CN-121340624-B - 3D prints shower nozzle, system and low temperature plasma efflux 3D printing device

CN121340624BCN 121340624 BCN121340624 BCN 121340624BCN-121340624-B

Abstract

The application relates to the technical field of additive manufacturing, and discloses a 3D printing spray head, a system and a low-temperature plasma jet 3D printing device, wherein the 3D printing spray head comprises a spray head main body and a plasma generation module; the spray head body is provided with an aerosol inlet and a plasma gas source inlet, the spray head body is internally provided with an aerosol channel and a plasma gas source channel, the plasma generation module comprises an inner electrode and an outer electrode and forms a plasma excitation area, gas introduced from the plasma gas source inlet is excited into a plasma jet by the plasma generation module in the plasma excitation area, and the aerosol is coupled with the plasma jet and sprayed out after passing through the aerosol channel. The 3D printing nozzle has the advantages that the 3D printing nozzle can realize 3D printing of materials such as organic conductive polymers, metal salt solution, nano particle slurry and the like on a flexible substrate, particularly a substrate which is not resistant to high temperature, and has high printing precision, high integration level and compact structure.

Inventors

SU RUITAO
AN BAILING
Tu Haowei
ZHOU XIN
CHEN XIAOSHUANG

Assignees

甬江实验室

Dates

Publication Date: 20260505
Application Date: 20251217

Claims (13)

1. A 3D printing head, comprising: a showerhead body (1) and a plasma generation module (2) provided to the showerhead body (1); an aerosol inlet (11) and a plasma gas source inlet (12) are respectively arranged on the spray head main body (1); An aerosol channel (110) and a plasma air source channel (120) are respectively arranged in the spray head main body (1), the aerosol channel (110) is communicated with the aerosol inlet (11), and the plasma air source channel (120) is communicated with the plasma air source inlet (12); A sheath gas inlet (13) is formed in the nozzle main body (1), a sheath gas channel (130) is formed in the nozzle main body (1), and the sheath gas channel (130) is communicated with the sheath gas inlet (13); The plasma generation module (2) comprises an inner electrode (21) and an outer electrode (22), the inner electrode (21) and the outer electrode (22) are coaxially arranged, the inner electrode (21) is close to the inner side of the plasma gas source channel (120), the outer electrode (22) is close to the outer side of the plasma gas source channel (120), and the outer electrode (22) and the inner electrode (21) form a plasma excitation area (120A) in the plasma gas source channel (120), and gas introduced from the plasma gas source inlet (12) is excited into a plasma jet by the plasma generation module (2) in the plasma excitation area (120A); The aerosol introduced by the aerosol inlet (11) is coupled with the plasma jet flow and sprayed out after passing through the aerosol channel (110); The spray head main body (1) comprises a cylindrical section (1A) and a conical section (1B) which are connected, wherein the cylindrical section (1A) and the conical section (1B) are coaxially arranged, the aerosol channel (110) is arranged at the center of the spray head main body (1) along the axial direction of the spray head main body (1), the sheath gas channel (130) is conical and is coaxially arranged with the aerosol channel (110), and the plasma gas source channel (120) is conical and is coaxially arranged with the aerosol channel (110); The sheath gas channel (130) is arranged close to the cylindrical section (1A), and the sheath gas channel (130) surrounds the periphery of the aerosol channel (110), the plasma gas source channel (120) is arranged close to the conical section (1B), and the plasma gas source channel (120) surrounds the periphery of the aerosol channel (110); the inner electrode (21) comprises a first inner electrode (21A) and a second inner electrode (21B), the outer electrode (22) comprises a first outer electrode (22A) and a second outer electrode (22B), the first outer electrode (22A) corresponds to the first inner electrode (21A), the second outer electrode (22B) corresponds to the second inner electrode (21B), and the second inner electrode (21B) and the second outer electrode (22B) are close to a plasma jet ejection port; The first inner electrode (21A) is configured to switch on a first high voltage, the second inner electrode (21B) is configured to switch on a second high voltage, and the voltage of the first high voltage is higher than the voltage of the second high voltage.
2. The 3D printing nozzle according to claim 1, wherein the sheath gas channel (130) is communicated with the aerosol channel (110), a restraining cavity (140) is formed at the communication position, the introduced sheath gas forms a sheath gas layer (130A) on the sheath gas channel (130), and the sheath gas layer (130A) can limit the contact of the aerosol with the inner wall of the restraining cavity (140).
3. The 3D printing head according to claim 2, wherein the constraining cavity (140) is tapered, and the cross-sectional area thereof gradually decreases from one end near the sheath gas inlet (13) to one end far from the sheath gas inlet (13); sheath gas introduced into the confinement chamber (140) is capable of refining aerosol introduced into the confinement chamber (140); the sheath layer (130A) extends to the end of the aerosol passage (110).
4. A 3D printing head according to claim 2 or 3, wherein the sheath gas layer (130A) has a thickness of 0.2-1.5 mm and an inclination angle of 10-60 degrees from an end close to the sheath gas inlet (13) to an end far from the sheath gas inlet (13).
5. The 3D printing head according to claim 1, wherein the outlet of the plasma gas source channel (120) is close to the outlet of the aerosol channel (110).
6. The 3D printing head according to claim 1, wherein the head body (1) forms an aerosol ejection port (111) at a distal end of the aerosol channel (110), the head body (1) forming a plasma jet ejection port (121) at a distal end of the plasma gas source channel (120); The aerosol jet (111) is flush with the plasma jet (121), or The aerosol jet (111) is higher than the plasma jet (121) to prolong the coupling time of aerosol and plasma jet, or The aerosol jet (111) is lower than the plasma jet (121) to shorten the coupling time of the aerosol and the plasma jet.
7. The 3D printing nozzle according to claim 6, wherein one end of the nozzle body (1) is provided with a nozzle (10), the nozzle (10) comprises an aerosol nozzle (10A) and a plasma jet nozzle (10B), the aerosol jet orifice (111) is provided at the aerosol nozzle (10A), and the plasma jet orifice (121) is provided at the plasma jet nozzle (10B); the plasma jet nozzle (10B) is arranged coaxially with the aerosol nozzle (10A).
8. The 3D printing head according to claim 7, wherein the plasma jet nozzle (10B) has a tapered inner wall (101), the cross section of the tapered inner wall (101) gradually shrinking from the end near the plasma gas source introducing port (12) to the end far from the plasma gas source introducing port (12) to the plasma jet ejection port (121); The aerosol jet (111) is disposed adjacent to the plasma jet (121).
9. 3D printing nozzle according to claim 1, characterized in that the inner electrode (21) and the outer electrode (22) are each arranged in a conical ring.
10. A 3D print head system, comprising: the 3D printing head of any of claims 1-9; The connector (3) is arranged at one end of the spray head main body (1), a mixing cavity (30) is arranged in the connector (3), the mixing cavity (30) is communicated with the aerosol inlet (11), and the mixing cavity (30) is configured for mixing aerosols of a plurality of different materials.
11. The 3D printing head system according to claim 10, further comprising a shutter (4), the shutter (4) being movably provided at the ejection port of the head body (1) for controlling opening and closing of the ejection port.
12. The 3D printing head system according to claim 10, further comprising a control module and an in-situ observation module (5), the in-situ observation module (5) comprising an optical observation window and a high-speed camera, the in-situ observation module (5) being configured to monitor a spray pattern and a deposition state of the spray orifice of the head body (1) and to form a closed loop feedback with the control module to adjust printing parameters; the printing parameters include one or more of flow, voltage, frequency, power, and motion profile.
13. A low temperature plasma jet 3D printing device, comprising: the 3D printing head of any of claims 1-9; The aerosol atomization system is used for atomizing one or more functional materials to form aerosol and conveying the aerosol to the 3D printing spray head; A plasma power supply (70) and a plasma gas source (71), wherein the plasma power supply (70) is electrically connected with the plasma generation module (2), and the plasma gas source (71) is communicated with the plasma gas source inlet (12); And the printing platform (8) is arranged below the 3D printing spray head.

Description

3D prints shower nozzle, system and low temperature plasma efflux 3D printing device Technical Field The application relates to the technical field of additive manufacturing, in particular to a 3D printing spray head, a system and a low-temperature plasma jet 3D printing device. Background When the traditional inkjet printing and fused deposition type 3D printing processes high-functional materials such as metal salt solution, organic conductive polymer, nanoparticle slurry and the like, the traditional inkjet printing and fused deposition type 3D printing is often limited by factors such as temperature conditions, solvent volatilization rate, material viscosity and conductivity in the printing process, a structure with high precision and high density is difficult to obtain, in-situ chemical reaction (such as reduction, crosslinking or solidification) cannot be realized in the printing process, and the forming quality and the functional performance are unstable. The low-temperature plasma jet technology can provide controllable high-energy active particles and free radicals at normal temperature, can activate, solidify, reduce or modify the surface of the material or a flowing region, and provides a new way for rapid solidification, chemical reaction and multiphase interface regulation of the functional material in 3D printing. However, most of the existing 3D printing nozzles have a single aerosol or thermal nozzle structure, and there is still a gap in high-precision 3D printing of special materials such as conductive polymers and metal salt solutions. Disclosure of Invention Aiming at the defects in the prior art, the application aims to solve the technical problems of providing a 3D printing nozzle, a system and a low-temperature plasma jet 3D printing device which can realize 3D printing of materials such as organic conductive polymers, metal salt solution, nanoparticle slurry and the like on a flexible substrate, particularly a substrate which is not resistant to high temperature, and have high printing precision, high integration level and compact structure. The technical scheme adopted by the application for solving the technical problems is that a 3D printing spray head is provided, comprising: A showerhead body and a plasma generation module disposed in the showerhead body; the spray head main body is respectively provided with an aerosol inlet and a plasma air source inlet; An aerosol channel and a plasma air source channel are respectively arranged in the spray head main body, the aerosol channel is communicated with the aerosol inlet, and the plasma air source channel is communicated with the plasma air source inlet; The plasma generation module comprises an inner electrode and an outer electrode, the inner electrode is arranged close to the inner side of the plasma gas source channel, the outer electrode is arranged close to the outer side of the plasma gas source channel, the outer electrode and the inner electrode form a plasma excitation area in the plasma gas source channel, and gas introduced from the plasma gas source inlet is excited into a plasma jet flow by the plasma generation module in the plasma excitation area; and the aerosol introduced by the aerosol inlet is coupled with the plasma jet flow and sprayed out after passing through the aerosol channel. Further, a sheath gas inlet is formed in the nozzle main body, and a sheath gas channel is formed in the nozzle main body and is communicated with the sheath gas inlet; The sheath gas channel is communicated with the aerosol channel, a constraint cavity is formed at the communication position, the introduced sheath gas forms a sheath gas layer in the sheath gas channel, and the sheath gas layer can limit the aerosol to be contacted with the inner wall of the constraint cavity. Further, the restriction cavity is arranged in a conical shape, and the sectional area of the restriction cavity is gradually reduced from one end close to the sheath gas inlet to one end far away from the sheath gas inlet; the sheath gas introduced into the constraint cavity can refine the aerosol introduced into the constraint cavity; the sheath layer extends to the end of the aerosol passage. Further, the thickness of the sheath layer is 0.2-1.5 mm, and the sheath layer has an inclination angle of 10-60 degrees from one end close to the sheath gas inlet to one end far from the sheath gas inlet. Further, the spray head main body comprises a cylindrical section and a conical section which are connected, and the cylindrical section and the conical section are coaxially arranged; The aerosol channel is arranged in the center of the spray head main body along the axial direction of the spray head main body; The sheath gas channel is conical and is coaxially arranged with the aerosol channel; the plasma gas source channel is conical and is coaxially arranged with the aerosol channel. Further, the sheath gas channel is disposed adjacent to the cylindrical section,