CN-121096950-B - Paraffin fixing jig and fixing method thereof

CN121096950BCN 121096950 BCN121096950 BCN 121096950BCN-121096950-B

Abstract

The application provides a paraffin fixing jig and a paraffin fixing method, and relates to the technical field of semiconductors and photovoltaics. The paraffin fixing jig comprises a carrying platform, a flow adjusting assembly, a temperature adjusting assembly, a vibration assembly and a control assembly, wherein the carrying platform comprises a first recess and a second recess, a diversion channel communicated with the second recess is arranged on a first side wall which surrounds the first recess, a second recess is formed by surrounding a first side wall and a second side wall which face the second recess, the first recess is higher than the second recess in the vertical direction, and the control assembly is respectively electrically connected with the flow adjusting assembly, the temperature adjusting assembly and the vibration assembly. The paraffin fixing jig and the fixing method thereof can improve the flatness, the machining precision and the machining efficiency of fixation due to the fact that the paraffin is obtained by dynamically adjusting the flow adjusting assembly, the temperature adjusting assembly and the vibration assembly respectively through the control assembly during the flowing and solid-liquid conversion of the paraffin to take and place the workpiece to be machined.

Inventors

YU SHENGJIE
CHEN YONGZAI
XU PENGFEI
LIAO JIAHAO

Assignees

湖南德智新材料股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250814

Claims (10)

1. The utility model provides a fixed tool of paraffin which characterized in that includes: The carrier comprises a first recess and a second recess which are adjacently arranged along a first direction, wherein the first recess and the second recess are configured to contain paraffin, a first side wall surrounding the first recess is provided with a diversion channel communicated with the second recess, a part of the first side wall and the second side wall facing the second recess surrounds the second recess to form the second recess, and the first recess is higher than the second recess in the vertical direction; the flow regulating component is arranged at the position of the diversion channel corresponding to the carrying platform and can regulate the flow of the liquid paraffin entering the second recess from the first recess so as to enable the liquid paraffin to be filled in the second recess; the temperature adjusting component is arranged on the carrying platform and can respectively adjust the temperature in the first recess and the second recess so as to enable paraffin to be converted between solid and liquid; the vibration assembly is connected with the carrier and can vibrate the carrier so that the liquid paraffin can be uniformly filled in the second recess when the liquid paraffin is introduced into the second recess; The control assembly is respectively and electrically connected with the flow regulating assembly, the temperature regulating assembly and the vibration assembly, is configured to control the temperature regulating assembly to heat and maintain paraffin of at least one of the first recess and the second recess at a first preset temperature or cool and maintain paraffin at a second preset temperature, the first preset temperature is higher than the second preset temperature, the control assembly is further configured to control the flow regulating assembly to enable the flow guide channel to be communicated and enable a preset amount of liquid paraffin to be led into the second recess, the preset amount is higher than the volume of the second recess, and is configured to control the vibration assembly to enable the carrier to vibrate so that the second recess is filled with paraffin, and a workpiece to be machined is fixed by the paraffin of the second recess.
2. The paraffin fixing jig according to claim 1, wherein in a vertical direction, a bottom wall of the first recess is higher than a bottom wall of the second recess, and a height of the first side wall is higher than a height of the second side wall, and a height of the second side wall is 0.1mm.
3. The paraffin fixing jig according to claim 1, wherein the bottom wall of the second recess is provided with a plurality of flow guide grooves, at least part of the flow guide grooves extend to the side wall of the second recess, the plurality of flow guide grooves are arranged in a cross manner along the first direction and the second direction to form a mutually communicated grid-like structure, and the first direction and the second direction intersect.
4. The paraffin fixing jig according to claim 1, further comprising a height detecting member disposed on the second side wall, so that the height detecting member is electrically connected to the control assembly, and when the height detecting member detects that the liquid paraffin at any position in the second recess is higher than the upper surface of the second side wall in the vertical direction during the process of introducing the liquid paraffin into the second recess through the flow guiding channel, the control assembly controls the flow adjusting assembly to close the flow guiding channel according to the pre-warning signal.
5. The paraffin fixing jig of claim 1, wherein the flow adjustment assembly comprises: The flow regulating valve is arranged in the diversion channel and is electrically connected with the control assembly, and the flow regulating valve is configured to regulate the flow of liquid paraffin from the first recess to the second recess; The flow detection piece is arranged in the diversion channel and is electrically connected with the control assembly, and the flow detection piece is electrically connected with the control assembly and is configured to detect the flow of the liquid paraffin passing through the diversion channel; And/or the number of the groups of groups, The temperature regulation assembly includes: A heating assembly disposed below the first recess and below the second recess, the heating assembly configured to heat and maintain paraffin of at least one of the first recess and the second recess at a first preset temperature that is 2-10 ℃ higher than a melting point of the paraffin; A cooling assembly disposed below the first recess and below the second recess, the cooling assembly being non-interfering with the heating assembly, the cooling assembly being configured to cool and maintain paraffin of at least one of the first recess and the second recess at a second preset temperature; A temperature detection assembly disposed on the stage, the temperature detection assembly configured to detect a paraffin temperature within the first recess and/or the second recess; The temperature detection assembly, the heating assembly and the cooling assembly are respectively and electrically connected with the control assembly, the control assembly is configured to dynamically adjust the heating temperature of the heating assembly or the cooling temperature of the cooling assembly according to the temperature detected by the temperature detection assembly, and/or, The vibration assembly includes: The vibrating piece is connected with the carrying platform and can drive the carrying platform to vibrate; an acceleration sensor disposed on the stage, the acceleration sensor configured to detect an amplitude and a frequency of the stage; The vibrating piece and the acceleration sensor are respectively and electrically connected with the control component, and the control component is configured to dynamically adjust the vibration and the frequency of the carrier according to the temperature of paraffin in the second recess and the amplitude and the frequency detected by the acceleration sensor.
6. The paraffin fixing jig as claimed in any one of claims 1 to 5, wherein the stage further comprises a third recess disposed around an outer peripheral side of the second side wall, the third recess being vertically lower than the second recess, The third recess is configured to receive liquid paraffin overflowing from the second recess during vibration of the vibration assembly during introduction of a preset amount of liquid paraffin into the second recess, and the temperature adjustment assembly is further configured to adjust a paraffin temperature within the third recess.
7. The fixture of any one of claims 1-5, wherein the carrier further comprises a recovery tank disposed on a side of the second recess away from the first recess in a first direction, and a portion of the third recess is disposed between the recovery tank and the second recess, the recovery tank being vertically lower than the third recess, and a communicating check valve is disposed between the third recess and the recovery tank to allow liquid paraffin in the third recess to flow into the recovery tank.
8. A method of fixing a paraffin fixing jig configured to fix a workpiece to be machined, the paraffin fixing jig including a stage, a flow rate adjusting assembly, a temperature adjusting assembly, a vibration assembly, and a control assembly, the stage including a first recess and a second recess, a flow guide passage being provided between the first recess and the second recess, the first recess being vertically higher than the second recess, the method comprising: under the condition that the first concave is accommodated with the solid paraffin, the control component controls the temperature regulating component to heat the first concave and the second concave, and the paraffin is maintained at a first preset temperature to form liquid paraffin; The control assembly controls the flow regulating assembly to open the flow guiding channel so that liquid paraffin in the first recess is led into the first recess, and the flow regulating assembly closes the flow guiding channel after a preset amount, wherein the preset amount is larger than the volume of the second recess; the control component controls the action of the vibration component so that the liquid paraffin is uniformly filled in the second concave; Placing a workpiece to be processed on the upper surface of liquid paraffin in the second recess; the control component controls the temperature regulating component to at least cool the liquid paraffin in the second recess and maintain the liquid paraffin at a second preset temperature, and the cooled solid paraffin fixes the workpiece to be processed.
9. The method according to claim 8, further comprising a height detecting member, wherein in the process of introducing the liquid paraffin into the second recess through the guide passage, the method further comprises: The height detection part detects the height of the liquid paraffin in the second recess, an early warning signal is generated when the liquid paraffin at any position in the second recess is detected to be higher than the upper surface of the second side wall in the vertical direction, and the control component controls the flow regulating component to close the flow guide channel according to the early warning signal.
10. The method for fixing the paraffin fixing jig according to claim 8, wherein the flow adjusting assembly comprises a flow adjusting valve and a flow detecting member, the temperature adjusting assembly comprises a heating assembly, a cooling assembly and a temperature detecting assembly, the vibration assembly comprises a vibration member and an acceleration sensor, and the method for fixing the paraffin fixing jig specifically comprises the following steps: Under the condition that the first concave is accommodated with the solid paraffin, the control component controls the heating component to heat the first concave and the second concave, the temperature detection component detects the temperature of the paraffin so as to enable the paraffin to be melted and maintained at a first preset temperature, and the first preset temperature is 2-10 ℃ higher than the melting point of the paraffin; the control component controls the flow regulating valve to open the diversion channel, the flow detection part detects the flow of the opened diversion channel, and the control component controls the flow regulating valve to be closed after the flow reaches a preset amount; the control component controls the action of the vibrating piece, the acceleration sensor detects the vibration amplitude and the frequency of the carrier, and the control component dynamically adjusts the vibration amplitude and the frequency according to the melting point of paraffin and the opening size of the flow regulating valve; Placing a workpiece to be processed on the upper surface of liquid paraffin in the second recess; The control component controls the cooling component to cool at least the liquid paraffin in the second recess and maintain the liquid paraffin at a second preset temperature, and the cooled solid paraffin fixes the workpiece to be processed.

Description

Paraffin fixing jig and fixing method thereof Technical Field The application relates to the technical field of semiconductors and photovoltaics, in particular to a paraffin fixing jig and a paraffin fixing method. Background With the development of semiconductor and photovoltaic technologies, the process of preparing wafers involves polishing, etching, ion implantation, and other process steps on the surface of a silicon carbide workpiece. With the increase in size and thickness of wafers, paraffin is used for adhesion and fixation to avoid damage to wafers. However, the solid-liquid conversion time of the paraffin is long, and when manual operation is adopted, the flatness of the paraffin cannot be ensured when the wafer is fixed every time, and the condition of stress concentration on the wafer support is easy to occur, so that the processing precision and the processing efficiency of the wafer are affected. Disclosure of Invention In view of the above, the application provides a paraffin fixing jig and a fixing method thereof, which solve the problem that the flatness, the machining precision and the machining efficiency of fixing cannot be improved. In a first aspect, an embodiment of the present application provides a paraffin fixing jig, including a carrier, including a first recess and a second recess adjacently arranged along a first direction, the first recess and the second recess being configured to accommodate paraffin, a first sidewall surrounding the first recess being provided with a flow guide channel communicating with the second recess, a portion of the first sidewall facing the second recess surrounding the second sidewall to form a second recess, the first recess being higher than the second recess in a vertical direction; the device comprises a carrier, a flow regulating component, a temperature regulating component, a vibration component and a control component, wherein the carrier is arranged at the position of a diversion channel corresponding to the carrier, the flow regulating component can regulate the flow of liquid paraffin entering the second recess from the first recess so as to enable the liquid paraffin to be filled in the second recess, the temperature regulating component is arranged on the carrier and can respectively regulate the temperature in the first recess and the second recess so as to enable the paraffin to be converted between solid and liquid, the vibration component is connected with the carrier, the vibration component can enable the carrier to vibrate so as to enable the liquid paraffin to be uniformly filled in the second recess when the second recess is introduced into the liquid paraffin, the control component is respectively electrically connected with the flow regulating component, the temperature regulating component and the vibration component, the control component is configured to control the temperature regulating component to heat and maintain the paraffin in at least one of the first recess and the second recess at a first preset temperature or a second preset temperature, the first preset temperature is higher than the second preset temperature, the flow regulating component is also configured to enable the diversion channel to be communicated and a preset amount of the liquid paraffin to be introduced into the second recess, the preset amount of liquid paraffin is larger than the second recess, the second recess is configured to vibrate so as to enable the second recess to be filled in the second recess to vibrate, the workpiece to be machined is fixed by paraffin of the second recess. In combination with the first aspect of the present application, in some embodiments, the bottom wall of the first recess is higher than the bottom wall of the second recess in the vertical direction, and the height of the first sidewall is higher than the height of the second sidewall, and the height of the second sidewall is 0.1mm. In combination with the first aspect of the present application, in some embodiments, the bottom wall of the second recess is provided with a plurality of flow guiding grooves, at least part of the flow guiding grooves extend to the side wall of the second recess, and the plurality of flow guiding grooves are arranged in a mutually communicated grid-like structure along a first direction and a second direction, and the first direction and the second direction intersect. In combination with the first aspect of the present application, in some embodiments, the device further includes a height detection member disposed on the second side wall, the height detection member is electrically connected to the control component, and when the height detection member detects that the liquid paraffin at any position in the second recess is higher than the upper surface of the second side wall in the vertical direction during the liquid paraffin is introduced into the second recess through the flow guiding channel, the control component controls t