CN-120413494-B - Air custody system

CN120413494BCN 120413494 BCN120413494 BCN 120413494BCN-120413494-B

Abstract

The invention discloses an air storage system, which comprises a vehicle rail and at least two layers of storage racks arranged below the vehicle rail, wherein the bottom storage rack comprises a group of first storage positions corresponding to part of square openings of the vehicle rail in a one-to-one mode, each first storage position and the corresponding square opening of the vehicle rail are opposite to each other in the vertical direction, a plurality of first storage positions which are continuously distributed in the same horizontal direction are first storage units, each upper layer storage rack above the bottom storage rack comprises a second storage unit corresponding to each first storage unit in the height direction, the second storage unit comprises a second storage position and at least one empty position, and the second storage positions are switched by a translation driving mechanism in a driving mode so that the empty positions of the second storage units correspond to different first storage positions of the first storage units corresponding to the second storage units. The multilayer pipe-protecting frame is arranged below the vehicle rail, so that the storage capacity is effectively improved, the storage of the FOUP is facilitated nearby, and the conveying efficiency is improved.

Inventors

ZHOU YONGFU
GUO MING
WANG HONGYU

Assignees

苏州新施诺半导体设备有限公司

Dates

Publication Date: 20260512
Application Date: 20250429

Claims (9)

1. The air storage system comprises a vehicle rail which is suspended in the air and is provided with a group of square openings, and is characterized in that a plurality of layers of storage racks are arranged below the vehicle rail, the storage racks are connected to the bottom of the vehicle rail through connecting columns, each bottom layer of storage rack comprises a group of first storage positions which are in one-to-one correspondence with part of square openings of the vehicle rail, each first storage position is opposite to the corresponding square opening in the vertical direction, the first storage positions which are continuously distributed in the same horizontal direction are first storage units, each upper layer of storage rack above the bottom layer of storage rack comprises a second storage unit which is corresponding to each first storage unit in the height direction, each second storage unit comprises at least one second storage position and at least one empty position, and the second storage positions are driven by a translation driving mechanism to switch the distribution direction of the first storage positions of the first storage units corresponding to the second storage units so that the empty positions of the second storage units are different from the first storage units corresponding to the second storage units; The bottom layer pipe protection frame comprises a supporting frame arranged below the connecting columns, grids corresponding to each grid opening are formed on the supporting frame, each grid is a rectangular space formed by surrounding four rectangular beam sections, at least two supporting rods extending horizontally into each grid are respectively arranged on the inner sides of at least one pair of parallel beam sections, the supporting rods are perpendicular to the beam sections where the supporting rods are located, limiting nuts are connected onto each supporting rod in a threaded mode, a placing plate is erected on each supporting rod at each grid, and the placing plates are limited between the limiting nuts of the supporting rods; The second storage position is a horizontal carrier plate which is consistent with the area of the placing plate, and the horizontal carrier plate is movably arranged in the unit frame of the second storage unit and is connected with a translation driving mechanism for driving the second storage unit to translate.
2. The aerial storage system of claim 1 wherein the rack is 2 or 3 layers.
3. The aerial storage system of claim 1 wherein the first storage unit comprises 2-4 first storage locations.
4. The aerial storage system of claim 1 wherein when said first storage unit comprises 2 first storage locations, said second storage unit comprises 1 second storage location; When the first storage unit includes 3 first storage locations, the second storage unit includes 2 second storage locations.
5. The aerial storage system of claim 1 wherein a positioning mechanism is provided on top of the second storage location.
6. The aerial storage system of claim 1 wherein the second storage location is disposed in a unit frame of the second storage unit in a rolling or sliding manner.
7. The aerial storage system of claim 1 wherein when the second storage unit comprises two second storage locations, both second storage locations are movable between an end and a middle position of the second storage unit, and two translational drive mechanisms are distributed on both sides of the second storage unit.
8. The overhead storage system of claim 1 wherein the carriage is movably disposed in a first horizontal direction and a second horizontal direction for picking and placing the cargo at the storage rack, and wherein when the cargo is to be picked and placed at a position directly below a square opening, either carriage is moved directly above the square opening and the cargo is to be picked and placed through the square opening.
9. An air custody system according to any of claims 1-8, wherein: When the trolley needs to take and put goods at one first keeping position, the first keeping unit where the first keeping position is located and the second keeping unit opposite to the first keeping unit are exclusively controlled so that the other first keeping positions of the first keeping unit and the second keeping positions of the second keeping unit cannot take and put goods; When the trolley needs to take and put goods at one second storage position, the second storage unit where the second storage position is located and the first storage unit and the second storage unit which are opposite to the second storage unit are exclusively controlled so that the first storage position of the first storage unit and other second storage positions of the second storage unit cannot take and put goods.

Description

Air custody system Technical Field The invention relates to the technical field of goods storage, in particular to an air custody system for temporarily storing FOUP (Front Opening Unified Pod, front opening wafer transfer box) in a semiconductor device processing factory. Background A FOUP is a container for storing wafers in a semiconductor device handler such as a wafer. In a factory, it is necessary to transfer FOUPs between different process facilities, and since a large number of FOUPs exist in the factory, it is necessary to provide some overhead storage systems for storing FOUPs. The invention patent application CN116685541a discloses an air custody system, in which a latticed rail is provided and a scaffold is provided below the rail at a certain distance, and scaffold units are provided on the scaffold, and the scaffold units require that the distance between the scaffold and the rail is required to satisfy the requirement that an operator can walk. The structure greatly increases the distance between the vehicle rail and the storage rack, so that only one layer of storage rack can be arranged below the vehicle rail, and the storage capacity of the air storage system is greatly limited. Disclosure of Invention The present invention has been made to solve the above-mentioned problems occurring in the prior art, and an object of the present invention is to provide an air custody system. The aim of the invention is achieved by the following technical scheme: The air storage system comprises a vehicle rail which is suspended in the air and provided with a group of square openings, at least two layers of storage racks are arranged below the vehicle rail, the bottom storage racks comprise a group of first storage positions which are in one-to-one correspondence with part of square openings of the vehicle rail, each first storage position is opposite to the corresponding square opening in the vertical direction, the first storage positions which are continuously distributed in the same horizontal direction are first storage units, each upper layer storage rack above the bottom storage racks comprises a second storage unit which corresponds to each first storage unit in the height direction, each second storage unit comprises at least one second storage position and at least one air opening position, and the second storage positions are driven by a translation driving mechanism to switch the distribution direction of the first storage positions of the first storage units corresponding to the second storage units so that the air opening positions of the second storage units correspond to different first storage positions of the first storage units corresponding to the second storage units. Preferably, the pipe support is 2 layers or 3 layers. Preferably, the first tube holding position comprises a first tube holding plate, the first tube holding plate is arranged on a group of struts, and limiting nuts used for limiting the position of the first tube holding plate are arranged on the struts. Preferably, the first holding unit includes 2 to 4 first holding positions. Preferably, when the first storage unit includes 2 first storage locations, the second storage unit includes 1 second storage location; When the first storage unit includes 3 first storage locations, the second storage unit includes 2 second storage locations. Preferably, a positioning mechanism is arranged at the top of the second storage position. Preferably, the second storage location is provided in a unit frame of the second storage unit in a rolling or sliding manner. Preferably, when the second storage unit includes two second storage positions, the two second storage positions can both move between an end portion and a middle position of the second storage unit, and the two translation driving mechanisms are distributed on two sides of the second storage unit. Preferably, the trolley is movably arranged on the trolley rail along the first horizontal direction and the second horizontal direction, and is used for taking and placing goods at the storage rack, when the goods are required to be taken and placed at the position right below one square opening, any trolley is moved to the position right above the square opening, and the goods are taken and placed through the square opening. Preferably, the method comprises the steps of, When the trolley needs to take and put goods at one first keeping position, the first keeping unit where the first keeping position is located and the second keeping unit opposite to the first keeping unit are exclusively controlled so that the other first keeping positions of the first keeping unit and the second keeping positions of the second keeping unit cannot take and put goods; When the trolley needs to take and put goods at one second storage position, the second storage unit where the second storage position is located and the first storage unit and the second storage unit which are opposite to the seco