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CN-120868261-B - Pipeline support piece and Dan Yingjia boat for gallium nitride production

CN120868261BCN 120868261 BCN120868261 BCN 120868261BCN-120868261-B

Abstract

The invention relates to the technical field of pipeline support, in particular to a pipeline support piece and Dan Yingjia boat for gallium nitride production, which comprises at least two gas pipelines, wherein the pipeline support piece comprises at least one pair of support plates, the support plates are provided with mounting holes corresponding to the number of the gas pipelines, the gas pipelines sequentially and movably penetrate through the mounting holes on the two support plates, the support plates are also provided with a plurality of air flow holes, and the support plates are provided with limiting assemblies fixed on the gas pipelines. The support is used for solving the technical problems that the traditional support adopts a welding or cementing fixing mode, so that the installation and the disassembly processes are complicated, the quick maintenance or replacement of the pipeline is not facilitated, and in a multi-pipeline system, the fixed support is difficult to flexibly adjust to adapt to the layout change of different pipe diameters or pipelines, and the maintainability and the operation flexibility of equipment are limited.

Inventors

  • Request for anonymity
  • Request for anonymity

Assignees

  • 雅安宇焜芯材材料科技有限公司

Dates

Publication Date
20260512
Application Date
20250926

Claims (6)

  1. 1. The pipeline support piece for gallium nitride production comprises at least two gas pipelines (1) and is characterized by comprising at least one pair of support plates (2), wherein the support plates (2) are provided with mounting holes (3) corresponding to the number of the gas pipelines (1), the gas pipelines (1) sequentially penetrate through the mounting holes (3) on the two support plates (2) in a movable mode, and a limiting assembly for fixing the gas pipelines (1) is arranged on one support plate (2); The first limiting part comprises two first limiting shells (5) arranged on the corresponding supporting plates (2), the two first limiting shells (5) are respectively arranged at two sides of the mounting hole (3), a first opening (6) is formed in the outer wall of the first limiting shell (5), and a first arc-shaped plate (7) is arranged in the first limiting shell (5); The second limiting part comprises two second limiting shells (8) arranged on the corresponding supporting plates (2), the two second limiting shells (8) are respectively arranged at two sides of the mounting hole (3), a second opening (9) is formed in the outer wall of each second limiting shell (8), and a second arc-shaped plate (10) is arranged in each second limiting shell (8), and driving devices for driving the corresponding arc-shaped plates to move are arranged in each first limiting shell (5) and each second limiting shell (8); The driving device comprises a moving plate (11) connected with a corresponding arc-shaped plate, the moving plate (11) is arranged in a corresponding first limiting shell (5) and a corresponding second limiting shell (8) in a sliding mode, an inclined surface (13) is formed in the moving plate (11), a first placing hole (15) is formed in the first limiting shell (5), a sleeve (16) is further arranged on the first limiting shell (5), a triggering device is arranged in the sleeve (16), and a second placing hole (17) is formed in the second limiting shell (8); When a pair of support plates (2) are relatively close, one end of the support rod (18) is inserted into a second placing hole (17) of a second limiting shell (8), the wedge-shaped block (20) at the end is contacted with the inclined surface (13) of a moving plate (11) in the second limiting shell (8), the wedge-shaped block (20) at the other end of the support rod (18) is matched with the inclined surface (13) of the moving plate (11) in the first limiting shell (5), and the wedge-shaped blocks (20) at the two ends simultaneously push the moving plate (11) in the first limiting shell (5) and the second limiting shell (8) to move towards the direction of the gas pipeline (1).
  2. 2. A pipe support for gallium nitride production according to claim 1, wherein the arcuate plate is provided with a cushion (19) which cooperates with the outer wall of the gas pipe (1).
  3. 3. A pipeline support for gallium nitride production according to claim 1, wherein each movable plate (11) is connected with a transverse plate (12), and the transverse plates (12) are respectively connected with the inner walls of the corresponding limiting shells through elastic components.
  4. 4. A Dan Yingjia boat for gallium nitride production, comprising a pipeline support member for gallium nitride production according to any one of claims 1-3, and further comprising a quartz gallium boat assembly connected with a gas pipeline (1), wherein the Dan Yingjia boat assembly comprises a reaction shell (21), a plurality of quartz plates (22) are arranged in the reaction shell (21), the reaction shell (21) is partitioned by the quartz plates (22) to form a plurality of cavities (23), and a flow port (24) is formed in the quartz plates (22).
  5. 5. A Dan Yingjia boat for gallium nitride production according to claim 4, wherein a plurality of quartz plates (22) are arranged at intervals.
  6. 6. A Dan Yingjia boat for gallium nitride production according to claim 4, wherein the flow ports (24) on adjacent quartz plates (22) are staggered.

Description

Pipeline support piece and Dan Yingjia boat for gallium nitride production Technical Field The invention relates to the technical field of pipeline support, in particular to a pipeline support piece and Dan Yingjia boats for gallium nitride production. Background Gallium nitride is used as a third-generation semiconductor material and has wide application in the fields of photoelectrons, high-frequency high-power devices and the like. In the chemical vapor deposition production process of gallium nitride, a quartz gallium boat is generally used as a reaction vessel for carrying metal source materials such as gallium, and is combined with reaction gases such as ammonia gas, hydrogen gas and the like through a high-temperature environment to generate gallium nitride crystals. In the prior art, a reactant gas (e.g., NH 3、H2) is delivered to the reaction chamber through a quartz tube. Because the gas delivery pressure is higher, high-speed air flow can produce strong impact on the inner wall of the quartz pipeline, and the production stability is affected. Given that quartz gas delivery tubes are typically long, it is common in the art to provide fixed supports on the outside of the quartz tube to enhance its impact resistance and stability. However, most of the conventional supporting members are welded or glued and fixed, so that the mounting and dismounting processes are complicated, and the rapid maintenance or replacement of the pipeline is not facilitated. Particularly in multi-pipe systems, the fixed support is difficult to accommodate for the different pipe diameters or layout adjustment requirements, reducing the maintainability and flexibility of the apparatus. Disclosure of Invention The invention aims to provide a pipeline support piece and Dan Yingjia boat for gallium nitride production, which are used for solving the technical problems that the traditional support piece adopts a welding or cementing fixing mode, so that the installation and disassembly processes are complicated, the quick maintenance or replacement of a pipeline is not facilitated, in a multi-pipeline system, the fixed support piece is difficult to flexibly adjust to adapt to the change of different pipe diameters or pipeline layouts, and the maintainability and the operation flexibility of equipment are limited. The invention is realized by the following technical scheme: The utility model provides a pipeline support piece is used in gallium nitride production, includes two piece at least gas pipeline, includes at least a pair of supporting disk, has seted up the mounting hole corresponding with gas pipeline quantity on the supporting disk, and gas pipeline activity runs through the mounting hole on two supporting disks in proper order, and still has seted up a plurality of air flow holes on the supporting disk, is provided with the spacing subassembly that is fixed in gas pipeline on the supporting disk. Further, the limiting assembly comprises first limiting parts, the number of which is the same as that of the gas pipelines, arranged on one of the supporting plates, and second limiting parts, the number of which is the same as that of the gas pipelines, arranged on the other supporting plate; the first limiting part comprises two first limiting shells arranged on the corresponding supporting plates, the two first limiting shells are respectively arranged at two sides of the mounting hole, a first opening is formed in the outer wall of each first limiting shell, and a first arc-shaped plate is arranged in each first limiting shell; the second limiting part comprises two second limiting shells arranged on the corresponding supporting plates, the two second limiting shells are respectively arranged at two sides of the mounting hole, a second opening is formed in the outer wall of each second limiting shell, a second arc-shaped plate is arranged in each second limiting shell, and driving devices for driving the corresponding arc-shaped plates to move are arranged in each first limiting shell and each second limiting shell. Further, the driving device comprises a moving plate connected with the corresponding arc-shaped plate, the moving plate is arranged in the corresponding first limiting shell and second limiting shell in a sliding mode, an inclined plane is formed in the moving plate, a first placing hole is formed in the first limiting shell, a sleeve is further arranged on the first limiting shell, a triggering device is arranged in the sleeve, a second placing hole is formed in the second limiting shell, and after the triggering device in the first placing hole enters the second placing hole, the triggering device triggers the moving plate to move. Further, the triggering device comprises supporting rods, the number of the supporting rods is the same as that of the moving plates, and the supporting rods are slidably arranged in the first placing holes. Further, a buffer cushion matched with the outer wall of the gas pipeline