CN-121540744-B - Energy spectrum analysis method and system based on energy dispersion X-ray fluorescence

CN121540744BCN 121540744 BCN121540744 BCN 121540744BCN-121540744-B

Abstract

The application provides an energy spectrum analysis method and system based on energy dispersion X-ray fluorescence. The method comprises the steps of obtaining energy dispersion X-ray fluorescence energy spectrum data of a sample surface, correcting the energy spectrum data of a plurality of measuring positions according to the layered structure characteristics of a multi-layer composite metal material, superposing the corrected energy spectrum data according to the layered structure of the material, performing interface diffusion effect compensation on the superposed energy spectrum data based on the concentration gradient characteristics of elements of each layer, and finally analyzing element distribution information from the energy spectrum data subjected to the interface diffusion effect compensation.

Inventors

ZHAO XIAOFANG
GUO BING
GONG WU

Assignees

北京谱质恒科技有限公司
跃迁科技(天津)有限公司

Dates

Publication Date: 20260508
Application Date: 20251124

Claims (7)

1. An energy spectrum analysis method based on energy dispersive X-ray fluorescence, comprising: Acquiring energy spectrum data of energy dispersion X-ray fluorescence of a plurality of measuring positions on the surface of a sample to be measured; According to the layered structure characteristics of the multi-layer composite metal material, carrying out angle dependence correction on the energy spectrum data of a plurality of measuring positions to obtain corrected energy spectrum data; The method comprises the steps of carrying out superposition processing on correction energy spectrum data according to a material layered structure to obtain superposed energy spectrum data, determining the distribution position of each material layer on a measurement path according to the layered structure characteristics of the multilayer composite metal material, classifying the correction energy spectrum data according to corresponding material layers, determining weight coefficients of the correction energy spectrum data of different material layers in the superposition process based on physical characteristic differences of the material layers, carrying out weighted combination on the correction energy spectrum data belonging to the same material layer according to the weight coefficients to obtain weighted energy spectrum data of the material layers, and carrying out integrated superposition on the weighted energy spectrum data of the material layers according to layer sequences to form superposed energy spectrum data representing the whole layered structure; The method comprises the steps of determining theoretical distribution forms of elements in an interface region under diffusion influence based on concentration gradient characteristics of elements in each layer of a multilayer composite metal material, comparing actual measurement signal distribution of each element in the superimposed energy spectrum data with the theoretical distribution forms of corresponding elements point by point to obtain signal difference data of each measurement point, establishing a form difference mapping relation between the actual measurement signal distribution and the theoretical distribution forms based on the signal difference data according to interface characteristics between material layers, and compensating and correcting the actual measurement signal distribution of each element in the superimposed energy spectrum data based on the form difference mapping relation to obtain the energy spectrum data subjected to interface diffusion compensation; The method comprises the steps of analyzing element distribution information of an interlayer interface region from energy spectrum data subjected to interface diffusion effect compensation, identifying characteristic energy signals of elements in the energy spectrum data subjected to interface diffusion effect compensation, determining a spatial range of the interlayer interface region according to layered structure characteristics of the multi-layer composite metal material, correspondingly associating the characteristic energy signals of the elements with the spatial range of the interlayer interface region to generate spatial signal association data, establishing a distribution relation between signal intensity and spatial position based on intensity changes of the characteristic energy signals of the elements in the spatial signal association data, determining distribution forms of the elements in the interface region according to the distribution relation between the signal intensity and the spatial position, and taking the distribution form information of the elements as element distribution information of the interlayer interface region.
2. The method of claim 1, wherein obtaining energy dispersive X-ray fluorescence energy spectrum data for a plurality of measurement locations on a surface of the sample to be measured comprises: obtaining a micro-region X-ray beam through beam shaping operation by utilizing an original ray beam emitted by an X-ray source; Defining a measuring path perpendicular to a layered structure interface on the surface of a sample to be measured according to the layered structure characteristics of the multilayer composite metal material; Step-by-step scanning is carried out along the measuring path by using the micro-region X-ray beam, and X-ray photon energy distribution data are collected at each step point of the measuring path; and recording the space position information of each stepping point and corresponding X-ray photon energy distribution data to form an energy spectrum data sequence with space position correlation.
3. The method of claim 1, wherein performing an angle-dependent correction on the spectral data for the plurality of measurement locations based on the layered structure characteristics of the multi-layered composite metal material to obtain corrected spectral data comprises: determining the information of an included angle between the incident direction of the X-ray beam at each measuring position and the normal direction of the characteristic interface of the layered structure; Based on the anisotropic property of each layer of material in the multilayer composite metal material, establishing a corresponding relation between the included angle information and the X-ray fluorescence signal intensity; according to the corresponding relation, carrying out signal intensity adjustment on the X-ray photon energy distribution data acquired by each measuring position to obtain X-ray photon energy distribution data of a plurality of measuring positions subjected to signal intensity adjustment; the X-ray photon energy distribution data of a plurality of measurement positions subjected to signal intensity adjustment is used as correction energy spectrum data.
4. The method according to claim 1, wherein weighting and combining the correction energy spectrum data belonging to the same material layer according to the weight coefficient to obtain weighted energy spectrum data of each material layer comprises: Acquiring correction energy spectrum data of all measurement positions belonging to the same material layer; determining the relative importance degree of the corrected energy spectrum data of each measuring position in the corresponding material layer; based on the weight coefficient and the relative importance degree, importance adjustment is carried out on the correction energy spectrum data of each measuring position; And synthesizing all correction energy spectrum data of the same material layer subjected to importance adjustment to obtain weighted energy spectrum data of each material layer.
5. An energy spectrum analysis system based on energy-dispersive X-ray fluorescence, applied to the energy spectrum analysis method based on energy-dispersive X-ray fluorescence according to any one of claims 1 to 4, comprising: The acquisition module is used for acquiring energy spectrum data of energy dispersion X-ray fluorescence of a plurality of measurement positions on the surface of the sample to be measured; the correction module is used for carrying out angle dependency correction on the energy spectrum data of a plurality of measuring positions according to the layered structure characteristics of the multi-layer composite metal material to obtain corrected energy spectrum data; The superposition module is used for superposing the corrected energy spectrum data according to the material layered structure to obtain the energy spectrum data after superposition; The compensation module is used for carrying out interface diffusion effect compensation on the energy spectrum data after the superposition processing based on the concentration gradient characteristics of each layer of elements in the multilayer composite metal material; the analysis module is used for analyzing the element distribution information of the interlayer interface region from the energy spectrum data compensated by the interface diffusion effect.
6. The computing device is characterized by comprising a processing component and a storage component, wherein the storage component stores one or more computer instructions, and the one or more computer instructions are used for being invoked and executed by the processing component to realize the energy dispersion X-ray fluorescence-based energy spectrum analysis method according to any one of claims 1-4.
7. A computer storage medium storing a computer program which, when executed by a computer, implements a method for energy dispersive X-ray fluorescence based energy spectrum analysis according to any one of claims 1 to 4.

Description

Energy spectrum analysis method and system based on energy dispersion X-ray fluorescence Technical Field The application relates to the technical field of material analysis, in particular to an energy spectrum analysis method and system based on energy dispersion X-ray fluorescence. Background In the electronic industry, the multilayer metal composite material prepared by precision rolling needs to accurately evaluate the diffusion behavior of interface elements, and the traditional method is difficult to realize the accurate analysis of the element distribution of the interface area. In the prior art, an energy dispersion X-ray fluorescence spectrum analysis method based on standard matrix correction is adopted, and the matrix correction model of a standard sample is established to carry out integral correction analysis on the energy spectrum data of a test sample, so that the element composition information of the material is obtained. However, the scheme has obvious defects that the adopted integral correction mode cannot effectively distinguish the difference between the interface diffusion signal and the matrix signal, so that the element diffusion boundary and the concentration gradient distribution characteristic are difficult to accurately identify when the interlayer interface region is analyzed, and particularly, the detection sensitivity of a thin layer interface and a trace diffusion element is insufficient. Disclosure of Invention The application provides an energy spectrum analysis method and system based on energy dispersion X-ray fluorescence, which are used for solving the problems that in the prior art, the difference between an interface diffusion signal and a matrix signal cannot be effectively distinguished by an integral correction mode, so that element diffusion boundaries and concentration gradient distribution characteristics are difficult to accurately identify when an interlayer interface region is analyzed, and particularly the detection sensitivity of a thin layer interface and a trace diffusion element is insufficient. In a first aspect, the present application provides a method for energy spectrum analysis based on energy-dispersive X-ray fluorescence, comprising: Acquiring energy spectrum data of energy dispersion X-ray fluorescence of a plurality of measuring positions on the surface of a sample to be measured; According to the layered structure characteristics of the multi-layer composite metal material, carrying out angle dependence correction on the energy spectrum data of a plurality of measuring positions to obtain corrected energy spectrum data; superposing the corrected energy spectrum data according to the material layered structure to obtain superposed energy spectrum data; Performing interface diffusion effect compensation on the energy spectrum data after superposition treatment based on concentration gradient characteristics of elements of each layer in the multilayer composite metal material; And analyzing element distribution information of the interlayer interface region from the energy spectrum data compensated by the interface diffusion effect. Optionally, acquiring energy spectrum data of energy-dispersive X-ray fluorescence at a plurality of measurement positions on a surface of a sample to be measured includes: obtaining a micro-region X-ray beam through beam shaping operation by utilizing an original ray beam emitted by an X-ray source; Defining a measuring path perpendicular to a layered structure interface on the surface of a sample to be measured according to the layered structure characteristics of the multilayer composite metal material; Step-by-step scanning is carried out along the measuring path by using the micro-region X-ray beam, and X-ray photon energy distribution data are collected at each step point of the measuring path; and recording the space position information of each stepping point and corresponding X-ray photon energy distribution data to form an energy spectrum data sequence with space position correlation. Optionally, according to the layered structure characteristics of the multi-layer composite metal material, performing angle-dependent correction on the energy spectrum data of the plurality of measurement positions to obtain corrected energy spectrum data, including: determining the information of an included angle between the incident direction of the X-ray beam at each measuring position and the normal direction of the characteristic interface of the layered structure; Based on the anisotropic property of each layer of material in the multilayer composite metal material, establishing a corresponding relation between the included angle information and the X-ray fluorescence signal intensity; according to the corresponding relation, carrying out signal intensity adjustment on the X-ray photon energy distribution data acquired by each measuring position to obtain X-ray photon energy distribution data of a plurality of measuring