CN-121548176-B - Micro display device and manufacturing method thereof

Abstract

The invention relates to a micro display device and a preparation method thereof. The micro display device comprises a driving backboard, a plurality of pixel layers are stacked on the driving backboard, a mother pixel comprises a plurality of sub-pixels, at least one pixel layer is a type pixel layer, the bottom ends of the sub-pixels in the type pixel layer are respectively and electrically connected to corresponding first type electrode contacts through independent conductive blocks, the conductive blocks are in one-to-one correspondence with the first type electrode contacts, in two sub-pixels located in different pixel layers, a pore channel is formed in one sub-pixel in a lower pixel layer, a peripheral light emitting area is formed at the periphery of the pore channel, the inside of the pore channel is penetrated by an interconnection conductive element, and light emitted by the peripheral light emitting area is emitted at least partially through the periphery of the upper sub-pixel electrically connected with the interconnection conductive element in the pore channel. The invention also discloses a preparation method of the micro display device. The invention can effectively improve the light effect and reliability of the micro display device and meet the requirements of different application scenes.

Inventors

• Yan Gaige
• ZHU YOULIANG
• LIN XIAO
• WANG YAZHOU

Assignees

• 诺视科技(浙江)有限公司

Dates

Publication Date

20260505

Application Date

20260116

Claims (20)

1. 1. A micro display device is characterized by comprising, The driving backboard is provided with a first type electrode contact; The pixel layers are stacked in sequence from bottom to top above the driving backboard; The pixel structure comprises a mother pixel, a plurality of pixel layers and a pixel electrode, wherein the mother pixel comprises a plurality of sub-pixels, and at least two sub-pixels are respectively positioned in different pixel layers; The top ends of the sub-pixels in different pixel layers in the parent pixel are electrically connected to the corresponding top conducting layers, and the bottom ends of the sub-pixels are respectively electrically connected to the corresponding first type electrode contacts; At least one pixel layer is a type pixel layer, the bottom ends of the sub-pixels in the type pixel layer are respectively and electrically connected to the corresponding first type electrode contacts through independent conductive blocks, and the conductive blocks are in one-to-one correspondence with the first type electrode contacts; In the two sub-pixels in different pixel layers, a pore is formed in one sub-pixel in the lower pixel layer, a peripheral light emitting area is formed at the periphery of the pore and is a part of the sub-pixel with the pore, an interconnection conductive element penetrates through the pore, the top end of the interconnection conductive element in the pore is electrically connected to the bottom end of the other sub-pixel in the upper pixel layer, the bottom end of the interconnection conductive element in the pore is electrically connected to the corresponding first type electrode contact, the projection area of the upper sub-pixel connected with the interconnection conductive element in the pore on the driving backboard is a first projection area, the projection area of the peripheral light emitting area of the pore on the periphery on the driving backboard is a second projection area, and the first projection area and the second projection area are at least partially misaligned, so that light emitted by the peripheral light emitting area is at least partially emitted out through the periphery of the upper sub-pixel electrically connected with the interconnection conductive element in the pore.
2. 2. A micro display device as set forth in claim 1 wherein said conductive block has an electrical contact area for electrical connection with a bottom end of a corresponding one of said sub-pixels in said one type of pixel layer, said electrical contact area having an area smaller than an area of a bottom surface of a corresponding one of said sub-pixels in said one type of pixel layer to which said electrical contact is made.
3. 3. A micro display device as set forth in claim 1 wherein the top conductive layers of the top sub-pixels of the parent pixel are interconnected to form a top common electrode structure.
4. 4. A micro display device as set forth in claim 3 wherein said top conductive layers are disposed individually and not in common on top of said sub-pixels of different pixel layers in said master pixel and said top conductive layers in the same pixel layer are disposed on top of said electrically connected sub-pixels.
5. 5. A micro display device as set forth in claim 3 wherein at least two of said sub-pixels in said parent pixel share one of said top conductive layers, said sub-pixels sharing one of said top conductive layers being located in different ones of said pixel layers, respectively.
6. 6. A micro display device as set forth in any one of claims 4 or 5 further comprising a metal reinforcement, at least one of said top conductive layers being electrically connected to said metal reinforcement.
7. 7. A micro display device as set forth in claim 6 wherein said metal reinforcement is located above said top conductive layer to which said metal reinforcement is electrically connected.
8. 8. A micro display device as set forth in claim 6 wherein said metal reinforcement is located below said top conductive layer to which said metal reinforcement is electrically connected.
9. 9. A micro display device as set forth in claim 8 wherein said metal reinforcement surrounds the periphery of one of said sub-pixels below said top conductive layer to which it is electrically connected.
10. 10. A micro display device as set forth in claim 3 further comprising a second type electrode contact of opposite polarity to the first type electrode contact, wherein the top conductive layers of a plurality of said sub-pixels in said parent pixel are all commonly connected to said second type electrode contact by a common electrode conductor.
11. 11. A micro display device as set forth in claim 10 wherein said bottom ends of said common electrode members are in direct contact with corresponding said second type electrode contacts.
12. 12. A micro display device as set forth in claim 10 wherein at least two of said sub-pixels in said parent pixel share one of said top conductive layers, said common electrode conductive member is in direct contact with said shared top conductive layer to effect an electrical connection, or said common electrode conductive member is electrically connected to said shared top conductive layer through a transition conductive member.
13. 13. A micro display device as set forth in claim 10 wherein said top conductive layers are disposed individually on top of said sub-pixels of at least two different pixel layers in said mother pixel without sharing, said common electrode conductive member comprises an interconnection conductive portion through which adjacent two top conductive layers are interconnected to make electrical connection, at least one of said top conductive layers is in direct contact with said interconnection conductive portion to make electrical connection, or at least one of said top conductive layers is in electrical connection with said interconnection conductive portion to make electrical connection through a metal reinforcement.
14. 14. A micro-display device as set forth in any one of claims 4 or 5 wherein the top end of the sub-pixel is in contact with the electrically connected top conductive layer or wherein the top end and at least a portion of the side wall of the sub-pixel are in contact with the electrically connected top conductive layer.
15. 15. A micro display device as set forth in claim 3 wherein the bottom ends of said sub-pixels in said one-type pixel layer are electrically connected to the respective corresponding conductive bumps through a metal reflective layer.
16. 16. A micro display device as set forth in claim 15 wherein only the bottom end of said sub-pixels in said one type pixel layer are electrically connected to said metal reflective layer or wherein the bottom end and at least a portion of the sidewalls of said sub-pixels in said one type pixel layer are electrically connected to said metal reflective layer.
17. 17. A micro display device as set forth in claim 15, wherein a peripheral reflection part is formed at an upper part of the metal reflection layer, the peripheral reflection part is surrounded by the periphery of the sub-pixel in the one-type pixel layer, and the peripheral reflection part is insulated from an outer sidewall of the surrounded sub-pixel by a first insulation layer.
18. 18. A micro display device as set forth in claim 17 wherein a hole is formed in one of said sub-pixels in one of said pixel layers, a peripheral light emitting region is formed around the periphery of said hole, an inner peripheral reflecting portion is further formed on the upper portion of said metal reflecting layer, said inner peripheral reflecting portion is located inside said hole, said inner peripheral reflecting portion surrounds the periphery of the interconnecting conductive member inside said hole, and said inner peripheral reflecting portion and the inner side wall of said peripheral light emitting region are insulated and isolated by said first insulating layer.
19. 19. A micro display device as set forth in claim 15 wherein the bottom ends of the sub-pixels in the one type pixel layer are electrically connected by direct contact with the metal reflective layer or are electrically connected with the metal reflective layer through an ohmic contact layer.
20. 20. A micro display device as set forth in claim 1 wherein the top ends of said interconnecting conductive members inside said tunnel are electrically connected to the bottom ends of one of said sub-pixels in one of said one-type pixel layers above through conductive bumps, and the bottom ends of said interconnecting conductive members inside said tunnel are electrically connected to the corresponding electrode contacts of said first-type.

Description

Micro display device and manufacturing method thereof Technical Field The invention relates to the technical field of semiconductors, in particular to a micro display device and a preparation method thereof. Background The Micro display device has the characteristics of small size, high resolution, high brightness and the like, can be applied to various fields of AR/VR equipment, vehicle-mounted display, medical detection, intelligent wearing and the like, and is widely developed in recent years, particularly the Micro-LED display technology, has the advantages of high efficiency, low power consumption, high concentration, high stability and the like, and is considered to be one of the most promising novel display and light-emitting devices of the next generation. In the micro display field, in order to further ensure the pixel size and the pixel density, the requirement of multicolor stacking integration exists when the colorization display is performed, the LED device adopting the multilayer stacking mode generally comprises a driving back plate (with a driving circuit) and a multilayer structure positioned above the driving back plate, the pixels are arranged in each layer of structure, the pixels of each layer are required to be electrically connected with the driving back plate, the whole structure is complex, the light emergent surface of each pixel is accumulated in larger loss, the adjustment of the light emergent area is inconvenient, the optimal light distribution effect cannot be realized, and the whole device has higher power consumption and is unfavorable for ensuring the reliability and the stability of the LED display device. Disclosure of Invention Therefore, the technical problem to be solved by the invention is to improve the light efficiency and the reliability of the micro display device in the prior art. In order to solve the above technical problems, the present invention provides a micro display device, comprising, The driving backboard is provided with a first type electrode contact; The pixel layers are stacked in sequence from bottom to top above the driving backboard; The pixel structure comprises a mother pixel, a plurality of pixel layers and a pixel electrode, wherein the mother pixel comprises a plurality of sub-pixels, and at least two sub-pixels are respectively positioned in different pixel layers; The top ends of the sub-pixels in different pixel layers in the parent pixel are electrically connected to the corresponding top conducting layers, and the bottom ends of the sub-pixels are respectively electrically connected to the corresponding first type electrode contacts; At least one pixel layer is a type pixel layer, the bottom ends of the sub-pixels in the type pixel layer are respectively and electrically connected to the corresponding first type electrode contacts through independent conductive blocks, and the conductive blocks are in one-to-one correspondence with the first type electrode contacts; In the two sub-pixels in different pixel layers, a pore canal is formed in one sub-pixel in the lower pixel layer, a peripheral light emitting area is formed at the periphery of the pore canal, an interconnection conducting piece penetrates through the pore canal, the top end of the interconnection conducting piece in the pore canal is electrically connected to the bottom end of the other sub-pixel in the upper pixel layer, the bottom end of the interconnection conducting piece in the pore canal is electrically connected to the corresponding first type electrode contact, and light emitted by the peripheral light emitting area is emitted at least partially through the periphery of the upper sub-pixel electrically connected with the interconnection conducting piece in the pore canal. In one embodiment of the present invention, the conductive block has an electrical contact area for electrical connection with a bottom end of a corresponding sub-pixel in the one-type pixel layer, the electrical contact area having an area smaller than an area of a bottom surface of the corresponding sub-pixel in the one-type pixel layer to which the electrical contact is electrically connected. In one embodiment of the invention, the top conductive layers of the parent pixel that are on top of the child pixels in different pixel layers are interconnected to form a top common electrode structure. In one embodiment of the present invention, the top conductive layers are disposed on top of the sub-pixels of the different pixel layers in the parent pixel separately and not in common, and the top conductive layers in the same pixel layer are disposed on top of the electrically connected sub-pixels. In one embodiment of the present invention, at least two of the sub-pixels in the parent pixel share one of the top conductive layers, the sub-pixels of at least one of the top conductive layers being respectively located in different ones of the pixel layers. In one embodiment of the invention, a metal re