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CN-121555986-B - Double-drive variable-position vacuum coating machine rotating frame

CN121555986BCN 121555986 BCN121555986 BCN 121555986BCN-121555986-B

Abstract

The invention relates to the technical field of rotating frames of coating machines and discloses a rotating frame of a double-drive variable-position vacuum coating machine, which comprises a transmission shaft, a revolution disc fixed on the transmission shaft, a composite gear sleeved on the transmission shaft and provided with an upper layer gear ring and a lower layer gear ring, a driving gear meshed with the lower layer gear ring, a planetary transmission assembly rotatably connected with the revolution disc, a plurality of rotating rods with lower ends connected with the transmission gear and a position changing mechanism. By locking the driving gear or the transmission shaft and driving the other part respectively, the compound motion of revolution of the rotating rod around the main shaft and rotation around the axis of the rotating rod can be realized, or pure rotation can be carried out on a fixed circumference position. The deflection mechanism comprises an arc-shaped track arranged on the revolution disc and a deflection bracket connected with the rotating rod, so that the circumferential position of the rotating rod is adjustable and locked and fixed. The invention has flexible movement mode, has deflection adjustment capability, can realize dynamic temperature measurement through the temperature sensor arranged in the hollow transmission shaft, and effectively improves the adaptability, uniformity and controllability of the coating process.

Inventors

  • Zhang yongshuo
  • XU FENG
  • GAO GUIBIN
  • WANG LIN

Assignees

  • 北京中科科美科技股份有限公司

Dates

Publication Date
20260508
Application Date
20260123

Claims (9)

  1. 1. A dual drive variable position vacuum coater turret, comprising: the transmission shaft (1), the said transmission shaft (1) fixedly connects with the revolution disc (2); the composite gear (3) is rotationally connected with the transmission shaft (1) through a bearing, and is provided with an upper layer big gear ring (32) and a lower layer small gear ring (31) which are coaxially distributed; a drive gear (4) engaged with the lower pinion gear (31); the planetary transmission assemblies are rotationally connected to the revolution disc (2) through planetary shafts (51), each planetary transmission assembly comprises an upper gear (52) and a lower gear (53) which are fixed on the planetary shafts (51), and the lower gears (53) are meshed with the upper layer large gear ring (32); A plurality of rotating rods (6) configured to revolve along the revolution plate (2), wherein a transmission gear (7) meshed with the upper gear (52) is connected to the lower ends of the rotating rods (6); the displacement mechanism comprises an arc displacement rail (13) fixed on the upper surface of the revolution disc (2) and a displacement bracket (12) rotatably connected to the lower end of the rotating rod (6), wherein the displacement bracket (12) can slide along the displacement rail (13) and is fixed on locking positions of different positions on the displacement rail (13) through locking pieces; the circle center of the arc-shaped deflection track (13) coincides with the axis of the planet shaft (51).
  2. 2. The rotary frame of the double-drive variable position vacuum coating machine according to claim 1, further comprising a supporting disc (17) and a driving shaft (9), wherein the driving shaft (9) is rotationally connected with the supporting disc (17), the top end of the driving shaft (9) is connected with the driving gear (4), the driving shaft (1) is rotationally connected with the supporting disc (17), and the compound gear (3) is positioned between the revolution disc (2) and the supporting disc (17).
  3. 3. The double-drive variable-position vacuum coating machine rotating frame according to claim 2, further comprising a retaining disc (10) and a fixing rod (11), wherein the lower end of the fixing rod (11) is connected with the revolution disc (2), the upper end of the fixing rod is connected with the retaining disc (10), a plurality of mounting holes (101) for mounting the rotating rod (6) are formed in the retaining disc (10), and the distribution of the mounting holes (101) corresponds to a preset locking position on the position-changing track (13).
  4. 4. A twin drive variable position vacuum coater turret according to claim 3, further comprising an integral shield (14) connected to the revolution plate (2), the integral shield (14) and the support plate (17) enclosing a protective space for accommodating a gear transmission.
  5. 5. The rotating frame of the double-drive variable position vacuum coating machine according to claim 4, wherein the integral protective cover (14) is provided with an arc-shaped notch (141) for the rotating rod (6) to pass through, and a through hole (142) for the locking piece to pass through is arranged at a locking position corresponding to the position-changing track (13).
  6. 6. A twin drive variable position vacuum coater turret as claimed in any one of claims 1 to 5, in which the turret (6) has a plurality of workpiece mounting assemblies (15) mounted on its shank for loading workpieces.
  7. 7. The rotary frame of a double-drive variable position vacuum coating machine according to any one of claims 1 to 5, wherein the transmission shaft (1) is of a hollow structure, a temperature sensor (8) is installed in the hollow structure, and a probe of the temperature sensor (8) penetrates out of the transmission shaft (1).
  8. 8. The dual drive variable position vacuum coater turret according to claim 7, further comprising a pinion shield (16) covering the area where the upper gear (52) meshes with the drive gear (7).
  9. 9. The rotating frame of the double-drive variable position vacuum coating machine according to claim 1, wherein the locking piece is a locking rod, a first locking hole is formed in the position-changing support (12), the locking position is a second locking hole formed in the position-changing track (13) along the arc line interval, and the locking rod can be simultaneously inserted into the first locking hole and one of the second locking holes to fix the position of the position-changing support (12).

Description

Double-drive variable-position vacuum coating machine rotating frame Technical Field The invention relates to the technical field of rotating frames of coating machines, in particular to a rotating frame of a double-drive variable-position vacuum coating machine. Background Vacuum coating is a process of depositing target gaseous particles on the surface of a workpiece to form a film in a high vacuum cavity. In the process, a rotating frame of the coating machine is a key component, and the movement mode of the rotating frame directly influences the uniformity, compactness and production efficiency of a film layer. At present, the vacuum coating machine rotating frame for realizing the compound motion of the workpiece mainly has the following technical routes, but has certain limitations: the first rotary frame can only realize revolution or simple combined movement of revolution and rotation of the workpiece, and can not enable the workpiece to independently rotate at a specific process position (such as right below a sputtering target source) in the coating cavity. The uniqueness of the motion mode limits the flexibility of process optimization, is difficult to specifically treat a local area, and influences the realization of a high-end coating process. The second category of turntables is designed with more complex drive trains in order to pursue functional comprehensiveness. For example, some arrangements achieve compound motion by providing a complete set of planetary gear mechanisms on each workpiece arm independently. The structure causes a plurality of gears, and under the special environment of vacuum coating with metal dust and particle pollution, the meshing position of the gears is extremely easy to be blocked and worn, the equipment failure rate is high, and the maintenance is frequent. In addition, in order to realize position adjustment, part of the rotating frame adopts a cantilever type deflection structure, so that the bearing capacity and rigidity are insufficient, large-size or heavy workpieces are difficult to stably support, and the application range is limited. The third type of turret, while improving athletic performance, has inherent structural drawbacks. For example, a rotating frame capable of realizing revolution and rotation in the prior art has combined motion of revolution and rotation motion at a specific position, but the scheme also fails to solve the problem of flexible and adjustable workpiece position. In summary, in the vacuum coating machine rotating frame in the prior art, it is difficult to realize reliable revolution, rotation composite motion and rotation at a specific position, and meanwhile, the variable position function with high bearing is considered. This is a technical problem to be solved in the art. Disclosure of Invention The invention provides a double-drive variable-position vacuum coating machine rotating frame, which aims to solve the problems. The invention provides a double-drive variable-position vacuum coating machine rotating frame, which comprises: The transmission shaft is fixedly connected with a revolution disc; the composite gear is rotationally connected with the transmission shaft through a bearing and is provided with an upper layer big gear ring and a lower layer small gear ring which are coaxially distributed; A driving gear meshed with the lower small gear ring; The planetary transmission assemblies are rotationally connected to the revolution disc through planetary shafts, each planetary transmission assembly comprises an upper gear and a lower gear which are fixed on the planetary shafts, and the lower gears are meshed with the upper layer big gear rings; A plurality of rotating rods configured to revolve along the revolution plate, wherein the lower ends of the rotating rods are connected with transmission gears meshed with the upper gears; The deflection mechanism comprises an arc deflection track fixed on the upper surface of the revolution turntable and a deflection bracket rotationally connected to the lower end of the rotating rod, wherein the deflection bracket can slide along the deflection track and is fixed on locking positions of different positions on the deflection track through locking pieces. When the compound motion of revolution and rotation is needed, the driving gear is locked to be not rotated, and then the transmission shaft is driven to rotate. The transmission shaft drives the revolution plate and all the planetary shafts to revolve. Because the upper layer big gear ring of the compound gear is fixed, the lower gear in revolution can mesh with the fixed upper layer big gear ring to rotate, thereby driving the upper gear to rotate through the planet shaft. The upper gear drives the transmission gear and the rotating rod meshed with the upper gear to rotate. Finally, the rotating rod continuously rotates while revolving around the transmission shaft. When it is desired to achieve only autorotation at a specific