CN-121571641-B - FMM repairing agent and repairing method

Abstract

The invention discloses an FMM repairing agent and a repairing method, which relate to the technical field of semiconductors, wherein the sintering temperature of the FMM repairing agent is 250-350 ℃, the FMM repairing agent comprises 45-60 wt% of metal powder, 10-15 wt% of ferrite magnetic powder, 7-15 wt% of thermoplastic adhesive, the decomposition temperature of the thermoplastic adhesive is lower than the melting point of the metal powder, and 15-21.5 wt% of viscosity regulator. The FMM repairing agent is strong in stability of repairing structure formed after sintering.

Inventors

• HUANG CHAO
• MO SONGTING
• SHEN JIANGUO
• XU ZONGYI
• MEI QIN
• YAO YUFENG

Assignees

• 寰采星科技(宁波)有限公司

Dates

Publication Date

20260508

Application Date

20260129

Claims (12)

1. 1. An FMM repair agent, characterized in that the sintering temperature of the FMM repair agent is 250 ℃ to 350 ℃, the FMM repair agent comprising: 45-60 wt% of metal powder, wherein the melting point of the metal powder is lower than the sintering temperature; 10-15 wt% of ferrite magnetic powder; 7-15 wt% of a thermoplastic adhesive, wherein the decomposition temperature of the thermoplastic adhesive is lower than the melting point of the metal powder; 15-21.5 wt% of viscosity modifier; The metal powder is tin powder, and the ratio of the mass ratio of the tin powder to the mass ratio of the ferrite magnetic powder is 3:1-4:1.
2. 2. The FMM repair agent of claim 1, wherein the thermoplastic adhesive is a polyvinyl alcohol solution having a mass concentration of 50% -83.3%, and the solvent of the polyvinyl alcohol solution is glycerin.
3. 3. The FMM repair agent of claim 2, wherein the solvent of the viscosity modifier is deionized water, the solute of the viscosity modifier is cellulose and/or ammonium polyacrylate, the mass concentration of the cellulose is 1.95% -2.45%, and the mass concentration of the ammonium polyacrylate is 2.6% -4.3%.
4. 4. An FMM repair method, comprising: Providing an FMM, wherein the FMM is provided with a first surface (110) and a second surface (120) which are oppositely arranged, a plurality of evaporation holes (100) penetrating through the FMM in the thickness direction of the FMM are formed in the FMM, and the openings of the evaporation holes (100) on the first surface (110) are larger than the openings of the evaporation holes on the second surface (120); Acquiring a first image of the first surface (110) and a second image of the second surface (120); Performing a recognition analysis on the first image and the second image to obtain overetch defect information on the first surface (110) and the second surface (120); injecting an FMM repairing agent into a defect part according to the overetch defect information and curing the injected FMM repairing agent, wherein the FMM repairing agent is any one of the FMM repairing agents in claims 1 to 3; And heating the FMM to the sintering temperature to sinter and mold the cured FMM repairing agent.
5. 5. The FMM repair method as set forth in claim 4, wherein the injecting the FMM repair agent into the defect site and curing the injected FMM repair agent according to the overetch defect information includes: analyzing the overetch defect information to obtain the position and specification information of the overetch defect; Judging the main surface where the overetch defect is positioned on the FMM and the depth of the overetch defect, if the overetch defect is positioned on the first surface (110) or the depth of the overetch defect is not less than the set depth, selecting a first repairing mode to perform injection and solidification treatment of the FMM repairing agent on the defect part, and if the overetch defect is positioned on the second surface (120) and the depth of the overetch defect is not more than the set depth, selecting a second repairing mode to perform injection and solidification treatment of the FMM repairing agent on the defect part.
6. 6. The FMM repair method as set forth in claim 5, wherein said first repair means comprises: selecting the first surface (110) as the repaired face; and (3) injecting a plurality of layers of FMM repairing agents into the defect part, and curing the injected FMM repairing agents once after each layer of FMM repairing agents is injected.
7. 7. The FMM repair method as set forth in claim 6, wherein said injecting a multi-layered FMM repair agent into the defect site comprises: according to the specification of the overetch defect, calculating the injection quantity, the injection layer number and the injection path of the FMM repairing agent; Injecting a plurality of layers of FMM repairing agent into the defect part along the injection path according to the number of injection layers; the injection amount V of the FMM repair agent satisfies the following formula: v = defect area x defect depth x fill factor/sintering rate, The number of injection layers C of the FMM repair agent satisfies the following formula: C= (defect depth/thickness of single layer FMM repair agent) +1, Wherein the filling coefficient is 1/3-1, the sintering rate is 60% -75%, and the thickness of the single-layer FMM repairing agent is a constant value.
8. 8. The FMM repair method as set forth in claim 7, wherein the calculating an injection path of the FMM repair agent includes: simulating the edge curve of the repaired vapor deposition hole (100) according to the specification of the overetch defect and the set size of the vapor deposition hole (100); And planning an FMM repair agent injection region according to the simulated edge curve to form an injection path.
9. 9. The FMM repair method of claim 7, wherein if the overetch defect is a hole expansion defect, the injection path of the FMM repair agent is: injecting the vapor to the center of the vapor deposition hole (100) along the edge of the defect part; if the overetch defect is a hole connection defect, the injection path of the FMM repairing agent is as follows: injecting from one side edge to the other side edge of the defect part between the two vapor deposition holes (100) to form a lap joint structure; And injecting the vapor deposition holes (100) on two sides to the centers of the vapor deposition holes along the edge of the defect part and the lap joint structure.
10. 10. The FMM repair method of claim 6, wherein the width of the upper layer FMM repair agent is 5 μm to 10 μm smaller than the width of the lower layer FMM repair agent.
11. 11. The FMM repair method as set forth in claim 5, wherein said second repair means comprises: selecting the second surface (120) as the repaired face; calculating the injection amount of the FMM repairing agent according to the specification of the overetch defect; Injecting the FMM repairing agent into the center of the overetch defect, and then curing the FMM repairing agent.
12. 12. The FMM repair method according to any one of claims 4 to 11, wherein the injecting the FMM repair agent into the defect site and curing the injected FMM repair agent includes: irradiating infrared light to the defect part, and heating the defect part by infrared radiation to cure the FMM repairing agent; Wherein the heating temperature is not more than 150 ℃.

Description

FMM repairing agent and repairing method Technical Field The invention relates to the technical field of semiconductors, in particular to an FMM repairing agent and a repairing method. Background The precise metal mask plate (FMM, fine Metal Mask) is a core material in the OLED display screen production process, and is mainly used for realizing precise transfer of patterns in the evaporation process. The FMM of the finished product is provided with a plurality of vapor deposition holes, the vapor deposition holes are usually formed by adopting a chemical reagent etching mode, however, certain over-etching phenomenon exists in the FMM forming process, so that the vapor deposition holes are abnormally large, and even the situation of connecting holes occurs. Because of high manufacturing cost of the FMM, in order to reduce loss, repair is performed on defective parts on the finished FMM at present, a metal material capable of being sintered at a lower temperature (50-80 ℃) is generally adopted to supplement the defective parts, and then sintering and solidification are performed. Because the sintering temperature of the metal material is low, the rapid repair can be realized, and the shape of the formed metal material is nearly consistent with the expected shape. However, the FMM further requires a high-temperature cleaning (at a temperature of 40-60 ℃) and a hot air drying (at a temperature of 50-75 ℃) in the following steps, and in these processing steps, the metal material filled in the repairing position may be melted and deformed, and defects such as deformation of openings and sinking occur in the repairing position in the evaporation process. If the metal paste with higher sintering temperature is selected, the FMM is easy to deform by heating in the sintering process. Disclosure of Invention The present invention aims to solve one of the technical problems in the related art to a certain extent. Therefore, the FMM repairing agent provided by the invention has strong stability of a repairing structure formed after sintering. In order to achieve the above purpose, the invention adopts the following technical scheme: An FMM repair agent having a sintering temperature of 250 ℃ to 350 ℃, the FMM repair agent comprising: 45-60 wt% of metal powder, wherein the melting point of the metal powder is lower than the sintering temperature; 10-15 wt% of ferrite magnetic powder; 7-15 wt% of a thermoplastic adhesive, wherein the decomposition temperature of the thermoplastic adhesive is lower than the melting point of the metal powder; 15-21.5 wt% of viscosity modifier. The invention discloses an FMM repairing agent which is used for repairing defects of an FMM finished product, and the FMM repairing agent is injected to the defect position on the FMM finished product during repairing the FMM finished product, so that the repairing can be completed. The components of the FMM repairing agent comprise metal powder, ferrite magnetic powder, thermoplastic adhesive and viscosity regulator, wherein the FMM is prepared from metal materials, and a defect repairing structure formed by the metal powder and the ferrite magnetic powder after sintering can form a main body of the FMM, so that the repaired performance of a defect part is consistent with that of other complete parts, the thermoplastic adhesive can enable the FMM repairing agent to adhere to the defect part, and the viscosity regulator is used for regulating the viscosity of the FMM repairing agent and the viscosity of the thermoplastic adhesive, so that the shape of the FMM repairing agent after injection can be kept unchanged in a short time. After the FMM is heated at the temperature of 250-350 ℃, the thermoplastic adhesive and the viscosity modifier completely disappear, so that only metal components in the FMM can be left, a pore structure is formed between the metal components due to the disappearance of the thermoplastic adhesive and the viscosity modifier, metal powder can be melted in the temperature environment of 250-350 ℃ to fill the pore, the melting point of ferrite magnetic powder is far higher than 350 ℃ to form a framework of a defect repair structure, the magnetism of the ferrite magnetic powder is not disappeared to match the magnetism of the FMM, and a finished FMM product cannot deform in the temperature environment of 250-350 ℃. In the sintering process, because the decomposition temperature of the thermoplastic adhesive is lower than the melting point of the metal powder, the thermoplastic adhesive begins to decompose and generate pores before the metal powder is melted, so that the subsequently melted metal powder can continuously fill the pores. After sintering and forming, the FMM repairing agent only leaves metal components, and can keep stable structure and firm combination with the FMM in the subsequent high-temperature cleaning and hot air drying processes of the FMM. The main component of the thermoplastic adhesive is thermoplastic mat