CN-121276897-B - Stepped temperature fuzzy control method and device for photoetching machine

CN121276897BCN 121276897 BCN121276897 BCN 121276897BCN-121276897-B

Abstract

The invention discloses a step temperature fuzzy control method and a control device of a photoetching machine, which relate to the technical field of temperature control, wherein the method comprises the steps of setting an initial step temperature fuzzy control strategy at a temperature execution unit of the photoetching machine and executing the strategy through a step fuzzy controller; the method comprises the steps of collecting interference signals in real time, extracting interference feature vectors, detecting a currently executed step temperature fuzzy control strategy and carrying out step-interference compatibility evaluation on the interference feature vectors, and if the step-interference compatibility index is smaller than a preset compatibility index threshold value, carrying out temperature fuzzy control parameter adjustment on the currently executed step temperature fuzzy control strategy to obtain an updated currently executed step temperature fuzzy control strategy. The technical problems of insufficient temperature control precision and stability when the photoetching machine faces to complex and variable dynamic interferences with different characteristics in the prior art are solved, a dynamic self-adjusting ladder fuzzy control strategy is realized, and the technical effect of improving the temperature control precision and stability of the photoetching machine is achieved.

Inventors

ZHANG JIE
ZHOU CHAOQIAN
YU SHENGHUI

Assignees

深圳市国仪兴科技有限公司

Dates

Publication Date: 20260512
Application Date: 20251107

Claims (9)

1. The step temperature fuzzy control method of the photoetching machine is characterized by comprising the following steps: Setting an initial step temperature fuzzy control strategy at a temperature execution unit of the photoetching machine, wherein the initial step temperature fuzzy control strategy is executed by a step fuzzy controller; Collecting interference signals in real time, and extracting interference feature vectors of the interference signals, wherein the interference feature vectors comprise interference duration time, interference amplitude, interference frequency and interference space distribution; Detecting a current execution ladder temperature fuzzy control strategy of the temperature execution unit, and performing ladder-interference compatibility evaluation on the interference feature vector based on the current execution ladder temperature fuzzy control strategy to acquire a ladder-interference compatibility index; And if the step-interference compatibility index is smaller than a preset compatibility index threshold, sending the interference feature vector to the step fuzzy controller to perform temperature fuzzy control parameter adjustment on the currently executed step temperature fuzzy control strategy, so as to obtain the updated currently executed step temperature fuzzy control strategy.
2. The stair temperature fuzzy control method of a lithography machine according to claim 1, wherein the stair-to-interference compatibility evaluation is performed on the interference feature vector based on a currently executed stair temperature fuzzy control strategy, and a stair-to-interference compatibility index is obtained, the method comprising: Acquiring a step temperature fuzzy control step length of a step temperature fuzzy control strategy currently executed; Invoking an interference elimination self-adaptive analysis model to perform interference elimination self-adaptive analysis on the interference characteristic vector, and acquiring a self-adaptive temperature control step interval; And carrying out compatibility evaluation according to whether the step temperature fuzzy control step length is deviated from the control step length of the self-adaptive temperature control step length interval or not, and obtaining a step-interference compatibility index.
3. The method of claim 1, wherein the step temperature fuzzy control method further comprises, before sending the interference feature vector to the step fuzzy controller to perform temperature fuzzy control parameter adjustment on a currently executed step temperature fuzzy control strategy: if the step-interference compatibility index is smaller than a preset compatibility index threshold, controlling the step fuzzy controller to return to a last step temperature fuzzy control strategy of the current execution step temperature fuzzy control strategy; and re-performing step-interference compatibility evaluation on the interference feature vector based on the previous step temperature fuzzy control strategy, and performing temperature fuzzy control by the temperature execution unit through the previous step temperature fuzzy control strategy if the re-calculated step-interference compatibility index is greater than or equal to the preset compatibility index threshold.
4. The method according to claim 3, wherein if the recalculated ladder-to-interference compatibility index is smaller than the preset compatibility index threshold, the interference feature vector is sent to the ladder fuzzy controller to perform temperature fuzzy control parameter adjustment on a currently executed ladder temperature fuzzy control strategy, the method comprising: Taking the preset compatibility index threshold value as an adjusting target, taking the interference feature vector and the step temperature fuzzy control step length of the current execution step temperature fuzzy control strategy as input variables, taking the step temperature step length correction parameters as response variables to perform parameter optimization, and outputting a step temperature step length correction parameter optimal solution; Updating the currently executed step temperature fuzzy control strategy according to the step temperature step length correction parameter optimal solution.
5. The method of claim 4, wherein the step temperature step correction parameter optimal solution is output, the method comprising: Acquiring a step length constraint range of a step temperature fuzzy control strategy currently executed, and constructing a step length correction parameter particle space under the step length constraint range; and performing step length correction parameter particle optimization in the step length correction parameter particle space and performing compatibility evaluation until a step temperature step length correction parameter optimal solution larger than the preset compatibility index threshold value is obtained.
6. The method of claim 2, wherein invoking an interference cancellation adaptive analysis model to perform an interference cancellation adaptive analysis on the interference feature vector, the method of training the interference cancellation adaptive analysis model comprising: Collecting training data samples, wherein the training data samples comprise interference signal samples corresponding to a historical temperature control curve, a temperature control execution step length and interference signal elimination degree labels before and after the temperature control execution step length; extracting interference feature vectors from the interference signal samples of the training data samples, and outputting interference feature vector samples; Training the training data sample by taking the interference signal elimination degree label as a supervision by adopting a lightweight neural network to obtain an interference elimination prediction model, wherein the output end of the interference elimination prediction model comprises an adaptive feedback network, and the adaptive feedback network carries out adaptive feedback with the minimum interference signal elimination degree as a target to obtain the interference elimination adaptive analysis model after training is completed.
7. The method according to claim 1, wherein after the step-interference compatibility index is obtained, if the step-interference compatibility index is greater than the preset compatibility index threshold, the temperature execution unit performs temperature fuzzy control according to a currently executed step temperature fuzzy control strategy.
8. The method of claim 1, wherein setting an initial step temperature fuzzy control strategy in a temperature execution unit of the lithography machine comprises: The initial step temperature fuzzy control strategy comprises N step temperature fuzzy control step sizes corresponding to N steps, the step sizes of the N step temperature fuzzy control step sizes are arranged in descending order, and N is a positive integer greater than or equal to 2.
9. A step temperature fuzzy control apparatus of a lithographic apparatus, wherein the apparatus is configured to implement the step temperature fuzzy control method of a lithographic apparatus according to any one of claims 1 to 8, the apparatus comprising: The initial strategy setting module is used for setting an initial step temperature fuzzy control strategy in a temperature executing unit of the photoetching machine, wherein the initial step temperature fuzzy control strategy is executed by a step fuzzy controller; the interference characteristic vector extraction module is used for acquiring interference signals in real time and extracting interference characteristic vectors of the interference signals, wherein the interference characteristic vectors comprise interference duration time, interference amplitude, interference frequency and interference space distribution; The compatibility evaluation module is used for detecting a current execution ladder temperature fuzzy control strategy of the temperature execution unit, and carrying out ladder-interference compatibility evaluation on the interference feature vector based on the current execution ladder temperature fuzzy control strategy to acquire a ladder-interference compatibility index; and the fuzzy control parameter adjusting module is used for sending the interference characteristic vector to the step fuzzy controller to adjust the temperature fuzzy control parameter of the current execution step temperature fuzzy control strategy when the step-interference compatibility index is smaller than a preset compatibility index threshold value, so as to obtain the updated current execution step temperature fuzzy control strategy.

Description

Stepped temperature fuzzy control method and device for photoetching machine Technical Field The invention relates to the technical field of temperature control, in particular to a stepped temperature fuzzy control method and a stepped temperature fuzzy control device for a photoetching machine. Background The photoetching machine is a core device in the manufacture of semiconductors, the performance of the photoetching machine directly determines the process precision and the production efficiency of an integrated circuit, and in the photoetching process, the temperature stability is a key factor influencing the photoetching precision and the consistency of devices. The factors such as heat source distribution, environmental fluctuation, process load change and the like in the photoetching machine can introduce complicated temperature interference, and if the control is improper, wafer change, alignment error or imaging quality reduction can be caused, so that the product yield is affected. The traditional temperature control has limited performance when dealing with nonlinear and time-varying interferences, and particularly under the temperature control requirements of multiple areas and high precision, the quick and stable dynamic response is difficult to realize, so that fuzzy control is introduced into a temperature control system of a photoetching machine, the problems of uncertainty and complexity are processed by simulating human experience, and then the adaptability is insufficient when the photoetching machine faces the interferences with different duration, amplitude, frequency and spatial distribution, so that the temperature control precision and the self-adaptive capacity of the photoetching machine in the complex interference environment cannot be ensured. Therefore, in the related art at the present stage, when the lithography machine is subjected to dynamic interference with complex and variable characteristics, the technical problems of insufficient temperature control precision and stability exist. Disclosure of Invention By providing the step temperature fuzzy control method and the control device of the photoetching machine, the technical problems of insufficient temperature control precision and stability when the photoetching machine faces to complex and changeable dynamic interferences with different characteristics in the prior art are solved, a dynamic self-adjusting step fuzzy control strategy is realized, and the technical effect of improving the temperature control precision and stability of the photoetching machine is achieved. The application provides a ladder temperature fuzzy control method of a photoetching machine, which comprises the steps of setting an initial ladder temperature fuzzy control strategy in a temperature execution unit of the photoetching machine, executing the initial ladder temperature fuzzy control strategy through a ladder fuzzy controller, collecting interference signals in real time, extracting interference characteristic vectors of the interference signals, detecting the current execution ladder temperature fuzzy control strategy of the temperature execution unit, carrying out ladder-interference compatibility evaluation on the interference characteristic vectors based on the current execution ladder temperature fuzzy control strategy to obtain ladder-interference compatibility indexes, and sending the interference characteristic vectors to the ladder fuzzy controller to carry out temperature fuzzy control parameter adjustment on the current execution ladder temperature fuzzy control strategy if the ladder-interference compatibility indexes are smaller than a preset compatibility index threshold value to obtain updated current execution ladder temperature fuzzy control strategy. In a possible implementation manner, the step temperature fuzzy control method of the photoetching machine further comprises the following steps of obtaining a step temperature fuzzy control step length of a step temperature fuzzy control strategy currently executed, calling an interference elimination self-adaptive analysis model to conduct interference elimination self-adaptive analysis on the interference characteristic vector to obtain a self-adaptive temperature control step length interval, and obtaining a step-interference compatibility index according to whether the step temperature fuzzy control step length is subjected to compatibility evaluation with a control step length deviation of the self-adaptive temperature control step length interval or not. In a possible implementation manner, the step temperature fuzzy control method of the photoetching machine further executes the following processing of controlling the step fuzzy controller to return to a previous step temperature fuzzy control strategy of the step temperature fuzzy control strategy to be executed currently if the step-interference compatibility index is smaller than a preset compatibility index thresh