CN-121099507-B - Electrostatic discharge device and method for metal mask

Abstract

The application provides an electrostatic discharge device of a metal mask, which directly leads out charges on the surface of a product through an electrostatic discharge assembly and reduces electrostatic adsorption components on the surface of the product. The electrostatic discharge assembly in the electrostatic discharge device can be in buffer contact with the surface to be discharged with static electricity, and can realize buffer of a first buffer height, so that the position deviation is dynamically compensated while electrostatic charge is discharged. The electrostatic discharge assembly is in buffer contact with the surface to be subjected to electrostatic discharge, so that hard collision and mechanical contact in the contact process can be avoided, scratch/pollution on the surface of a product is avoided, and the yield of the product is improved.

Inventors

• HAN ZHENZHEN
• XU HUAWEI
• CAI JUNFEI
• KANG ZITONG
• JIANG HUIHUI

Assignees

• 浙江众凌科技有限公司

Dates

Publication Date

20260512

Application Date

20250814

Claims (3)

1. 1. A method for releasing static electricity of a metal mask plate is characterized in that, Adopting an electrostatic discharge device of the metal mask plate to realize electrostatic discharge of a metal mask plate product, wherein the electrostatic discharge device of the metal mask plate is connected with a product taking and placing device; the product taking and placing device comprises a driving assembly (10) and a connecting assembly (20); The electrostatic discharge device (200) includes: the static electricity discharge assembly (30) is fixedly arranged on the connecting assembly (20), and the static electricity discharge assembly (30) can be in buffer contact with the surface to be discharged with static electricity; The electrostatic discharge assembly (30) includes: A telescopic member (31) which is extended or shortened along the Z axis, wherein the telescopic member (31) passes through the through hole of the connecting assembly (20); A fixing member (32) for fixing the extensible member (31) to the connection assembly (20), and A release member (33), the telescopic shaft being extended or shortened along the Z-axis in the fixed housing when the release member (33) is in contact with a surface to be electrostatically discharged; the release member (33) comprises a first release element (34) and a second release element (35); The first release element (34) comprises a main copper belt (341) and a cladding copper belt (342), wherein the main copper belt (341) is fixedly connected with the connecting component (20), the cladding copper belt (342) is arranged on the outer side of the main copper belt (341) and wraps the main copper belt (341) and part of the connecting component (20); The method comprises the following steps: S01, driving the electrostatic discharge assembly (30) to move downwards towards the surface of the metal mask product along the Z-axis direction at a first speed, and detecting and feeding back the height value of the electrostatic discharge assembly (30) in real time, wherein when the lower end of the electrostatic discharge assembly (30) is at a first distance from the surface of the metal mask product, the electrostatic discharge assembly is automatically switched to a second speed which is smaller than the first speed; S02, detecting pressure values born by the static electricity discharge assembly (30) at a plurality of positions, and switching to a pressure closed loop mode when the pressure value at any position reaches a first pressure value, wherein the pressure closed loop mode comprises the steps of setting target pressure as a standard pressure value, dynamically adjusting output force of the driving assembly (10) in the Z-axis direction, and enabling the pressure values born by the positions to be uniform; s03, after the pressure values born by the positions are uniform, the static electricity release assembly (30) is determined to be in stable contact with the surface of the metal mask product, voltage monitoring is carried out, and a voltage release strategy is adjusted; And S04, continuously monitoring the surface voltage, the accumulated release time and the voltage decay slope of the metal mask product, and controlling the electrostatic release assembly (30) to lift along the Z axis at a third speed when any one of the three parameters meets the constraint condition, wherein the third speed is greater than the first speed.
2. 2. The method for electrostatic discharge of a metal mask according to claim 1, wherein in S03, the voltage monitoring and voltage discharge strategy adjustment includes: s031, calculating a voltage decay slope S every 0.1 seconds based on the detection data of the voltage detector; s032, dynamically adjusting a voltage release strategy according to the voltage decay slope S: when S < -100V/S, maintaining the current state; When the voltage of-100V/S is less than or equal to S < -50V/S, the electrostatic discharge time is prolonged for 1 second; when S is more than or equal to-50V/S, the electrostatic discharge component (30) starts a micro-vibration mode so as to accelerate electrostatic discharge.
3. 3. The method for electrostatic discharge of a metal mask according to claim 1, further comprising, after the electrostatic discharge of each batch of products is completed, binding product IDs to store full parameters, automatically generating a process report, and labeling an abnormal event.

Description

Electrostatic discharge device and method for metal mask Technical Field The invention relates to precision machining equipment in the field of semiconductor or display panel manufacturing, in particular to an electrostatic discharge device and method of a metal mask. Background In the prior art, laser processing stations typically use electrostatic adsorption to secure the product. Specifically, after the product is fed to the glass platform, a positive voltage of 150-200V is applied to the platform, and the product is fixed on the surface of the platform by using electrostatic adsorption force. The process has the following technical defects: 1. in the static opening state, the product is subjected to downward electrostatic force, so that air between the product and the glass platform is forcedly discharged, and a local negative pressure environment is formed. 2. Due to the charge induction effect, after static electricity is closed, part of static charge still remains between the glass platform and the product, and a negative pressure environment still exists. Experiments show that the state of negative pressure adsorption and static electricity residue can take 10-30 minutes to be naturally dissipated. When the material is discharged, under the combined action of negative pressure adsorption force and static residual adsorption force, excessive adhesion force can be generated between the product and the platform, so that the local area of the product is excessively adsorbed by the platform. At this time, if the material is forcibly discharged, the adsorption part of the product can be subjected to uneven pulling force, plastic deformation and even structural damage are very easy to occur, and the yield of the product is seriously affected. This problem is particularly pronounced for precision components such as ultra-thin flexible substrates. The prior art simply relies on the method of eliminating the adsorption force by prolonging the standing time, thereby not only greatly reducing the utilization rate of equipment, but also being incapable of fundamentally solving the problem of mechanical damage during blanking. Therefore, there is a need to develop a technical solution capable of effectively eliminating the residual adsorption force to solve the long-standing industrial problem. Disclosure of Invention The application aims to provide an electrostatic discharge device and method for a metal mask, which can effectively eliminate residual adsorption force after electrostatic adsorption and fundamentally solve the problem of mechanical damage of products during blanking. The application provides an electrostatic discharge device of a metal mask, which is connected with a product taking and placing device, wherein the product taking and placing device comprises: the driving assembly is used for realizing the lifting of the product taking and placing device in the Z-axis direction; the connecting component is fixedly connected with the driving component; Wherein the electrostatic discharge device comprises: The static electricity discharge assembly is fixedly arranged on the connecting assembly, can be in buffer contact with the surface to be subjected to static electricity discharge, and can realize a first buffer height h1; The electrostatic discharge assembly includes: A telescopic member having a fixed housing and a telescopic shaft extendable or contractible along a Z-axis in the fixed housing, the telescopic member passing through a through hole of the connection assembly; A fixing part for fixing the telescopic part to the connecting assembly, and And the release piece is fixedly arranged at the end part of the telescopic shaft, and when the release piece is contacted with the surface to be subjected to static electricity release, the telescopic shaft stretches or shortens along the Z axis in the fixed shell so as to buffer the contact force between the release piece and the surface to be subjected to static electricity release. In one embodiment, the electrostatic discharge device further comprises a grounding component fixedly arranged on the electrostatic discharge component, one end of the grounding component is electrically connected with the electrostatic discharge component, and one end of the grounding component is electrically connected with the outer shell of the product taking and placing device. In one embodiment, the release member comprises a release monomer, wherein the electrostatic contact surface of the release monomer is provided with a plating layer, and the plating layer is a gold plating layer or a rhodium plating layer. In one embodiment, the connection assembly comprises: the first connecting piece is fixedly connected with the driving assembly at one end and has a bending angle of 90 degrees; a second connecting piece fixedly connected with the other end of the first connecting piece, the second connecting piece extending along the Z-axis direction and being closer to the