CN-121548178-B - Micro display device and manufacturing method thereof

Abstract

The invention relates to a micro display device and a preparation method thereof. The micro display device comprises a driving backboard, a first layer and a second layer of pixel layers, wherein a mother pixel comprises a plurality of sub-pixels, the bottom end of each sub-pixel is respectively and electrically connected to a corresponding first type electrode contact through a bottom conducting layer, the top ends of the sub-pixels are all interconnected through a top conducting layer to form a top common electrode structure, a pore canal is formed in one sub-pixel in the first layer of pixel layers, a peripheral luminous area is formed in the periphery of the pore canal, a non-common electrode conducting piece penetrates through the inside of the pore canal, light emitted by the peripheral luminous area is at least partially emitted from the periphery of an upper sub-pixel electrically connected with the non-common electrode conducting piece in the pore canal, and a color conversion layer is further arranged above the first layer of pixel and located on a light emitting path of the corresponding sub-pixel in the first layer of pixel. The invention also discloses a preparation method. The invention can effectively improve the light effect and the reliability of the micro display device.

Inventors

• Yan Gaige
• ZHU YOULIANG
• LIN XIAO
• WANG YAZHOU

Assignees

• 诺视科技(浙江)有限公司

Dates

Publication Date

20260505

Application Date

20260116

Claims (20)

1. 1. A micro display device is characterized by comprising, The driving backboard is provided with a first type electrode contact; a first layer of pixel layers stacked over the driving backplate; A second layer of pixel layers stacked over the first layer of pixel layers; The master pixel comprises a plurality of sub-pixels, middle sub-pixels of the plurality of sub-pixels are located in the first layer of pixel layers, and the rest sub-pixels are located in the second layer of pixel layers; The bottom end of each sub-pixel in the plurality of sub-pixels is electrically connected to the corresponding first type electrode contact through the bottom conductive layer, and the top ends of the plurality of sub-pixels are interconnected through the top conductive layer to form a top common electrode structure; The inside of one sub-pixel in the first layer of pixel layer is provided with a pore canal, the periphery of the pore canal forms a peripheral light-emitting area, a non-common electrode conductive piece penetrates through the inside of the pore canal, the top end of the non-common electrode conductive piece in the pore canal is electrically connected to the bottom conductive layer of the other sub-pixel in the second layer of pixel layer, and the bottom end of the non-common electrode conductive piece in the pore canal is electrically connected to the corresponding first type electrode contact; light emitted by the peripheral light-emitting region is emitted at least partially through the periphery of the upper sub-pixel electrically connected with the non-common electrode conductive piece inside the pore canal; And a color conversion layer is arranged above the first pixel layer and positioned on the light emergent path of the corresponding sub-pixel in the first pixel layer.
2. 2. A micro display device according to claim 1, wherein the sub-pixels having the via holes are arranged coaxially with respect to the sub-pixels above the via holes to which the non-common electrode conductive members passing through the via holes are connected.
3. 3. A micro display device according to claim 1, wherein the sub-pixels having the via holes are arranged on different axes from the sub-pixels above the via holes to which the non-common electrode conductive members passing through the via holes are connected.
4. 4. The micro-display device of claim 1, wherein the projection area of the upper sub-pixel connected with the non-common electrode conductive element in the pore canal on the driving back plate is a first projection area, the projection area of the peripheral light emitting area on the periphery of the pore canal on the driving back plate is a second projection area, and the first projection area and the second projection area are at least partially misaligned.
5. 5. A micro display device as set forth in claim 1 wherein said top conductive layer is provided individually and not commonly on top of said sub-pixels in said first and second pixel layers in said mother pixel, and said top conductive layer in said first pixel layer is provided on top of said electrically connected sub-pixels and said top conductive layer in said second pixel layer is provided on top of said electrically connected sub-pixels.
6. 6. A micro display device as set forth in claim 1 wherein said sub-pixels of said parent pixel in said first and second pixel layers share one of said top conductive layers.
7. 7. A micro display device as set forth in claim 6 wherein said color conversion layer is disposed at an upper surface of said top conductive layer in common.
8. 8. The micro-display device according to claim 1, wherein the color conversion layer is disposed on the light emitting path of the sub-pixel having the aperture in the first pixel layer.
9. 9. A micro display device as set forth in claim 8 wherein the region of the sub-pixel having the aperture located at the periphery of the aperture forms a peripheral light emitting region, and the color conversion layer covers at least a partial region of the top end of the peripheral light emitting region.
10. 10. The micro-display device according to claim 1, wherein the color conversion layer is disposed on a light emitting path of the sub-pixel in the first pixel layer, the sub-pixel not being provided with the channel.
11. 11. A micro display device as set forth in claim 1 wherein a first insulating fill region is disposed within said aperture and said non-co-polar conductive member passes directly through said first insulating fill region.
12. 12. A micro display device as set forth in claim 1 wherein said tunnel is internally provided with a compound semiconductor region through which said non-common electrode conductive member passes.
13. 13. A micro display device as set forth in claim 1, wherein in the sub-pixel having a tunnel, a first inner peripheral metal rail is formed inside the tunnel, the first inner peripheral metal rail surrounds the periphery of the non-common electrode conductive member inside the tunnel, the inner side wall of the peripheral light emitting region is covered with a first insulating layer, and the first inner peripheral metal rail and the inner side wall of the peripheral light emitting region are insulated and isolated by the first insulating layer.
14. 14. A micro display device as set forth in claim 13 wherein said bottom conductive layer is a metal bonding layer.
15. 15. The micro-display device of claim 14, wherein the metal bonding layer at the bottom of the sub-pixel having the via and the first inner periphery metal fence are integrally formed, or the metal bonding layer at the bottom of the sub-pixel having the via and the first inner periphery metal fence are separately disposed and insulated from each other.
16. 16. A micro display device as set forth in claim 1 wherein at least one of said sub-pixels is surrounded by a first peripheral metal rail, said first peripheral metal rail being insulated from the outer sidewall of the surrounding sub-pixel.
17. 17. A micro-display device as set forth in claim 1 wherein the top end of the sub-pixel is in contact with the electrically connected top conductive layer or wherein the top end and at least a portion of the side wall of the sub-pixel are in contact with the electrically connected top conductive layer.
18. 18. A micro display device as set forth in any one of claims 5 or 6 further comprising a metal reinforcement, at least one of said top conductive layers being electrically connected to said metal reinforcement.
19. 19. A micro display device as set forth in claim 18 wherein said metal reinforcement is located above said top conductive layer to which said metal reinforcement is electrically connected.
20. 20. A micro display device as set forth in claim 18 wherein said metal reinforcement is located below said top conductive layer to which said electrical connection is made.

Description

Micro display device and manufacturing method thereof Technical Field The invention relates to the technical field of semiconductors, in particular to a micro display device and a preparation method thereof. Background The Micro display device has the characteristics of small size, high resolution, high brightness and the like, can be applied to various fields of AR/VR equipment, vehicle-mounted display, medical detection, intelligent wearing and the like, and is widely developed in recent years, particularly the Micro-LED display technology, has the advantages of high efficiency, low power consumption, high concentration, high stability and the like, and is considered to be one of the most promising novel display and light-emitting devices of the next generation. In the field of micro-display, in order to further ensure the pixel size and the pixel density, the requirement of multicolor stacking integration exists when the multicolor display is performed, the LED device adopting the multilayer stacking mode generally comprises a driving back plate (with a driving circuit) and a multilayer structure positioned above the driving back plate, pixels are arranged in each layer of structure, the pixels of each layer are required to be electrically connected with the driving back plate, the whole structure is complex, the light emitting surface of each pixel is accumulated in larger loss, the optimal light distribution effect cannot be realized, and the whole device has higher power consumption, so that the reliability and the stability of the LED display device are not guaranteed. Disclosure of Invention Therefore, the technical problem to be solved by the invention is to improve the light efficiency and the reliability of the micro display device in the prior art. In order to solve the above technical problems, the present invention provides a micro display device, comprising, The driving backboard is provided with a first type electrode contact; a first layer of pixel layers stacked over the driving backplate; A second layer of pixel layers stacked over the first layer of pixel layers; The master pixel comprises a plurality of sub-pixels, middle sub-pixels of the plurality of sub-pixels are located in the first layer of pixel layers, and the rest sub-pixels are located in the second layer of pixel layers; The bottom end of each sub-pixel in the plurality of sub-pixels is electrically connected to the corresponding first type electrode contact through the bottom conductive layer, and the top ends of the plurality of sub-pixels are interconnected through the top conductive layer to form a top common electrode structure; The inside of one sub-pixel in the first layer of pixel layer is provided with a pore canal, the periphery of the pore canal forms a peripheral light-emitting area, a non-common electrode conductive piece penetrates through the inside of the pore canal, the top end of the non-common electrode conductive piece in the pore canal is electrically connected to the bottom conductive layer of the other sub-pixel in the second layer of pixel layer, and the bottom end of the non-common electrode conductive piece in the pore canal is electrically connected to the corresponding first type electrode contact; light emitted by the peripheral light-emitting region is emitted at least partially through the periphery of the upper sub-pixel electrically connected with the non-common electrode conductive piece inside the pore canal; And a color conversion layer is arranged above the first pixel layer and positioned on the light emergent path of the corresponding sub-pixel in the first pixel layer. In one embodiment of the present invention, the sub-pixel having a via is disposed coaxially with an upper sub-pixel connected to a non-common electrode conductive member passing through the via. In one embodiment of the present invention, the sub-pixel having a via is disposed off-axis from the upper sub-pixel connected to the non-common electrode conductive member passing through the via. In one embodiment of the present invention, a projection area of the upper sub-pixel connected to the non-common electrode conductive member inside the tunnel on the driving back plate is a first projection area, a projection area of the peripheral light emitting area outside the tunnel on the driving back plate is a second projection area, and the first projection area and the second projection area are at least partially misaligned. In one embodiment of the present invention, the top conductive layers are disposed individually and not in common on top of the sub-pixels in the first and second pixel layers in the parent pixel, and the top conductive layer in the first pixel layer is disposed on top of the electrically connected sub-pixels, and the top conductive layer in the second pixel layer is disposed on top of the electrically connected sub-pixels. In one embodiment of the present invention, the sub-pixels of the parent pixel loc