame, a lens, a reset tension spring, a suspension spring pin, a piezoelectric motor and a driving rod. The moving block and the driving block are arranged in the translation groove of the bottom plate, the adjacent moving block and the driving block are connected through a connecting rod, and rotating shafts are arranged at two ends of the connecting rod. The ball screw is connected to the glasses frame through threads, and the top ball head of the ball screw is embedded into the V-shaped groove on the driving block. The bottom plate is connected with the mirror frame through the reset spring and the hanging spring pin. The lens is fixed on the lens frame through cementing. The piezoelectric motor is fixed on the bottom plate, the driving rod is connected in front of the piezoelectric motor, and the front of the driving rod is fixedly connected with the moving block. The invention has high adjusting precision, good repeatability and easy installation and adjustment.

Inventors

  • KANG XIA
  • SUN HAIFENG
  • LIU WENJING
  • CHENG YANGYANG
  • ZHOU JI
  • HU SONG

Assignees

  • 中国科学院光电技术研究所

Dates

Publication Date
20260512
Application Date
20250627

Claims (9)

  1. 1. An axial synchronous adjusting device for optical elements is characterized by comprising a base plate (1), a driving block (2), ball screws (3), a moving block (4), a connecting rod (5), a rotating shaft (6), a lens frame (7), lenses (8), a reset tension spring (9), a suspension spring pin (10), a piezoelectric motor (11) and a driving rod (12), wherein the moving block (4) and the driving block (2) are installed in a translation groove on the base plate (1) along the circumferential direction and slide in the groove, the moving block (4) and the driving block (2) are connected through the connecting rod (5), the connecting rod (5) rotates relatively through the rotating shaft (6), the ball screws (3) are connected to the lens frame (7) through threads, the ball screws are embedded into the V-shaped groove of the driving block and roll along the V-shaped groove, the upper side and the lower side of the reset tension spring (9) respectively penetrate through the suspension spring pin (10), the lower side of the suspension spring pin (10) is embedded into the base plate (1), the upper side of the lens frame (7), the base plate (1) and the lens frame (7) are connected with the piezoelectric motor (7) through the reset tension spring (9) and the suspension spring pin (10) through the connecting rod, the lens (7) and the piezoelectric motor (11) are fixed on the front of the piezoelectric motor (11) through the driving rod (11), when the piezoelectric motor (11) drives the driving rod (12) to move forwards and backwards, the driving rod drives the moving block (4) to slide in the bottom plate (1), and then drives the driving block (2) to slide through the connecting rod (5); Six groups of translation grooves are formed in the bottom plate (1), the six groups of translation grooves are respectively a first translation groove (1.1), a second translation groove (1.2), a third translation groove (1.3), a fourth translation groove (1.4), a fifth translation groove (1.5) and a sixth translation groove (1.6), the driving block (2) comprises a first driving block (2.1), a second driving block (2.2) and a third driving block (2.3), the structural dimensions are identical, the ball screws (3) comprise a first ball screw (3.1), a second ball screw (3.2) and a third ball screw (3.3), the structural dimensions are identical, the moving block (4) comprises a first moving block (4.1), a second moving block (4.2) and a third moving block (4.3), the structural dimensions are identical, the connecting rod (5) comprises a first connecting rod (5.1), a second connecting rod (5.2), a third connecting rod (5.3), a fourth connecting rod (5.4), a fifth connecting rod (5.5), a sixth connecting rod (5), a tension spring (6), a reset rotating shaft (6) and a reset rotating shaft (6.1.6) which comprise the same rotating shaft (6.9), and the reset rotating shaft (6.9.6) comprises the same rotating shaft (6.1.9) The spring hanging pin (10) comprises a first spring hanging pin (10.1), a second spring hanging pin (10.2), a third spring hanging pin (10.3), a fourth spring hanging pin (10.4), a fifth spring hanging pin (10.5) and a sixth spring hanging pin (10.6), and the structural sizes are identical.
  2. 2. The device for axially synchronizing the optical element according to claim 1, wherein the first moving block (4.1), the second moving block (4.2), the third moving block (4.3), the first driving block (2.1), the second driving block (2.2) and the third driving block (2.3) are respectively installed in a fifth moving groove (1.5) of the base plate (1), the first moving groove (1.1), the third moving groove (1.3), the sixth moving groove (1.6), the second moving groove (1.2) and the fourth moving groove (1.4) in the fifth moving groove (1.5), the first moving groove (1.1), the third moving groove (1.3), the sixth moving groove (1.6), the second moving groove (1.2) and the fourth moving groove (1.4), the first moving block (4.1) and the first driving block (2.1) are respectively connected through a first connecting rod (5.1), the second moving block (2) and the second moving block (2.4) are connected through a second connecting rod (5.1), and the third moving block (2.3) are connected through the first connecting rod (5.1), the second moving block (2.1) and the third moving block (2.3) are connected through the third connecting rod (2.5.5) The third driving block (2.3) is connected with the first moving block (4.1) through a sixth connecting rod (5.6), the first connecting rod (5.1) and the second connecting rod (5.2) are relatively rotated through the sixth rotating shaft (6.6), the second connecting rod (5.2) and the third connecting rod (5.3) are relatively rotated through the first rotating shaft (6.1), the third connecting rod (5.3) and the fourth connecting rod (5.4) are relatively rotated through the second rotating shaft (6.2), the fourth connecting rod (5.4) and the fifth connecting rod (5.5) are relatively rotated through the third rotating shaft (6.3), the fifth connecting rod (5.5) and the sixth connecting rod (5.6) are relatively rotated through the fourth rotating shaft (6.4), the sixth connecting rod (5.6) and the first connecting rod (5.1) are relatively rotated through the fifth rotating shaft (6.5), the ball screw (3) is connected to the glasses frame (7) through threads, and the first reset tension springs (9.1), the second reset tension springs (9.2) and the third reset springs (9.2) are radially distributed on the third hanging springs (2.2.2) and the third hanging springs (2.2.2) are respectively arranged on the outer sides of the third driving block (2.2).
  3. 3. The optical element axial synchronization adjustment device of claim 2, wherein: The first driving block (2.1) is provided with a first driving block V-shaped groove (2.11), the second driving block (2.2) is provided with a second driving block V-shaped groove (2.21), the third driving block (2.3) is provided with a third driving block V-shaped groove (2.31), and two surfaces forming the V-shaped groove form an angle of 90 degrees; The first ball screw ball head (3.11), the second ball screw ball head (3.21) and the third ball screw ball head (3.31) are respectively embedded into the first driving block V-shaped groove (2.11), the second driving block V-shaped groove (2.21) and the third driving block V-shaped groove (2.31) and roll in the first driving block V-shaped groove.
  4. 4. The axial synchronous adjusting device for the optical element according to claim 1, wherein a first translation groove (1.1), a second translation groove (1.2), a third translation groove (1.3), a fourth translation groove (1.4), a fifth translation groove (1.5) and a sixth translation groove (1.6) on the bottom plate (1) are uniformly distributed along the circumferential direction, the left side of the first translation groove (1.1) is a first translation left sliding groove (1.1 a), the right side of the first translation groove is a first translation right sliding groove (1.1 b), the left side of the second translation groove (1.2) is a second translation left sliding groove (1.2 a), and the right side of the second translation left sliding groove (1.2 b).
  5. 5. The axial synchronous adjusting device for the optical element according to claim 1 is characterized in that first bottom suspension spring grooves (1.11), second bottom suspension spring grooves (1.21) and third bottom suspension spring grooves (1.31) are uniformly distributed on a bottom plate (1) along the circumferential direction, first suspension spring pins (10.1), second suspension spring pins (10.2) and third suspension spring pins (10.3) are respectively arranged in the grooves, and a side tangential plane (1A) on the bottom plate (1) is fixedly connected with a piezoelectric motor (11).
  6. 6. The device for axially synchronizing the adjustment of optical elements according to claim 1, wherein the left step of the second driving block (2.2) is a left slide rail (2.2 a) of the second driving block, and the right step is a right slide rail (2.2 b) of the second driving block, which are respectively in contact with the second translational left slide groove (1.2 a) and the second translational right slide groove (1.2 b) and are capable of parallel movement therein.
  7. 7. The device for axially synchronously adjusting the optical element according to claim 1, wherein a left side step of the third moving block (4.3) is a third moving block left sliding rail (4.3 a), a right side step is a third moving block right sliding rail (4.3 b), the third moving block left sliding rail and the third moving block right sliding rail are respectively contacted with the third translational left sliding groove (1.3 a) and the third translational right sliding groove (1.3 b) and can move in parallel, a third moving block rotating hole (4.32) is formed at the end part of the third moving block (4.3), and the second moving block rotating hole (4.32) is used for rotating the third rotating shaft 6.3 in the third moving block rotating hole (4.32).
  8. 8. The device for axially synchronously adjusting the optical element according to claim 1, wherein the first connecting rod (5.1), the second connecting rod (5.2), the third connecting rod (5.3), the fourth connecting rod (5.4), the fifth connecting rod (5.5) and the sixth connecting rod (5.6) are respectively provided with four round steps, the round steps are respectively positioned at the end parts of the connecting rods, and only the steps are contacted between the adjacent connecting rods (5).
  9. 9. The axial synchronous adjusting device for the optical element according to claim 1 is characterized in that three threaded holes are uniformly distributed on the mirror frame (7) along the circumferential direction, namely a first threaded hole (7.1), a second threaded hole (7.2) and a third threaded hole (7.3), are respectively connected with a first reset tension spring (9.1), a second reset tension spring (9.2) and a third reset tension spring (9.3) through threads, three grooves are uniformly distributed on the mirror frame (7) along the circumferential direction, namely a first upper hanging spring groove (7.11), a second upper hanging spring groove (7.21), a third upper hanging spring groove (7.31), a fourth hanging spring pin (10.4), a fifth hanging spring pin (10.5) and a sixth hanging spring pin (10.6) are respectively arranged in the grooves, and the upper parts of the first reset tension spring (9.1), the second reset tension spring (9.2) and the third reset tension spring (9.3) respectively penetrate through the first hanging spring pin (10.1), the second hanging spring pin (10.2) and the third hanging spring pin (10.3), and the lower part of the fourth hanging spring pin (10.4) respectively penetrates through the fifth hanging spring pin (10.6).

Description

Axial synchronous adjusting device for optical element Technical Field The invention is used in the technical field of photoetching machines, belongs to the field of integrated circuit equipment manufacturing, and particularly relates to an axial synchronous adjusting device for an optical element. Background With the development of large-scale integrated circuits, the demand for high-precision projection lithography machines is increasing. For high precision projection lithography, manufacturing and assembly errors of the lenses and mechanical parts can lead to degradation of the imaging quality of the objective system. In addition, during exposure of the projection lithography machine, the imaging quality of the objective system may be reduced due to changes in ambient temperature, air pressure, etc. The on-line moving mirror is required to be used for compensation adjustment regardless of the image quality reduction generated in the processing and adjustment process or the image quality reduction caused by the environment. According to the image quality compensation requirement, a part of movable mirrors are required to have a high-precision axial micro-motion adjusting function. However, at present, a multi-point synchronous driving mode is mostly adopted for the axial fine adjustment of a special lens, so that higher requirements are put on the consistency of motion control of different driving points, and meanwhile, as a plurality of drivers are used, the cost of the mechanism is increased, and better economy is not achieved, so that an optical element axial fine-movement mechanism meeting the requirements of better driving consistency and economy is needed. Disclosure of Invention The invention aims to provide an axial synchronous adjusting device for an optical element, which has good rigidity and stability, can compensate image quality change caused by lens processing assembly errors, meets the image quality compensation requirement in the actual exposure process, and ensures the imaging quality of an objective lens. In order to achieve the aim, the technical scheme adopted by the invention is that the axial synchronous adjusting device of the optical element comprises a bottom plate, a driving block, a ball screw, a moving block, a connecting rod, a rotating shaft, a mirror frame, a lens, a reset tension spring, a suspension spring pin, a piezoelectric motor and a driving rod. The moving block and the driving block are arranged in a translation groove on the bottom plate along the circumferential direction and slide in the groove. The moving block is connected with the driving block through connecting rods, and the connecting rods relatively rotate through rotating shafts. The ball screw is connected to the mirror frame through threads, and the ball screw ball head is embedded into the V-shaped groove of the driving block and rolls along the V-shaped groove. The upper part and the lower part of the reset tension spring respectively pass through the hanging spring pin, the lower part of the hanging spring pin is embedded into the bottom plate, and the upper part is embedded into the mirror frame. The bottom plate is connected with the mirror frame through the reset spring and the hanging spring pin. The lens is fixed on the lens frame through cementing. The piezoelectric motor is fixed on the bottom plate, the driving rod is connected in front of the piezoelectric motor, and the front of the driving rod is fixedly connected with the moving block. When the piezoelectric motor drives the driving rod to move forwards and backwards, the moving block is driven to slide in the bottom plate, and then the driving block is driven to slide through the connecting rod. The ball screw slides in the V-shaped groove to drive the glasses frame and the lenses to move up and down. The invention has the advantages that six connecting rods are identical, an equilateral hexagon structure is formed, a guide groove is reserved on the radial direction of the bottom plate, and the moving block and the driving block move in the guide groove. When the motor drives the moving blocks to move, the moving directions of the three moving blocks are opposite to the moving directions of the three driving blocks, and the moving amounts are equal, namely when the moving distance of the moving blocks to the direction of the circle center of the bottom plate is X, the driving blocks move X to the direction away from the circle center of the bottom plate. The three driving blocks are distributed in the circumferential direction in pairs according to the principle of triangle stability, so that a stable and uniform triangle support is formed. Meanwhile, a micron-sized fit clearance is ensured between the guide groove on the bottom plate and the moving block and the rotating block, the freedom degree in other directions can be effectively eliminated in the motion process, errors introduced in other directions are avoided, and the adjustmen